| Patents for H05B 31 - Electric arc lamps (423) |
|---|
| 03/29/2012 | WO2012018367A3 Distributed multi-zone plasma source systems, methods and apparatus |
| 03/20/2012 | US8138677 Radial hall effect ion injector with a split solenoid field |
| 03/06/2012 | US8129913 Closed electron drift thruster |
| 03/06/2012 | US8129912 Electrode device and apparatus for generating plasma |
| 03/06/2012 | US8128783 Plasma generator and work processing apparatus provided with the same |
| 02/28/2012 | US8125155 Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities |
| 02/16/2012 | US20120038277 Power supply control device, plasma processing device, and plasma processing method |
| 02/09/2012 | WO2012018365A2 Systems, methods and apparatus for choked flow element extraction |
| 02/09/2012 | US20120035766 Systems, methods and apparatus for choked flow element extraction |
| 02/07/2012 | US8110993 Methods for inductively-coupled RF power source |
| 02/07/2012 | US8110991 Phase and frequency control of a radio frequency generator from an external source |
| 02/07/2012 | US8110990 Atmospheric pressure plasma apparatus |
| 02/01/2012 | EP1977440B1 High pressure discharge lamp with improved ignitability |
| 01/19/2012 | US20120013253 Phase And Frequency Control Of A Radio Frequency Generator From An External Source |
| 01/05/2012 | US20120000606 Plasma uniformity system and method |
| 12/27/2011 | US8084947 Pulsed dielectric barrier discharge |
| 12/22/2011 | US20110309748 Rf matching network of a vacuum processing chamber and corresponding configuration methods |
| 10/20/2011 | US20110254449 Fluorescent excimer lamps |
| 10/11/2011 | US8033246 Arc suppression |
| 10/04/2011 | US8030849 Pulsed plasma device and method for generating pulsed plasma |
| 10/04/2011 | US8028655 Plasma processing system with locally-efficient inductive plasma coupling |
| 10/04/2011 | US8028654 Planar controlled zone microwave plasma system |
| 09/27/2011 | US8025775 Vacuum plasma generator |
| 09/13/2011 | US8018162 Surface wave excitation plasma processing system |
| 08/30/2011 | US8008595 Arrangement for generating extreme ultraviolet radiation by means of an electrically operated gas discharge |
| 08/25/2011 | US20110204265 Laser-Driven Light Source |
| 08/11/2011 | US20110193483 Methods for Inductively-Coupled RF Power Source |
| 08/09/2011 | US7994794 Methods for measuring a set of electrical characteristics in a plasma |
| 08/09/2011 | US7993489 Capacitive coupling plasma processing apparatus and method for using the same |
| 08/02/2011 | US7988816 Plasma processing apparatus and method |
| 07/19/2011 | US7982415 Discharge lamp lighting apparatus |
| 07/07/2011 | US20110163674 Mitigation of plasma-inductor termination |
| 06/28/2011 | US7969096 Inductively-coupled plasma source |
| 06/28/2011 | US7969095 Method of and arrangement for removing contaminants from a substrate surface using an atmospheric pressure glow plasma |
| 06/21/2011 | US7965043 Inner coating of lamp vessels, such as discharge vessels of gas discharge lamps |
| 06/09/2011 | US20110134405 Radiation source, lithographic apparatus and device manufacturing method |
| 06/09/2011 | US20110133650 Apparatus for generating plasma |
| 05/24/2011 | US7948185 Inductively-driven plasma light source |
| 05/19/2011 | US20110115378 Plasma source design |
| 05/17/2011 | US7942112 Method and apparatus for preventing the formation of a plasma-inhibiting substance |
| 05/12/2011 | US20110109226 Microplasma device with cavity for vacuum ultraviolet irradiation of gases and methods of making and using the same |
| 05/11/2011 | CN101341573B High pressure discharge lamp with improved ignitability and high voltage pulse generator |
| 05/10/2011 | US7940008 Inductively-coupled RF power source |
| 04/26/2011 | US7932678 Magnetic mirror plasma source and method using same |
| 04/22/2011 | CA2710682A1 Par lamp |
| 04/19/2011 | US7927455 Plasma processing apparatus |
| 04/07/2011 | US20110080095 Filament electrical discharge ion source |
| 04/07/2011 | US20110080093 Apparatus and Method for Regulating the Output of a Plasma Electron Beam Source |
| 03/22/2011 | US7911146 High-velocity, multistage, nozzled, ion driven wind generator and method of operation of the same adaptable to mesoscale realization |
| 02/15/2011 | US7886690 Plasma source |
| 02/10/2011 | US20110031866 Plasma radiation source, method of forming plasma radiation, apparatus for projecting a pattern from a patterning device onto a substrate and device manufacturing method |
| 02/08/2011 | US7883601 Apparatus and method for controlling relative particle speeds in a plasma |
| 02/01/2011 | US7879179 Processing apparatus with a chamber having therein a high-corrosion-resistant sprayed film |
| 01/11/2011 | US7868556 RF matching network of a vacuum processing chamber and corresponding configuration methods |
| 01/04/2011 | US7863547 Microwave chamber |
| 12/28/2010 | US7858899 Coaxial microwave plasma torch |
| 12/23/2010 | US20100320916 Plasma Generator and Discharge Device and Reactor Using Plasma Generator |
| 12/21/2010 | US7854213 Modulated gap segmented antenna for inductively-coupled plasma processing system |
| 12/09/2010 | US20100308177 Plasma enhanced riblet |
| 12/09/2010 | DE102009024319A1 Vorrichtung und Verfahren zur photoinduzierten Aushärtung von mittels elektromagnetischer Strahlung aushärtbaren Polymeren Apparatus and method for photo-induced curing of thermosetting polymers by means of electromagnetic radiation |
| 12/07/2010 | US7846291 Processing apparatus with a chamber having therein a high-corrosion-resistant sprayed film |
| 12/07/2010 | US7845310 Wide area radio frequency plasma apparatus for processing multiple substrates |
| 11/23/2010 | US7838842 Dual mode ion source for ion implantation |
| 11/18/2010 | US20100288923 Dischaging method for charged particle beam imaging |
| 11/04/2010 | US20100276611 High-intensity electromagnetic radiation apparatus and methods |
| 11/02/2010 | US7825601 Axial Hall accelerator with solenoid field |
| 11/02/2010 | US7825597 Discharge lamp |
| 11/02/2010 | US7824520 Plasma treatment apparatus |
| 10/26/2010 | US7820981 Method and apparatus for extending equipment uptime in ion implantation |
| 10/12/2010 | US7812542 Arrangement and method for the generation of extreme ultraviolet radiation by means of an electrically operated gas discharge |
| 10/12/2010 | US7810449 Plasma processing system with locally-efficient inductive plasma coupling |
| 10/07/2010 | US20100253224 Modulated multi-frequency processing method |
| 10/05/2010 | US7808353 Coil system for plasmoid thruster |
| 10/05/2010 | US7808184 Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities |
| 09/21/2010 | US7800312 Dual mode ion source for ion implantation |
| 09/14/2010 | US7795818 Microwave plasma generation method and microwave plasma generator |
| 09/14/2010 | US7795816 High speed phase scrambling of a coherent beam using plasma |
| 09/07/2010 | US7791281 two spaced electrodes, wherein at least one plasma pulse comprising an absolute pulse maximum, is generated by applying an AC plasma energizing voltage to such electrodes causing a plasma current and a displacement current |
| 09/07/2010 | US7791005 Coil constructions configured for utilization in physical vapor deposition chambers, and methods of forming coil constructions |
| 09/07/2010 | US7789992 Neutral beam etching device for separating and accelerating plasma |
| 08/31/2010 | US7786455 Laser-driven light source |
| 08/24/2010 | US7782463 Particle density measuring probe and particle density measuring equipment |
| 08/24/2010 | US7780814 Wafer pre-clean reactor cable termination for selective suppression/reflection of source and bias frequency cross products |
| 08/17/2010 | US7777599 Methods and apparatus for controlling characteristics of a plasma |
| 08/17/2010 | US7777194 Charged particle beam apparatus |
| 08/10/2010 | US7771562 Etch system with integrated inductive coupling |
| 08/03/2010 | US7768267 Ionization gauge with a cold electron source |
| 07/29/2010 | US20100187998 Abnormal discharge suppressing device for vacuum apparatus |
| 07/20/2010 | US7759874 Apparatus for effecting plasma chemical vapor deposition (PCVD) |
| 07/08/2010 | US20100171428 Driving switches of a plasma load power suuply |
| 07/08/2010 | US20100171427 Protecting High-Frequency Amplifers |
| 07/06/2010 | US7750574 Method of generating discharge plasma |
| 06/29/2010 | US7746001 Plasma generator having a power supply with multiple leakage flux coupled transformers |
| 06/29/2010 | US7744249 High-pressure discharge lamp, lamp unit and image display device |
| 06/08/2010 | US7732787 Ion implantation ion source, system and method |
| 06/03/2010 | US20100134013 Method and system for adjusting the frequency of a resonator assembly for a plasma lamp |
| 05/25/2010 | US7723994 Plasma processing chamber with an apparatus for measuring a set of electrical characteristics in a plasma |
| 05/18/2010 | US7719199 Controlled fusion in a field reversed configuration and direct energy conversion |
| 05/12/2010 | CN1893743B Organic light emitting device |
| 05/12/2010 | CN101023505B Surface wave plasma processing system and method of using |