| Patents for C30B 35 - Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure (2,584) |
|---|
| 01/31/1989 | US4801352 Processing of semiconductor wafer in the manufacture of integrated circuits |
| 12/28/1988 | EP0296235A1 Flowing gas seal enclosure for processing workpiece surface with controlled gas environment and intense laser irradiation |
| 12/07/1988 | EP0294047A1 Minimizing carbon content of semiconductor materials |
| 11/17/1988 | EP0291147A1 Vertical thermal processor |
| 11/17/1988 | EP0290629A1 Device for growing profiled monocrystals |
| 11/17/1988 | EP0290628A1 Method of growing profiled monocrystals |
| 11/09/1988 | EP0290322A1 Composite material cartridge for a single crystal-producing apparatus |
| 10/18/1988 | US4778382 Apparatus for automatic baking treatment of semiconductor wafers |
| 10/18/1988 | US4778202 Tubular component made out of quartz glass with a flange |
| 10/12/1988 | EP0285840A2 Epitaxy installation |
| 10/06/1988 | WO1988007096A3 Epitaxial installation |
| 09/22/1988 | WO1988007096A2 Epitaxial installation |
| 09/06/1988 | USH520 Producing a silicon crystal melt from a glass crucible; increasing reactive surface area by corrugations and ribs |
| 08/24/1988 | CN88201086U Horizontal sliding graphite boat |
| 08/03/1988 | CN85100534B High temp. crystal growing unit using temp. gradient method |
| 07/27/1988 | EP0191023B1 Tubular quartz-glass element with a flange |
| 07/19/1988 | US4758399 Substrate for manufacturing single crystal thin films |
| 07/14/1988 | WO1988005211A1 Flowing gas seal enclosure for processing workpiece surface with controlled gas environment and intense laser irradiation |
| 07/05/1988 | US4755220 Materials resistant to metal and salt melts, their production and their use |
| 06/21/1988 | US4752219 Wafer softlanding system and cooperative door assembly |
| 06/08/1988 | CN87108014A Process for growing shaped single crystals |
| 06/08/1988 | CN87108007A Apparatus for growing profieled single crystals |
| 06/02/1988 | WO1988003968A1 Device for growing profiled monocrystals |
| 06/02/1988 | WO1988003967A1 Method of growing profiled monocrystals |
| 05/25/1988 | EP0268166A2 Molten metal and fused salt resistant materials, their production and application |
| 04/19/1988 | US4738618 Vertical thermal processor |
| 04/05/1988 | US4735396 Replica pattern of monocrystalline cleavage plane; solar cells |
| 01/05/1988 | US4717630 Substrate for manufacturing single crystal thin films |
| 01/05/1988 | US4717444 Container with deformable coating |
| 12/23/1987 | DE3620848A1 Device for doping a semiconductor body |
| 12/15/1987 | US4713104 Quartz glass crucibles |
| 10/15/1987 | DE3612375A1 Loading apparatus for accommodating substrate wafers to be treated in an oven |
| 09/01/1987 | US4690841 Pyrolytic boron nitride article |
| 06/02/1987 | CA1222436A1 Process for growing crystalline material |
| 04/28/1987 | US4661324 Apparatus for replenishing a melt |
| 04/08/1987 | EP0216932A1 Rhombohedral polycrystalline boron nitride and process for its production |
| 02/25/1987 | EP0211292A2 Molecular beam epitaxy apparatus |
| 12/09/1986 | US4627815 Ceramic temperature stabilization body, and method of making same |
| 11/25/1986 | US4624735 Constituent members of a semiconductor element-manufacturing apparatus and a reaction furnace for making said constituent members |
| 10/28/1986 | US4619798 Method of manufacturing parts for use to the heat processing furnace |
| 09/12/1986 | WO1986005169A1 Rhombohedral polycrystalline boron nitride and process for its production |
| 09/03/1986 | EP0193192A2 Pyrolytic boron nitride article and method for producing the same |
| 08/28/1986 | WO1986004934A1 Apparatus for replenishing a melt |
| 08/20/1986 | EP0191023A1 Tubular quartz-glass element with a flange. |
| 08/06/1986 | CN85100534A High temp. crystal growing unit using temp. gradient method |
| 07/08/1986 | CA1207470A1 Apparatus for molecular beam epitaxy |
| 06/03/1986 | US4592924 Method of manufacturing a reaction vessel for crystal growth purposes |
| 05/13/1986 | US4588379 Configuration for temperature treatment of substrates, in particular semi-conductor crystal wafers |
| 02/13/1986 | WO1986000973A1 Tubular quartz-glass element with a flange |
| 02/11/1986 | US4569452 Silica glass tray made for wafers |
| 01/15/1986 | CN85200367U Sealed stove adapted for the growth of single-crystal silicon |
| 01/02/1986 | EP0166032A2 Carrier rack of quartz glass for substrate wafers |
| 09/24/1985 | US4542712 Apparatus for molecular beam epitaxy |
| 07/09/1985 | US4528163 Crucible for semiconductor manufacturing purposes and a process for manufacturing the crucible |
| 02/13/1985 | EP0132538A1 An apparatus for molecular beam epitaxy |
| 02/12/1985 | US4498416 Installation for treatment of materials for the production of semi-conductors |
| 11/06/1984 | US4481406 Heater assembly for thermal processing of a semiconductor wafer in a vacuum chamber |
| 09/26/1984 | EP0119472A2 Process for the thermal treatment of substrates, particularly semiconductor wafers |
| 08/21/1984 | US4466766 Transfer apparatus |
| 07/25/1984 | EP0113954A1 A substrate for manufacturing single crystal thin films |
| 04/24/1984 | US4444728 Iridium-rhenium crucible |
| 04/04/1984 | EP0104741A1 Process for growing crystalline material |
| 04/03/1984 | US4440538 Apparatus for loading and unloading a furnace |
| 01/17/1984 | US4425996 Apparatus for transporting workpieces through a processing system |
| 01/03/1984 | US4424193 Constituent members of a semiconductor element-manufacturing apparatus and a reaction furnace for making said constituent members |
| 07/12/1983 | US4392915 Wafer support system |
| 04/27/1983 | EP0077408A1 A method and apparatus for the heat treatment of semiconductor articles |
| 10/26/1982 | US4356152 Silicon melting crucible |
| 10/05/1982 | US4352607 Automatic wafer processing system and method |
| 09/15/1982 | EP0060151A1 Material treatment apparatus for producing semiconductors |
| 07/14/1981 | US4278366 Automatic wafer processing system and method |
| 05/19/1981 | US4268483 Shapes, dies |
| 05/12/1981 | US4266507 Cap-mounting mechanism for apparatus for thermal treatment of semiconductors |
| 11/18/1980 | US4234630 Process for the protection of carbon bodies |
| 04/30/1980 | EP0010307A1 Process for protecting carbon bodies |
| 06/26/1979 | CA1057416A2 Self-aligned cmos process for bulk silicon and insulating substrated device |
| 06/26/1979 | CA1057415A2 Self-aligned cmos process for bulk silicon and insulating substrate device |
| 06/26/1979 | CA1057414A2 Self-aligned cmos process for bulk silicon and insulating substrate device |
| 02/27/1979 | US4141458 Wafer transport system |
| 06/21/1977 | US4030622 Wafer transport system |
| 04/26/1977 | US4019645 Crucible of fused vitreous silica |
| 12/28/1976 | US3999950 Semiconductor crystals |
| 11/30/1976 | US3994690 Universal apparatus for elaborating semiconductive monocrystals |
| 02/24/1976 | US3940243 Semiconductor wafer baking and handling system |