| Patents for F15C 5 - Manufacture of fluid-circuit elements; Manufacture of assemblages of such elements (1,879) |
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| 04/20/1994 | EP0592469A1 Miniature actuating device. |
| 04/19/1994 | US5304431 Fluid depolarized electrochemical battery with automatic valve |
| 04/14/1994 | DE4234237A1 Piezoelectric micro-actuator with silicon thrust beam - has temp. compensation for differential expansion of beam and piezoelectric thruster |
| 03/23/1994 | EP0587912A1 Fluid controlling microdevice and method of manufacturing the same |
| 03/17/1994 | WO1994005516A1 Groove width trimming |
| 03/17/1994 | CA2123004A1 Groove width trimming |
| 03/16/1994 | EP0540510B1 Micromechanic manipulator |
| 03/10/1994 | DE4227998A1 Mikrominiaturisierbares Ventil Mikrominiaturisierbares valve |
| 03/03/1994 | WO1994004832A1 Micro-miniaturizable valve |
| 02/08/1994 | US5284179 Valve and semiconductor fabricating equipment using the same |
| 01/20/1994 | DE4223067A1 Micromechanical flow limiter with multilayer structure, e.g. for medical infusion system - has intermediate diaphragm layer which deflects w.r.t. amount of flowing medium, and blocks flow for large flow amounts |
| 01/11/1994 | US5277556 Valve and micropump incorporating said valve |
| 01/06/1994 | WO1994000696A1 Microvalve |
| 01/06/1994 | WO1994000695A1 Magnetostrictive transducer |
| 01/05/1994 | DE4221089A1 Mikroventil Microvalve |
| 12/23/1993 | DE4220226A1 Magnetostrikiver Wandler Magnetostrikiver converter |
| 12/21/1993 | US5271724 Valve equipped with a position detector and a micropump incorporating said valve |
| 12/21/1993 | US5271597 Bimetallic diaphragm with split hinge for microactuator |
| 12/21/1993 | US5271431 Microvalve |
| 12/07/1993 | US5267589 Piezoelectric pressure control valve |
| 11/25/1993 | WO1993023887A1 Fluid depolarized electrochemical battery with automatic valve |
| 11/18/1993 | EP0569480A1 Flow regulator. |
| 11/18/1993 | EP0474771B1 Method of bonding plastics |
| 10/14/1993 | WO1993020351A1 Fluid controlling microdevice and method of manufacturing the same |
| 09/14/1993 | US5244537 Fabrication of an electronic microvalve apparatus |
| 08/24/1993 | US5238223 Method of making a microvalve |
| 06/16/1993 | EP0546427A1 Microvalve and process of producing the same |
| 06/01/1993 | US5216273 Microvalve of multilayer silicon construction |
| 06/01/1993 | US5215244 Method of mounting silicon wafers on metallic mounting surfaces |
| 05/27/1993 | WO1993010385A1 Micromechanical valve for micromechanical dosing devices |
| 05/27/1993 | DE4138491A1 Mikromechanisches ventil fuer mikromechanische dosiereinrichtungen Micromechanical valve for micromechanical dosing |
| 05/12/1993 | EP0540510A1 Micromechanic manipulator. |
| 04/14/1993 | EP0381692B1 Method of bonding plastics |
| 02/16/1993 | US5186001 For providing motion at a high repetitive rate |
| 02/02/1993 | US5182910 Micromechanical manipulator |
| 01/19/1993 | US5180623 Electronic microvalve apparatus and fabrication |
| 01/12/1993 | US5178190 Microvalve |
| 01/07/1993 | EP0521117A1 Microvalve. |
| 01/05/1993 | US5176358 Microstructure gas valve control |
| 12/24/1992 | DE4119955A1 Miniatur-betaetigungselement Miniature betaetigungselement |
| 12/23/1992 | WO1992022763A1 Miniature actuating device |
| 12/16/1992 | EP0518524A2 Valve and semiconductor fabricating equipment using the same |
| 11/19/1992 | EP0513018A1 Microvalve. |
| 11/17/1992 | US5163920 Flow regulator damper element |
| 11/11/1992 | EP0512521A1 Thermally actuated microminiature valve |
| 11/10/1992 | US5161774 Microvalve |
| 09/01/1992 | US5142781 Method of making a microvalve |
| 08/19/1992 | EP0498863A1 A valve equipped with a position detector and a micropump incorporating said valve. |
| 08/06/1992 | WO1992013200A1 Microvalve |
| 07/31/1992 | WO1992014199A1 Flow regulator |
| 07/23/1992 | DE4101575A1 Mikroventil Microvalve |
| 07/21/1992 | CA1305393C Silicon micromachined elastic flow valves |
| 07/14/1992 | US5129794 Pump apparatus |
| 07/08/1992 | EP0478716A4 Semiconductor microactuator |
| 06/24/1992 | EP0491026A1 Valve and micropump incorporating said valve. |
| 05/20/1992 | EP0485739A1 Microvalve having a multilayer structure |
| 05/06/1992 | EP0483469A1 Micropump |
| 04/08/1992 | EP0478716A1 Semiconductor microactuator. |
| 04/08/1992 | EP0478565A1 Microvalve. |
| 04/07/1992 | CA1298530C Silicon micromachined non-elastic flow valves |
| 03/19/1992 | WO1992004569A1 A valve equipped with a position detector and a micropump incorporating said valve |
| 03/18/1992 | EP0474771A1 Method of bonding plastics. |
| 03/17/1992 | US5096643 Method of manufacturing microvalves |
| 02/05/1992 | EP0469749A1 Control valve utilizing mechanical beam buckling |
| 01/21/1992 | US5082242 Electronic microvalve apparatus and fabrication |
| 01/14/1992 | CA1294202C Method of bonding plastics |
| 01/11/1992 | WO1992001160A1 Valve and micropump incorporating said valve |
| 01/11/1992 | CA2065735A1 Valve and micropump incorporating said valve |
| 12/24/1991 | US5074629 Integrated variable focal length lens and its applications |
| 12/11/1991 | EP0447451A4 Micromachined valve with polyimide film diaphragm |
| 12/03/1991 | US5069419 Semiconductor microactuator |
| 11/19/1991 | US5065978 Valve arrangement of microstructured components |
| 10/22/1991 | US5058856 Thermally-actuated microminiature valve |
| 09/25/1991 | EP0447451A1 Micromachined valve with polyimide film diaphragm. |
| 09/24/1991 | US5050838 Control valve utilizing mechanical beam buckling |
| 08/22/1991 | WO1991012434A1 Microvalve |
| 08/20/1991 | US5041181 By heating confined pieces to induce expansion against their confinement |
| 08/14/1991 | DE4003619A1 Two=stage multilayer micro-valve - has central flexible tongue in first stage for direction of fluid into two chambers with outlet and return ports, respectively |
| 07/31/1991 | EP0438570A1 Method of making a microvalve. |
| 07/09/1991 | US5029805 Valve arrangement of microstructured components |
| 07/03/1991 | EP0435237A1 Electrostatic miniature valve and method for its fabrication |
| 05/08/1991 | EP0425612A1 Micromechanical actuator. |
| 05/08/1991 | EP0309450B1 Micro-valve arrangement |
| 03/12/1991 | US4999069 Heat treatment of a multilayer plastic material to bond the layers |
| 02/21/1991 | WO1991002169A1 Method of making a microvalve |
| 02/07/1991 | WO1991001464A1 Anti-return valve, particularly for micropump and micropump provided with such a valve |
| 02/07/1991 | WO1990014940A3 Method of bonding plastics |
| 01/10/1991 | WO1991000464A1 Semiconductor microactuator |
| 12/27/1990 | WO1990015933A1 Microvalve |
| 12/12/1990 | EP0401607A1 Method for manufacturing a microvalve and microvalve |
| 12/03/1990 | WO1990014940A2 Method of bonding plastics |
| 12/03/1990 | CA2056443A1 Method of bonding plastics |
| 11/15/1990 | WO1990013750A1 Micromechanical actuator |
| 10/31/1990 | DE3914031A1 Mikromechanischer aktuator The micromechanical actuator |
| 10/30/1990 | US4966646 Method of making an integrated, microminiature electric-to-fluidic valve |
| 10/30/1990 | CA1275611C Silicon valve |
| 08/16/1990 | EP0381692A1 Method of bonding plastics. |
| 07/24/1990 | US4943032 Integrated, microminiature electric to fluidic valve and pressure/flow regulator |
| 07/03/1990 | CA1271140A1 Integrated, microminiature electric-to-fluidic valve and pressure/flow regulator |
| 06/14/1990 | WO1990006587A1 Micromechanic manipulator |