| Patents for F15C 5 - Manufacture of fluid-circuit elements; Manufacture of assemblages of such elements (1,879) |
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| 06/14/1990 | WO1990006470A1 Micromachined valve with polyimide film diaphragm |
| 06/13/1990 | DE3844669A1 Micromechanical device |
| 06/13/1990 | DE3841557A1 Mikromechanischer manipulator Micromechanical manipulator |
| 01/23/1990 | US4895500 Micromechanical non-reverse valve |
| 12/12/1989 | US4885830 Process of producing a valve element |
| 11/02/1989 | EP0339528A1 Valve structure from microstructured components |
| 10/24/1989 | US4875956 Preshrinkage, machining, and polishing |
| 10/05/1989 | WO1989009477A1 Micromechanical device |
| 10/05/1989 | DE3809597A1 Mikromechanisches stellelement Micromechanical adjusting element |
| 09/26/1989 | US4869282 Micromachined valve with polyimide film diaphragm |
| 05/03/1989 | EP0314286A1 A silicon valve assembly for controlling the flow of fluid |
| 05/03/1989 | EP0314285A1 A silicon valve assembly for controlling the flow of fluid |
| 05/02/1989 | US4826131 Electrically controllable valve etched from silicon substrates |
| 04/25/1989 | US4824073 Integrated, microminiature electric to fluidic valve |
| 04/20/1989 | WO1989003297A1 Method of bonding plastics |
| 04/18/1989 | US4821999 Valve element and process of producing the same |
| 04/18/1989 | US4821997 Integrated, microminiature electric-to-fluidic valve and pressure/flow regulator |
| 04/05/1989 | EP0309450A1 Micro-valve arrangement. |
| 03/22/1989 | EP0307494A1 Manifold block |
| 09/13/1988 | US4770740 Method of manufacturing valve element for use in an ink-jet printer head |
| 09/06/1988 | US4768751 Silicon micromachined non-elastic flow valves |
| 07/27/1988 | EP0276156A2 Valve element and process of producing the same |
| 07/12/1988 | US4756508 Silicon valve |
| 06/14/1988 | US4750520 Electrically-actuable valve |
| 03/30/1988 | EP0261972A2 Integrated, microminiature electric-to-fluidic valve and pressure/flow regulator and method of making same |
| 01/27/1988 | EP0254031A2 Implanted medication infusion device |
| 01/14/1988 | DE3621332A1 Microvalve |
| 01/07/1988 | EP0250948A2 Microvalve |
| 01/05/1988 | US4716936 Fluidic system with noise filter for increasing operating range |
| 12/29/1987 | US4715852 Implanted medication infusion device |
| 12/29/1987 | CA1230791A1 Compact implantable medication infusion device |
| 12/03/1987 | WO1987007351A1 Micro-valve arrangement |
| 12/03/1987 | DE3618380A1 Mikroventilanordnung Micro-valve arrangement |
| 03/31/1987 | US4654676 Valve element for use in an ink-jet printer head |
| 03/03/1987 | US4647013 Silicon valve |
| 01/14/1987 | EP0208386A1 Silicon valve |
| 12/16/1986 | US4628576 For controlling fluid flow |
| 08/05/1986 | US4604090 Compact implantable medication infusion device |
| 04/29/1986 | US4585209 Miniature valve and method of making same |
| 04/08/1986 | US4581624 Microminiature semiconductor valve |
| 04/01/1986 | CA1202569A1 Pneumatic control valve and manifold interface |
| 11/06/1985 | EP0160463A2 Valve element for use in an ink-jet printer head |
| 07/02/1985 | US4526827 Adapter block made of structural foam having foam core and solid exterior skin, recess in first surface, connecting bore, sealing plate |
| 06/11/1985 | US4522220 Diaphragm module for pneumatic control systems |
| 05/29/1985 | EP0142866A2 Compact implantable medication infusion unit and method of filling and sealing the pressure stabilizing chamber thereof |
| 05/28/1985 | US4520061 With fluid channels |
| 04/23/1985 | US4512362 Pneumatic control valve manifold interface |
| 03/26/1985 | US4507345 Polyurethane |
| 12/11/1984 | US4487662 Electrodeposition method for check valve |
| 10/16/1984 | US4477404 Process for producing grooved choke plates for adjustable chokes |
| 08/29/1984 | EP0116683A1 Pneumatic control system |
| 07/04/1984 | EP0112701A2 Valve element for use in an ink-jet printer head |
| 05/22/1984 | US4450087 Borate ester, amine, orthoester |
| 08/17/1983 | EP0085945A1 Membrane module for a pneumatic control system |
| 07/12/1983 | US4392677 Connecting device for pneumatic apparatus |
| 12/08/1981 | US4304749 Method for mass production assembly of fluidic devices |
| 02/10/1981 | CA1095560A1 Fluidic spray device of simple construction |
| 01/20/1981 | CA1094229A1 Electrostatically deformable thin silicon membranes |
| 01/13/1981 | US4244391 Pneumatic program register and corresponding module |
| 09/30/1980 | US4224957 Modular system for obtaining pneumatic logic circuits |
| 05/27/1980 | CA1078273A1 Pneumatic program register and corresponding module |
| 05/13/1980 | US4203128 Electrostatically deformable thin silicon membranes |
| 03/11/1980 | CA1073489A1 Stacking and destacking etched patterned metal foils using vacuum conveyors |
| 02/19/1980 | US4188977 Fluid system circuit board |
| 01/29/1980 | US4185777 Fluidic spray device of simple construction |
| 01/01/1980 | US4181141 Pneumatic circuit arrangement |
| 04/10/1979 | CA1052368A1 Hydraulic fluid comprising borate ester and orthoester and amine |
| 12/26/1978 | CA1045039A1 Transition module for a pneumatic sequencer and an associated sequencer |
| 09/12/1978 | US4112962 Integrated pneumatic logic module |
| 08/29/1978 | US4110140 Method of making fluid system circuit board |
| 01/03/1978 | US4065839 Method and apparatus for the production of stacked, etched patterned metal foils for component elements |
| 12/06/1977 | US4061156 Transition module for a pneumatic sequencer and an associated sequencer |
| 09/06/1977 | US4046159 Pneumatic logic circuits and their integrated circuits |
| 06/07/1977 | US4027692 System allowing the realization of logic circuits by juxtaposition of pneumatic elements |
| 03/29/1977 | US4014364 Universal circuit-defining device |
| 12/07/1976 | US3995654 Universal body block for fabrication of fluid logic elements and fluid logic circuits |
| 11/16/1976 | US3991786 Fluid circuit plate for a circuit module for fluid distribution |
| 11/09/1976 | US3990468 Universal insert for fabrication of fluid logic elements |
| 09/14/1976 | US3980324 Swivelling coupling for fluid |