| Patents for G21G 5 - Alleged conversion of chemical elements by chemical reaction (927) |
|---|
| 03/03/2015 | US8970509 Touch panel and liquid crystal display device including the same |
| 02/24/2015 | US8963337 Thin wafer support assembly |
| 01/27/2015 | US8941086 Charged particle beam irradiation apparatus |
| 12/23/2014 | US8916838 Device and method for particle beam delivery |
| 12/11/2014 | US20140361414 Processes And Systems For Laser Crystallization Processing Of Film Regions On A Substrate Utilizing A Line-Type Beam, And Structures Of Such Film Regions |
| 12/02/2014 | US8900715 Semiconductor device |
| 12/02/2014 | US8899044 Surface tension mediated conversion of light to work |
| 11/25/2014 | US8897910 Particle beam-assisted ultra-precision machining method for single-crystal brittle materials |
| 11/18/2014 | US8889169 Drug delivery system and method of manufacturing thereof |
| 11/04/2014 | US8878149 Charged particle beam writing apparatus and charged particle beam writing method |
| 10/21/2014 | US8865572 Dislocation engineering using a scanned laser |
| 10/21/2014 | US8865571 Dislocation engineering using a scanned laser |
| 10/14/2014 | US8859999 Movement-free bending method for one-dimensional or two-dimensional nanostructure using ion beam |
| 10/02/2014 | US20140291516 Methods and Systems for Measuring a Characteristic of a Substrate or Preparing a Substrate for Analysis |
| 09/16/2014 | US8835879 Reduction of deposition by separation of ion beam and neutral flow |
| 09/16/2014 | US8835878 Gated radiation procedure using packages |
| 08/05/2014 | US8796651 Method and apparatus for specimen fabrication |
| 08/05/2014 | US8796648 Treatment planning system, device for calculating a scanning path and particle therapy system |
| 08/05/2014 | US8796159 Processes and systems for laser crystallization processing of film regions on a substrate utilizing a line-type beam, and structures of such film regions |
| 07/29/2014 | US8791436 Circuit tracing using a focused ion beam |
| 07/29/2014 | US8791431 Drawing apparatus, and method of manufacturing article |
| 07/22/2014 | US8785890 Charged particle beam apparatus permitting high-resolution and high-contrast observation |
| 07/22/2014 | US8785888 Apparatus for and method of drawing |
| 07/15/2014 | US8779400 Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample |
| 07/01/2014 | US8765496 Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis |
| 07/01/2014 | US8764952 Method for smoothing a solid surface |
| 06/24/2014 | US8759803 Ion implant apparatus and a method of implanting ions |
| 06/17/2014 | US8755924 Charged particle beam writing method and apparatus therefor |
| 06/10/2014 | US8748850 Energy application device and energy application method |
| 05/20/2014 | US8729508 Beam transport system for a hadron therapy facility |
| 05/15/2014 | WO2014074608A1 Uv led lightbar setting uv-curable nail formulation |
| 05/13/2014 | US8723143 Plasma igniter for an inductively coupled plasma ion source |
| 05/06/2014 | US8716681 Sample processing method |
| 05/06/2014 | US8716678 Method of manufacturing microstructure and substrate provided with the microstructure |
| 04/29/2014 | US8710469 Ion implantation method and ion implantation apparatus |
| 04/22/2014 | US8704197 Accelerator and method for irradiating a target volume |
| 04/15/2014 | US8700228 Beam scheduler and beam allocation method of beam scheduler |
| 04/15/2014 | US8698105 Charged particle beam apparatus and method of adjusting charged particle optics |
| 04/15/2014 | US8698099 Attraction member, and attraction device and charged particle beam apparatus using the same |
| 04/08/2014 | US8692214 Charged particle beam inspection method |
| 04/01/2014 | US8686380 Charged particle beam apparatus |
| 03/18/2014 | US8673450 Graphite member for beam-line internal member of ion implantation apparatus |
| 03/04/2014 | US8664622 System and method of ion beam source for semiconductor ion implantation |
| 02/18/2014 | US8653484 Detection of emission radiation of UV light emitting diode by structurally identical UV light receiving diode |
| 02/18/2014 | US8652306 Method for manufacturing mask blank, method for manufacturing transfer mask, sputtering target for manufacturing mask blank |
| 02/04/2014 | US8642979 Radiotherapy device and method for balancing a radiotherapy device |
| 01/28/2014 | US8637837 Charged particle irradiation system and method for controlling the same |
| 01/21/2014 | US8633458 Ion implant apparatus and a method of implanting ions |
| 01/21/2014 | US8633457 Background reduction system including louver |
| 01/14/2014 | US8629416 Charged particle beam masking for laser ablation micromachining |
| 12/27/2013 | WO2013166506A3 Non-centrifugal contactor for molten-salt tritium-extraction process |
| 12/27/2013 | WO2013166505A3 LITHIUM TRITIDE (LiT) ELECTROLYSIS CELL FOR REMOVING TRITIUM FROM LITHIUM METAL |
| 12/19/2013 | US20130334475 Photoresponsive Nanoparticles as Light-Driven Nanoscale Actuators |
| 12/17/2013 | US8610093 Direct write lithography system |
| 12/10/2013 | US8604450 System and method for high resolution radiation field shaping |
| 12/10/2013 | US8604449 Glitch control during implantation |
| 12/03/2013 | US8598547 Handling beam glitches during ion implantation of workpieces |
| 11/19/2013 | US8586952 Temperature control of a substrate during a plasma ion implantation process for patterned disc media applications |
| 11/12/2013 | US8581484 Liquid metal ion gun |
| 11/12/2013 | US8581218 Treatment planning system, device for calculating a scanning path and particle therapy system |
| 11/07/2013 | WO2013166506A2 Non-centrifugal contactor for molten-salt tritium-extraction process |
| 11/07/2013 | WO2013166505A2 LITHIUM TRITIDE (LiT) ELECTROLYSIS CELL FOR REMOVING TRITIUM FROM LITHIUM METAL |
| 11/05/2013 | US8575577 Grazing incidence neutron optics |
| 11/05/2013 | US8575574 Ion implanting system |
| 10/29/2013 | US8569720 Patient alignment system with external measurement and object coordination for radiation therapy system |
| 10/29/2013 | US8569719 Method and apparatus for specimen fabrication |
| 10/15/2013 | US8558198 Beam line system of ion implanter |
| 10/15/2013 | US8558197 Ion implanting system |
| 10/15/2013 | US8558194 Interactive coatings, surfaces and materials |
| 10/10/2013 | US20130266556 Processing biomass |
| 10/08/2013 | US8552409 Wafer temperature correction system for ion implantation device |
| 09/26/2013 | US20130251613 Apparatus, system, and method for converting a first substance into a second substance |
| 09/19/2013 | DE10297658B4 Verfahren und System zum Reparieren defekter Photomasken Method and system for repairing defective photomasks |
| 09/03/2013 | US8527913 Method for resizing pattern to be written by lithography technique, and charged particle beam writing method |
| 08/22/2013 | US20130216520 Processing biomass |
| 07/09/2013 | US8481978 Lithographic apparatus and device manufacturing method |
| 06/11/2013 | US8461558 System and method for ion implantation with dual purpose mask |
| 06/11/2013 | US8461557 Ion sources, systems and methods |
| 06/11/2013 | US8461051 Cluster jet processing method, semiconductor element, microelectromechanical element, and optical component |
| 06/11/2013 | US8460842 Defect repair apparatus and method for EUV mask using a hydrogen ion beam |
| 05/21/2013 | US8445873 System and method for detecting at least one contamination species in a lithographic apparatus |
| 05/07/2013 | US8436325 Synchrotron and particle therapy system using the same |
| 05/07/2013 | US8436324 Preparation unit for lithography machine |
| 04/30/2013 | US8431915 Charged particle beam apparatus permitting high resolution and high-contrast observation |
| 04/30/2013 | US8431912 Simultaneous measurement of beams in lithography system |
| 04/30/2013 | US8431907 Particle beam treatment device and irradiation dose setting method of the particle beam treatment device |
| 04/09/2013 | US8415646 Production of MeV micro beams of protons for medical applications |
| 03/26/2013 | US8405056 Ion acceleration system for medical and/or other applications |
| 03/19/2013 | US8399862 Ion implanting apparatus and ion implanting method |
| 03/13/2013 | EP2567257A1 Adhesive bonding composition and method of use |
| 03/05/2013 | US8389035 Means for emitting terahertz radiation |
| 02/28/2013 | US20130048878 Target supply unit |
| 02/19/2013 | US8378320 Method for multi-beam exposure on a target |
| 02/19/2013 | US8378316 Wafer temperature correction system for ion implantation device |
| 02/13/2013 | EP2556514A1 Systems and method for target material delivery protection in a laser produced plasma euv light source |
| 01/01/2013 | US8344337 Silaborane implantation processes |
| 12/12/2012 | CN102822903A Systems and method for target material delivery protection in a laser produced plasma EUV light source |
| 11/27/2012 | US8319198 Device and method for determining control parameters for an irradiation unit, irradiation unit and irradiation method |
| 11/06/2012 | US8304748 Identifying new semiconductor detector materials by D.C. ionization conductivity |
| 10/04/2012 | US20120248328 Apparatus and method for multiple slot ion implantation |