| Patents for G21G 5 - Alleged conversion of chemical elements by chemical reaction (927) |
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| 01/27/2011 | WO2011011782A1 Functionalized metal-coated energy converting nanoparticles, methods for production thereof and methods for use |
| 01/27/2011 | US20110022148 Thermo-mechanically controlled implants and methods of use |
| 01/27/2011 | US20110020175 Apparatus for sanitizing oral appliances |
| 01/27/2011 | US20110020174 Apparatus and method for treating formed parts by means of high-energy electron beams |
| 01/25/2011 | US7875863 Illumination system, lithographic apparatus, mirror, method of removing contamination from a mirror and device manufacturing method |
| 01/18/2011 | US7872246 Laser annealing method and semiconductor device fabricating method |
| 01/18/2011 | US7872245 Systems and methods for target material delivery in a laser produced plasma EUV light source |
| 01/06/2011 | US20110001062 Dynamic optical countermeasures for ground level threats to an aircraft |
| 01/04/2011 | US7864823 Laser irradiation apparatus |
| 01/04/2011 | US7863587 Symmetrical shaper for an ion beam deposition and etching apparatus |
| 01/04/2011 | US7863563 Carbon tube for electron beam application |
| 12/28/2010 | US7858155 Plasma processing method and plasma processing apparatus |
| 12/23/2010 | DE10393131B4 Verfahren zum Herstellen von Maskenrohlingen A method for producing mask blanks |
| 12/14/2010 | US7851771 Method of constructing chimeric plant by heavy-ion beam irradiation |
| 12/07/2010 | US7847270 Semiconductor manufacturing apparatus and method thereof |
| 11/30/2010 | US7842933 System and method for measuring overlay errors |
| 11/23/2010 | US7838848 Patterning device holding apparatus and application thereof |
| 11/09/2010 | US7829870 Method and apparatus for in-situ sample preparation |
| 11/02/2010 | US7825389 Method and apparatus for controlling a gas cluster ion beam formed from a gas mixture |
| 10/27/2010 | CN101023506B Electrostatic lens for ion beams |
| 10/26/2010 | US7820987 Predicting dose repeatability in an ion implantation |
| 10/19/2010 | US7816649 Laser patterning apparatus |
| 10/19/2010 | US7816062 obtaining scanning electron microscopy image of target pattern |
| 10/05/2010 | US7807981 Data processing device, tomography apparatus for examination of an object of interest, method of examining an object of interest, computer-readable medium and program element |
| 10/05/2010 | US7807980 Charged particle beam apparatus and methods for capturing images using the same |
| 09/28/2010 | US7804073 Liquid metal ion gun |
| 09/28/2010 | US7804054 Wireless system and method for displaying the path traveled by a marker |
| 09/21/2010 | US7800079 Assembly for detection of radiation flux and contamination of an optical component, lithographic apparatus including such an assembly and device manufacturing method |
| 08/31/2010 | US7786454 Optics for generation of high current density patterned charged particle beams |
| 08/19/2010 | US20100207040 Light exposure apparatus and manufacturing method of semiconductor device using the same |
| 08/12/2010 | US20100202918 Apparatus and method for sterilizing vessel with electron beam |
| 08/10/2010 | US7772571 Implant beam utilization in an ion implanter |
| 07/06/2010 | US7750325 Methods and apparatus for producing and storing positrons and protons |
| 07/06/2010 | US7750318 Working method by focused ion beam and focused ion beam working apparatus |
| 07/06/2010 | US7750298 Interferometer having three electron biprisms |
| 06/29/2010 | US7745073 Method for manufacturing a semiconductor device, stencil mask and method for manufacturing a the same |
| 06/22/2010 | US7741623 Patient positioning device |
| 06/15/2010 | US7737422 Charged-particle exposure apparatus |
| 06/03/2010 | US20100136799 Method of manufacturing semiconductor device, Exposure device, and recording medium |
| 06/01/2010 | USRE41362 Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 05/25/2010 | US7723702 E-beam lithography system for synchronously irradiating a plurality of photomasks and method of fabricating photomasks using the same |
| 05/11/2010 | US7714288 Charged particle beam apparatus |
| 05/06/2010 | US20100108913 Laser system |
| 04/27/2010 | US7705334 Extreme ultraviolet radiation source device |
| 04/20/2010 | US7700931 Ion beam processing apparatus |
| 04/15/2010 | US20100090130 Energy Sources for Curing in an Imprint Lithography System |
| 04/13/2010 | US7696492 Radiation system and lithographic apparatus |
| 04/13/2010 | US7696488 Irradiating device and method for controlling the same |
| 04/08/2010 | US20100084577 Techniques for ion implantation of molecular ions |
| 03/23/2010 | US7685560 Method and apparatus for monitoring exposure process |
| 03/23/2010 | US7684023 Apparatus and method for generating THz wave by heterodyning optical and electrical waves |
| 03/18/2010 | US20100065938 Ion implantation method, method of producing solid-state imaging device, solid-state imaging device, and electronic apparatus |
| 03/18/2010 | US20100065853 Process and system for laser crystallization processing of film regions on a substrate to minimize edge areas, and structure of such film regions |
| 02/25/2010 | US20100044594 Apparatus for aligning a particle-beam-generated pattern to a pattern on a pre-patterned substrate |
| 02/18/2010 | US20100040980 Method and apparatus for reforming film and controlling slimming amount thereof |
| 02/18/2010 | US20100038561 Material activating device |
| 02/18/2010 | US20100038560 Laser cleaning apparatus and laser cleaning method |
| 02/16/2010 | US7662524 Scanning beam of metallic ions over defect to dope, reducing transparency; implanting gallium atoms to reduce transmission and quartz can be etched |
| 02/11/2010 | US20100032586 Uniform Large-Grained And Grain Boundary Location Manipulated Polycrystalline Thin Film Semiconductors Formed Using Sequential Lateral Solidification And Devices Formed Thereon |
| 02/11/2010 | US20100032585 Solid State Radiation Source Array |
| 02/04/2010 | US20100025588 Determining diffusion length of minority carriers using luminescence |
| 01/26/2010 | US7652270 Techniques for ion beam current measurement using a scanning beam current transformer |
| 01/20/2010 | CN100583375C Electrostatic lens for ion beams |
| 01/14/2010 | US20100006776 Semiconductor thin film forming system |
| 01/07/2010 | US20100003809 Method for destruction of metallic carbon nanotubes, method for production of aggregate of semiconducting carbon nanotubes, method for production of thin film of semiconducting carbon nanotubes, method for destruction of semiconducting carbon nanotubes, method for |
| 01/07/2010 | US20100001212 Charged particle beam irradiation system and charged particle beam extraction method |
| 01/05/2010 | US7642528 Portable electronic device having appearance customizable housing |
| 12/31/2009 | US20090324928 Forming ultra low dielectric constant porous dielectric films and structures formed thereby |
| 12/24/2009 | US20090314487 Processing hydrocarbons |
| 12/17/2009 | US20090311799 Nucleic Acid Materials for Nonradiative Energy Transfer and Methods of Production and Use |
| 12/17/2009 | US20090309045 Method of cleaning a surface region covered with contaminant or undesirable material |
| 12/15/2009 | US7633074 Arrangement and method for compensating emitter tip vibrations |
| 12/10/2009 | US20090304951 Ultralow dielectric constant layer with controlled biaxial stress |
| 12/10/2009 | US20090302762 Process for the preparation of optical filter for display, optical filter for display, and display and plasma display panel provided with the optical filter |
| 12/08/2009 | US7628865 Methods to clean a surface, a device manufacturing method, a cleaning assembly, cleaning apparatus, and lithographic apparatus |
| 12/03/2009 | US20090294692 Plasmonic assisted systems and methods for interior energy-activation from an exterior source |
| 12/03/2009 | US20090294689 Fluid treatment system |
| 12/02/2009 | CN100565774C Electronic optical focusing, deflexion and signals collection method for the turning gear immerged object lens |
| 11/26/2009 | US20090289194 Particle beam therapy system |
| 11/26/2009 | US20090289053 Apparatus Including Heating Source Reflective Filter for Pyrometry |
| 11/17/2009 | US7619207 Lithographic apparatus and device manufacturing method |
| 11/12/2009 | US20090278058 3d two-photon lithographic microfabrication system |
| 11/12/2009 | US20090278057 Pulsed-Laser Systems and Methods for Producing Holographic Stereograms |
| 11/10/2009 | US7615765 Charged particle beam apparatus |
| 11/05/2009 | US20090272915 Soft X-Ray Generation Apparatus and Static Elimination Apparatus |
| 10/22/2009 | US20090263734 Lithographic Apparatus and Device Manufacturing Method |
| 10/22/2009 | US20090261276 Method and apparatus for excimer curing |
| 10/15/2009 | US20090256086 Production method of liquid crystal display device and exposure device |
| 10/08/2009 | US20090250636 Charged particle supplying apparatus |
| 10/08/2009 | US20090250635 Method and apparatus for processing multiphoton curable photoreactive compositions |
| 10/08/2009 | US20090250634 Back illumination method for counter measuring IR guided missiles |
| 10/06/2009 | US7598504 Writing error diagnosis method for charged particle beam photolithography apparatus and charged particle beam photolithography apparatus |
| 10/06/2009 | US7598490 SEM-type reviewing apparatus and a method for reviewing defects using the same |
| 09/24/2009 | US20090236546 Information recording medium and method of manufacturing the same |
| 09/24/2009 | US20090236545 Non-continuous particle beam irradiation method and apparatus |
| 09/15/2009 | US7589334 Ion beam delivery equipment and an ion beam delivery method |
| 09/15/2009 | US7589332 Via-hole processing method |
| 09/09/2009 | EP2099056A2 Electrostatic lens for ion beams |
| 09/09/2009 | EP1761822A4 A dynamic fluid control system for immersion lithography |
| 09/08/2009 | US7586113 EUV illumination system |