Patents
Patents for F15C 5 - Manufacture of fluid-circuit elements; Manufacture of assemblages of such elements (1,879)
09/2007
09/04/2007CA2350077C Buckled actuator with enhanced restoring force
08/2007
08/30/2007US20070200082 Manufacture of an integrated fluid delivery system for semiconductor processing apparatus
08/15/2007EP1490601B1 Micromechanical components
08/08/2007EP1644104B1 Electrically-driven valve comprising a microporous membrane
08/07/2007US7252764 Method for fabrication of a molecular filter and apparatus formed by the same
08/01/2007EP1588156B1 Miniaturised gas chromatograph and injector for the same
07/2007
07/31/2007US7250128 Method of forming a via in a microfabricated elastomer structure
07/26/2007US20070172362 Microvalve device suitable for controlling a variable displacement compressor
07/26/2007US20070169686 Systems and methods for mixing reactants
07/25/2007CN101004191A Manufacturing process of a hydraulic unit and a hydraulic unit
07/19/2007US20070164641 Electroactive polymer devices for moving fluid
07/17/2007US7244402 Microfluidic protein crystallography
07/03/2007US7238325 By selectively compressing the cavity section from externally, the flow rate of the fluid passing through the cavity section can be reduced to zero
07/03/2007US7238268 Microfluidic devices for the controlled manipulation of small volumes
06/2007
06/19/2007US7232109 Electrostatic valves for microfluidic devices
06/14/2007US20070133081 Micro-electromechanical system (mems) polyelectrolyte gel network pump
06/07/2007WO2007064310A1 Motorised valve
06/07/2007WO2005103504A3 High pressure capillary micro-fluidic valve device and a method of fabricating same
05/2007
05/31/2007WO2007060636A2 Microfluidic system
05/31/2007WO2007060635A2 System to measure blood coagulation related parameters
05/31/2007WO2007060523A1 Microfluidic structures
05/31/2007CA2637885A1 Microfluidic structures
05/30/2007EP1790861A1 Microfluidic system
05/24/2007US20070113663 Capacitance dual electrode pressure sensor in a diffusion bonded layered substrate
05/23/2007CN1968754A A valve for a microfluidic device
05/15/2007US7217395 Piezoelectrically controllable microfluid actor system
05/15/2007US7216671 Microfabricated elastomeric valve and pump systems
05/09/2007EP1709335B1 Pyrotechnic microsystem and method for making same
05/03/2007WO2007050418A1 Reconfigurable valve using optically active material
05/01/2007US7212332 Micro-electromechanical system (MEMS) polyelectrolyte gel network pump
05/01/2007US7210502 Microvalve device suitable for controlling a variable displacement compressor
04/2007
04/26/2007US20070090314 Micromachined knife gate valve for high-flow pressure regulation applications
04/25/2007EP1476393B1 Microfluidic valve and system therefor
04/19/2007WO2006018043A3 Valve slider for a microfluidic coupling device
04/18/2007EP1216373B1 A normally closed in-channel micro check valve
04/17/2007US7204264 High pressure capillary micro-fluidic valve device and a method of fabricating same
04/17/2007US7204263 Flow control method for micro system
04/11/2007EP1771665A1 Method of controlling microvalve actuator
04/04/2007EP1597576B1 Capillary stop
03/2007
03/27/2007US7195670 High throughput screening of crystallization of materials
03/27/2007US7195393 Micro fluidic valves, agitators, and pumps and methods thereof
03/27/2007US7195036 Thermal micro-valves for micro-integrated devices
03/22/2007US20070062909 cleaning with a detergent, then deionized water, then treating with a nitric acid solution; useful for gas distribution in semiconductor processing equipment; leakproof
03/22/2007US20070062021 Method of attaching components to semiconductor processing chambers using diffusion bonding
03/20/2007US7192001 Thermopneumatic microvalve
03/15/2007US20070059494 Microfabricated elastomeric valve and pump systems
03/08/2007US20070051080 In-line filter in a diffusion bonded layered substrate
03/07/2007EP1759120A2 Microfluidic devices with separable actuation and fluid-bearing modules
03/01/2007WO2006113860A3 Waveform sensing and regulating fluid flow valve
03/01/2007US20070044851 Latching micro-regulator
02/2007
02/22/2007US20070042503 Moving microdroplets
02/21/2007EP1753534A1 A valve for a microfluidic device
02/15/2007US20070034269 Method of controlling fluid
02/08/2007DE10235441B4 Durch Mikrobearbeitung hergestelltes Hochtemperaturventil Produced by micro-machining high temperature valve
02/07/2007EP1040736B1 Synthetic jet actuators for cooling heated bodies and environments
01/2007
01/30/2007US7169314 Microfabricated elastomeric valve and pump systems
01/24/2007EP1745491A1 Optoelectronic tweezers
01/24/2007EP1514045B1 Electrostatically actuated valve
01/18/2007US20070012371 Flow restrictor and system for delivering a flow of liquid in a microcapillary
01/16/2007US7163026 Valve unit and fluid control chip
01/10/2007CN1894524A High-flow microvalve
01/09/2007US7159841 Piezoelectric axial flow microvalve
01/09/2007US7159618 Electrically opened micro fluid valve
01/02/2007US7156365 Method of controlling microvalve actuator
12/2006
12/14/2006WO2006132929A1 Microvalve package assembly
12/14/2006US20060278288 Microfluidic system including a bubble valve for regulating fluid flow through a microchannel
12/06/2006EP1116003A4 Apparatus and method for controlling fluid in a micromachined boiler
12/05/2006US7144616 Microfabricated elastomeric valve and pump systems
12/05/2006US7143787 Microluidic valve having two revolving valve elements
12/05/2006US7143785 Microfluidic large scale integration
11/2006
11/30/2006US20060266679 Method and apparatus for sorting particles
11/23/2006US20060263033 Switchable surfaces
11/23/2006US20060260700 Microluidic valve having two revolving valve elements
11/22/2006EP1723356A2 High-flow microvalve
11/22/2006CN1867795A Microfluidic large scale integration
11/22/2006CN1865714A Device and method for handling liquids
11/15/2006EP1266142B1 Thermally actuated microvalve assembly
11/14/2006US7134639 Latching micro-regulator
11/14/2006US7134453 Microfluidic switch for stopping a liquid flow during a time interval
11/14/2006US7134445 Double-effect pyrotechnic microactuator for microsystem and microsystem using same
11/09/2006US20060251544 Capillary stop
11/02/2006WO2006114406A1 A package for beamlead semiconductor devices
11/02/2006US20060243331 Microvalve device suitable for controlling a variable displacement compressor
11/02/2006EP1664601A4 Microfluidic large scale integration
11/01/2006CN1856365A Microfluidic valve
10/2006
10/26/2006WO2006113860A2 Waveform sensing and regulating fluid flow valve
10/25/2006EP1715336A1 Connector for analytical devices
10/25/2006EP1194693B1 Microfabricated elastomeric valve and pump systems
10/05/2006WO2006104467A1 Configurable microfluidic device and method
10/05/2006US20060222571 Fluid handling assembly with valve position control based on fluid amount measurement
09/2006
09/14/2006WO2006067715A3 Method for controlling the flow of liquids containing biological material by inducing electro- or magneto-rheological effect
09/14/2006US20060204381 Fluid transferring system and micropump suitable therefor
09/14/2006US20060202330 Chip with cleaning cavity
09/13/2006EP1633988B1 Electrically-opened micro fluid-valve
09/13/2006EP1007873B1 Thermal microvalves
09/12/2006US7106493 MEMS-based valve device
09/12/2006US7104517 Polymer valves
09/12/2006US7104405 Method and apparatus for sorting particles
09/07/2006US20060196409 High throughput screening of crystallization materials
09/06/2006EP1320741A4 Microfluidic devices for rotational manipulation of the fluidic interface between multiple flow streams
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