| Patents for F15C 5 - Manufacture of fluid-circuit elements; Manufacture of assemblages of such elements (1,879) |
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| 08/31/2006 | DE10239306B4 Verfahren zum selektiven Verbinden von Substraten A method of selectively bonding substrates |
| 08/30/2006 | EP1694990A1 Microvalve device suitable for controlling a variable displacement compressor |
| 08/30/2006 | EP1415210B1 Micromachined structure usable in pressure regulating microvalve and proportional microvalve |
| 08/30/2006 | EP1317399B1 Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods |
| 08/29/2006 | US7097775 Coated microfluidic delivery system |
| 08/29/2006 | US7096878 Pyrotechnically actuated microvalve |
| 08/24/2006 | US20060185728 Pyrotechnically actuated microvalve |
| 08/23/2006 | EP1691924A1 A modular biochip assembly |
| 08/22/2006 | US7094040 Fluid transferring system and micropump suitable therefor |
| 08/17/2006 | US20060180779 Microfluidic valve |
| 08/17/2006 | US20060180223 Electrically opended micro fluid-valve |
| 08/09/2006 | EP1687535A1 Cooling device for an integrated circuit |
| 08/09/2006 | EP1576294B1 Microvalve that is doubly closed in a normal manner |
| 08/08/2006 | US7086245 Valve apparatus for controlling mass flow, manufacturing method thereof and heat exchanger using the same |
| 07/26/2006 | EP1683570A1 Method of controlling fluid |
| 07/20/2006 | US20060158065 Electroactive polymer devices for moving fluid |
| 07/19/2006 | CN1804396A Micro-electro-mechanical V-type micro valve and making method thereof |
| 07/13/2006 | WO2006073746A1 Microfluidic modulating valve |
| 07/12/2006 | EP1679121A2 Microfabricated fluidic circuit elements and applications |
| 07/11/2006 | US7075162 Electrostatic/electrostrictive actuation of elastomer structures using compliant electrodes |
| 07/11/2006 | US7073531 Valve block |
| 07/11/2006 | CA2421934C Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods |
| 07/05/2006 | EP1458984B1 Apparatus for conveying fluids and base plate |
| 07/05/2006 | CN1262344C Very small chemical device and flow rate adjusting method thereof |
| 07/04/2006 | US7070577 Drive circuit having improved energy efficiency for implantable beneficial agent infusion or delivery device |
| 07/04/2006 | US7069943 Generating a gas bubble, pressurizing to deflect the membrane by an actuator, varying the electrical resistance; electrophoretic systems |
| 06/29/2006 | US20060138371 Electrically-driven valve comprising a microporous membrane |
| 06/27/2006 | US7066453 Microscale reaction devices |
| 06/27/2006 | US7066205 Microvalve for controlling fluid flow |
| 06/20/2006 | US7064472 Electroactive polymer devices for moving fluid |
| 06/13/2006 | US7059339 Pyrotechnically actuated microvalve |
| 06/08/2006 | US20060118895 Electrostatic/electrostrictive actuation of elastomer structures using compliant electrodes |
| 06/07/2006 | EP1664601A2 Microfluidic large scale integration |
| 06/07/2006 | EP1663492A1 Microfluidic valve |
| 06/07/2006 | EP1663350A1 Flow restrictor and system for delivering a flow of liquid in a microcapillary |
| 06/07/2006 | CN1784605A Method of moving fluid in capillary chip |
| 06/06/2006 | US7055797 Micro-actuator, fabrication method thereof, and micro-actuating valve |
| 06/06/2006 | US7055540 Method of moving fluid in capillary chip |
| 05/31/2006 | EP1386087B1 Microfabricated fluidic circuit elements and applications |
| 05/30/2006 | US7052616 Fabrication of molecular scale devices using fluidic assembly |
| 05/30/2006 | US7052594 Elastic sheet immobilized on substrate; electrode contactors on elastic sheet; applying electric potentials; microfluids |
| 05/30/2006 | US7052545 High throughput screening of crystallization of materials |
| 05/18/2006 | US20060102862 Electrostatic sealing device and method of use thereof |
| 05/17/2006 | EP1345698A4 Microfluidic devices for introducing and dispensing fluids from microfluidic systems |
| 05/17/2006 | CN1774629A Capillary stop |
| 05/09/2006 | US7040338 Microfabricated elastomeric valve and pump systems |
| 05/03/2006 | EP1560642A4 Microfluidic systems and components |
| 04/12/2006 | EP1644104A1 Electrically-driven valve comprising a microporous membrane |
| 04/11/2006 | US7025323 Low power integrated pumping and valving arrays for microfluidic systems |
| 04/06/2006 | US20060073687 Method for maskless fabrication of self-aligned structures comprising a metal oxide |
| 04/04/2006 | US7022381 Method for producing high dielectric strength microvalves |
| 03/29/2006 | EP1640664A2 Control valve assembly for controlling gas flow in gas combustion systems |
| 03/28/2006 | US7020355 Switchable surfaces |
| 03/21/2006 | US7014165 Flow control valve and flow control valve apparatus using the same |
| 03/16/2006 | US20060054228 Microfabricated elastomeric valve and pump systems |
| 03/16/2006 | US20060054226 Liquid delivery device |
| 03/15/2006 | EP1633988A1 Electrically-opened micro fluid-valve |
| 03/14/2006 | US7011791 For analysis of liquid samples such as blood |
| 03/14/2006 | US7011378 Proportional micromechanical valve |
| 03/09/2006 | WO2005060393A3 Microfluidic large scale integration |
| 03/09/2006 | US20060051214 Micro liquid handling device and methods for using it |
| 03/08/2006 | EP1631760A2 A micromachined knife gate valve for high-flow pressure regulation applications |
| 03/02/2006 | WO2006022883A1 Method of controlling microvalve actuator |
| 03/02/2006 | US20060044084 Macromechanical components |
| 03/02/2006 | DE10055374B4 Verteilerplatte für Flüssigkeiten und Gase Distribution plate for liquids and gases |
| 03/01/2006 | EP1332547B1 Electrostatic/pneumatic actuators for active surfaces |
| 02/28/2006 | US7004184 Compositions and methods for liquid metering in microchannels |
| 02/16/2006 | WO2005069797A3 Microfluidic structures and methods for integrating a functional component into a microfluidic device |
| 02/09/2006 | US20060027772 Normally double-closed microvalve |
| 02/08/2006 | EP1624234A1 Fluid handling assembly with valve position control based on fluid amount measurement |
| 02/08/2006 | EP1623763A1 Chip with cleaning cavity |
| 02/08/2006 | EP1534982A4 One-directional microball valve for a microfluidic device |
| 02/07/2006 | US6994115 Thermally actuated microvalve device |
| 02/07/2006 | US6994030 Pyrotechnic microactuators for microsystems |
| 02/02/2006 | US20060022160 Method of controlling microvalve actuator |
| 02/02/2006 | US20060021666 Microsystem, microopening film, and system and method for analizing interaction between biomolecules |
| 02/02/2006 | US20060021651 Liquid delivery device |
| 01/31/2006 | US6991214 Microvalve normally in a closed position |
| 01/25/2006 | CN1726348A Valve unit and fluid control chip |
| 01/25/2006 | CN1238684C Apparatus and method for controlling fluid in micro-machined boiler |
| 01/24/2006 | US6988706 Piezoelectric microvalve |
| 01/24/2006 | US6988402 Mobile monolithic polymer elements for flow control in microfluidic devices |
| 01/17/2006 | US6986500 Electrostatic microvalve and a method for the operation thereof |
| 01/17/2006 | US6986365 High-flow microvalve |
| 01/05/2006 | US20060002817 Flow modulation devices |
| 01/05/2006 | US20060000709 Methods for modulation of flow in a flow pathway |
| 01/05/2006 | US20060000513 Microfabricated fluidic circuit elements and applications |
| 01/04/2006 | EP1612430A2 Methods for modulation of flow in a microfluidic pathway |
| 01/04/2006 | EP1612429A2 Microfluidic flow modulation device |
| 01/04/2006 | CN1715932A Platform microstructured to process liquid and using method of the same |
| 01/04/2006 | CN1715930A Methods for modulation of flow in a flow pathway |
| 01/04/2006 | CN1715929A Flow modulation devices |
| 01/03/2006 | US6981687 Bubble-actuated valve with latching |
| 01/03/2006 | US6981520 Microvalve for controlling fluid flow |
| 01/03/2006 | US6981518 Latching micro-regulator |
| 12/30/2005 | CA2510825A1 Flow modulation devices |
| 12/30/2005 | CA2510824A1 Methods for modulation of flow in a flow pathway |
| 12/29/2005 | DE102004055247B3 Micro valve with electrostatic drive especially for pneumatic uses has vacuum chamber inlet and outlet channels and valve member held by electrostatic force |
| 12/20/2005 | US6976590 Method and apparatus for sorting particles |
| 12/15/2005 | US20050274423 Method of moving fluid in capillary chip |