| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 03/05/2015 | US20150060660 Method for coincident alignment of a laser beam and a charged particle beam |
| 03/04/2015 | EP2841607A1 Processes, systems, and apparatus for cyclotron production of technetium-99m |
| 03/03/2015 | US8972909 OPC method with higher degree of freedom |
| 03/03/2015 | US8969841 Light source for generating light from a laser sustained plasma in a above-atmospheric pressure chamber |
| 03/03/2015 | US8969838 Systems and methods for protecting an EUV light source chamber from high pressure source material leaks |
| 03/03/2015 | US8969837 Multi charged particle beam writing method, and multi charged particle beam writing apparatus |
| 02/26/2015 | US20150053866 Repair Apparatus |
| 02/26/2015 | DE102013109171A1 Blitzlampe mit einer Zündvorrichtung Flash lamp with an ignition device |
| 02/25/2015 | EP2840579A1 Gantry-type particle beam illumination device, and particle beam therapy device comprising same |
| 02/24/2015 | US8966410 Semiconductor structure and method for fabricating semiconductor layout |
| 02/24/2015 | US8963337 Thin wafer support assembly |
| 02/24/2015 | US8963108 Proton treatment gantry system |
| 02/24/2015 | US8963100 Nitrogen ions from a gas field ion source held at a pressure of 1.0 x 10^(-6) pa to 1.0 x 10^(-2) pa |
| 02/19/2015 | US20150048260 Ultraviolet laser sterilization system |
| 02/17/2015 | US8957394 Compact high-voltage electron gun |
| 02/17/2015 | US8957393 Particle beam irradiation apparatus and particle beam therapy system |
| 02/12/2015 | WO2015019676A1 Electron beam sterilization device and sterile filling equipment |
| 02/12/2015 | DE102013108603A1 Strahlungsquelle, Vorrichtung und Verfahren zur schnellen Wärmebehandlung von Beschichtungen Radiation source device and method for rapid heat treatment of coatings |
| 02/10/2015 | US8952345 Radiation therapy apparatus with an aperture assembly and associated methods |
| 02/10/2015 | US8952344 Techniques for processing photoresist features using ions |
| 02/10/2015 | US8951384 Electron beam plasma source with segmented beam dump for uniform plasma generation |
| 02/05/2015 | WO2015014753A1 Projection optical unit for imaging an object field into an image field, and projection exposure apparatus comprising such a projection optical unit |
| 02/05/2015 | US20150034844 System and method for reducing contamination in extreme ultraviolet lithography light source |
| 02/05/2015 | US20150034839 Installation for processing articles by electron bombardment |
| 02/05/2015 | US20150033546 Driving apparatus, charged particle beam irradiation apparatus, and method of manufacturing device |
| 02/04/2015 | EP2832190A1 X-ray generator device |
| 02/04/2015 | CN104335290A 电子线照射装置 Electron beam irradiation device |
| 02/04/2015 | CN104324449A 粒子射线照射装置及粒子射线治疗装置 Particle beam irradiation apparatus and particle beam treatment apparatus |
| 02/03/2015 | US8946662 Excimer light source |
| 02/03/2015 | US8946661 Radiation source, lithographic apparatus and device manufacturing method |
| 02/03/2015 | US8946660 Downhole sources having enhanced IR emission |
| 02/03/2015 | US8946659 Particle beam transport apparatus and method of transporting a particle beam with small beam spot size |
| 02/03/2015 | US8946657 Beam head |
| 02/03/2015 | US8946489 Processing biomass |
| 01/29/2015 | WO2015013309A1 Compound elliptical reflector for curing optical fibers |
| 01/29/2015 | WO2015013185A1 System and method for generation of extreme ultraviolet light |
| 01/29/2015 | US20150032233 Path planning and collision avoidance for movement of instruments in a radiation therapy environment |
| 01/29/2015 | US20150028229 Dual elliptical reflector with a co-located foci for curing optical fibers |
| 01/29/2015 | US20150027908 Multiple-cavity vapor cell structure for micro-fabricated atomic clocks, magnetometers, and other devices |
| 01/29/2015 | DE102013214550A1 Fahrzeug mit einer Heizeinrichtung Vehicle with a heating device |
| 01/28/2015 | CN204130195U 一种应用于辐照装置的钴源模块移动导向架 Applied to the irradiation device mobile guide frame cobalt source module |
| 01/28/2015 | CN204130194U 一种电子束扩散截面修整装置 An electron beam diffusion section trimming device |
| 01/27/2015 | US8941086 Charged particle beam irradiation apparatus |
| 01/27/2015 | US8941085 Electron beam lithography systems and methods including time division multiplex loading |
| 01/27/2015 | US8941084 Charged particle cancer therapy dose distribution method and apparatus |
| 01/27/2015 | US8941083 Applying a particle beam to a patient |
| 01/27/2015 | US8941082 Dual sided workpiece handling |
| 01/22/2015 | US20150021500 Laser-Driven Light Source |
| 01/22/2015 | US20150021498 Chemical mechanical polishing retaining ring methods and apparatus |
| 01/22/2015 | DE102013107548A1 Dosierapparat zum handgesteuerten Dosieren eines lichtaushärtenden Materials Measuring equipment for manually controlled dosing of a light-curing material |
| 01/20/2015 | US8938047 Sequencing sector fields |
| 01/20/2015 | US8937289 High heat load optics with vibration isolated hoses in an extreme ultraviolet lithography system |
| 01/15/2015 | US20150016590 Soft X-Ray Curtain Tube |
| 01/14/2015 | EP2824999A1 Neutron generation source, and neutron generation device |
| 01/13/2015 | US8933423 Charged particle beam device and sample production method |
| 01/13/2015 | US8933415 Laser ion source and heavy particle beam therapy equipment |
| 01/08/2015 | US20150008818 Phosphor compositions and methods of making the same |
| 01/08/2015 | US20150008334 Charged particle beam system and method of operating a charged particle beam system |
| 01/08/2015 | DE102013011066A1 Wärme-Lichttrennung für eine UV-Strahlungsquelle Heat-light separation for a UV radiation source |
| 01/07/2015 | EP2821102A1 Compact/lightweight gantry and particle beam therapy device using same |
| 01/07/2015 | CN204087837U 辐照传送装置 Radiation delivery device |
| 01/06/2015 | US8930859 Method of decomposing layout of semiconductor device |
| 01/06/2015 | US8927952 Target for laser produced plasma extreme ultraviolet light source |
| 01/06/2015 | US8927949 Measuring apparatus, drawing apparatus, and article manufacturing method |
| 01/06/2015 | US8927946 System and method for layer-wise proton beam current variation |
| 01/06/2015 | US8927615 Plasmonic assisted systems and methods for interior energy-activation from an exterior source |
| 01/01/2015 | US20150005533 Postharvest production and enhancement of resveratrol and piceatannol in sugarcane |
| 01/01/2015 | US20150001424 Switching micro-resonant structures by modulating a beam of charged particles |
| 12/30/2014 | US8922027 Electronic device having electrodes bonded with each other |
| 12/30/2014 | US8921814 Photon source, metrology apparatus, lithographic system and device manufacturing method |
| 12/25/2014 | US20140375735 Light irradiation apparatus and printing apparatus |
| 12/25/2014 | US20140374625 Euv discharge lamp with moving protective component |
| 12/24/2014 | CN104246907A 台架型粒子射线照射装置及具备该装置的粒子射线治疗装置 Bench type particle beam irradiation apparatus and the apparatus includes a particle beam treatment apparatus |
| 12/24/2014 | CN104240787A 钠冷快堆结构材料辐照罐 Sodium-cooled fast reactor structural materials irradiated tank |
| 12/24/2014 | CN102227236B 照射至少两个目标体积 Irradiating at least two target volume |
| 12/23/2014 | US8918746 Cut mask aware contact enclosure rule for grating and cut patterning solution |
| 12/23/2014 | US8916841 Particle therapy system |
| 12/23/2014 | US8916840 Lithography apparatus, and article manufacturing method |
| 12/23/2014 | US8916839 Sample preparation method and apparatus |
| 12/23/2014 | US8916837 Charged particle lithography system with intermediate chamber |
| 12/17/2014 | CN104221093A 旋转机架及粒子射线治疗装置 Rotating frame and particle beam treatment apparatus |
| 12/17/2014 | CN104217780A 辐照传送装置 Radiation delivery device |
| 12/17/2014 | CN104217779A 一种电子束扩散截面修整装置及方法 An electron beam diffusion section trimming device and method |
| 12/16/2014 | US8912514 Target for extreme ultraviolet light source |
| 12/16/2014 | US8912513 Charged particle beam writing apparatus and charged particle beam writing method |
| 12/16/2014 | US8912505 Electron beam focusing electrode and electron gun using the same |
| 12/11/2014 | US20140362556 Quantum rod sheet, backlight unit, display device and manufacturing method thereof |
| 12/11/2014 | US20140361414 Processes And Systems For Laser Crystallization Processing Of Film Regions On A Substrate Utilizing A Line-Type Beam, And Structures Of Such Film Regions |
| 12/11/2014 | US20140361193 Multi charged particle beam writing method, and multi charged particle beam writing apparatus |
| 12/10/2014 | CN204010720U 伽玛辐照装置放射源升降液压站的停电自动降源机构 Automatic power down the source agency Gamma Irradiation Facility radioactive hydraulic lift station |
| 12/10/2014 | CN204010719U 防止伽玛辐照装置辐照箱装载超重的结构 Gamma irradiation facility to prevent overweight load irradiation box structure |
| 12/10/2014 | CN102438701B 放射线治疗装置控制装置及放射线治疗装置的工作方法 Radiation therapy apparatus control device and radiation therapy apparatus working methods |
| 12/09/2014 | US8907309 Treatment delivery control system and method of operation thereof |
| 12/09/2014 | US8907308 Method and apparatus for verifying an irradiation field |
| 12/02/2014 | US8901522 Chamber apparatus and extreme ultraviolet light generation system |
| 12/02/2014 | US8901519 Quick regulation of the range of high-energy ion beams for precision irradiation of moving target volumes |
| 12/02/2014 | US8901518 Chambers with improved cooling devices |
| 12/02/2014 | US8899834 Pivot joint brakes for X-ray positioning system |
| 11/27/2014 | US20140350324 Particle beam irradiation apparatus and particle beam therapy system |
| 11/27/2014 | US20140346122 System and apparatus for determining and controlling water clarity |