| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 10/08/2013 | US8552406 Apparatus and method for surface modification using charged particle beams |
| 10/08/2013 | US8552405 Charged particle beam writing apparatus and charged particle beam writing method |
| 10/08/2013 | US8552404 Ion implantation method and ion implantation apparatus |
| 10/03/2013 | WO2013148518A1 X-ray generator device |
| 10/03/2013 | WO2013145211A1 Rotating gantry and particle beam therapy device |
| 10/03/2013 | US20130256568 Extreme ultraviolet light source apparatus and method of generating ultraviolet light |
| 10/03/2013 | US20130256567 Extreme ultraviolet light source apparatus |
| 10/03/2013 | US20130255577 Method and Apparatus for Generating High Current Negative Hydrogen ION Beam |
| 10/02/2013 | CN103339529A Beam position monitor device and particle ray treatment device |
| 10/01/2013 | US8546776 Optical system for EUV lithography with a charged-particle source |
| 10/01/2013 | US8546775 Method and arrangement for the stabilization of the source location of the generation of extreme ultraviolet (EUV) radiation based on a discharge plasma |
| 09/26/2013 | WO2013141580A1 Extreme ultraviolet light generating device for stabilization and improving energy efficiency through laser beam correction |
| 09/26/2013 | WO2013141578A1 Apparatus for generating extreme ultraviolet light using plasma |
| 09/25/2013 | EP2642505A1 Field emission apparatus and hand-held nondestructive inspection apparatus |
| 09/19/2013 | US20130240762 Extreme ultra violet light source apparatus |
| 09/19/2013 | US20130240761 Self-focusing radioactive source device and radiating apparatus employing the same |
| 09/19/2013 | US20130240760 Treatment Method for Stamping Tool Surface |
| 09/19/2013 | US20130240758 Plasmonic assisted systems and methods for interior energy-activation from an exterior source |
| 09/19/2013 | US20130240753 Ion Source and Ion Implanter Including the Same |
| 09/19/2013 | DE102013102654A1 Set zum Verarbeiten eines Lichthärtenden Materials Set for processing a light-curing material |
| 09/18/2013 | EP2639598A1 Beam position monitor device and particle ray treatment device |
| 09/18/2013 | CN203205085U Protective device for irradiated products |
| 09/18/2013 | CN203205084U Rotating shaft used for industrial irradiation accelerators |
| 09/18/2013 | CN103313502A Ion source, heavy particle beam irradiation apparatus, ion source driving method, and heavy particle beam irradiation method |
| 09/17/2013 | US8539390 Determining manufacturability of lithographic mask based on manufacturing shape penalty of aspect ratio of edge that takes into account pair of connected edges of the edge |
| 09/17/2013 | US8536551 Extreme ultra violet light source apparatus |
| 09/17/2013 | US8536549 Light source employing laser-produced plasma |
| 09/17/2013 | US8536548 Particle beam therapy system |
| 09/17/2013 | US8536539 Ion beam generator, and substrate processing apparatus and production method of electronic device using the ion beam generator |
| 09/17/2013 | US8536538 Multiple-pole electrostatic deflector for improving throughput of focused electron beam instruments |
| 09/12/2013 | WO2013133342A1 Neutron generation source, and neutron generation device |
| 09/12/2013 | WO2013133169A1 X-ray tube |
| 09/12/2013 | DE102012203633A1 Spiegel für den EUV-Wellenlängenbereich, Herstellungsverfahren für einen solchen Spiegel und Projektionsbelichtungsanlage mit einem solchen Spiegel Mirror for the EUV wavelength range, manufacturing process for such a mirror and projection exposure system with such a mirror |
| 09/12/2013 | DE102009038719B4 Vorrichtung zur UV-Bestrahlung kleiner Probenmengen Device for UV irradiation of small amounts of sample |
| 09/11/2013 | CN203191332U 射线发射装置及成像系统 Ray-emitting device and imaging system |
| 09/10/2013 | US8530870 Extreme ultraviolet light source apparatus |
| 09/10/2013 | US8530866 Pattern observation method |
| 09/10/2013 | US8530859 Method and system for sterilizing objects by the application of gas-cluster ion-beam technology |
| 09/10/2013 | US8530857 Stage device |
| 09/10/2013 | US8530856 Beam device system comprising a particle beam device and an optical microscope |
| 09/10/2013 | US8530855 Method for producing a micro-gripper |
| 09/10/2013 | US8530836 Electron-beam dimension measuring apparatus and electron-beam dimension measuring method |
| 09/04/2013 | EP2634776A2 Electron beam irradiation apparatus |
| 09/03/2013 | US8526561 Methods for making and processing metal targets for producing Cu-67 radioisotope for medical applications |
| 09/03/2013 | US8525141 Collimator alignment system and method |
| 09/03/2013 | US8525140 Chamber apparatus, extreme ultraviolet light generation system, and method for controlling the extreme ultraviolet light generation system |
| 09/03/2013 | US8525137 Method for creating S/TEM sample and sample structure |
| 09/03/2013 | US8525136 Work piece with concealed surface defects |
| 09/03/2013 | US8525134 Lithography system |
| 09/03/2013 | US8525133 Particle beam irradiation system and particle beam irradiation method |
| 09/03/2013 | US8525127 Method and apparatus for inspecting sample surface |
| 08/29/2013 | US20130221246 Target supply device, extreme ultraviolet light generation apparatus, and method for supplying target |
| 08/28/2013 | CN203165480U Large power irradiation accelerator X-ray conversion target and large power irradiation accelerator X-ray conversion device |
| 08/28/2013 | CN203165479U A safety opening protector of the beam baffle plate of an electron irradiation accelerator |
| 08/28/2013 | CN103268779A Protecting device of irradiated products |
| 08/27/2013 | US8519370 Modifying radiation beam shapes |
| 08/27/2013 | US8519369 Handheld illumination device |
| 08/27/2013 | DE202013000527U1 Infrarotstrahler in U-Form mit Keramik-Reflektorbeschichtung Infrared heaters in a U shape with ceramic reflector coating |
| 08/27/2013 | DE202013000526U1 Infrarotstrahler mit inhomogenem Filament für die Oberflächentechnik Infrared port with inhomogeneous filament for surface technology |
| 08/26/2013 | DE202013000525U1 Infrarotstrahler in UForm mit inhomogenen Filamenten Infrared heaters in U-shape with inhomogeneous filaments |
| 08/26/2013 | DE202013000524U1 Infrarotstrahler mit inhomogenen Filament für die Papiertrocknung Infrared port with inhomogeneous filament for paper drying |
| 08/26/2013 | DE202013000523U1 IR-Strahler mit inhomogenem Filament in der Granulat-Trocknung IR illuminator with inhomogeneous filament in the granule drying |
| 08/22/2013 | WO2013121288A1 A device for applying rf energy to a cavity |
| 08/22/2013 | US20130216953 Electron beam writing apparatus and electron beam writing method |
| 08/21/2013 | EP2628161A1 Device for shaping an electron beam of a machine for intraoperative radiation therapy |
| 08/21/2013 | EP1948249B1 Decontamination and sterilaztion system using large area x-ray source |
| 08/21/2013 | CN203148388U System for detecting closing of irradiation box door |
| 08/21/2013 | CN103262202A Field emission apparatus and hand-held nondestructive inspection apparatus |
| 08/21/2013 | CN103258581A Plasma irradiation platform |
| 08/20/2013 | US8516405 System and method for lithography simulation |
| 08/20/2013 | US8515005 Tomosynthesis with shifting focal spot and oscillating collimator blades |
| 08/20/2013 | US8513629 Droplet generator with actuator induced nozzle cleaning |
| 08/20/2013 | US8513623 Installation for sterilizing objects by means of a radiation source |
| 08/20/2013 | US8513621 Specimen holder used for mounting |
| 08/15/2013 | US20130211174 Gamma Radiation Apparatus for Remediation of Organic Compounds in Waste Slurries |
| 08/15/2013 | US20130207001 Septum magnet and particle beam therapy system |
| 08/13/2013 | US8509387 X-ray imaging apparatus |
| 08/13/2013 | US8507885 Semiconductor exposure device using extreme ultra violet radiation |
| 08/13/2013 | US8507884 Elliptical light source for ultraviolet (UV) curing lamp assemblies |
| 08/13/2013 | US8507876 Device for holding electron microscope grids and other materials |
| 08/08/2013 | WO2013114351A2 Laser activated magnetic field manipulation of laser driven ion beams |
| 08/08/2013 | US20130200279 Germicidal device for elevator buttons |
| 08/07/2013 | EP2624277A1 Photo-cathode high-frequency electron-gun cavity apparatus |
| 08/06/2013 | US8502176 Imaging system |
| 08/06/2013 | US8502175 Charged particle beam pattern forming apparatus and charged particle beam pattern forming method |
| 08/06/2013 | US8502174 Method of and system for exposing a target |
| 08/06/2013 | US8502142 Charged particle beam analysis while part of a sample to be analyzed remains in a generated opening of the sample |
| 08/06/2013 | DE202011110341U1 Set mit Dosiervorrichtung zum handgesteuerten Dosieren eines lichtaushärtenden Materials Set metering device for manually controlled dosing of a light-curing material |
| 08/01/2013 | US20130193322 Phase plate |
| 07/31/2013 | EP2619559A1 Apparatus and method for attenuating high energy radiation |
| 07/31/2013 | CN103229269A An electron exit window foil |
| 07/31/2013 | CN103226988A Rotating shaft for industrial irradiation accelerator |
| 07/30/2013 | US8497977 Optical integrator, illumination optical system, exposure apparatus, and device manufacturing method |
| 07/30/2013 | US8497490 Terahertz wave generation device and method for generating terahertz wave |
| 07/30/2013 | US8497487 Sample holder with optical features |
| 07/25/2013 | WO2013108534A1 Charged particle beam illumination system |
| 07/25/2013 | WO2013108393A1 Beam position monitor device and particle ray treatment device |
| 07/25/2013 | US20130190548 Beam position monitor and particle beam therapy system |
| 07/25/2013 | US20130187293 Electronic device, method of manufacturing, and electronic device manufacturing apparatus |
| 07/25/2013 | DE102012106667B3 Vorrichtung zur Bestrahlung eines Substrats Apparatus for irradiating a substrate |