Patents for G21K 5 - Irradiation devices (9,144) |
---|
11/27/2014 | US20140346091 Processing mined material |
11/25/2014 | US8897910 Particle beam-assisted ultra-precision machining method for single-crystal brittle materials |
11/25/2014 | US8895945 Dose measurement device for plasma-immersion ion implantation |
11/25/2014 | US8895943 Lithography system and method of processing substrates in such a lithography system |
11/25/2014 | US8895922 Electron beam apparatus |
11/20/2014 | US20140342504 Electronic device, method of manufacturing, and electronic device manufacturing apparatus |
11/18/2014 | US8893309 Scanning tunneling microscope assembly, reactor, and system |
11/18/2014 | US8893067 System and method for lithography simulation |
11/18/2014 | US8890092 Multi-particle beam column having an electrode layer including an eccentric aperture |
11/18/2014 | US8890066 Sharp scattering angle trap for electron beam apparatus |
11/13/2014 | US20140336125 Methods for improving the bioactivity characteristics of a surface and objects with surfaces improved thereby |
11/13/2014 | US20140332700 Extreme ultraviolet light generation apparatus |
11/13/2014 | US20140332698 Polarized light irradiating apparatus and method of irradiating polarized light for photo alignment |
11/13/2014 | US20140332696 Low contamination scanner for gcib system |
11/11/2014 | US8884257 Chamber apparatus and extreme ultraviolet light generation system |
11/11/2014 | US8884245 Corrector for the correction of chromatic aberrations in a particle-optical apparatus |
11/11/2014 | US8884181 Method of generating low-energy secondary electrons for applications in biological sciences, radiochemistry, and chemistry of polymers and physics of radiotherapy |
11/11/2014 | US8883618 Method and device for the treatment of a semiconductor substrate |
11/06/2014 | US20140326179 Apparatus and techniques for controlling ion implantation uniformity |
11/04/2014 | US8878148 Method and apparatus of pretreatment of an electron gun chamber |
11/04/2014 | US8878147 Method and apparatus for in situ preparation of serial planar surfaces for microscopy |
11/04/2014 | US8878142 Charged particle beam irradiation apparatus |
11/04/2014 | US8878141 Drawing apparatus, and method of manufacturing article |
10/30/2014 | US20140319383 Charged particle beam irradiation system |
10/30/2014 | US20140319381 Optimization of high resolution digitally encoded laser scanners for fine feature marking |
10/28/2014 | US8872145 Target supply device |
10/28/2014 | US8872142 Extreme ultraviolet light generation apparatus |
10/28/2014 | US8872141 Charged particle beam writing apparatus and charged particle beam writing method |
10/28/2014 | US8872139 Settling time acquisition method |
10/28/2014 | US8872138 Gas delivery for uniform film properties at UV curing chamber |
10/28/2014 | US8872137 Dual elliptical reflector with a co-located foci for curing optical fibers |
10/28/2014 | US8872135 Electroactive polymers for lithography |
10/28/2014 | US8872126 Target supply device and extreme ultraviolet light generation apparatus |
10/28/2014 | US8872123 Method of timing laser beam pulses to regulate extreme ultraviolet light dosing |
10/28/2014 | US8872122 Method of timing laser beam pulses to regulate extreme ultraviolet light dosing |
10/21/2014 | US8866109 Charged-particle beam irradiation device |
10/21/2014 | US8866103 Charged particle energy analysers and methods of operating charged particle energy analysers |
10/16/2014 | US20140306128 Terahertz radiation source mounting arrangements and methods of mounting a terahertz source |
10/14/2014 | US8861676 Transport bin in an X-ray inspection system |
10/14/2014 | US8860232 Electronic device having electrodes bonded with each other |
10/14/2014 | US8859997 Charged particle beam writing apparatus and charged particle beam writing method |
10/14/2014 | US8859994 Disinfection device and method |
10/09/2014 | US20140299791 Target for extreme ultraviolet light source |
10/09/2014 | US20140299789 Marking paper products |
10/09/2014 | US20140299788 Marking paper products |
10/07/2014 | US8853657 Intracavity loss element for power amplifier |
10/07/2014 | US8853653 Apparatus and techniques for controlling ion implantation uniformity |
10/07/2014 | US8853647 Electron microscope |
10/02/2014 | WO2014156170A1 Electron beam irradiation device |
10/02/2014 | US20140291555 Radiation generation apparatus and radiographic apparatus |
10/02/2014 | US20140291540 Radiation generating apparatus and radiographic imaging system |
10/02/2014 | US20140291539 Radiation generating apparatus, radiographing apparatus, and computer readable storage medium storing program |
09/30/2014 | US8847183 System, method and apparatus for laser produced plasma extreme ultraviolet chamber with hot walls and cold collector mirror |
09/30/2014 | US8847181 System and method for generating extreme ultraviolet light |
09/30/2014 | US8847180 Charged particle beam apparatus, drawing apparatus, and method of manufacturing article |
09/30/2014 | US8847179 Treatment planning apparatus and particle therapy system |
09/30/2014 | US8847178 Charged particle beam writing apparatus and charged particle beam writing method |
09/25/2014 | WO2014148266A1 X-ray imaging apparatus |
09/23/2014 | US8843859 Layout content analysis for source mask optimization acceleration |
09/23/2014 | US8841641 Extreme ultraviolet light source apparatus |
09/23/2014 | US8841638 Particle beam therapy system |
09/18/2014 | WO2014143826A2 Interior energy-activation of photo-reactive species inside a medium or body |
09/18/2014 | WO2014143522A1 Target for extreme ultraviolet light source |
09/18/2014 | US20140272030 Interior energy-activation of photo-reactive species inside a medium or body |
09/18/2014 | US20140264091 Beam position control for an extreme ultraviolet light source |
09/18/2014 | US20140264090 Target for laser produced plasma extreme ultraviolet light source |
09/17/2014 | EP2778663A1 Nondestructive inspection device and method for correcting luminance data with nondestructive inspection device |
09/17/2014 | EP2777766A1 Particle beam treatment system, and beam position correction method therefor |
09/16/2014 | US8835886 UV nail lamp |
09/16/2014 | US8835885 Charged particle beam irradiation device |
09/16/2014 | US8835883 Charged particle radiation device and soundproof cover |
09/16/2014 | US8835882 Real time monitoring ion beam |
09/16/2014 | US8835881 Drift correction method and pattern writing data generation method |
09/16/2014 | US8835880 Charged particle-beam processing using a cluster source |
09/16/2014 | US8835870 Targets for generating ions and treatment apparatuses using the targets |
09/16/2014 | US8835868 Multi charged particle beam writing apparatus |
09/16/2014 | US8835845 In-situ STEM sample preparation |
09/16/2014 | US8834732 Plasma uniformity control using biased array |
09/12/2014 | WO2014138548A1 Reconfigurable processing enclosures |
09/12/2014 | WO2014138545A1 Array for processing materials |
09/12/2014 | WO2014134775A1 Target device for neutron generating device, accelerator-driven neutron generating device and beam coupling method therefor |
09/11/2014 | DE102013102236A1 Verfahren und Vorrichtung zur Herstellung von Kunststoffformkörpern aus einem Gemisch mehrerer Komponenten Method and apparatus for the production of plastic moldings from a mixture of several components |
09/09/2014 | US8829478 Drive laser delivery systems for EUV light source |
09/09/2014 | US8829470 Configurable charged-particle apparatus |
09/09/2014 | US8829469 Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices |
09/09/2014 | US8829463 Ion carpet for mass spectrometry having progressive electrodes |
09/09/2014 | US8829461 Scanning apparatus, drawing apparatus, and method of manufacturing article |
09/04/2014 | US20140246606 Charged particle beam irradiation apparatus |
09/04/2014 | US20140246603 Mobile uva curing system and method for collision and cosmetic repair of vehicles |
09/04/2014 | US20140246602 Mobile uva curing system for collision and cosmetic repair of automobiles |
09/04/2014 | US20140246601 Scanned uv-led exposure device |
09/02/2014 | US8824630 Method and apparatus for treating a target's partial motion range |
09/02/2014 | US8823404 Evaluation device and evaluation method for substrate mounting apparatus and evaluation substrate used for the same |
09/02/2014 | US8822959 Method and apparatus for optical phase error correction |
09/02/2014 | US8822958 Radiation treatment planning system |
09/02/2014 | US8822953 Electron beam irradiation apparatus |
09/02/2014 | US8822947 Particle beam generating device |
08/28/2014 | WO2014106223A3 A nuclear fusion system for extracting energy from controlled fusion reaction |
08/28/2014 | US20140241481 Quench tank and liquid metal loop |
08/28/2014 | US20140239805 Dc high-voltage super-radiant free-electron based euv source |