Patents for G21K 5 - Irradiation devices (9,144)
11/2014
11/27/2014US20140346091 Processing mined material
11/25/2014US8897910 Particle beam-assisted ultra-precision machining method for single-crystal brittle materials
11/25/2014US8895945 Dose measurement device for plasma-immersion ion implantation
11/25/2014US8895943 Lithography system and method of processing substrates in such a lithography system
11/25/2014US8895922 Electron beam apparatus
11/20/2014US20140342504 Electronic device, method of manufacturing, and electronic device manufacturing apparatus
11/18/2014US8893309 Scanning tunneling microscope assembly, reactor, and system
11/18/2014US8893067 System and method for lithography simulation
11/18/2014US8890092 Multi-particle beam column having an electrode layer including an eccentric aperture
11/18/2014US8890066 Sharp scattering angle trap for electron beam apparatus
11/13/2014US20140336125 Methods for improving the bioactivity characteristics of a surface and objects with surfaces improved thereby
11/13/2014US20140332700 Extreme ultraviolet light generation apparatus
11/13/2014US20140332698 Polarized light irradiating apparatus and method of irradiating polarized light for photo alignment
11/13/2014US20140332696 Low contamination scanner for gcib system
11/11/2014US8884257 Chamber apparatus and extreme ultraviolet light generation system
11/11/2014US8884245 Corrector for the correction of chromatic aberrations in a particle-optical apparatus
11/11/2014US8884181 Method of generating low-energy secondary electrons for applications in biological sciences, radiochemistry, and chemistry of polymers and physics of radiotherapy
11/11/2014US8883618 Method and device for the treatment of a semiconductor substrate
11/06/2014US20140326179 Apparatus and techniques for controlling ion implantation uniformity
11/04/2014US8878148 Method and apparatus of pretreatment of an electron gun chamber
11/04/2014US8878147 Method and apparatus for in situ preparation of serial planar surfaces for microscopy
11/04/2014US8878142 Charged particle beam irradiation apparatus
11/04/2014US8878141 Drawing apparatus, and method of manufacturing article
10/2014
10/30/2014US20140319383 Charged particle beam irradiation system
10/30/2014US20140319381 Optimization of high resolution digitally encoded laser scanners for fine feature marking
10/28/2014US8872145 Target supply device
10/28/2014US8872142 Extreme ultraviolet light generation apparatus
10/28/2014US8872141 Charged particle beam writing apparatus and charged particle beam writing method
10/28/2014US8872139 Settling time acquisition method
10/28/2014US8872138 Gas delivery for uniform film properties at UV curing chamber
10/28/2014US8872137 Dual elliptical reflector with a co-located foci for curing optical fibers
10/28/2014US8872135 Electroactive polymers for lithography
10/28/2014US8872126 Target supply device and extreme ultraviolet light generation apparatus
10/28/2014US8872123 Method of timing laser beam pulses to regulate extreme ultraviolet light dosing
10/28/2014US8872122 Method of timing laser beam pulses to regulate extreme ultraviolet light dosing
10/21/2014US8866109 Charged-particle beam irradiation device
10/21/2014US8866103 Charged particle energy analysers and methods of operating charged particle energy analysers
10/16/2014US20140306128 Terahertz radiation source mounting arrangements and methods of mounting a terahertz source
10/14/2014US8861676 Transport bin in an X-ray inspection system
10/14/2014US8860232 Electronic device having electrodes bonded with each other
10/14/2014US8859997 Charged particle beam writing apparatus and charged particle beam writing method
10/14/2014US8859994 Disinfection device and method
10/09/2014US20140299791 Target for extreme ultraviolet light source
10/09/2014US20140299789 Marking paper products
10/09/2014US20140299788 Marking paper products
10/07/2014US8853657 Intracavity loss element for power amplifier
10/07/2014US8853653 Apparatus and techniques for controlling ion implantation uniformity
10/07/2014US8853647 Electron microscope
10/02/2014WO2014156170A1 Electron beam irradiation device
10/02/2014US20140291555 Radiation generation apparatus and radiographic apparatus
10/02/2014US20140291540 Radiation generating apparatus and radiographic imaging system
10/02/2014US20140291539 Radiation generating apparatus, radiographing apparatus, and computer readable storage medium storing program
09/2014
09/30/2014US8847183 System, method and apparatus for laser produced plasma extreme ultraviolet chamber with hot walls and cold collector mirror
09/30/2014US8847181 System and method for generating extreme ultraviolet light
09/30/2014US8847180 Charged particle beam apparatus, drawing apparatus, and method of manufacturing article
09/30/2014US8847179 Treatment planning apparatus and particle therapy system
09/30/2014US8847178 Charged particle beam writing apparatus and charged particle beam writing method
09/25/2014WO2014148266A1 X-ray imaging apparatus
09/23/2014US8843859 Layout content analysis for source mask optimization acceleration
09/23/2014US8841641 Extreme ultraviolet light source apparatus
09/23/2014US8841638 Particle beam therapy system
09/18/2014WO2014143826A2 Interior energy-activation of photo-reactive species inside a medium or body
09/18/2014WO2014143522A1 Target for extreme ultraviolet light source
09/18/2014US20140272030 Interior energy-activation of photo-reactive species inside a medium or body
09/18/2014US20140264091 Beam position control for an extreme ultraviolet light source
09/18/2014US20140264090 Target for laser produced plasma extreme ultraviolet light source
09/17/2014EP2778663A1 Nondestructive inspection device and method for correcting luminance data with nondestructive inspection device
09/17/2014EP2777766A1 Particle beam treatment system, and beam position correction method therefor
09/16/2014US8835886 UV nail lamp
09/16/2014US8835885 Charged particle beam irradiation device
09/16/2014US8835883 Charged particle radiation device and soundproof cover
09/16/2014US8835882 Real time monitoring ion beam
09/16/2014US8835881 Drift correction method and pattern writing data generation method
09/16/2014US8835880 Charged particle-beam processing using a cluster source
09/16/2014US8835870 Targets for generating ions and treatment apparatuses using the targets
09/16/2014US8835868 Multi charged particle beam writing apparatus
09/16/2014US8835845 In-situ STEM sample preparation
09/16/2014US8834732 Plasma uniformity control using biased array
09/12/2014WO2014138548A1 Reconfigurable processing enclosures
09/12/2014WO2014138545A1 Array for processing materials
09/12/2014WO2014134775A1 Target device for neutron generating device, accelerator-driven neutron generating device and beam coupling method therefor
09/11/2014DE102013102236A1 Verfahren und Vorrichtung zur Herstellung von Kunststoffformkörpern aus einem Gemisch mehrerer Komponenten Method and apparatus for the production of plastic moldings from a mixture of several components
09/09/2014US8829478 Drive laser delivery systems for EUV light source
09/09/2014US8829470 Configurable charged-particle apparatus
09/09/2014US8829469 Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices
09/09/2014US8829463 Ion carpet for mass spectrometry having progressive electrodes
09/09/2014US8829461 Scanning apparatus, drawing apparatus, and method of manufacturing article
09/04/2014US20140246606 Charged particle beam irradiation apparatus
09/04/2014US20140246603 Mobile uva curing system and method for collision and cosmetic repair of vehicles
09/04/2014US20140246602 Mobile uva curing system for collision and cosmetic repair of automobiles
09/04/2014US20140246601 Scanned uv-led exposure device
09/02/2014US8824630 Method and apparatus for treating a target's partial motion range
09/02/2014US8823404 Evaluation device and evaluation method for substrate mounting apparatus and evaluation substrate used for the same
09/02/2014US8822959 Method and apparatus for optical phase error correction
09/02/2014US8822958 Radiation treatment planning system
09/02/2014US8822953 Electron beam irradiation apparatus
09/02/2014US8822947 Particle beam generating device
08/2014
08/28/2014WO2014106223A3 A nuclear fusion system for extracting energy from controlled fusion reaction
08/28/2014US20140241481 Quench tank and liquid metal loop
08/28/2014US20140239805 Dc high-voltage super-radiant free-electron based euv source
1 2 3 4 5 6 7 8 9 10 11 12 ... 92