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Patents for B81B - Micro-structural devices or systems, e.g. micro-mechanical devices (113) |
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07/29/2004 | WO2004063089A2 Recessed microstructure device and fabrication method thereof | 07/22/2004 | US20040142249 making integrated circuits using absorbent transmission masks that can be repaired | 06/24/2004 | WO2004026757A3 Controlling electromechanical behavior of structures within a microelectromechanical systems device | 06/10/2004 | WO2004009489A3 Fabrication of 3d photopolymeric devices | 05/19/2004 | EP1419102A2 Method for producing micro-electromechanical components | 04/01/2004 | WO2004026757A2 Controlling electromechanical behavior of structures within a microelectromechanical systems device | 04/01/2004 | CA2499208A1 Controlling electromechanical behavior of structures within a microelectromechanical systems device | 03/25/2004 | US20040058532 Controlling electromechanical behavior of structures within a microelectromechanical systems device | 03/04/2004 | US20040041254 Packaged microchip | 01/29/2004 | WO2004009489A2 Fabrication of 3d photopolymeric devices | 12/24/2003 | WO2003024865A8 Method for producing micro-electromechanical components | 11/27/2003 | WO2003024865A3 Method for producing micro-electromechanical components | 03/27/2003 | WO2003024865A2 Method for producing micro-electromechanical components |
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