Patents
Patents for B81B - Micro-structural devices or systems, e.g. micro-mechanical devices (113)
07/2004
07/29/2004WO2004063089A2 Recessed microstructure device and fabrication method thereof
07/22/2004US20040142249 making integrated circuits using absorbent transmission masks that can be repaired
06/2004
06/24/2004WO2004026757A3 Controlling electromechanical behavior of structures within a microelectromechanical systems device
06/10/2004WO2004009489A3 Fabrication of 3d photopolymeric devices
05/2004
05/19/2004EP1419102A2 Method for producing micro-electromechanical components
04/2004
04/01/2004WO2004026757A2 Controlling electromechanical behavior of structures within a microelectromechanical systems device
04/01/2004CA2499208A1 Controlling electromechanical behavior of structures within a microelectromechanical systems device
03/2004
03/25/2004US20040058532 Controlling electromechanical behavior of structures within a microelectromechanical systems device
03/04/2004US20040041254 Packaged microchip
01/2004
01/29/2004WO2004009489A2 Fabrication of 3d photopolymeric devices
12/2003
12/24/2003WO2003024865A8 Method for producing micro-electromechanical components
11/2003
11/27/2003WO2003024865A3 Method for producing micro-electromechanical components
03/2003
03/27/2003WO2003024865A2 Method for producing micro-electromechanical components
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