| Patents for B81B 7 - Micro-structural systems (8,983) |
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| 03/05/2015 | WO2015031473A1 Rf mems electrodes with limited grain growth |
| 03/05/2015 | WO2015030657A1 Thin capping for mems devices |
| 03/05/2015 | WO2015028450A1 Optical component |
| 03/05/2015 | US20150061695 Micromechanical component and corresponding test method for a micromechanical component |
| 03/05/2015 | US20150061455 Vibration device and method of manufacturing vibration device |
| 03/05/2015 | US20150061106 Cavity-type semiconductor package and method of packaging same |
| 03/05/2015 | US20150061046 Wafer level method of sealing different pressure levels for mems sensors |
| 03/05/2015 | US20150061045 MEMS Device |
| 03/05/2015 | US20150061044 Sequential wafer bonding |
| 03/05/2015 | US20150060956 Integrated mems pressure sensor with mechanical electrical isolation |
| 03/05/2015 | US20150060954 CMOS-MEMS Integrated Flow for Making a Pressure Sensitive Transducer |
| 03/05/2015 | US20150060756 Optical-microwave-quantum transducer |
| 03/05/2015 | US20150060688 Mems 2d air amplifier ion focusing device and manufacturing method thereof |
| 03/05/2015 | US20150059485 Micromechanical sensor system and corresponding manufacturing method |
| 03/05/2015 | DE112013002041T5 Methoden und Apparate zur Bereitstellung eines Sichtfelds für MEMS Abtastspiegel Methods and apparatus for providing a field of view for MEMS scanning mirror |
| 03/05/2015 | DE102014216742A1 MEMS-Vorrichtung MEMS device |
| 03/05/2015 | DE102014216223A1 Verkapseltes MEMS-Bauelement Encapsulated MEMS device |
| 03/05/2015 | DE102014112597A1 Vibrationsvorrichtung und Verfahren zur Herstellung einer Vibrationsvorrichtung Vibration device and method for manufacturing a vibrating device |
| 03/05/2015 | DE102014112495A1 Sensoranordnung Sensor array |
| 03/05/2015 | DE102013217349A1 Mikromechanische Sensoranordnung und entsprechendes Herstellungsverfahren Micro-mechanical sensor device and manufacturing method thereof |
| 03/05/2015 | DE102013217312A1 Kapazitives MEMS-Bauelement mit einer druckempfindlichen Membran Capacitive MEMS device having a pressure sensitive diaphragm |
| 03/05/2015 | DE102013217093A1 Verfahren zum Anpassen der Parameter eines Reglers für mikromechanische Aktoren und Vorrichtungen The method of adjusting the parameters of a controller for micromechanical actuators and devices |
| 03/03/2015 | US8970940 Display device and manufacturing method of the display device |
| 03/03/2015 | US8969981 Sensor package |
| 03/03/2015 | US8969980 Vented MEMS apparatus and method of manufacture |
| 02/26/2015 | WO2015026516A1 A microelectromechanical system with a micro-scale spring suspension system and methods for making the same |
| 02/26/2015 | WO2015026368A1 Mems devices utilizing a thick metal layer of an interconnect metal film stack |
| 02/26/2015 | US20150054097 Method for Manufacturing a MEMS Device and MEMS Device |
| 02/26/2015 | US20150054095 Capacitive micro-machined ultrasonic transducer and method of singulating the same |
| 02/26/2015 | US20150053985 Micromachine and method for manufacturing the same |
| 02/26/2015 | DE102014216777A1 Verfahren zum herstellen einer mems-vorrichtung und mems-vorrichtung A method of manufacturing a MEMS device and the MEMS device |
| 02/26/2015 | DE102013216935A1 Drehratensensor mit voreingestelltem Quadratur-Offset Rotation rate sensor with preset quadrature offset |
| 02/26/2015 | DE102013216915A1 Mikromechanischer Sensor und Verfahren zur Herstellung eines mikromechanischen Sensors Micromechanical sensor and method for manufacturing a micromechanical sensor |
| 02/26/2015 | DE102013216907A1 Mikromechanischer Sensor Micromechanical sensor |
| 02/26/2015 | DE102013216901A1 Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements Micromechanical component and process for producing a micromechanical component |
| 02/26/2015 | DE102013216898A1 Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements Micromechanical component and process for producing a micromechanical component |
| 02/25/2015 | EP2840058A1 Optical scanning unit, and apparatus including the optical scanning unit |
| 02/19/2015 | US20150048864 Low consumption logic circuit with mechanical switches |
| 02/19/2015 | US20150048463 Package device for microelectromechanical inertial sensor |
| 02/19/2015 | US20150048462 Sensor package and method of forming same |
| 02/19/2015 | US20150048461 Device with a micro- or nanoscale structure |
| 02/17/2015 | US8957497 Vertically integrated systems |
| 02/17/2015 | US8956444 Venting array and manufacturing method |
| 02/12/2015 | WO2015020881A1 Inertial and pressure sensors on single chip |
| 02/12/2015 | US20150042418 Switchable filters and design structures |
| 02/12/2015 | US20150041931 Embedded Micro Valve In Microphone |
| 02/12/2015 | US20150041929 Packaged Microphone with Multiple Mounting Orientations |
| 02/12/2015 | US20150041928 Wafer encapsulated microelectromechanical structure |
| 02/12/2015 | DE102009046831B4 Strahlungserzeugungsvorrichtung zum Erzeugen einer elektromagnetischen Strahlung mit einer einstellbaren spektralen Zusammensetzung und Verfahren zur Herstellung derselben Radiation generating means for generating an electromagnetic radiation having an adjustable spectral composition and method of manufacturing the same |
| 02/11/2015 | CN104348326A 微机电系统的可动载具结构 MEMS movable carrier structure |
| 02/11/2015 | CN104340955A 微型皮拉尼计的制备方法及其与体硅器件集成加工的方法 Preparation of micro Pirani gauge and bulk silicon device integration and processing methods |
| 02/11/2015 | CN104340953A Mems器件及其形成方法 Mems device and method for forming |
| 02/11/2015 | CN104340949A 用于制造封装器件的工艺和由此得到的封装器件 Thus obtained is used to process and package device manufacturing packaged device |
| 02/11/2015 | CN104340948A 包括机械加强盖并且具有吸气效应的封装结构 The package structure includes mechanical reinforcement cover and has a suction effect |
| 02/11/2015 | CN104340947A Mems器件的装配和封装 Mems device assembly and packaging |
| 02/11/2015 | CN104340946A 一种mems电路盖子及其制作方法 One kind of mems circuit cover its production methods |
| 02/11/2015 | CN103207021B 高性能mems热电堆红外探测器结构及其制备方法 Mems performance thermopile infrared detector structure and preparation method |
| 02/11/2015 | CN103076372B 一种电容式湿度传感器 A capacitive humidity sensor |
| 02/11/2015 | CN102509844B 一种微机械圆盘谐振器及制作方法 A micro mechanical resonator disc and production methods |
| 02/10/2015 | US8952467 Electronic device and its manufacturing method |
| 02/10/2015 | US8951836 Chip package and method for forming the same |
| 02/05/2015 | WO2015017743A1 Dvc utilizing mems resistive switches and mim capacitors |
| 02/05/2015 | WO2015016541A1 Method for manufacturing nanowire element |
| 02/05/2015 | US20150037210 Method for producing a functional unit and corresponding functional unit |
| 02/05/2015 | US20150037024 Mems iris diaphragm-based for an optical system and method for adjusting a size of an aperture thereof |
| 02/05/2015 | US20150035090 Stacked die package for mems resonator system |
| 02/05/2015 | US20150033878 Method for producing a pressure sensor and corresponding sensor |
| 02/05/2015 | DE102013214823A1 Mikrofonbauteil mit mindestens zwei MEMS-Mikrofonbauelementen Microphone component with at least two MEMS microphone devices |
| 02/04/2015 | EP2832683A2 Spin coating deposition of a thin structured layer on a substrate |
| 02/04/2015 | CN104335341A 具有布置在内插器与衬底之间的微电子装置的微电子结构 Having a microelectronic structure is arranged between the interposer and the substrate microelectronic device |
| 02/04/2015 | CN104334492A 微传感器封装件及其装配的相关方法 Related methods and micro-sensor package assembly |
| 02/04/2015 | CN104333838A 微机电系统器件 MEMS devices |
| 02/04/2015 | CN104330080A 一种新型的mems陀螺仪一体化封装 A new mems gyroscope integrated package |
| 02/04/2015 | CN104326437A 包括设有至少一个微电子或纳米电子系统的流体通道的设备以及用于实现此设备的方法 The method is provided comprising at least one microelectronic or nanofluidic channel of the electronic system, and the apparatus for implementing this |
| 02/04/2015 | CN104326436A 微电子装置及制造方法、微机电封装结构及封装方法 Microelectronic device and method for manufacturing, MEMS package structure and packaging method |
| 02/04/2015 | CN104326435A 具有流体通道的装置以及用于制造该装置的方法 Means having a fluid passageway and a method for manufacturing the same |
| 02/04/2015 | CN104326434A 一种微机械静电驱动的梳齿结构 A micro mechanical electrostatic comb drive structure |
| 02/03/2015 | US8945688 Process of forming a material having nano-particles and a material having nano-particles |
| 02/03/2015 | CA2803901C Methods and apparatus for spatial light modulation |
| 01/29/2015 | WO2015012914A2 Nano- and micro-electromechanical resonators |
| 01/29/2015 | US20150028455 Method for varied topographic mems cap process |
| 01/29/2015 | US20150028438 Mems device and process for producing same |
| 01/29/2015 | US20150028436 Apparatus Comprising and a Method for Manufacturing an Embedded MEMS Device |
| 01/29/2015 | US20150028435 Method of Packaging Integrated Circuits and a Molded Package |
| 01/29/2015 | US20150028434 Resonant transducer, manufacturing method therefor, and multi-layer structure for resonant transducer |
| 01/29/2015 | US20150028433 Encapsulation structure including a mechanically reinforced cap and with a getter effect |
| 01/29/2015 | US20150028432 Assembly and packaging of mems device |
| 01/29/2015 | DE102014109940A1 Verfahren für MEMS-Kappen-Arbeitsablauf für vielgestaltige Topographie Method for MEMS caps workflow for diverse topography |
| 01/28/2015 | EP2829510A2 Assembly and packaging of a mems device |
| 01/28/2015 | EP2829509A1 Device comprising a fluidic channel provided with at least a micro or nanoelectronic system, and method of manufacturing such a device |
| 01/28/2015 | CN204129000U 一种mems气体传感器 One kind of gas sensor mems |
| 01/28/2015 | CN204128996U 一种mems气体传感器 One kind of gas sensor mems |
| 01/28/2015 | CN204125162U 封装器件和电子设备 Packaged devices and electronic equipment |
| 01/28/2015 | CN204125161U 一种具有绝热沟槽的mems硅基微热板 A kind of insulation trench silicon mems micro-hotplate |
| 01/28/2015 | CN104310301A 一种集成微垫片的mems可调光衰减器芯片及其制作方法 An integrated micro pads mems variable optical attenuator chip and its manufacturing method |
| 01/28/2015 | CN104310300A 集成像元级聚光透镜的红外探测器及其制备方法 Pixel-level condenser lens integrated infrared detector and its preparation method |
| 01/28/2015 | CN104310299A 用于后侧绝对压力传感器的罩结合结构和方法 Cover for the rear side of the absolute pressure sensor combined with the structure and methods |
| 01/28/2015 | CN103149684B 可双向扭转的交错梳齿静电驱动可变光衰减器及制备方法 Two-way interleaved comb static torsional driving variable optical attenuator and preparation methods |
| 01/28/2015 | CN102583217B 微机电系统元件及用于其中的防止变形结构及其制作方法 MEMS components and which prevents the deformation structure and method for making |
| 01/28/2015 | CN101832831B 一种压阻传感器芯片及其制作方法 One kind of piezoresistive sensor chip and its manufacturing method |