| Patents for B81B 5 - Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements (874) |
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| 02/26/2015 | US20150055205 Mems display incorporating extended height actuators |
| 02/24/2015 | US8960230 Valve, in particular for a component in microfluid technology |
| 02/05/2015 | US20150037024 Mems iris diaphragm-based for an optical system and method for adjusting a size of an aperture thereof |
| 02/04/2015 | CN104329484A 具有增强的抗污性的微型阀 With enhanced stain resistance microvalve |
| 02/03/2015 | CA2803901C Methods and apparatus for spatial light modulation |
| 01/28/2015 | CN104321271A 微流体表面处理装置和方法 Microfluidic surface treatment apparatus and method |
| 01/22/2015 | DE112013002173T5 Mikrofluldik-Oberflächen-Verarbeitungseinheit und Verfahren Mikrofluldik-surface processing unit and method |
| 01/22/2015 | DE102014109908A1 MEMS-Vorrichtungen, Schnittstellenschaltungen und Verfahren zu deren Herstellen MEMS devices, interface circuits and processes for preparing |
| 01/21/2015 | CN104291262A 具有嵌入式声道的电容性感测结构 Capacitive sensing structure with embedded channels |
| 01/14/2015 | EP2823351A1 A mems iris diaphragm for an optical system and method for adjusting a size of an aperture thereof |
| 01/08/2015 | US20150009583 Dynamic laser beam shaping methods and systems |
| 11/27/2014 | US20140348513 Optical assembly for optical communication systems |
| 10/07/2014 | US8853804 Tilting actuator with close-gap electrodes |
| 10/02/2014 | WO2014155343A1 Peristaltic pump microfluidic separator |
| 09/25/2014 | WO2014153284A1 Integrated apertured micromirror and applications thereof |
| 09/25/2014 | US20140285905 Miniaturized optical zoom lens system |
| 09/23/2014 | CA2584145C Piano mems with hidden hinge |
| 09/11/2014 | US20140251009 System and method for reducing offset variation in multifunction sensor devices |
| 09/04/2014 | DE102013203656A1 Mikrofluidisches Drehventil Microfluidic rotary valve |
| 08/28/2014 | DE102013203293A1 Vorrichtung und Verfahren zum Leiten einer Flüssigkeit durch einen ersten oder zweiten Auslasskanal Apparatus and method for conducting a liquid through a first or second outlet duct |
| 08/14/2014 | US20140225905 Interferometric optical modulator with broadband reflection characteristics |
| 07/29/2014 | US8789438 Space curve mesh driving pair and polyhedral space curve mesh transmission |
| 07/17/2014 | WO2014109984A1 Electromechanical systems having sidewall beams |
| 07/09/2014 | EP2751540A1 Centrifugally-enhanced capture method and device |
| 06/12/2014 | WO2014088977A1 Sensor device comprising inertial sensor modules using moving-gate transducers and a μετηd of manufacturing such inertial sensor modules |
| 06/11/2014 | CN103857522A Commutator material, method for manufacturing same, and micromotor using same |
| 04/23/2014 | CN102395424B Transportation of object of micro-size and retrieval of mechanical work by means of constant electric field |
| 04/15/2014 | CA2472029C Method, apparatus and article for microfluidic control via electrowetting, for chemical, biochemical and biological assays and the like |
| 04/10/2014 | WO2014053003A1 Actuator with electromechanical friction control |
| 04/08/2014 | US8691592 Mechanically actuated diagnostic device |
| 04/03/2014 | WO2014047737A1 Microfluidic chip for multi-analyte detection |
| 02/27/2014 | US20140057104 Process for Fabricating High-Precision Objects by High-Resolution Lithography and Dry Deposition and Objects thus Obtained |
| 01/30/2014 | US20140026661 Mems device |
| 01/28/2014 | US8638179 Micromechanical resonating devices and related methods |
| 01/21/2014 | CA2679219C Mems actuators and switches |
| 01/14/2014 | US8631511 Method and apparatus for micromachines, microstructures, nanomachines and nanostructures |
| 01/11/2014 | CA2820181A1 Microfluidic structure, microfluidic device having the same and method of controlling the microfluidic device |
| 01/09/2014 | DE102013212915A1 Inertial sensor Inertial sensor |
| 01/03/2014 | WO2014001935A1 Microfluidic surface processing device and method |
| 12/27/2013 | WO2013191618A1 Precise definition of transducer electrodes |
| 12/24/2013 | CA2598825C Methods and apparatus for spatial light modulation |
| 12/19/2013 | WO2013188662A1 Teeter-totter type mems accelerometer with electrodes on circuit wafer |
| 12/05/2013 | DE102012010549A1 Verfahren zur Fixierung einer beweglichen Komponente eines mikromechanischenBauelementes Method for fixing a movable component of a micromechanical component |
| 12/04/2013 | CN103430340A Microelectromechanical system device including metal proof mass and piezoelectric component |
| 11/20/2013 | CN103395738A Bayonet-lock-free blocking mechanism depending on backseat centrifugal compound environment and used for microstructure |
| 11/12/2013 | CA2714788C Merged-mask micro-machining process |
| 10/10/2013 | DE102012221835B3 Normal-closed non-return valve for micro-fluidic component e.g. micro-pump of polymeric layer system e.g. lab-on-chip system, has seal surface formed between intake and increased roughness surface of valve element to close main portion |
| 09/25/2013 | EP2642329A2 Conductive bus structure for interferometric modulator array |
| 09/12/2013 | WO2013133767A1 A mems iris diaphragm for an optical system and method for adjusting a size of an aperture thereof |
| 09/12/2013 | DE112010005887T5 Mikrofluidische Vorrichtung zum Modifizieren eines Fluidflusses und mikrofluidisches System mit der mikrofluidischen Vorrichtung Microfluidic device for modifying fluid flow and microfluidic system with the microfluidic device |
| 09/11/2013 | CN103288036A Micromechanical sensor apparatus with a movable gate, and corresponding production process |
| 09/10/2013 | CA2468132C Electrode configuration for piano mems micromirror |
| 08/29/2013 | DE102012202783A1 Mikromechanische Sensorvorrichtung mit beweglichem Gate und entsprechendes Herstellungsverfahren Micromechanical sensor device with movable gate and method of manufacture |
| 07/18/2013 | WO2013106714A1 Fluid regulating microvalve assembly for fluid consuming cells with spring-like shape-retaining aperture cover |
| 07/18/2013 | WO2013104828A1 A vibration tolerant accelaration sensor structure |
| 07/16/2013 | CA2455651C Bubble-actuated valve with latching |
| 07/03/2013 | CN103183306A Microelectromechanical system device with electrical interconnections and method for fabricating the same |
| 06/26/2013 | CN103180239A Piezo-electric based micro-electro-mechanical lens actuation system |
| 06/13/2013 | WO2013082644A1 Centrifugal microfluidic device |
| 06/13/2013 | CA2858160A1 Centrifugal microfluidic device |
| 05/16/2013 | WO2013069689A1 Commutator material, method for manufacturing same, and micromotor using same |
| 05/15/2013 | EP2590890A1 Piezo-electric based micro-electro-mechanical lens actuation system |
| 05/02/2013 | DE102012110416A1 Siliziumbasierte Multiplexereinrichtungen für optische Leitungen Silicon-based multiplexing for optical cables |
| 05/02/2013 | DE102011085566A1 Mikromechanischer Schalter The micromechanical switch |
| 05/01/2013 | EP2587266A1 A method for the micromechanical measurement of acceleration and a micromechanical acceleration sensor |
| 05/01/2013 | CN101033057B Microstructure, semiconductor device, and manufacturing method of the microstructure |
| 04/24/2013 | CN102076601B Mems device with independent rotation in two axes of rotation |
| 04/11/2013 | DE102008013116B4 Verfahren zur Erzeugung einer mikromechanischen Struktur Method for producing a micromechanical structure |
| 04/09/2013 | CA2468139C Electrical cross-talk shields for mems micromirrors |
| 03/27/2013 | CN102046514B Device with miniature electromechanical system sensor and preparation method thereof |
| 03/13/2013 | CN102963858A Micro-electromechanical device and manufacturing method thereof |
| 03/07/2013 | WO2013029153A1 Centrifugally-enhanced capture method and device |
| 03/07/2013 | CA2847215A1 Centrifugally-enhanced capture method and device |
| 02/27/2013 | CN101884160B Flat-plate lamination-type conductive polymer actuator and flat-plate lamination-type conductive polymer actuator device as well as operating method thereof |
| 02/19/2013 | US8378434 Tilting actuator with close-gap electrodes |
| 02/13/2013 | CN1762786B System and method for protecting microelectromechanical systems array using structurally reinforced back-plate |
| 01/03/2013 | US20130005955 Micro Rotary Machine and Methods for Using Same |
| 01/02/2013 | EP2539114A1 Multi degree-of-freedom piezoelectric micro-actuator with an energy efficient isolation structure |
| 12/26/2012 | CN102844263A Electromagnetically actuated micro-shutter |
| 11/29/2012 | WO2012125070A9 Micro- and nanodrive |
| 11/27/2012 | US8316643 Method of driving and drive mechanism utilizing surface tension difference convection generated in two fluids having an interface |
| 11/14/2012 | CN101374757B Fluid-controlled structure, apparatus, method, and method for configuring instrument |
| 11/14/2012 | CN101279712B Method for generating a micromechanical structure |
| 11/08/2012 | DE102005010940B4 Elektrostatisch in Schwingungen versetzbare Anordnung Electrostatic oscillations in relocatable assembly |
| 10/18/2012 | US20120261013 Microfluidic system including a bubble valve for regulating fluid flow through a microchannel |
| 10/04/2012 | DE102011006595A1 Micromechanical optical component e.g. micro mirror actuator device has lever elements that are connected to piezoelectric element such that voltage is applied to piezoelectric element and lever elements are moved to move mirror element |
| 09/20/2012 | WO2012125070A1 Micro- and nanodrive |
| 09/19/2012 | CN101304841B Cutting tool |
| 09/05/2012 | CN101858929B Capacitive micro-acceleration sensor with symmetrically combined elastic beam structure and production method thereof |
| 07/19/2012 | DE102010038547B4 Bildstabilisierungs- und -aufnahmesensor für eine Bildaufnahmevorrichtung eines Operationsmikroskops Image stabilization and -aufnahmesensor for an image pickup device of a surgical microscope |
| 07/11/2012 | CN102556935A Artificial hollow micro-nano motor and preparation method thereof |
| 06/28/2012 | WO2012084033A1 Micropump assembly |
| 05/24/2012 | DE102010061909A1 Fluidischer Aktor mit verformbarer Verschlussanordnung und langer Lagerfähigkeit Fluidic actuator deformable closure assembly and long shelf life |
| 05/10/2012 | WO2012035429A3 Remotely controlled drug delivery systems |
| 03/28/2012 | CN102395424A Transportation of object of micro-size and retrieval of mechanical work by means of constant electric field |
| 03/22/2012 | WO2012036627A1 A microfluidic device for altering a fluid flow and a microfluidic system including the microfluidic device |
| 03/08/2012 | WO2011139796A3 Self-folding sub-centimeter structures |
| 02/22/2012 | CN101117207B 对于微型装置的抗粘连材料的原位应用 For the in situ application of anti-adhesion material of the micro-device |
| 02/09/2012 | US20120036603 Method and apparatus for micromachines, microstructures, nanomachines and nanostructures |
| 02/07/2012 | US8111118 Multi-stable micro electromechanical switches and methods of fabricating same |