| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 03/05/2015 | WO2015030298A1 Substrate structure and method of manufacturing same |
| 03/05/2015 | WO2015030297A1 Hybrid organic/inorganic thin films and method of manufacturing same |
| 03/05/2015 | WO2015030191A1 Microwave plasma processing device |
| 03/05/2015 | WO2015030178A1 Barrier laminate, gas barrier film and device |
| 03/05/2015 | WO2015030167A1 Susceptor |
| 03/05/2015 | WO2015030073A1 Coated tool |
| 03/05/2015 | WO2015029918A1 Method for producing ceramic molded article |
| 03/05/2015 | WO2015029859A1 Gas barrier film and method of manufacturing gas barrier film |
| 03/05/2015 | WO2015029795A1 Method for producing gas barrier film |
| 03/05/2015 | WO2015029786A1 Susceptor |
| 03/05/2015 | WO2015029777A1 Plasma processing device and method for monitoring plasma processing device |
| 03/05/2015 | WO2015029732A1 Gas barrier film and process for manufacturing gas barrier film |
| 03/05/2015 | WO2015029090A1 Plasma processing device and plasma processing method |
| 03/05/2015 | US20150064908 Substrate processing apparatus, method for processing substrate and method for manufacturing semiconductor device |
| 03/05/2015 | US20150064838 Self-assembled organic monolayer hybrid materials and methods thereof |
| 03/05/2015 | US20150064471 Seed for Metal Dichalcogenide Growth by Chemical Vapor Deposition |
| 03/05/2015 | US20150064452 Coated body and method for coating a body |
| 03/05/2015 | US20150064451 Coating, coating method, and coated article |
| 03/05/2015 | US20150064431 Refractory Coatings For Cutting Tools |
| 03/05/2015 | US20150064364 Deposition System And Method Of Forming A Metalloid-Containing Material Therewith |
| 03/05/2015 | US20150064363 Localized atmospheric laser chemical vapor deposition |
| 03/05/2015 | US20150064340 Fixed and portable coating apparatuses and methods |
| 03/05/2015 | US20150061191 Microwave plasma reactors and substrates for synthetic diamond manufacture |
| 03/05/2015 | US20150060267 Diamond electrodes for electrochemical devices |
| 03/05/2015 | US20150060110 Methods for shielding electronic components from moisture |
| 03/05/2015 | US20150059974 Method of processing a substrate support assembly |
| 03/05/2015 | US20150059910 Plasma cvd apparatus, method for forming film and dlc-coated pipe |
| 03/05/2015 | US20150059648 High-conductance, non-sealing throttle valve with projections and stop surfaces |
| 03/05/2015 | US20150059643 Type of fine metal mask (ffm) used in oled production and the method of manufacturing it |
| 03/05/2015 | US20150059640 Method for reducing growth of non-uniformities and autodoping during column iii-v growth into dielectric windows |
| 03/05/2015 | DE102014109652A1 Feuerfeste Beschichtungen für Schneidwerkzeuge Refractory coatings for cutting tools |
| 03/05/2015 | DE102013217627A1 Wärmedämmschichtsystem mit Korrosions- und Erosionsschutz Thermal barrier coating system with corrosion and erosion protection |
| 03/05/2015 | DE102013217441A1 Substratträger Substrate carrier |
| 03/05/2015 | DE102013014335A1 Verfahren und vorrichtung zum beschichten eines reaktorgefässes sowie ein reaktorgefäss A method and apparatus for coating a reactor vessel and a reactor vessel |
| 03/04/2015 | EP2843083A2 Piston ring for internal combustion engine |
| 03/04/2015 | EP2843080A1 Method for treating surface of diamond thin film, method for forming transistor, and sensor device |
| 03/04/2015 | EP2841621A1 Atomic layer deposition method and apparatuses |
| 03/04/2015 | EP2841620A1 Hood for metal-oxide vapor coating glass containers |
| 03/03/2015 | US8969823 Microchannel plate detector and methods for their fabrication |
| 03/03/2015 | US8969768 Applicator and apparatus for heating samples by microwave radiation |
| 03/03/2015 | US8969753 Plasma treatment installation |
| 03/03/2015 | US8969234 Method for preparing fuel cell electrode catalyst by simultaneous evaporation, method for preparing fuel cell electrode comprising catalyst prepared thereby and fuel cell comprising the same |
| 03/03/2015 | US8969183 Method for producing thin layers of crystalline or polycrystalline materials |
| 03/03/2015 | US8968866 Surface-coated cutting tool |
| 03/03/2015 | US8968839 Method for producing surface-treated metallic material |
| 03/03/2015 | US8968838 Plasma processing in a capacitively-coupled reactor with trapezoidal-waveform excitation |
| 03/03/2015 | US8968837 Method for the plasma-enhanced treatment of internal surfaces of a hollow body, fluid separator, and use thereof |
| 03/03/2015 | US8968829 Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
| 03/03/2015 | US8968823 Method of manufacturing a light emitting device |
| 03/03/2015 | US8968527 Micro-fluid ejection devices, methods for making micro-fluid ejection heads, and micro-fluid ejection head having high resistance thin film heaters |
| 03/03/2015 | US8968514 Gas distributing device and substrate processing apparatus including the same |
| 03/03/2015 | US8968513 Plasma processing apparatus |
| 03/03/2015 | US8968512 Temperature adjusting mechanism and semiconductor manufacturing apparatus using temperature adjusting mechanism |
| 03/03/2015 | US8968477 Deposition mask and method for manufacturing organic light emitting display using the same |
| 03/03/2015 | US8968476 Atomic layer deposition apparatus |
| 03/03/2015 | US8968475 Substrate processing apparatus |
| 03/03/2015 | US8968474 Substrate processing apparatus and method of disassembling and assembling the same |
| 03/03/2015 | US8968473 Stackable multi-port gas nozzles |
| 03/03/2015 | US8968472 Valve and processing apparatus provided with the same |
| 03/03/2015 | US8967082 Plasma processing apparatus and gas supply device for plasma processing apparatus |
| 03/03/2015 | US8967081 Device and process for chemical vapor phase treatment |
| 03/03/2015 | US8967080 Top plate of microwave plasma processing apparatus, plasma processing apparatus and plasma processing method |
| 03/03/2015 | US8966729 Method for manufacturing piezoelectric actuator |
| 02/28/2015 | CA2860822A1 Refractory coatings for cutting tools |
| 02/26/2015 | WO2015027123A1 Reflection shadow mask alignment using coded apertures |
| 02/26/2015 | WO2015026087A1 Plasma chemical vapour deposition device |
| 02/26/2015 | WO2015025903A1 Coated cutting tool |
| 02/26/2015 | WO2015025783A1 Device for producing gas barrier film and method for producing gas barrier film |
| 02/26/2015 | WO2015025782A1 Device for producing gas barrier film and method for producing gas barrier film |
| 02/26/2015 | WO2015025510A1 Photoelectric conversion element and method for manufacturing photoelectric conversion element |
| 02/26/2015 | WO2015024762A1 Substrate treatment device |
| 02/26/2015 | US20150057516 Fully wireless continuously wearable sensor for measurement of eye fluid |
| 02/26/2015 | US20150056791 Depression filling method and processing apparatus |
| 02/26/2015 | US20150056787 Device for depositing a layer on a semiconductor wafer by means of vapour deposition |
| 02/26/2015 | US20150056447 Enhancing the adhesion or attachment of carbon nanotubes to the surface of a material via a carbon layer |
| 02/26/2015 | US20150056386 Device for depositing carbon film and method for depositing carbon film |
| 02/26/2015 | US20150056384 Method for the deposition of a ruthenium containing film using arene diazadiene ruthenium(0) precursors |
| 02/26/2015 | US20150056373 Deposition method and deposition apparatus |
| 02/26/2015 | US20150055030 Touch surface for an electronic device and method for manufacturing the same |
| 02/26/2015 | US20150054398 Electrode material with low work function and high chemical stability |
| 02/26/2015 | US20150053641 Process for making high multiplex arrays |
| 02/26/2015 | US20150053553 Plasma processing apparatus |
| 02/26/2015 | US20150053348 Plasma processing apparatus |
| 02/26/2015 | US20150053137 Carburetor, carburetor for mocvd using same, center rod for use in the carburetor or carburetor7 for mocvd, method for dispersing carrier gas, and method for vaporizing carrier gas |
| 02/26/2015 | US20150053136 Vertical Furnace for Improving Wafer Uniformity |
| 02/26/2015 | US20150053135 Strap for plasma processing apparatus and plasma processing apparatus having the same |
| 02/26/2015 | US20150053134 Source container and vapour-deposition reactor |
| 02/26/2015 | DE112013002718T5 Oberflächenbehandlungsverfahren und Beschichtungsmittel Surface treatment method and coating agents |
| 02/26/2015 | DE112010002199B4 Brausekopf für eine Vakuumschichtabscheidungsvorrichtung Shower head for a vacuum layer deposition apparatus |
| 02/26/2015 | DE102013109210A1 Evakuierbare Kammer, insbesondere mit einem Spülgas spülbare Beladeschleuse Evacuated chamber, flushable especially with a purge gas load lock |
| 02/26/2015 | DE102013109155A1 Substratbehandlungsvorrichtung The substrate processing apparatus |
| 02/26/2015 | DE102013014068A1 Gleitkontakt für Hoch- und Ultrahochvakuumanwendungen Sliding for high and ultra high vacuum applications |
| 02/26/2015 | DE102010045670B4 Wärmereflektor Heat reflector |
| 02/25/2015 | EP2840164A1 Compositions and methods using same for flowable oxide deposition |
| 02/25/2015 | EP2839907A1 Surface-coated cutting tool |
| 02/25/2015 | EP2839055A1 Vapor deposition apparatus and method associated |
| 02/24/2015 | US8963544 Signal transmission device |
| 02/24/2015 | US8963052 Method for controlling spatial temperature distribution across a semiconductor wafer |
| 02/24/2015 | US8963051 Heat treatment apparatus and method of manufacturing substrates |
| 02/24/2015 | US8962876 Thermally stable volatile film precursors |