| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 01/27/2015 | US8940359 Method of producing a microacoustic component |
| 01/27/2015 | US8940140 Thin film application device and method for coating small aperture vacuum vessels |
| 01/27/2015 | US8940128 Plasma processing apparatus |
| 01/27/2015 | US8940097 Vertical heat treatment apparatus |
| 01/27/2015 | US8940096 Vertical thermal processing apparatus and substrate supporter |
| 01/27/2015 | US8939555 Compact organic vapor jet printing print head |
| 01/27/2015 | US8939108 Processing system |
| 01/27/2015 | CA2686445C Vacuum treatment installation and vacuum treatment method |
| 01/22/2015 | WO2015010036A1 Method for manufacturing barrier films |
| 01/22/2015 | WO2015009997A1 Hexacoordinate silicon-containing precursors for ald/cvd silicon-containing film applications |
| 01/22/2015 | WO2015009811A1 Sheet coating method |
| 01/22/2015 | WO2015009257A1 A method for obtaining bacteria anti-fouling biomaterial |
| 01/22/2015 | WO2015009038A1 Fluidized bed atomic layer deposition device for manufacturing nanocoating particles |
| 01/22/2015 | WO2015007660A1 A deposition of nanoparticles of a metal or of an alloy of metals, on a substrate, process for the preparation thereof and uses of same |
| 01/22/2015 | WO2015007653A1 Plasma-chemical coating apparatus |
| 01/22/2015 | US20150024540 Device and Method for Producing Thin Films |
| 01/22/2015 | US20150024330 Apparatus and method for controlling heating of base within chemical vapour deposition chamber |
| 01/22/2015 | US20150024225 Screen printing film and surface modification method of the same |
| 01/22/2015 | US20150024152 Metal components with inert vapor phase coating on internal surfaces |
| 01/22/2015 | US20150024148 Remote fluorination of fibrous filter webs |
| 01/22/2015 | US20150024147 Plasma-enhanced chemical vapor deposition apparatus and method of manufacturing display apparatus using the same |
| 01/22/2015 | US20150024143 Film deposition apparatus, film deposition method, and computer readable storage medium |
| 01/22/2015 | US20150024142 Magnetic recording medium and method for producing protective film thereof |
| 01/22/2015 | US20150022731 Touch screen panel and fabricating method thereof |
| 01/22/2015 | US20150021775 Method for manufacturing semiconductor device, semiconductor device, and apparatus for producing semiconductor |
| 01/22/2015 | US20150020847 Cleaning method for thin-film processing applications and apparatus for use therein |
| 01/22/2015 | US20150020737 Atomic Layer Deposition Using Radicals Of Gas Mixture |
| 01/22/2015 | US20150020734 Structure for improved gas activation for cross-flow type thermal cvd chamber |
| 01/22/2015 | US20150020686 Heat Resistant Hydrogen Separation Membrane and Method for Manufacturing Same |
| 01/22/2015 | DE102013107659A1 Plasmachemische Beschichtungsvorrichtung Plasma-chemical coating apparatus |
| 01/22/2015 | DE102013019108B3 Bereitstellung einer korrosionsgeschützten Kraftfahrzeug-Abgasanlagenkomponente Providing a corrosion resistant automotive exhaust system component |
| 01/22/2015 | DE102013012082A1 Vorrichtung zum thermischen Behandeln eines Halbleitersubstrates, insbesondere zum Aufbringen einer Beschichtung Apparatus for the thermal treatment of a semiconductor substrate, in particular for applying a coating |
| 01/21/2015 | EP2826884A1 Metal components with inert vapor phase coating on internal surfaces |
| 01/21/2015 | EP2825687A2 Chemical vapor deposition process for depositing zinc oxide coatings, method for forming a conductive glass article and the coated glass articles produced thereby |
| 01/21/2015 | EP2825686A1 Coated body and method for coating a body |
| 01/21/2015 | CN204111865U 一种化学气相沉积装置 A chemical vapor deposition apparatus |
| 01/21/2015 | CN204111864U 一种腐蚀清洗装置 One corrosion cleaning device |
| 01/21/2015 | CN204111858U 一种磁控溅射设备传送系统 One kind of magnetron sputtering device transfer system |
| 01/21/2015 | CN1966762B 汽化器、使用汽化器的各种装置以及汽化方法 Vaporizer, vaporizer using various apparatus and method of vaporization |
| 01/21/2015 | CN104303078A 用于光学ir部件的dlc涂层以及具有dlc涂层的光学ir部件 Ir dlc coating for optical components and an optical member having dlc coating ir |
| 01/21/2015 | CN104302807A 用于化学汽相沉积的具有铁磁流体密封件的转盘反应器 For chemical vapor deposition reactor having a turntable ferrofluid seal |
| 01/21/2015 | CN104302589A 光学涂覆方法、设备和产品 Optical coating methods, equipment and products |
| 01/21/2015 | CN104300033A 一种多层氮化硅膜的制备方法 Method for preparing a multilayer film of silicon nitride |
| 01/21/2015 | CN104294272A 一种提高硬质合金刀具表面金刚石涂层附着力的方法 An enhanced diamond carbide surface coating adhesion method |
| 01/21/2015 | CN104294271A 一种在线预涂覆烃类裂解炉管的方法 An online pre-coated hydrocarbon cracking furnace tube method |
| 01/21/2015 | CN104294237A 一种薄膜的制备设备及方法 A thin film preparation apparatus and method |
| 01/21/2015 | CN104294236A 在内表面上具有惰性气相涂层的金属部件 The inner member having an inert metal coating on the surface of the gas phase |
| 01/21/2015 | CN104294233A 经表面处理的形状记忆材料及其制造方法 Surface treated shape memory material and manufacturing method thereof |
| 01/21/2015 | CN104291325A 一种石墨烯透明薄膜的制备方法 One kind of graphene transparent film production method |
| 01/21/2015 | CN103387418B 在石墨材料上将热分解氮化硼涂布的方法以及用该方法得到的被覆物 In the graphite material will be thermally decomposed boron nitride coating and the coating method was obtained by the method |
| 01/21/2015 | CN103228827B 外延碳化硅单晶基板的制造方法 Manufacture of epitaxial SiC single crystal substrate |
| 01/21/2015 | CN103132052B 一种用于反应源瓶的取放装置 A reaction flask source device to take place |
| 01/21/2015 | CN103060745B 对金属表面进行镀钛、渗钛从而形成合金的表面处理工艺 Titanium metal surface, infiltration titanium alloy to form a surface treatment process |
| 01/21/2015 | CN103018811B 一种利用原子层沉积技术制备褶皱负滤光片的方法 A deposition technique for preparing fold negative filter method utilizing atomic layer |
| 01/21/2015 | CN103014664B 化学气相沉积装置 Chemical vapor deposition apparatus |
| 01/21/2015 | CN102994976B 多元衬底、基于多元衬底的层数连续可调的石墨烯、及其制备方法 Multiple substrate, based on multi-layer substrate continuously tunable graphene, its preparation method |
| 01/21/2015 | CN102933742B 织构化的氧化铝层 Textured alumina layer |
| 01/21/2015 | CN102212798B 适应热膨胀的喷头装备 Accommodate thermal expansion of the nozzle equipment |
| 01/21/2015 | CN102134709B 成膜装置 Film forming apparatus |
| 01/20/2015 | US8937335 Gallium nitride devices with aluminum nitride intermediate layer |
| 01/20/2015 | US8937023 Method of manufacturing porous insulating film |
| 01/20/2015 | US8937022 Method of manufacturing semiconductor device, substrate processing method and substrate processing apparatus |
| 01/20/2015 | US8937012 Production method for semiconductor device |
| 01/20/2015 | US8937001 Patterning of nanostructures |
| 01/20/2015 | US8937000 Chemical vapor deposition with elevated temperature gas injection |
| 01/20/2015 | US8936829 Method of aftertreatment of amorphous hydrocarbon film and method for manufacturing electronic device by using the aftertreatment method |
| 01/20/2015 | US8936799 Pigments with improved sparkling effect |
| 01/20/2015 | US8936696 Method and apparatus for shaping a magnetic field in a magnetic field-enhanced plasma reactor |
| 01/20/2015 | US8935990 Low contamination components for semiconductor processing apparatus and methods for making components |
| 01/15/2015 | WO2015006745A1 Refurbishable coated cmp conditioner, method of making same and integrated system for use in chemical mechanical planarization |
| 01/15/2015 | WO2015006330A1 Methods of making aluminide coatings by co-deposition of aluminum and one or more refractory elements and their use in thermal barrier systems to protect metal-containing substrates in high temperature environments |
| 01/15/2015 | WO2015005421A1 Moisture-proof substrate production method, moisture-proof substrate, polarizing plate using moisture-proof substrate, and liquid crystal display panel |
| 01/15/2015 | WO2015005202A1 Semiconductor device and manufacturing method for same, crystal, and manufacturing method for same |
| 01/15/2015 | WO2015005064A1 Method for producing silicon carbide semiconductor device, and silicon carbide semiconductor device |
| 01/15/2015 | WO2015004021A1 Method and device for coating cutting tools having a rod-like basic shape |
| 01/15/2015 | WO2015003343A1 Superlubricity basic structure, multi-stage superlubricity structure, device with structure, and forming method therefor |
| 01/15/2015 | US20150017813 Semiconductor Device Manufacturing Method and Substrate Treatment System |
| 01/15/2015 | US20150017759 Method for producing multiple-surface imposition vapor deposition mask, multiple-surface imposition vapor deposition mask obtained therefrom, and method for producing organic semiconductor element |
| 01/15/2015 | US20150017349 Polycrystalline silicon rod manufacturing method |
| 01/15/2015 | US20150017348 Ald of metal-containing films using cyclopentadienyl compounds |
| 01/15/2015 | US20150017347 Method for producing film with coating |
| 01/15/2015 | US20150017344 Thin film formation |
| 01/15/2015 | US20150017339 Substrate Structure Grown By Plasma Deposition |
| 01/15/2015 | US20150017319 Method and system to reduce outgassing in a reaction chamber |
| 01/15/2015 | US20150014600 Method for manufacturing high quality graphene by heating carbon-based self-assembly monolayers |
| 01/15/2015 | US20150013909 Substrate processing apparatus including auxiliary gas supply port |
| 01/15/2015 | US20150013793 Flow control features of cvd chambers |
| 01/15/2015 | US20150013608 Ceramic heater |
| 01/15/2015 | US20150013607 In-situ deposition of film stacks |
| 01/15/2015 | US20150013595 Silicon carbide crystal growth in a cvd reactor using chlorinated chemistry |
| 01/15/2015 | US20150013577 Annular structure having excellent heat insulating and heat releasing properties |
| 01/15/2015 | US20150013481 Micro-scale pendulum |
| 01/15/2015 | DE102014011277A1 Verfahren zur Beschichtung zumindest eines Bauteils einer Fahrzeugleuchte und Fahrzeugleuchte A method of coating at least a component of a vehicle lamp and light vehicle |
| 01/15/2015 | DE102013213454B3 Werkzeug zum Einsatz beim Aluminiumguss Tool for use in aluminum casting |
| 01/15/2015 | DE102013107375A1 Verfahren und Vorrichtung zur Beschichtung von Schneidwerkzeugen mit stabförmiger Grundform Method and apparatus for coating of cutting tools with rod-shaped basic form |
| 01/14/2015 | EP2824510A1 Mask and method for forming the same |
| 01/14/2015 | EP2824223A1 Substrate, substrate with thin film, semiconductor device, and method of manufacturing semiconductor device |
| 01/14/2015 | EP2823919A1 Coated surface cutting tool and manufacturing method therefor |
| 01/14/2015 | EP2823736A1 Container with effervescent action |
| 01/14/2015 | EP2823083A1 Methods for making silicon containing films on thin film transistor devices |