| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 11/25/2014 | US8894723 Formation of a lithium comprising structure on a substrate by ALD |
| 11/20/2014 | US20140342573 Method for manufacturing semiconductor device, method for processing substrate, substrate processing apparatus and recording medium |
| 11/20/2014 | US20140342555 Deposition chambers with uv treatment and methods of use |
| 11/20/2014 | US20140342474 Temperature detecting apparatus, substrate processing apparatus and method of manufacturing semiconductor device |
| 11/20/2014 | US20140342122 Large area optical quality synthetic polycrystalline diamond window |
| 11/20/2014 | US20140342102 Small Feature Size Fabrication Using a Shadow Mask Deposition Process |
| 11/20/2014 | US20140342101 Method for preparing the low temperature poly-silicon film |
| 11/20/2014 | US20140338602 Plasma processing apparatus |
| 11/20/2014 | US20140338600 Exhausting apparatuses and film deposition facilities including the same |
| 11/20/2014 | US20140338591 Converging mirror furnace |
| 11/18/2014 | US8891053 Lithographic apparatus, method of manufacturing an article for a lithographic apparatus and device manufacturing method |
| 11/18/2014 | US8890208 Group III nitride epitaxial substrate for semiconductor device, semiconductor device, and process for producing group III nitride epitaxial substrate for semiconductor device |
| 11/18/2014 | US8889568 Method and apparatus for producing silicon nitride film |
| 11/18/2014 | US8889567 Apparatus and methods for low K dielectric layers |
| 11/18/2014 | US8889566 Low cost flowable dielectric films |
| 11/18/2014 | US8889551 Depositing device and method for manufacturing organic light emitting diode display using the same |
| 11/18/2014 | US8889545 Method of manufacturing a semiconductor device |
| 11/18/2014 | US8889533 Method of manufacturing semiconductor device, method of manufacturing substrate and substrate processing apparatus |
| 11/18/2014 | US8889294 Negative electrode material for secondary battery having lithium-doped silicon-silicon oxide composite, method for manufacturing negative electrode, and lithium secondary battery |
| 11/18/2014 | US8889251 Alkali resistant optical coatings for alkali lasers and methods of production thereof |
| 11/18/2014 | US8889235 Dielectric barrier deposition using nitrogen containing precursor |
| 11/18/2014 | US8889226 Method of bonding a metal to a substrate |
| 11/18/2014 | US8889225 Chemical vapor deposition of fluorocarbon polymers |
| 11/18/2014 | US8889224 Method of forming parylene film |
| 11/18/2014 | US8889223 Physical vapor deposition apparatus and physical vapor deposition method |
| 11/18/2014 | US8889214 Deposition amount measuring apparatus, depositing apparatus including the same, and method for manufacturing light emitting display |
| 11/18/2014 | US8888951 Plasma processing apparatus and electrode for same |
| 11/18/2014 | US8888949 Plasma processing equipment and gas distribution apparatus thereof |
| 11/18/2014 | US8888920 Imprint system, imprint method, and non-transitory computer storage medium |
| 11/18/2014 | US8888919 Wafer carrier with sloped edge |
| 11/18/2014 | US8888918 Vapor collection |
| 11/18/2014 | US8888917 Restricted radiated heating assembly for high temperature processing |
| 11/18/2014 | US8888916 Thermal reactor with improved gas flow distribution |
| 11/18/2014 | US8888914 Process for producing layered member and layered member |
| 11/18/2014 | US8888913 Method of manufacturing epitaxial silicon wafer and apparatus therefor |
| 11/18/2014 | US8887650 Temperature-controlled purge gate valve for chemical vapor deposition chamber |
| 11/13/2014 | US20140335700 Carbon Layers for High Temperature Processes |
| 11/13/2014 | US20140335617 Controlling surface wettability of ultrahigh surface area hierarchical supports |
| 11/13/2014 | US20140335363 Indium-containing oxide film and preparing method thereof |
| 11/13/2014 | US20140335328 Nanowire manufacturing device having nanowire manufacturing substrate and nanowire adhesive film and nanowire manufactured using the same |
| 11/13/2014 | US20140335287 Atomic layer deposition apparatus and atomic layer deposition method |
| 11/13/2014 | US20140335281 Film-forming treatment jig, plasma cvd apparatus, metal plate and osmium film forming method |
| 11/13/2014 | US20140335272 Protective coating of silver |
| 11/13/2014 | US20140335215 Blank for nanoimprint mold, nanoimprint mold, and methods for producing said blank and said nanoimprint mold |
| 11/13/2014 | US20140334106 Bulk amorphous alloy heat sink |
| 11/13/2014 | US20140332605 Plasma processing equipment and gas distribution apparatus thereof |
| 11/13/2014 | US20140332437 Food container having improved oxygen barrier properties and manufacturing methed thereof |
| 11/13/2014 | US20140331933 Apparatus for processing apparatus having side pumping type |
| 11/13/2014 | US20140331932 Method and Apparatus for Organic Vapor Printing |
| 11/13/2014 | US20140331931 Method and system for inline chemical vapor deposition |
| 11/11/2014 | US8884297 Microcrystalline silicon film, manufacturing method thereof, semiconductor device, and manufacturing method thereof |
| 11/11/2014 | US8884194 Heating plate with planar heater zones for semiconductor processing |
| 11/11/2014 | US8883655 Atomic layer deposition of metal oxide materials for memory applications |
| 11/11/2014 | US8883637 Systems and methods for controlling etch selectivity of various materials |
| 11/11/2014 | US8883296 Coating structure and method for forming the same |
| 11/11/2014 | US8883270 Systems and methods for thin-film deposition of metal oxides using excited nitrogen—oxygen species |
| 11/11/2014 | US8883269 Thin film deposition using microwave plasma |
| 11/11/2014 | US8883267 Vapor deposition apparatus, vapor deposition method, and method of manufacturing organic light-emitting display apparatus |
| 11/11/2014 | US8883266 Irradiation assisted nucleation of quantum confinements by atomic layer deposition |
| 11/11/2014 | US8883260 Apparatus and method for producing carbon |
| 11/11/2014 | US8883259 Thin film deposition apparatus |
| 11/11/2014 | US8883258 Protective coating of silver |
| 11/11/2014 | US8883257 Method for manufacturing gas barrier thin film-coated plastic container |
| 11/11/2014 | US8883256 Process for the internal coating of hollow bodies using a plasma beam at atmospheric pressure |
| 11/11/2014 | US8883246 Plasma activated chemical vapour deposition method and apparatus therefor |
| 11/11/2014 | US8883027 Methods for removing a metal oxide from a substrate |
| 11/11/2014 | US8882962 Plasma processing apparatus |
| 11/11/2014 | US8882923 Substrate processing apparatus and method of manufacturing semiconductor device |
| 11/11/2014 | US8882922 Organic layer deposition apparatus |
| 11/11/2014 | US8882921 Thin film deposition apparatus |
| 11/11/2014 | US8882920 Thin film deposition apparatus |
| 11/11/2014 | US8882919 Combinatorial non-contact wet processing |
| 11/11/2014 | US8882918 Vapor deposition apparatus |
| 11/11/2014 | US8882917 Substrate processing including correction for deposition location |
| 11/11/2014 | US8882916 Film deposition apparatus, film deposition method, and computer readable storage medium |
| 11/11/2014 | US8882915 Film deposition apparatus, film deposition method, and computer readable storage medium |
| 11/11/2014 | US8882914 Processing substrates using site-isolated processing |
| 11/11/2014 | US8882913 Apparatus of chemical vapor deposition with a showerhead regulating injection velocity of reactive gases positively and method thereof |
| 11/11/2014 | US8882909 Method for producing virtual Ge substrates for III/V-integration on Si(001) |
| 11/11/2014 | US8881672 Universal atomizer |
| 11/06/2014 | US20140329072 Optical product and method for manufacturing same |
| 11/06/2014 | US20140329032 Device for improving the uniformity of the film for packaging and method for applying the same |
| 11/06/2014 | US20140329030 Plasma generation for thin film deposition on flexible substrates |
| 11/06/2014 | US20140329026 Ceramic barrier layers |
| 11/06/2014 | US20140329025 Solid precursor-based delivery of fluid utilizing controlled solids morphology |
| 11/06/2014 | US20140328967 Mold and method for manufacturing same |
| 11/06/2014 | US20140327064 Method for fabricating a metal-insulator-metal (mim) capacitor having capacitor dielectric layer formed by atomic layer deposition (ald) |
| 11/06/2014 | US20140326697 Conductive transparent film and method for making same |
| 11/06/2014 | US20140326276 Cobalt removal for chamber clean or pre-clean process |
| 11/06/2014 | US20140326185 Inject and exhaust design for epi chamber flow manipulation |
| 11/06/2014 | US20140326184 Cooling pedestal with coating of diamond-like carbon |
| 11/06/2014 | US20140326183 Deposition source assembly |
| 11/04/2014 | US8878326 Imager microlens structure having interfacial region for adhesion of protective layer |
| 11/04/2014 | US8878244 Semiconductor device having strained silicon film |
| 11/04/2014 | US8877655 Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species |
| 11/04/2014 | US8877301 Plasma processing including asymmetrically grounding a susceptor |
| 11/04/2014 | US8877300 Atomic layer deposition using radicals of gas mixture |
| 11/04/2014 | US8877291 Method of manufacturing thin film which suppresses unnecessary scattering and deposition of a source material |
| 11/04/2014 | US8877285 Process for repairing a cylinder running surface by means of plasma spraying processes |
| 11/04/2014 | US8877005 Plasma processing apparatus and electrode used therein |