| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 05/23/2013 | US20130130015 Metallized Opaque Films with Robust Metal Layer Attachment |
| 05/23/2013 | US20130129983 Silicon carbide stabilizing of solid diamond and stabilized molded and formed diamond structures |
| 05/23/2013 | US20130129922 Batch processing for electromechanical systems and equipment for same |
| 05/23/2013 | US20130129913 Coating apparatus and coating method |
| 05/23/2013 | US20130129603 Tellurium (Te) Precursors for Making Phase Change Memory Materials |
| 05/23/2013 | US20130128462 Amorphous diamond-like carbon coatings for increasing the thermal conductivity of structural frames in portable electronic devices |
| 05/23/2013 | US20130125820 Chemical vapor deposition or epitaxial-layer growth reactor and supporter thereof |
| 05/23/2013 | US20130125819 Chemical gas deposition reactor |
| 05/23/2013 | US20130125818 Combinatorial deposition based on a spot apparatus |
| 05/23/2013 | US20130125817 Apparatus for performing a plasma chemical vapour deposition process |
| 05/23/2013 | US20130125816 Fluorinating Apparatus |
| 05/23/2013 | US20130125815 Plasma enhanced atomic layer deposition system |
| 05/23/2013 | DE102012220314A1 Transparenter Kohlenstoff-Nanoröhren-Graphen-Hybridleiter und Feldeffekttransistor Transparent carbon nanotube-graphene hybrid circuit and field effect transistor |
| 05/23/2013 | DE102011119013A1 Forming dielectric layer on substrate, comprises generating plasma between plasma electrode and substrate from process gas, and forming dielectric layer on the substrate by at least partial chemical reaction of substrate and process gas |
| 05/23/2013 | CA2854052A1 Barrier layer to sioc alkali metals |
| 05/22/2013 | EP2594971A1 Process for producing metamaterial, and metamaterial |
| 05/22/2013 | EP2594882A1 Vertical Heat Treating Furnace |
| 05/22/2013 | EP2594660A1 An apparatus for performing a plasma chemical vapour deposition process |
| 05/22/2013 | EP2594659A1 Apparatus and method for carrying out a PCVD deposition process |
| 05/22/2013 | EP2594352A1 Surface coating cutting tool |
| 05/22/2013 | EP2593959A2 Electrode for producing a plasma, plasma chamber having said electrode, and method for analyzing or processing a layer of the plasma in situ |
| 05/22/2013 | EP2593580A1 Process chamber pressure control system and method |
| 05/22/2013 | EP2593579A1 Coating for converting radiation energy |
| 05/22/2013 | EP2593286A1 Injection molding process and product produced using the same |
| 05/22/2013 | CN202945323U Selenium source ionizer for small-area substrate |
| 05/22/2013 | CN103120032A System and method for current-based plasma excursion detection |
| 05/22/2013 | CN103119697A Thin film manufacturing method and thin film manufacturing apparatus |
| 05/22/2013 | CN103119696A Thin film production process and thin film production device |
| 05/22/2013 | CN103119199A Control of Differential Pressure in PECVD Systems |
| 05/22/2013 | CN103119198A Substrate transport mechanism contacting a single side of a flexible web substrate for roll-to-roll thin film deposition |
| 05/22/2013 | CN103119197A Amorphous silicon nitride film and method for producing same |
| 05/22/2013 | CN103119196A Depositing conformal boron nitride films |
| 05/22/2013 | CN103119195A Unit for the treatment of an object, in particular the surface of a polymer object |
| 05/22/2013 | CN103119194A A palette system for thin film deposition facilities for collecting and recovering deposited materials |
| 05/22/2013 | CN103119107A Optical article including an antireflecting coating having antifog properties and process for making same |
| 05/22/2013 | CN103118852A Injection molding process and product produced using the same |
| 05/22/2013 | CN103114279A Monitoring device, monitoring method and vapour deposition equipment |
| 05/22/2013 | CN103114278A Planar magnetic control ECR-PECVD (Electron Cyclotron Resonance Plasma-Enhanced Chemical Vapor Deposition) plasma source device |
| 05/22/2013 | CN103114277A Atomic layer deposition equipment |
| 05/22/2013 | CN103114276A Device for rapidly depositing diamond-like carbon film |
| 05/22/2013 | CN103114275A Preparation method of moving core mark for micronano-diamond composite coating tube stock |
| 05/22/2013 | CN103114274A Preparation method of diamond coating wire-drawing die with small aperture |
| 05/22/2013 | CN102424955B Novel gas-homogenizing structure |
| 05/22/2013 | CN102150245B Film forming apparatus |
| 05/22/2013 | CN102112651B Method for forming amorphous carbon nitride film, amorphous carbon nitride film, multilayer resist film and method for manufacturing semiconductor device |
| 05/22/2013 | CN101831632B Film deposition apparatus |
| 05/22/2013 | CN101665921B Film deposition apparatus, substrate processing apparatus and film deposition method |
| 05/22/2013 | CN101440485B Film processing device |
| 05/22/2013 | CN101368267B Plasma CVD apparatus, manufacture of microcrystalline semiconductor layer and thin film transistor |
| 05/21/2013 | US8445952 Zr-Sn-Ti-O films |
| 05/21/2013 | US8445937 Barrier films for plastic substrates fabricated by atomic layer deposition |
| 05/21/2013 | US8445364 Methods of treating semiconducting materials including melting and cooling |
| 05/21/2013 | US8444988 Cancer treatment method |
| 05/21/2013 | US8444926 Processing chamber with heated chamber liner |
| 05/21/2013 | US8444806 Plasma generator, plasma control method and method of producing substrate |
| 05/21/2013 | US8444767 Coating device |
| 05/21/2013 | US8444766 System and method for recycling a gas used to deposit a semiconductor layer |
| 05/21/2013 | US8444120 Method and apparatus to help promote contact of gas with vaporized material |
| 05/21/2013 | US8443756 Showerhead electrodes and showerhead electrode assemblies having low-particle performance for semiconductor material processing apparatuses |
| 05/21/2013 | CA2538483C Pharmaceutical blister |
| 05/16/2013 | WO2013071138A1 PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL PACKAGE, COATING PROCESS AND APPARATUS |
| 05/16/2013 | WO2013071065A1 Nanostructured polymer-inorganic fiber media |
| 05/16/2013 | WO2013070702A1 Deposition of metal films using alane-based precursors |
| 05/16/2013 | WO2013070649A1 High emissivity distribution plate in vapor deposition apparatus and processes |
| 05/16/2013 | WO2013069739A1 Dielectric window for plasma treatment device, and plasma treatment device |
| 05/16/2013 | WO2013069510A1 Temperature control method, control device, and plasma treatment device |
| 05/16/2013 | WO2013068980A1 Support for an optical coating liquid composition to deposit by evaporation treatment on an optical article |
| 05/16/2013 | WO2013068691A1 Method for manufacturing a titanium alloy for biomedical devices |
| 05/16/2013 | WO2013068122A1 Friction stir welding tool made of cemented tungsten carbid with nickel and with a al203 surface coating |
| 05/16/2013 | WO2013033315A3 Wafer carrier with thermal features |
| 05/16/2013 | WO2012051975A8 Method and device for plasma-treating workpieces |
| 05/16/2013 | US20130122328 Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxide |
| 05/16/2013 | US20130122316 Method for producing metalized fibrous composite sheet with olefin coating |
| 05/16/2013 | US20130122301 Pressure sensitive microparticles for measuring characteristics of fluid flow |
| 05/16/2013 | US20130122267 Bonding element, bonding matrix and composite material having the bonding element, and method of manufacturing thereof |
| 05/16/2013 | US20130122198 Process for forming a protective coating on the surface of a metal part |
| 05/16/2013 | US20130122197 Securing of shadow mask and substrate on susceptor of deposition apparatus |
| 05/16/2013 | US20130122192 Chemical vapor deposition using n,o polydentate ligand complexes of metals |
| 05/16/2013 | US20130119017 Method and system for autotuning of rf match |
| 05/16/2013 | US20130118407 Substrate susceptor and deposition apparatus having same |
| 05/16/2013 | US20130118406 Method for Cold Plasma Treatment of Plastic Bottles and Device for Implementing Same |
| 05/16/2013 | US20130118405 Fluid cooled showerhead with post injection mixing |
| 05/16/2013 | DE112011102504T5 Verbesserter Reaktor zur chemischen Gasphasenabscheidung Improved reactor for chemical vapor deposition |
| 05/16/2013 | DE112011102417T5 Herstellung von polykristallinem Silizium Producing polycrystalline silicon |
| 05/16/2013 | DE102011086399A1 Nanoskalige Oberflächenstruktur zur Verbesserung der Adhäsion Nanoscale surface structure for improving the adhesion |
| 05/16/2013 | CA2855353A1 Passivation, ph protective or lubricity coating for pharmaceutical package, coating process and apparatus |
| 05/16/2013 | CA2853870A1 Friction stir welding tool made of cemented tungsten carbid with nickel and with a al203 surface coating |
| 05/15/2013 | EP2592647A1 Manufacturing method for channel plate, channel plate, temperature adjustment plate, cold plate, and shower plate |
| 05/15/2013 | EP2592173A2 Assembly and method for performing a low temperature ALD process |
| 05/15/2013 | EP2592172A1 Support for a liquid composition. |
| 05/15/2013 | EP2591141A1 Method and apparatus for contactlessly advancing substrates |
| 05/15/2013 | EP2591140A1 Method for depositing a biocidal coating on a substrate |
| 05/15/2013 | EP2590802A1 Method and device for atmospheric pressure plasma treatment |
| 05/15/2013 | EP2590756A2 Method and apparatus for applying a coating at a high rate onto non-line-of-sight regions of a substrate |
| 05/15/2013 | CN202936480U PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment and antenna applied to reaction chamber thereof |
| 05/15/2013 | CN202936479U Base plate heating and conveying device for reaction cavity |
| 05/15/2013 | CN202936478U Low pressure chemical vapor deposition (LPCVD) system |
| 05/15/2013 | CN202936477U Device for growing diamond thick film |
| 05/15/2013 | CN103109380A Method for manufacturing solar cell |
| 05/15/2013 | CN103109358A Embedded catalyst for atomic layer deposition of silicon oxide |