Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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08/21/2013 | EP2627797A1 Apparatus and method for atomic layer deposition on a surface |
08/21/2013 | CN203150595U Tail gas treatment, recovery and recycling apparatus of MOCVD grown gallium nitride wafer |
08/21/2013 | CN203144511U Pyrolysis furnace for preparing nickel rod by chemical vapour deposition method |
08/21/2013 | CN203144510U Hook for plasma chemical vapor deposition equipment |
08/21/2013 | CN203144505U Cleaning device |
08/21/2013 | CN103262207A Multi-layer substrate structure and manufacturing method for the same |
08/21/2013 | CN103261760A Low-friction sliding ring having an economical diamond coating |
08/21/2013 | CN103261478A Apparatus and method for atomic layer deposition on a surface |
08/21/2013 | CN103261477A Apparatus and method for depositing a layer onto a substrate |
08/21/2013 | CN103261476A Sliding element, in particular a piston ring, having a coating |
08/21/2013 | CN103258763A Wafer loading platform structure commonly used by wafers of different sizes |
08/21/2013 | CN103256306A Current insulated bearing components and bearings |
08/21/2013 | CN103255395A PECVD processing chamber ion source diffusion plate device |
08/21/2013 | CN103255394A Manufacturing method of heater for metal organic chemical vapor deposition |
08/21/2013 | CN103255393A Semiconductor manufacturing apparatus |
08/21/2013 | CN103255392A Spray head and vapour deposition equipment |
08/21/2013 | CN103255391A Water bath tank and film deposition apparatus using same |
08/21/2013 | CN103255390A Heater of metal organic chemical vapor deposition |
08/21/2013 | CN103255389A Method for epitaxial growth of III nitride semiconductor material on silicon substrate |
08/21/2013 | CN103255388A Plasma chemical vapor deposition method of phosphosilicate glass film |
08/21/2013 | CN103253648A Preparation method of carbon nanotube by growing on foamed nickel substrate |
08/21/2013 | CN103252938A Coated article of martensitic steel and method of forming coated article of steel |
08/21/2013 | CN103252509A A surface coating cutting tool with a hard coating layer exhibiting excellent broken fracture resistance |
08/21/2013 | CN102650046B Device for largely and continuously preparing two-dimensional nanometer films in large |
08/21/2013 | CN102409318B Thermochemical vapor deposition reactor and method for improving thermal radiance in reactor |
08/21/2013 | CN102383113B Method and device for improving efficiency of preparing diamond coating on tool surface and coating evenness |
08/21/2013 | CN102345112B Semiconductor processing device and gas spray head cooling plate thereof |
08/21/2013 | CN102325921B Mocvd reactor having cylindrical gas inlet element |
08/21/2013 | CN102282291B Raw material for chemical vapor deposition, and process for forming silicon-containing thin film using same |
08/21/2013 | CN102234785B Substrate coating and forming method thereof |
08/21/2013 | CN102037791B Plasma processing apparatus |
08/21/2013 | CN101994097B Film coating device |
08/21/2013 | CN101970716B Body coated with hard material |
08/21/2013 | CN101883652B A new product and method for its manufacture within material processing |
08/21/2013 | CN101714506B Capacitor with hafnium oxide and aluminum oxide alloyed dielectric layer and method for fabricating the same |
08/21/2013 | CN101688298B Method and device for preparing a multilayered coating on a substrate |
08/21/2013 | CN101313092B Interconnects and heat dissipators based on nanostructures |
08/21/2013 | CN101195193B Laser processing apparatus, laser processing method, substrate, manufacturing method of substrate, manufacturing method of display apparatus |
08/20/2013 | US8513137 Plasma processing apparatus and plasma processing method |
08/20/2013 | US8512816 Method of fabricating thin film by microplasma processing and apparatus for same |
08/20/2013 | US8512807 Method of making cutting tool inserts with high demands on dimensional accuracy |
08/20/2013 | US8512806 Large volume evaporation source |
08/20/2013 | US8512798 Threading substrate strands through reactor;mixing yttrium-barium-copper oxide superconducting precursor vapor with inert gas, nitrous oxide, and oxygen; energizing diatomic oxygen to form monoatomic oxygen and excite precursors to high energy state; microwave plasma injection; continuous translation |
08/20/2013 | US8512612 Nano-fibered membrane for western blot and manufacturing method of the same |
08/20/2013 | US8512511 Mounting table and plasma processing apparatus |
08/20/2013 | US8512510 Plasma processing method and apparatus |
08/20/2013 | US8512474 Apparatus for precursor delivery system for irradiation beam instruments |
08/20/2013 | US8512473 Substrate centering device and organic material deposition system |
08/20/2013 | US8512472 Method and apparatus to enhance process gas temperature in a CVD reactor |
08/20/2013 | US8511504 Demisable fuel supply system |
08/20/2013 | CA2555032C Cylindrical microwave chamber |
08/15/2013 | WO2013119430A1 Pressure control valve assembly of plasma processing chamber and rapid alternating process |
08/15/2013 | WO2013117955A1 Method for the deposition of a ruthenium containing film using arene diazadiene ruthenium(0) precursors |
08/15/2013 | WO2013117885A1 Device for supporting mechanical seal faces |
08/15/2013 | WO2013089805A3 Electrically conducting nanocomposite wire comprising tow of multiwalled carbon nanotubes and transverse metal bridges |
08/15/2013 | WO2013056831A3 Drill having a coating |
08/15/2013 | US20130210241 Precursors for Plasma Activated Conformal Film Deposition |
08/15/2013 | US20130210232 Cut-mask patterning process for fin-like field effect transistor (finfet) device |
08/15/2013 | US20130209780 Tunable nanoporous films on polymer substrates, and method for their manufacture |
08/15/2013 | US20130209767 Coated article of martensitic steel and a method of forming a coated article of steel |
08/15/2013 | US20130209766 Lubricity vessel coating, coating process and apparatus |
08/15/2013 | US20130209757 Using chemical vapor deposited films to control domain orientation in block copolymer thin films |
08/15/2013 | US20130209706 Apparatus and method for coating substrates using the eb/pvd process |
08/15/2013 | US20130209704 Power lance and plasma-enhanced coating with high frequency coupling |
08/15/2013 | US20130209703 Hollow-cathode gas lance for the interior coating of containers |
08/15/2013 | US20130209701 Method of preparing sample for tem observation |
08/15/2013 | US20130209700 Tem sample preparation method |
08/15/2013 | US20130209685 Doping method of atomic layer deposition |
08/15/2013 | US20130209684 Method and apparatus for igniting silicon rods outside a cvd-reactor |
08/15/2013 | US20130209198 Techniques for handling media arrays |
08/15/2013 | US20130209183 Fabrication method for diamond film coating of drill bit |
08/15/2013 | US20130209006 Current insulated bearing components and bearings |
08/15/2013 | US20130206725 Creation of off-axis null magnetic field locus for improved uniformity in plasma deposition and etching |
08/15/2013 | US20130206337 Arrangements for controlling plasma processing parameters |
08/15/2013 | US20130206070 Deposition ring |
08/15/2013 | US20130206069 Deposition apparatus |
08/15/2013 | US20130206068 Linear pecvd apparatus |
08/14/2013 | EP2626890A1 Epitaxial wafer, light-receiving element, optical sensor device, and method for manufacturing epitaxial wafer and light-receiving element |
08/14/2013 | EP2626446A1 Power lance and plasma-assisted coating with the input of a high frequency |
08/14/2013 | EP2626445A1 Hollow cathode gas lance for internally coating containers |
08/14/2013 | EP2625309A1 Control of differential pressure in pecvd systems |
08/14/2013 | EP2625308A2 Mechanically fluidized reactor systems and methods, suitable for production of silicon |
08/14/2013 | EP2625307A2 Wear resistant coating, article, and method |
08/14/2013 | DE10319206B4 Verwendung von KrF-Excimerlasern zur Laserpulsabscheidung und zur Spannungsreduzierung von dünnen Schichten Using KrF excimer lasers for laser pulse deposition and voltage reduction of thin layers |
08/14/2013 | DE102012210068A1 Vacuum substrate treatment-throughput processing system comprises vacuum chamber, substrate processing device in vacuum chamber, and transport device for conveying plate-shaped substrates, which comprises a number of transport rollers |
08/14/2013 | DE102012202086A1 Prozesswalze zur Aufnahme und Führung von bandförmigen Substraten in Vakuum-Beschichtungsanlagen Process roller for receiving and guiding of band-shaped substrates in vacuum coating equipment |
08/14/2013 | DE102012201956A1 Hohlkathoden-Gaslanze für die Innenbeschichtung von Behältern Hollow cathode gas lance for the internal coating of containers |
08/14/2013 | DE102012201955A1 Powerlanze und plasmaunterstützte Beschichtung mit Hochfrequenzeinkopplung Power lance, and plasma-assisted coating with high-frequency coupling |
08/14/2013 | DE102012201953A1 Verfahren und Vorrichtung zur Passivierung von Solarzellen mit einer Aluminiumoxid-Schicht Method and apparatus for the passivation of solar cells with an alumina layer |
08/14/2013 | DE102010062357B4 Vorrichtung und Verfahren zur Herstellung eines mit zumindest einer Korrosionsschutzschicht beschichteten magnesiumhaltigen Substrats Apparatus and method for making a coated with at least one anti-corrosion layer containing magnesium substrate |
08/14/2013 | CN203128659U Microwave exciting CVD (chemical vapor deposition) coating equipment |
08/14/2013 | CN203128658U Laser CVD (chemical vapor deposition) coating equipment |
08/14/2013 | CN203128657U Laser exciting CVD (chemical vapor deposition) coating equipment |
08/14/2013 | CN203128656U CVD (chemical vapor deposition) device adopting light heating |
08/14/2013 | CN203128655U Gas-flow distribution panel |
08/14/2013 | CN203128654U Chemical vapor deposition (CVD) device adopting electromagnetic heating |
08/14/2013 | CN203128653U Quartz outer tube protective device and furnace tube |
08/14/2013 | CN203128652U Etching and baking device |
08/14/2013 | CN1853832B Cutting tool coated with hard alloy and spraying target material for producing same |
08/14/2013 | CN103249865A Plasma cvd apparatus |