Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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04/25/1984 | EP0106521A2 Baffle system for glow discharge deposition apparatus |
04/25/1984 | EP0106497A2 Ion shower apparatus |
04/24/1984 | US4444811 Fluidized bed silicon deposition from silane |
04/24/1984 | US4444805 Vacuum deposition of carbon from hydrocarbon gases, frequencies |
04/24/1984 | CA1166129A1 Prevention of low pressure chemical vapor deposition silicon dioxide undercutting and flaking |
04/24/1984 | CA1166128A1 Low pressure chemical vapor deposition of silicon dioxide with oxygen enhancement of the chlorosilane- nitrous oxide reaction |
04/18/1984 | EP0105835A1 Method of producing a hard layer on articles of Ti or Ti-alloys |
04/17/1984 | US4443529 Photoconductive member having an amorphous silicon photoconductor and a double-layer barrier layer |
04/17/1984 | US4443489 Method for the formation of phosphorous-nitrogen based glasses useful for the passivation of III-V semiconductor materials |
04/17/1984 | US4443488 Semiconductors, multistage, thin films, extraction, coalescing |
04/17/1984 | US4443410 Integrated circuits, thin films, cassettes |
04/17/1984 | CA1165551A1 Optical fiber fabrication and resulting product |
04/10/1984 | US4442169 Multiple coated cutting tool and method for producing same |
04/04/1984 | EP0104907A2 Method of making amorphous semiconductor alloys and devices using microwave energy |
04/04/1984 | EP0104764A2 Chemical vapor deposition apparatus and process |
04/04/1984 | EP0104658A1 Process for forming thin film |
04/04/1984 | EP0104405A1 Silicon carbide materials |
04/03/1984 | US4441113 P-Type semiconductor material having a wide band gap |
04/03/1984 | US4440618 Gas discharge device comprising a pressure controller for controlling a pressure over a wide range |
04/03/1984 | US4440108 Ion beam coating apparatus |
04/03/1984 | US4440107 Magnetic apparatus for reducing substrate warpage |
04/03/1984 | CA1165015A1 Organometallic semiconductor devices |
03/27/1984 | US4439463 Plasma assisted deposition system |
03/27/1984 | US4439410 Method of manufacturing silicon from powdered material containing silica |
03/27/1984 | US4438724 Grooved gas gate |
03/27/1984 | US4438723 Multiple chamber deposition and isolation system and method |
03/21/1984 | EP0103505A1 Method of preparing thin layers |
03/21/1984 | EP0103470A1 Titanium disulfide thin film and process for fabricating the same |
03/21/1984 | EP0103280A2 Fabrication method of membrane structure |
03/21/1984 | EP0103149A1 Poly(arylene sulfide) printed circuit boards |
03/20/1984 | US4438368 Plasma treating apparatus |
03/20/1984 | US4438188 Glow discharge, vapor deposition |
03/20/1984 | US4438154 Method of fabricating an amorphous silicon film |
03/20/1984 | US4437932 Dissolution of metals utilizing a furan derivative |
03/13/1984 | US4436830 Nitride hardfacing |
03/13/1984 | US4436770 Vapor deposition |
03/13/1984 | US4436769 Metal organic vapor deposition procedure for preparing group III--V compounds on a heated substrate |
03/13/1984 | US4436762 Low pressure plasma discharge formation of refractory coatings |
03/13/1984 | US4436761 Method for treatment of metal substrate for growth of hydrogen-containing semiconductor film |
03/13/1984 | US4436674 Vapor mass flow control system |
03/06/1984 | US4435445 Production of silicon-germanium alloy film from silane and germane |
03/06/1984 | US4434742 Installation for depositing thin layers in the reactive vapor phase |
02/28/1984 | USRE31526 Coated cemented carbide body and method of making such a body |
02/28/1984 | US4434188 Method for synthesizing diamond |
02/28/1984 | CA1162798A1 Method for preparing adherent layers on polyolefins |
02/22/1984 | EP0101286A1 Grooved gas gate |
02/21/1984 | US4433012 Process for the pyrolytic deposition of aluminum from TIBA |
02/21/1984 | CA1162385A1 Preparation of silicon metal through polymer degradation |
02/14/1984 | US4431708 Annealed CVD molybdenum thin film surface |
02/14/1984 | US4430959 Semiconductor vapor phase growing apparatus |
02/07/1984 | US4430364 Monovalent aluminum halide |
02/07/1984 | US4430361 Glow discharges, ferromagnetism, backings, plates, velocities, joining |
02/07/1984 | US4430185 Method of producing photoelectric transducers |
02/07/1984 | US4430149 Chemical vapor deposition of epitaxial silicon |
02/07/1984 | CA1161966A1 Computer controlled system and process for processing semiconductor wafers |
02/01/1984 | EP0099725A2 High pressure, non-local thermal equilibrium arc plasma generating apparatus for deposition of coatings upon substrates |
02/01/1984 | EP0099708A1 Magnetic apparatus for reducing substrate warpage |
01/31/1984 | US4428975 Process for improving nitride deposition on a semiconductor wafer |
01/25/1984 | EP0099257A1 Apparatus for uniformly heating a substrate |
01/24/1984 | US4427720 Vapor phase process for the deposition of a protective metal coating on a metallic piece |
01/24/1984 | US4427445 Tungsten alloys containing A15 structure and method for making same |
01/17/1984 | US4426408 Method of deposition of silicon in fine crystalline form |
01/11/1984 | EP0097819A1 Photo deposition of metals onto substrates |
01/11/1984 | EP0097694A1 Process for making inorganic oxide fibers |
01/10/1984 | CA1160179A1 Glow discharge deposition of films from disilane or digermane gas |
01/03/1984 | US4424199 Fluid jet seed particle generator for silane pyrolysis reactor |
01/03/1984 | US4424096 Radio frequency |
01/03/1984 | US4423701 Glow discharge deposition apparatus including a non-horizontally disposed cathode |
01/03/1984 | CA1159724A1 Method of controlling the index profile of optical fiber preforms |
01/03/1984 | CA1159723A1 Process for the production of an electrically conductive article |
12/27/1983 | US4422898 Iron pentacarbonyl decomposition, patterns, etching |
12/27/1983 | US4422407 Apparatus for chemically activated deposition in a plasma |
12/22/1983 | WO1983004420A1 Process for forming sulfide layers |
12/20/1983 | CA1159012A1 Plasma deposition apparatus |
12/13/1983 | US4420498 Using a mixed gas of titanium, zirconium, or hafnium halide, hydrogen, and nitrogen |
12/08/1983 | WO1983004269A1 Maskless growth of patterned films |
12/07/1983 | EP0095963A1 Process for the inner gas plating of small holes in steel parts |
12/07/1983 | EP0095887A1 Apparatus for plasma chemical vapour deposition |
12/07/1983 | EP0095729A2 Hermetic coating by heterogeneous nucleation thermochemical deposition |
12/06/1983 | US4419385 Low temperature process for depositing an oxide dielectric layer on a conductive surface and multilayer structures formed thereby |
12/06/1983 | US4419380 Method for ion-aided coating on electrically insulating substrates |
12/06/1983 | US4419335 Process for producing rhombohedral system boron nitride |
12/06/1983 | US4418645 Glow discharge apparatus with squirrel cage electrode |
12/06/1983 | CA1158109A1 Coating of semiconductor wafers and apparatus therefor |
11/30/1983 | EP0095275A2 Photo-assisted CVD |
11/30/1983 | EP0095196A1 Resilient bearing support for high-speed rotors, particularly for turbo machines |
11/29/1983 | US4417914 Vapor phase reaction of germane and silane with oxygen, then depositing on semiconductor |
11/22/1983 | US4416952 Passivation, dielectrics, optical absorbers |
11/22/1983 | US4416913 Ascending differential silicon harvesting means and method |
11/22/1983 | US4416912 Formation of coatings on cutting edges |
11/16/1983 | EP0094053A1 Plasma method for making a dielectric rod |
11/15/1983 | US4415609 Vapor deposition of a silicon carbide using a gaseous blend of hydrocarbon and silane; stoichiometry; wetting |
11/08/1983 | US4414085 Sputtering, carbon |
11/08/1983 | US4414082 Process for cracking hydrocarbons |
11/08/1983 | CA1156517A1 Fluidizing fine powder to be coated with valve metal by admixing with coarse powder |
11/02/1983 | EP0092586A1 An amorphous silicon material fabricated by a magnetically aligned glow discharge |
11/01/1983 | US4413302 Structural member made from a metallic material having an upper surface exposed to the danger of electric charge building-up thereon and the use of such structural member |
11/01/1983 | US4413022 Vapor reactions |
11/01/1983 | US4412903 Coating infra red transparent semiconductor material |
11/01/1983 | CA1156036A1 Fluidized bed oven and method of emptying the same |