| Patents for B81B 5 - Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements (874) |
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| 06/24/2004 | US20040118241 Arrangement, method, and system to reduce the play of micro-mechanical produced gears |
| 06/17/2004 | US20040114458 Device for mixing fluids |
| 06/09/2004 | EP1425528A1 Methods and systems for fluid control in microfluidics devices |
| 06/08/2004 | US6747863 Electrostatic drive |
| 06/08/2004 | US6747785 MEMS-actuated color light modulator and methods |
| 06/08/2004 | US6745567 System and method for positional movement of microcomponents |
| 06/03/2004 | WO2003072486A3 Mems devices and methods of manufacture |
| 06/01/2004 | US6744173 Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods |
| 06/01/2004 | US6743991 Polymeric liquid metal switch |
| 05/27/2004 | US20040100678 Method for finesse compensation in a fabry-perot device and a fabry-perot device with high finesse |
| 05/25/2004 | US6740829 Insertion-type liquid metal latching relay |
| 05/13/2004 | WO2003078302A3 Micro-electromechanical systems |
| 05/13/2004 | WO2003057619A8 Apparatus and method for nanoscale and microscale mechanical machining and processing |
| 04/29/2004 | US20040081802 Component and method of manufacturing same |
| 04/29/2004 | US20040080807 Mems-actuated color light modulator and methods |
| 04/29/2004 | US20040080484 Display devices manufactured utilizing mems technology |
| 04/28/2004 | EP1413543A1 Micro electro mechanical (MEMS) actuated colour light modulator grating and method for its manufacture |
| 04/27/2004 | US6726443 Micromachines |
| 04/15/2004 | US20040071607 Microsize driving device and method for preparation thereof |
| 04/14/2004 | EP1407812A1 Fluid mixing device |
| 04/14/2004 | CN1489717A Microelectromechanical display device |
| 04/08/2004 | US20040066259 Electrically isolated liquid metal micro-switches for integrally shielded microcircuits |
| 04/06/2004 | US6717227 MEMS devices and methods of manufacture |
| 03/31/2004 | EP1402607A1 Processing device for cables or wires |
| 03/18/2004 | US20040049918 Gear and method of making the same |
| 03/16/2004 | US6707308 Measurements using tunnelling current between elongate conductors |
| 03/11/2004 | US20040046473 Micro-electromechanical energy storage device |
| 03/10/2004 | CN1481000A Base plate with minitype connection components and its preparation method |
| 02/26/2004 | WO2004017509A2 System and method for providing a micro-electro-mechanical microengine assembly |
| 02/26/2004 | WO2004017119A1 Micro rocking device having tosion bar |
| 02/26/2004 | WO2004016948A1 Micro liquid handling device and methods for using it |
| 02/19/2004 | US20040032654 Electrostatic machine element, light diffraction modulation element and image display device |
| 02/19/2004 | US20040031266 System and method for providing a micro-electro-mechanical microengine assembly |
| 02/11/2004 | CN1138148C Comb-shaped stereo silicon processing micro mechanical structure with fixed tooth offset |
| 02/10/2004 | US6690847 Optical switching element having movable optically transmissive microstructure |
| 02/10/2004 | US6689976 Electrically isolated liquid metal micro-switches for integrally shielded microcircuits |
| 02/05/2004 | WO2004011985A1 Normally latched mems engagement mechanism |
| 02/05/2004 | US20040022479 Normally latched MEMS engagement mechanism |
| 02/05/2004 | DE10231729A1 Component used in micro-mechanical structures has a surface micro-mechanical structure formed in a functional layer connected to a substrate via an insulating layer which is attacked by the process of removing the first sacrificial layer |
| 02/04/2004 | CN1137287C Method for protecting sacrificial layer of movable structure in deep-reaction ion etching process |
| 01/29/2004 | US20040017599 Micro-mirror with rotor structure |
| 01/13/2004 | US6678436 Optical switch with moving lenses |
| 12/31/2003 | WO2004001481A1 Micromirror unit, method for fabricating the same and optical switch comprising it |
| 12/30/2003 | US6671078 Electrostatic zipper actuator optical beam switching system and method of operation |
| 12/23/2003 | CA2322122C Micro-electro-mechanical optical device |
| 12/10/2003 | CN1130790C Resonator structures |
| 12/03/2003 | EP1367414A1 Electrostatic machine element, light diffraction modulation element and image display device |
| 12/02/2003 | US6657324 Micromachine switch and method of manufacture thereof |
| 11/18/2003 | US6649947 Surface-micromachined rotatable member having a low-contact-area hub |
| 11/12/2003 | EP1360539A2 Optical switching element having movable optically transmissive microstructure |
| 11/11/2003 | US6646527 High frequency attenuator using liquid metal micro switches |
| 11/05/2003 | CN1127168C Resonator structures |
| 10/30/2003 | US20030201855 Double sided liquid metal micro switch |
| 10/30/2003 | US20030201854 High frequency attenuator using liquid metal micro switches |
| 10/29/2003 | CN1452553A Ink jet printhead having moving nozzle with externally arranged actuator |
| 10/14/2003 | US6633213 Double sided liquid metal micro switch |
| 10/01/2003 | EP1348144A2 Display devices manufactured utilizing mems technology |
| 10/01/2003 | CN1446394A Walking actuator |
| 09/30/2003 | US6628177 Micromechanical resonator device and micromechanical device utilizing same |
| 09/25/2003 | WO2003078302A2 Micro-electromechanical systems |
| 09/23/2003 | US6624367 Controllers comprising receivers on glass or semiconductor substrates, having electrode layouts used as wavelength phase shifters or filters for high-frequency circuits |
| 09/18/2003 | WO2003076063A1 Microcomponent connection system |
| 09/18/2003 | US20030174930 Bubble stability in an optical switch |
| 09/17/2003 | EP1345055A2 Bubble stability in an optical switch |
| 09/11/2003 | US20030167831 Method and apparatus for micromachines, microstructures, nanomachines and nanostructures |
| 09/04/2003 | WO2003072486A2 Mems devices and methods of manufacture |
| 09/04/2003 | US20030164041 Rotation-type decoupled MEMS gyroscope |
| 09/02/2003 | US6612029 Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods |
| 08/28/2003 | WO2002025352A3 Optical switching element having movable optically transmissive microstructure |
| 08/28/2003 | US20030161027 Light modulator and method of manufacturing the same |
| 08/27/2003 | EP1337887A2 Fiber optic switch and associated methods |
| 08/27/2003 | CN1438167A Tubeline micro-robot single-wheel direct driving method and its driving device |
| 08/21/2003 | WO2001074707A3 Multi-layer, self-aligned vertical comb-drive electrostatic actuators and fabrication methods |
| 08/21/2003 | US20030156451 MEMS devices and methods of manufacture |
| 08/21/2003 | US20030155841 MEMS devices and methods for inhibiting errant motion of MEMS components |
| 08/21/2003 | US20030155840 MEMS actuators |
| 08/14/2003 | US20030153115 Micromachined device having electrically isolated components and a method for making the same |
| 08/13/2003 | EP1335187A1 Rotation-type decoupled microelectromechanical (MEMS) gyroscope |
| 07/31/2003 | WO2003063223A1 Method for making a gas permeable enclosure for micromachine devices |
| 07/30/2003 | CN1433379A Gear and method of making the same |
| 07/30/2003 | CN1433133A Electrostatic driver |
| 07/23/2003 | EP1330017A2 Electrostatic drive |
| 07/23/2003 | CN1431686A Method of etching silicon in high ratio between depth and width |
| 07/17/2003 | WO2003057619A2 Apparatus and method for nanoscale and microscale mechanical machining and processing |
| 07/17/2003 | US20030133252 Electrostatic drive |
| 07/10/2003 | US20030129374 Self-aligned micro hinges |
| 07/09/2003 | EP1325885A2 Self-aligned micro hinges |
| 07/08/2003 | US6589402 Part fabricating apparatus |
| 06/11/2003 | CN1423141A 光学开关 Optical Switch |
| 06/10/2003 | US6575188 Methods and systems for fluid control in microfluidic devices |
| 06/05/2003 | WO2003046473A1 Method and apparatus for micromachines, microstructures, nanomachines and nanostructures |
| 06/05/2003 | US20030102772 Use of standoffs to protect atomic resolution storage mover for out-of-plane motion |
| 05/28/2003 | CN1420842A Micromachines |
| 05/21/2003 | EP1312163A2 Micromechanical resonator and filter using the same |
| 05/14/2003 | EP1310038A1 Walking actuator |
| 05/13/2003 | US6563249 Rotary microactuator having optimally curved electrodes |
| 04/22/2003 | US6552839 Optical switch |
| 04/16/2003 | EP1301344A1 Ink jet printhead having a moving nozzle with an externally arranged actuator |
| 04/08/2003 | US6544811 Micromachined device having electrically isolated components and a method for making the same |
| 03/27/2003 | US20030057803 Use of standoffs to protect atomic resolution storage mover for out-of-plane motion |