| Patents for B81B 5 - Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements (874) |
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| 07/13/2005 | CN1210200C Tubeline micro-robot single-wheel direct driving method and its driving device |
| 07/07/2005 | US20050145393 Micro-switches for downhole use |
| 07/06/2005 | CN1209799C Method of etching silicon in high ratio between depth and width |
| 06/23/2005 | US20050134951 Micro-oscillating element provided with torsion bar |
| 06/22/2005 | EP1544463A2 A micro fluid pumping device and a pumping method for same |
| 06/16/2005 | US20050129529 Device and method for pumping fluids employing the movement of gas bubbles in microscale |
| 06/15/2005 | EP1542059A1 Micro rocking device having tosion bar |
| 06/08/2005 | CN1205035C Ink jet printhead having moving nozzle with externally arranged actuator |
| 06/07/2005 | US6903287 Liquid metal optical relay |
| 06/01/2005 | EP1534954A1 Micro liquid handling device and methods for using it |
| 05/31/2005 | US6900510 MEMS devices and methods for inhibiting errant motion of MEMS components |
| 05/25/2005 | CN1618722A Mems having a three-wafer structure |
| 05/19/2005 | US20050104675 Micro-electromechanical systems |
| 05/11/2005 | CN1614865A Permanent magnetic bistable electrothermal microdrivers |
| 05/10/2005 | US6891654 Light modulator and method of manufacturing the same |
| 04/21/2005 | US20050081363 Apparatus and method for nanoscale and microscale mechanical machining and processing |
| 04/20/2005 | CN1607628A 继电器 Relay |
| 04/19/2005 | US6882256 Anchorless electrostatically activated micro electromechanical system switch |
| 04/14/2005 | US20050077160 Relay |
| 04/13/2005 | CN1605871A Comb capacitance type Z axis accelerometer and preparation method thereof |
| 04/12/2005 | US6879088 Insertion-type liquid metal latching relay array |
| 04/07/2005 | DE102004041654A1 Verfahren zum Entfernen von Fremdmaterial für einen Dynamikgrössensensor vom Kapazitätstyp A method for removing foreign material for a dynamic variable capacitance type sensor |
| 03/31/2005 | US20050068128 Anchorless electrostatically activated micro electromechanical system switch |
| 03/24/2005 | WO2004097910A3 Multi-stable micro electromechanical switches and methods of fabricating same |
| 03/22/2005 | US6870111 Bending mode liquid metal switch |
| 03/17/2005 | US20050059239 Foreign material removing method for capacitance type dynamic quantity sensor |
| 03/16/2005 | CN1595703A Method for manufacturing minitype liquid methanol fuel cell |
| 03/16/2005 | CN1595633A A method for integrating CMOS circuit and bulk silicon MEMS uniwafer |
| 03/03/2005 | WO2004081991A3 Micro parallel kinematic mechanism design and fabrication |
| 03/03/2005 | DE102004033162A1 MEMS mit Drei-Wafer-Struktur MEMS with three-wafer structure |
| 03/02/2005 | CN1588618A Static bonding process with suspending movable sensitive structure |
| 03/02/2005 | CN1588617A Direct bonding method for silicon sheet at low temperature |
| 03/02/2005 | CN1587022A Torque mirror driver of micro electromechanical system, producing method and use |
| 02/24/2005 | US20050042791 Micromachined device having electrically isolated components and a method for making the same |
| 02/23/2005 | CN1585085A Small gap non-binding electrostatic sealing process for sensor |
| 02/22/2005 | US6858911 MEMS actuators |
| 02/17/2005 | US20050035671 Method of forming a micro-rotating device, and a micro-rotating device produced by the method |
| 02/16/2005 | CN1189384C Micromachines |
| 02/15/2005 | US6856217 Micromechanical resonator device and micromechanical device utilizing same |
| 02/03/2005 | US20050023547 MEMS having a three-wafer structure |
| 02/02/2005 | CN1575430A Optical switching element having movable optically transmissive microstructure |
| 02/02/2005 | CN1574151A Anchorless electrostatically activated micro electromechanical system switch |
| 01/26/2005 | CN1186246C Static driven large-displacement micro structure |
| 01/20/2005 | US20050013087 MEMS tunable capacitor based on angular vertical comb drives |
| 01/20/2005 | US20050012562 Seesaw-type MEMS switch for radio frequency and method for manufacturing the same |
| 01/06/2005 | US20050001701 Electrostatic actuator, microswitch, micro optical switch, electronic device, and method of manufacturing electrostatic actuator |
| 01/04/2005 | CA2323914C Mems variable optical delay lines |
| 12/30/2004 | US20040263936 Optical deflection apparatus and manufacturing method thereof, optical deflection array, imaging apparatus, and image projection display apparatus |
| 12/22/2004 | EP1489639A1 Anchorless electrostatically activated micro electromechanical system switch |
| 12/15/2004 | EP1486999A2 Seesaw MEMS switch for radio frequency and its manufacturing method |
| 12/15/2004 | EP1485318A2 Micro-electromechanical systems |
| 12/08/2004 | EP1483046A1 Microcomponent connection system |
| 11/30/2004 | US6825969 MEMS-actuated color light modulator and methods |
| 11/25/2004 | DE10360994A1 Polymerer Flüssigmetallschalter Polymeric liquid metal switch |
| 11/25/2004 | DE10360988A1 Verfahren und Struktur für einen Festkörper-unterstüzten Piezoelektrisch betätigen optischen Längs-Flüssigmetallschalter Method and structure for a solid-unterstüzten Piezoelectric press longitudinal optical liquid metal switch |
| 11/25/2004 | DE10359689A1 Biegemodus-Flüssigmetallschalter Bending mode liquid metal switch |
| 11/25/2004 | DE10356802A1 Flüssigmetallverriegelungsrelaisarray vom Einfügungstyp Liquid metal latching relay array of insertion type |
| 11/23/2004 | CA2468139A1 Electrical cross-talk shields for mems micromirrors |
| 11/23/2004 | CA2468132A1 Electrode configuration for piano mems micromirror |
| 11/18/2004 | US20040226369 Vertical MEMS gyroscope by horizontal driving and fabrication method thereof |
| 11/18/2004 | DE10355147A1 Flüssigmetall-Verriegelungsrelais vom Einfügungstyp Liquid metal latching relay from the insertion type |
| 11/17/2004 | EP1301344A4 Ink jet printhead having a moving nozzle with an externally arranged actuator |
| 11/11/2004 | WO2004097910A2 Multi-stable micro electromechanical switches and methods of fabricating same |
| 11/11/2004 | DE10356678A1 Optisches Flüssigmetallrelais Optical liquid metal relay |
| 11/11/2004 | CA2524388A1 Multi-stable micro electromechanical switches and methods of fabricating same |
| 11/09/2004 | US6813937 Method and apparatus for micromachines, microstructures, nanomachines and nanostructures |
| 11/04/2004 | US20040216988 Multi-stable micro electromechanical switches and methods of fabricating same |
| 11/02/2004 | US6813061 Electrostatic machine element, light diffraction modulation element and image display device |
| 11/02/2004 | US6812055 MEMS devices and methods of manufacture |
| 10/26/2004 | US6809392 Micromachined device having electrically isolated components and a method for making the same |
| 10/20/2004 | CN2649568Y MEMS photoswitch |
| 10/14/2004 | US20040201907 Liquid metal optical relay |
| 10/14/2004 | US20040201312 Method and structure for a slug assisted longitudinal piezoelectrically actuated liquid metal optical switch |
| 10/14/2004 | US20040201309 Insertion-type liquid metal latching relay array |
| 10/14/2004 | US20040200703 Bending mode liquid metal switch |
| 09/28/2004 | US6798939 Bubble stability in an optical switch |
| 09/28/2004 | US6796178 Rotation-type decoupled MEMS gyroscope |
| 09/23/2004 | WO2004081991A2 Micro parallel kinematic mechanism design and fabrication |
| 09/15/2004 | CN1529343A Gold-tin-eutectic-based silicon/silicon bonding method |
| 09/15/2004 | CN1166554C Miniature manipulate with piezoelectric-type flexible drive and adjustable range |
| 09/09/2004 | US20040174583 MEMS-actuated color light modulator and methods |
| 08/31/2004 | US6784630 Use of standoffs to protect atomic resolution storage mover for out-of-plan motion |
| 08/31/2004 | US6784593 Use of standoffs to protect atomic resolution storage mover for out-of-plane motion |
| 08/31/2004 | US6784592 Use of standoffs to protect atomic resolution storage mover for out-of-plane motion |
| 08/24/2004 | US6781075 Electrically isolated liquid metal micro-switches for integrally shielded microcircuits |
| 08/24/2004 | US6779247 Selective removal of sacrificial thin film with adhesive side beneath electrical connecting elements to form windows; etching; depositing dielectric covering |
| 08/05/2004 | US20040149943 Bubble-actuated valve with latching |
| 08/05/2004 | DE10300904A1 Verfahren zur Finessekompensation in einem Fabry-Perot-Bauteil sowie Fabry-Perot-Bauteil mit hoher Finesse A process for Finessekompensation in a Fabry-Perot device and Fabry-Perot component with high finesse |
| 08/04/2004 | EP1443018A1 Rotational micro-electromechanical (mems) structure with parallel electrodes |
| 08/03/2004 | US6770997 Micro-electromechanical energy storage device |
| 07/28/2004 | EP1441132A2 Bubble-actuated valve with latching |
| 07/28/2004 | CN1516913A Processing device for cables or wires |
| 07/23/2004 | CA2455651A1 Bubble-actuated valve with latching |
| 07/22/2004 | US20040141683 Optical switching element having movable optically transmissive microstructure |
| 07/21/2004 | CN1513751A Method of air tight packaging micro computer electric system device using capillary tube method |
| 07/15/2004 | US20040134965 Processing device for cables or wires |
| 07/08/2004 | US20040129953 Mems devices and methods of manufacture |
| 06/30/2004 | EP1434031A2 Mems gyroscope and fabrication method thereof |
| 06/29/2004 | US6755982 Self-aligned micro hinges |
| 06/24/2004 | US20040119354 MEMS based motor |