| Patents for B81B 5 - Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements (874) |
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| 01/30/2008 | CN101112967A Mikro- mechanical component |
| 01/17/2008 | US20080013140 Micro-oscillating member, light-deflector, and image-forming apparatus |
| 12/27/2007 | WO2003057619A3 Apparatus and method for nanoscale and microscale mechanical machining and processing |
| 12/26/2007 | CN101092233A Mems device |
| 12/26/2007 | CN100358094C Static bonding process with suspending movable sensitive structure |
| 12/25/2007 | US7312677 Micro-switching element fabrication method and micro-switching element |
| 12/20/2007 | DE10361411B4 Mischervorrichtung und Verfahren zum Mischen von zumindest zwei Flüssigkeiten Mixer Device and method for mixing at least two fluids |
| 12/19/2007 | CN101088911A Micro-electro mechanical system device and method of forming comb electrodes of the same |
| 12/19/2007 | CN100356566C Semiconductor device with micro electromechanical system |
| 12/12/2007 | CN100355016C Process for producing a movable structure and etchant for silicon oxide film |
| 12/06/2007 | DE102006008315B4 Miniaturisierte Transportsysteme aus einem Formgedächtnis-Polymer und Verfahren zur Herstellung Miniaturized delivery systems made of a shape memory polymer and method for producing |
| 11/28/2007 | EP1860417A2 A pressure sensor having a chamber and a method for fabricating the same |
| 11/28/2007 | EP1858458A2 Mems flow module with pivoting-type baffle |
| 11/28/2007 | CN101077766A Electromechanical element and electronic circuit device, and method for manufacturing the same |
| 11/27/2007 | US7299818 Integrated microvalve and method for manufacturing a microvalve |
| 11/27/2007 | CA2343261C Measurements using tunnelling current between elongate conductors |
| 11/21/2007 | EP1857173A1 Flow adjusting device, micro-reactor and use thereof |
| 11/20/2007 | US7296592 Composite polymer microfluidic control device |
| 11/08/2007 | WO2007125969A1 Micro machine switch, filter circuit, duplexer circuit, and communication device |
| 10/17/2007 | CN101056072A Staggered vertical comb drive fabrication method |
| 10/17/2007 | CN100343949C Micro-switching element fabrication method and micro-switching element |
| 10/11/2007 | DE10214523B4 Mikromechanisches Bauelement mit magnetischer Aktuation Micro-mechanical device with magnetic actuation |
| 10/06/2007 | CA2584145A1 Piano mems with hidden hinge |
| 10/02/2007 | US7276834 Electrostatically oscillated device |
| 09/20/2007 | WO2007104811A1 Electrooptical reflector device and corresponding actuation methods |
| 09/18/2007 | US7270868 Micromechanical component |
| 09/12/2007 | CN101033057A Microstructure, semiconductor device, and manufacturing method of the microstructure |
| 09/12/2007 | CN100337093C Physical quantity sensor having sensor chip and circuit chip |
| 09/11/2007 | US7266998 Method and apparatus for micromachines, microstructures, nanomachines and nanostructures |
| 09/06/2007 | DE102006008315A1 Miniaturized transport system for adjusted forward motion of material, comprises flick hair epithelium anchored with multiple substrates, where flick hairs from shape retention polymer are switched at selected distance by stimuli exposure |
| 09/05/2007 | EP1829953A1 Slide material, process for producing the same and apparatus utilizing the slide material |
| 09/04/2007 | US7265647 High isolation tunable MEMS capacitive switch |
| 09/04/2007 | US7263885 Physical quantity sensor having sensor chip and circuit chip |
| 08/29/2007 | CN101026053A Downward type MEMS switch and method for fabricating the same |
| 08/29/2007 | CN100334479C Optical modulator and manufacturing method thereof |
| 08/02/2007 | US20070176719 Magnetically Actuated Microelectromechanical Systems Actuator |
| 08/01/2007 | CN1329757C Method and structure used on stub regulatable resonance cavity of photon crystal |
| 08/01/2007 | CN1329284C Fabrication of a reflective spatial light modulator |
| 07/19/2007 | DE10141561B4 Mikrospiegelgerät und dieses verwendender Projektor Micromirror device and use this projector Direction |
| 07/18/2007 | EP1301345B1 Method of manufacture of an ink jet printhead having a moving nozzle with an externally arranged actuator |
| 07/18/2007 | CN101000842A Mems开关 Mems switch |
| 07/12/2007 | US20070157712 Micromotion device and scanning probe microscope |
| 07/11/2007 | CN1994861A All-optical micromachine non-frigorific infrared thermal imaging chip structure and its production method |
| 07/10/2007 | US7240420 System and method for post-fabrication reduction of minimum feature size spacing of microcomponents |
| 07/03/2007 | US7239054 Method of forming a micro-rotating device, and a micro-rotating device produced by the method |
| 06/28/2007 | DE102005059905A1 Mikromechanisches Bauelement und Herstellungsverfahren Micromechanical component and manufacturing processes |
| 06/06/2007 | CN1975956A Piezoelectric RF MEMS device and method of fabricating the same |
| 06/06/2007 | CN1319847C Electrothermal-driven flexile micro-gripper |
| 06/05/2007 | US7225674 Self-stabilizing, floating microelectromechanical device |
| 05/31/2007 | WO2007060523A1 Microfluidic structures |
| 05/31/2007 | CA2637885A1 Microfluidic structures |
| 05/30/2007 | CN1318878C Micro rocking device having torsion bar |
| 05/24/2007 | WO2007059063A1 Cutting tool having variable movement in a z-direction laterally along a work piece for making microstructures |
| 05/23/2007 | EP1786723A1 Embedded fluid mixing device using a homopolar motor |
| 05/23/2007 | EP1301344B1 Ink jet printhead having a moving nozzle with an externally arranged actuator |
| 05/22/2007 | US7221247 Magnetically actuated microelectromechanical systems actuator |
| 05/16/2007 | EP1785391A2 Multi-stable electromechanical switches and methods of fabricating same |
| 05/15/2007 | CA2356793C Micro-switches for downhole use |
| 05/10/2007 | DE10161492C5 Verfahren zur Herstellung und Magazinierung von Mikrobauteilen, Magazin und Montageverfahren für Mikrobauteile Process for the preparation and magazining microcomponents, magazine and installation procedures for micro-components |
| 05/02/2007 | CN1313355C Single piece of pneumatic gelatious tiny valve |
| 04/25/2007 | CN1954058A Slide material, process for producing the same and device using the slide material |
| 04/05/2007 | WO2007036613A1 System and method for handling microscopic objects, and computer program |
| 04/04/2007 | CN1309040C A method for integrating CMOS circuit and bulk silicon MEMS uniwafer |
| 03/28/2007 | CN1307683C Small gap non-binding electrostatic sealing process for sensor |
| 03/27/2007 | US7196454 Positioning device for microscopic motion |
| 03/22/2007 | WO2007031606A1 A method for the micromechanical measurement of acceleration and a micromechanical acceleration sensor |
| 03/15/2007 | US20070057994 Inkjet printhead having row of nozzle actuators interleaved with nozzles of adjacent row |
| 03/14/2007 | CN2878348Y Microstructure single direction bending pulling fatigue experimental device |
| 03/14/2007 | CN1305110C Direct bonding method for silicon sheet at low temperature |
| 03/14/2007 | CN1304273C Gear and method of making the same |
| 03/13/2007 | US7190245 Multi-stable micro electromechanical switches and methods of fabricating same |
| 02/22/2007 | US20070041682 Micro mirror unit and its manufacturing process, and optical switch with the micro mirror unit employed therein |
| 02/06/2007 | US7172735 Modular microreaction system |
| 01/30/2007 | US7169314 Microfabricated elastomeric valve and pump systems |
| 01/25/2007 | WO2007011052A1 Fluid control device |
| 01/18/2007 | WO2007006154A1 Optimized bi-directional electrostatic actuators |
| 01/18/2007 | US20070012108 Method for manufacturing a micromechanical motion sensor, and a micromechanical motion sensor |
| 01/17/2007 | CN1895992A Microelectromechanical system |
| 01/16/2007 | US7164334 Electrostatic actuator, microswitch, micro optical switch, electronic device, and method of manufacturing electrostatic actuator |
| 01/11/2007 | US20070009203 Multi-stable micro electromechanical switches and methods of fabricating same |
| 01/09/2007 | US7159462 Electrostatically oscillated device |
| 12/26/2006 | US7152962 Ink jet printhead having a moving nozzle with an externally arranged actuator |
| 12/20/2006 | CN1290677C Mini clamp with dual-chip |
| 12/06/2006 | CN1288831C Walking actuator and method for driving same |
| 11/23/2006 | CA2607918A1 Micro-electro-mechanical transducers |
| 11/16/2006 | US20060255694 Electrostatically oscillated device |
| 11/16/2006 | DE10239048B4 Integrierter Schaltkreis Integrated circuit |
| 11/14/2006 | US7135804 Micro-mirror with rotor structure |
| 11/09/2006 | US20060250201 Micro relay |
| 10/19/2006 | WO2006109741A1 Mixed flow generating device and fixed flow generating method |
| 10/19/2006 | DE102005017653A1 Device and method to control liquid flow has two sections of channel whereby liquid flows from one to the other and can be held at first section using capillary stop and said stop can be bypassed if wished by moving sections |
| 10/18/2006 | CN1280177C Application of fixator for preventing outer-plane movement of minimal resolution memory actuator |
| 10/17/2006 | US7123111 Micro-electromechanical systems |
| 10/11/2006 | CN1279595C Base plate with minitype connection components and its preparation method |
| 10/11/2006 | CN1278920C Torque mirror driver of micro electromechanical system, producing method and use |
| 10/05/2006 | CA2602103A1 Micromechanical component and method for fabricating a micromechanical component |
| 10/03/2006 | US7116542 Micro-switches for downhole use |
| 10/03/2006 | US7115437 Micromachined device having electrically isolated components and a method for making the same |
| 09/26/2006 | US7113321 Optical deflection apparatus and manufacturing method thereof, optical deflection array, imaging apparatus, and image projection display apparatus |
| 09/20/2006 | CN1276536C Method for manufacturing minitype liquid methanol fuel cell |