| Patents for B81B 5 - Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements (874) |
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| 04/04/2001 | EP1089261A1 A method of producing suspended elements for electrical connection between two portions of a micro-mechanism which can move relative to one another |
| 03/20/2001 | US6204737 Piezoelectric resonator structures with a bending element performing a voltage controlled switching function |
| 03/14/2001 | EP1082740A1 Micro-mechanical elements |
| 03/06/2001 | US6198145 Method for manufacturing a semiconductor material integrated microactuator, in particular for a hard disc mobile read/write head, and a microactuator obtained thereby |
| 03/06/2001 | US6197610 Method of making small gaps for small electrical/mechanical devices |
| 01/24/2001 | CN1281061A Method for protecting sacrificial layer of movable structure in deep-reaction ion etching process |
| 01/18/2001 | CA2714788A1 Merged-mask micro-machining process |
| 11/02/2000 | WO2000065626A1 Micromachine switch and method of manufacture thereof |
| 09/28/2000 | WO2000025160A9 Fluid-encapsulated mems optical switch |
| 09/14/2000 | WO2000023266A9 Method of forming plastically deformable microstructures |
| 07/25/2000 | US6094293 Optical switching apparatus for use in an optical communication system |
| 07/13/2000 | WO2000041200A1 Micromachine switch |
| 07/04/2000 | US6082208 Method for fabricating five-level microelectromechanical structures and microelectromechanical transmission formed |
| 06/22/2000 | WO2000036740A1 Rotary electrostatic microactuator |
| 06/22/2000 | CA2356905A1 Optical microswitch with rotary electrostatic microactuator |
| 06/22/2000 | CA2354604A1 Rotary electrostatic microactuator |
| 05/04/2000 | WO2000025160A1 Fluid-encapsulated mems optical switch |
| 05/04/2000 | CA2346451A1 Fluid-encapsulated mems optical switch |
| 04/27/2000 | WO2000023266A1 Method of forming plastically deformable microstructures |
| 04/12/2000 | EP0892981A4 A magnetic relay system and method capable of microfabrication production |
| 03/16/2000 | WO2000014476A1 Measurements using tunnelling current between elongate conductors |
| 12/09/1999 | WO1999063559A1 Micro-mechanical elements |
| 12/08/1999 | EP0963000A2 Resonator structures |
| 12/08/1999 | EP0962999A2 Resonator structures |
| 12/08/1999 | CN1237828A Resonator structures |
| 12/08/1999 | CN1237827A Resonator structures |
| 11/30/1999 | US5994159 Self-assemblying micro-mechanical device |
| 11/04/1999 | DE19819458A1 Micromechanical component manufacturing method for e.g. capacitive acceleration sensor |
| 10/21/1999 | DE19817357A1 Micromechanical structural element, especially acceleration sensor |
| 10/19/1999 | US5970315 Particularly useful for data storage applications, isotropically etching sacrificial layer under at least a beam portion of said microelectromechanical device |
| 09/21/1999 | US5955818 Machine structures fabricated of multiple microstructure layers |
| 06/23/1999 | EP0924763A2 Self-assembling micro-mechanical device |
| 06/09/1999 | EP0920946A2 Part fabricating method and part fabricating apparatus |
| 05/06/1999 | EP0913921A1 Method for manufacturing a semiconductor material integrated micractuator, in particular for a hard disc mobile read/write head, and a microactuator obtained thereby |
| 03/16/1999 | US5883470 Fast atomic beam source with an inductively coupled plasma generator |
| 01/27/1999 | EP0892981A1 A magnetic relay system and method capable of microfabrication production |
| 12/08/1998 | US5847631 Magnetic relay system and method capable of microfabrication production |
| 10/28/1998 | EP0830725A4 High performance magnetic bearing systems using high temperature superconductors |
| 10/06/1998 | US5818148 Electromechanical switch |
| 09/09/1998 | CN1192828A High performance magnetic bearing system using high temp. superconductors |
| 06/09/1998 | US5763318 Method of making a machine structures fabricated of mutiple microstructure layers |
| 05/05/1998 | US5747426 Stabilizing force; efficient energy storage |
| 03/25/1998 | EP0830725A1 High performance magnetic bearing systems using high temperature superconductors |
| 02/10/1998 | US5717631 Microelectromechanical structure and process of making same |
| 10/23/1997 | WO1997039468A1 A magnetic relay system and method capable of microfabrication production |
| 10/23/1997 | CA2251585A1 A magnetic relay system and method capable of microfabrication production |
| 09/10/1997 | EP0794543A2 Electromechanical switch |
| 08/20/1997 | EP0790757A1 Fast atomic beam source |
| 07/08/1997 | US5646464 Planar micro-motor with bifilar micro-coils |
| 05/06/1997 | US5626779 Micromachine transducer with cantilevered movable portion |
| 02/06/1997 | WO1997004451A1 Microelectromechanical structure and process of making same |
| 02/05/1997 | EP0757431A2 Machine structures fabricated of multiple microstructure layers |
| 01/07/1997 | US5592037 Analog display device with micro-motor drive means |
| 12/19/1996 | WO1996041409A1 High performance magnetic bearing systems using high temperature superconductors |
| 02/20/1996 | US5493156 Equipment using a micro-actuator |
| 01/02/1996 | US5481188 Method and apparatus for detecting the movement of an object with a micro machine that responds to a change in magnetic flux associated with the object |
| 10/24/1995 | US5461272 Planar micro-actuator |
| 05/02/1995 | US5412265 Planar micro-motor and method of fabrication |
| 11/15/1994 | US5364742 Micro-miniature structures and method of fabrication thereof |
| 10/12/1994 | EP0619642A2 Micro-motor and method of fabrication |
| 07/05/1994 | US5327033 Micromechanical magnetic devices |
| 04/20/1994 | CN1085667A Micro-miniature structures and method of fabrication thereof |
| 04/13/1994 | EP0592094A2 Micro-miniature structure fabrication |
| 10/27/1993 | EP0567038A1 Thermal urger |
| 10/27/1993 | CN1077781A Thermal urger |
| 10/21/1993 | CA2082080A1 Thermal urger |
| 09/14/1993 | US5245193 Micromechanics forming method and micromechanics |
| 09/09/1993 | DE4306487A1 Detecting absolute displacement of object, e.g. servomotor shaft - operating micromachine with elements made from polycrystalline silicon in magnetic field as object moves, and storing relative positions of micromachine elements |
| 05/04/1993 | US5206983 Method of manufacturing micromechanical devices |
| 12/30/1992 | EP0520631A2 Micromechanical magnetic devices and method of producing the same |
| 06/09/1992 | US5121089 Micro-machined switch and method of fabrication |
| 05/06/1992 | EP0484142A2 Micro-machined switch and method of fabrication |
| 05/07/1991 | US5013954 Electrostatic micro-motor apparatus |
| 12/19/1990 | EP0403179A1 Electrostatic micro-motor apparatus |