| Patents for B81B 7 - Micro-structural systems (8,983) |
|---|
| 10/27/2010 | CN101870446A Multichannel carbon nanotube sensor and preparation method thereof |
| 10/27/2010 | CN101870445A Circuit lead structure and micro-electromechanical system |
| 10/27/2010 | CN101870444A Micro electro mechanical system chip with functional connecting lead |
| 10/27/2010 | CN101870443A Multilayer line conduction type wafer-level chip of micro-electro-mechanical system |
| 10/21/2010 | WO2010121176A2 Microtensiometer |
| 10/21/2010 | WO2010075550A3 Method and apparatus for chemical detection and release |
| 10/21/2010 | DE102010011631A1 Kointegrierter MEMS-Sensor und Verfahren hierzu Kointegrierter MEMS sensor and method therefor |
| 10/21/2010 | DE102009002485A1 Verfahren zur Herstellung von verkappten MEMS-Bauelementen Process for the preparation of capped MEMS devices |
| 10/21/2010 | DE102009002413A1 Device for detecting mechanical displacement, particularly for use as analog-digital-converter for digitalizing electrical or thermodynamic parameter, has two elements, where former element is movably arranged relative to latter element |
| 10/21/2010 | DE102009002412A1 Mechanical deflection determining device e.g. analog-digital converter, that is utilized for digitization of voltage, has current measuring device measuring currents between contact elements or pairs in multiple deflection positions of mass |
| 10/21/2010 | DE102009002376A1 Multichip-Sensormodul und Verfahren dessen Herstellung Multi-chip sensor module and method of manufacturing |
| 10/21/2010 | DE102008002674B9 Mikroventil und Abdichteinrichtung zur Verwendung in einem Mikrofluidiksystem sowie Verfahren zu deren Herstellung Micro valve and sealing means for use in a microfluidic system, as well as processes for their preparation |
| 10/20/2010 | EP2240401A1 Microfluidic microarray system and method for the multiplexed analysis of biomolecules |
| 10/20/2010 | EP2240400A1 Microfluidic device and method of operation |
| 10/20/2010 | EP2240399A1 Microfluidic device and methods of operation and making |
| 10/20/2010 | EP1540727B1 Method for sealing a microcavity and package comprising at least one microcavity |
| 10/20/2010 | CN201610373U Mems传感器 Mems Sensor |
| 10/20/2010 | CN101532879B Micro-spectrum analysis method and device based on Fresnel zone plate |
| 10/19/2010 | CA2519233C Integrated capacitive microfluidic sensors method and apparatus |
| 10/16/2010 | CA2700114A1 Microprocessing of synthetic quartz glass substrate |
| 10/14/2010 | WO2010118154A2 Mass sensing device for liquid environment |
| 10/14/2010 | WO2010117615A2 Sensor device with reduced parasitic-induced error |
| 10/14/2010 | WO2010117593A2 Bridge sensor with collocated electronics and two-wire interface |
| 10/14/2010 | US20100258441 Manipulation of Beads in Droplets and Methods for Splitting Droplets |
| 10/14/2010 | DE102009016712A1 Einweg-Mikrofluidik-Testkassette zur Bioassay von Analyten Disposable microfluidic test cassette for bioassay of analytes |
| 10/13/2010 | EP2239619A1 Optical device, sealing board and method for manufacturing optical device |
| 10/13/2010 | CN201605163U 一种带有梳形阻尼孔的大电容微惯性传感器 Large capacitive micro inertial sensor with a comb-shaped orifice of |
| 10/13/2010 | CN201605162U 半导体结构 The semiconductor structure |
| 10/13/2010 | CN101858931A Frame type capacitive silicon micromechanical accelerometer |
| 10/13/2010 | CN101858928A Capacitance-type triaxial accelerator for micromotor system |
| 10/07/2010 | WO2010113759A1 Film for resin spacer, light-receiving device and method for manufacturing same, and mems device and method for manufacturing same |
| 10/07/2010 | WO2010112676A1 A casing of a sensor measuring oscillations, and a sensor for measuring oscillations |
| 10/07/2010 | DE102009029281A1 Module, particularly sensor module, is provided with component and connecting element, where component is connected to another component in electrically conductive manner |
| 10/07/2010 | DE102009002066A1 Verfahren zum Erfassen von Beschleunigungen und Drehraten sowie MEMS-Sensor A method of detecting acceleration and angular rate sensor, as well as MEMS |
| 10/07/2010 | DE102009001969A1 Sensormodul Sensor module |
| 10/07/2010 | CA2757560A1 Multi-primer amplification method for barcoding of target nucleic acids |
| 10/06/2010 | EP2235747A1 In-situ cavity integrated circuit package |
| 10/06/2010 | EP2234916A2 Universal sample preparation system and use in an integrated analysis system |
| 10/06/2010 | CN201600387U 一种大振子质量的微惯性传感器 One kind of boosted sub-quality micro inertial sensors |
| 10/06/2010 | CN201598171U 具有应力隔离的mems惯性传感器封装结构 Mems inertial sensor package structure having a stress isolation |
| 10/06/2010 | CN1721993B System and method for moving an object employing piezo actuators |
| 10/06/2010 | CN101852816A Piezoresistive monolithic integrated tri-axial acceleration sensor and manufacturing method thereof |
| 10/06/2010 | CN101852770A Quick-response surface acoustic wave gas sensor and method for preparing same |
| 10/06/2010 | CN101850943A Mems sensor and mems sensor manufacture method |
| 10/06/2010 | CN101850942A Micro electromechanical system packaging structure |
| 10/05/2010 | US7808091 Wafer structure with discrete gettering material |
| 09/30/2010 | WO2010111153A2 Display device with openings between sub-pixels and method of making same |
| 09/30/2010 | WO2010110989A2 Vertically integrated mems acceleration transducer |
| 09/30/2010 | WO2010090798A3 Substrate bonding with metal germanium silicon material |
| 09/30/2010 | DE102009001930A1 Sensorbaustein Sensor module |
| 09/30/2010 | DE102009001922A1 Mikro-Gyroskop zur Ermittlung von Rotationsbewegungen um drei senkrecht aufeinanderstehende Raumachsen x, y und z Micro-gyroscope for detecting rotational movements about three mutually perpendicular axes x, y and z |
| 09/30/2010 | DE102009001856A1 Vorrichtung zum resonanten Antreiben eines mikromechanischen Systems Device for driving a resonant micromechanical system |
| 09/30/2010 | DE102009001847A1 Micro-mechanical component for sensor device, has holder, where seismic measure is connected with holder by spring in displacing manner, and condenser surfaces of two condensers are coupled to common electrical contact |
| 09/29/2010 | EP2232205A2 Mems structure for flow sensor |
| 09/29/2010 | CN101847664A Electron device package and method for manufacturing same |
| 09/29/2010 | CN101844739A Manufacturing method of subminiature MEMS gyroscope sensor |
| 09/29/2010 | CN101483401B Micro thermoelectric power source for premixing burner |
| 09/29/2010 | CN101271124B L-beam piezoresistance type micro-accelerometer and production method thereof |
| 09/23/2010 | WO2010107619A2 Substrate with multiple encapsulated pressures |
| 09/23/2010 | WO2010107436A1 Three phase capacitance-based sensing |
| 09/23/2010 | WO2010106484A1 Bond frame integrated in electronic circuit |
| 09/23/2010 | US20100238532 Scanner apparatus having electromagnetic radiation devices coupled to mems actuators |
| 09/23/2010 | US20100237446 Thin film encapsulation of mems devices |
| 09/22/2010 | CN201589787U Capacitance type bidirectional micro inertial sensor |
| 09/22/2010 | CN101842313A Micromechanical system |
| 09/22/2010 | CN101840867A Method for producing an electronic module |
| 09/22/2010 | CN101839923A Two-axis accelerometer based on SOI technology |
| 09/22/2010 | CN101837944A Method for forming a gyroscope and accelerometer |
| 09/22/2010 | CN101837943A Sensor for quantitatively measuring mechanical and electrical properties and microstructure and manufacturing method thereof |
| 09/21/2010 | CA2393603C Microchip devices for delivery of molecules and methods of fabrication thereof |
| 09/16/2010 | WO2010104518A1 Structure and fabrication of a microscale flow-rate/ skin friction sensor |
| 09/16/2010 | WO2010104478A1 Apparatus for processing a biological and/or chemical sample |
| 09/16/2010 | DE102010002796A1 Doppelaxialer Drehratensensor Doppelaxialer rotation rate sensor |
| 09/16/2010 | DE102009010096A1 Scanning probe drive unit for moving probe of scanning probe microscope, particularly scanning force microscope, has probe mounting bracket for fixing probe holder with probe, where probe holder actuator is provided for moving probe holder |
| 09/16/2010 | DE102009006822A1 Mikrostruktur, Verfahren zu deren Herstellung, Vorrichtung zum Bonden einer Mikrostruktur und Mikrosystem Microstructure, to processes for their preparation, to apparatus for bonding a micro-structure and micro-system |
| 09/16/2010 | DE102009001398A1 Pflaster zur Detektion von Bewegungen eines Körpers Patch for detecting movements of a body |
| 09/16/2010 | DE102004011203B4 Verfahren zum Montieren von Halbleiterchips und entsprechende Halbleiterchipanordnung A method for mounting semiconductor chips and corresponding semiconductor chip system |
| 09/15/2010 | CN101835076A Capacitive sensing device and making method thereof |
| 09/15/2010 | CN101833017A Wireless calibration system of centrifugal micro-machine acceleration transducer |
| 09/15/2010 | CN101832965A Laccase biosensor based on magnetic carbon nano tube and chitosan/silicon dioxide gel and preparation method and application thereof |
| 09/15/2010 | CN101832831A Piezoresistive sensor chip and manufacture method thereof |
| 09/15/2010 | CN101830426A MEMS sensor, MEMS sensor manufacturing method, and electronic device |
| 09/15/2010 | CN101509788B Capacitance silicon micromechanical rainfall sensor |
| 09/14/2010 | USRE41673 Micro electromechanical system controlled organic LED and pixel arrays and method of using and of manufacturing same |
| 09/14/2010 | US7795723 Capped sensor |
| 09/10/2010 | WO2010065804A3 Fluid flow control assembly |
| 09/10/2010 | CA2754553A1 An apparatus for generating power responsive to mechanical vibration |
| 09/09/2010 | US20100224274 Liquid control apparatus |
| 09/09/2010 | DE102010000729A1 Halbleitervorrichtung und Verfahren zu deren Fertigung A semiconductor device and method of manufacturing |
| 09/09/2010 | DE102009001381A1 Antriebselement und Verfahren zum Betrieb eines Antriebselements Drive element and method for operating a drive member |
| 09/09/2010 | DE102009001247A1 Mikro-elektro-mechanischer Sensor Micro-electro-mechanical sensor |
| 09/08/2010 | CN101826535A Monolithic integrated chip for micro-electro-mechanical device and integrated circuit device |
| 09/08/2010 | CN101825505A MEMS pressure sensitive chip and manufacturing method thereof |
| 09/07/2010 | US7791440 Microfabricated system for magnetic field generation and focusing |
| 09/07/2010 | US7788976 Semiconductor acceleration sensor device and method for manufacturing the same |
| 09/02/2010 | WO2010096928A1 Digital microfluidic liquid-liquid extraction device and method of use thereof |
| 09/02/2010 | DE102010000818A1 MEMS-Resonatorbauelemente MEMS resonator devices |
| 09/02/2010 | DE102009001248A1 MEMS-Gyroskop zur Ermittlung von Rotationsbewegungen um eine x-, y- oder z-Achse MEMS gyroscope for detecting rotational movement about an x-, y- or z-axis |
| 09/02/2010 | DE102009001244A1 Mikro-Gyroskop zur Ermittlung von Rotationsbewegungen um eine x-, y- oder z-Achse Micro-gyroscope for detecting rotational movement about an x-, y- or z-axis |
| 09/02/2010 | DE102006061182B4 Ultraschallsensor Ultrasonic sensor |