| Patents for B81B 7 - Micro-structural systems (8,983) |
|---|
| 10/20/2011 | WO2011082241A3 Microelectromechanical system having movable element integrated into leadframe-based package |
| 10/20/2011 | DE102011007549A1 Gehäustes akustisches Wandlergerät mit Abschirmung von elektromagnetischer Interferenz A housed acoustic transducer device with shielding electromagnetic interference |
| 10/19/2011 | EP2377154A1 Via structure and method thereof |
| 10/19/2011 | EP2377138A1 Micro-electro-mechanical switch beam construction with minimized beam distortion and method for constructing |
| 10/19/2011 | CN101024481B Micro electro mechanical system, semiconductor device, and manufacturing method thereof |
| 10/18/2011 | CA2412299C Microsystem process networks |
| 10/13/2011 | WO2011127120A1 Micro-electro-mechanical switch beam construction with minimized beam distortion and method for constructing |
| 10/13/2011 | WO2011125494A1 Optical scanning device and image display device |
| 10/13/2011 | US20110251109 Fluidic methods for devices for parallel chemical reactions |
| 10/13/2011 | US20110247934 Microelectrode array architecture |
| 10/13/2011 | DE102010032799A1 Mikroventil mit elastisch verformbarer Ventillippe, Herstellungsverfahren und Mikropumpe Microvalve with elastically deformable valve lip, manufacturing processes and micropump |
| 10/13/2011 | DE102010014101A1 Hybrid circuit for impedance matching circuit used in mobile communication apparatus, has adjustable impedance elements which are designed based on different technologies, different physical effects and different action principles |
| 10/12/2011 | EP2375232A1 Pressure sensor assembly |
| 10/12/2011 | EP2375219A1 Inertial sensor and method for manufacturing the same |
| 10/12/2011 | EP2374285A1 Miniature transducer assembly with integrated de-coupling coils |
| 10/12/2011 | CN102216201A Encapsulation method |
| 10/12/2011 | CN102213673A MEMS infrared emission gas-sensitive sensor |
| 10/12/2011 | CN101417783B Micromechanical device and method of manufacturing micromechanical device |
| 10/06/2011 | WO2011122932A1 Planar micropump with integrated passive micromixers |
| 10/06/2011 | WO2011122410A1 Optical scanning device and image display device |
| 10/06/2011 | DE102010003488A1 Method for manufacturing integrated micro-electromechanical system component of flux sensor, involves achieving mechanical mobility of structural elements by removal of layer portions of layer stack of substrate rear side |
| 10/05/2011 | EP2373060A2 Silicon condenser microphone and manufacturing method |
| 10/05/2011 | EP2371760A1 Housing for vacuum encapsulation of an electromechanical microsystem, associated assembly and method for detecting a solder problem in such an assembly |
| 10/05/2011 | CN102205941A Micro electro mechanical system (MEMS) process-based micro atomic cavity device air tightness package and method |
| 10/05/2011 | CN101276707B MEMS device and portable communication terminal with said MEMS device |
| 10/05/2011 | CN101151206B Methods and apparatus for actuating displays |
| 09/29/2011 | WO2011116642A1 Mems device and method of forming the same |
| 09/29/2011 | DE102010012607A1 HF-MEMS-Schalter RF MEMS switch |
| 09/29/2011 | DE102007015726B4 Auslenkbare Struktur, mikromechanische Struktur mit derselben und Verfahren zur Einstellung einer mikromechanischen Struktur Deflectable structure, micromechanical structure with the same and method for adjusting a micromechanical structure |
| 09/28/2011 | CN102203001A Transducer with decoupled sensing in mutually orthogonal directions |
| 09/28/2011 | CN102198925A MEMS device and forming method thereof |
| 09/28/2011 | CN102198924A Electronic device |
| 09/28/2011 | CN101561510B Chip of three-dimensional MEMS geophone and preparation method thereof |
| 09/28/2011 | CN101276053B Micro oscillating device and micro oscillating device array |
| 09/22/2011 | WO2011115580A1 A process for making an array |
| 09/22/2011 | DE102011001189A1 Mikroelektrode zur Zurückweisung von Bewegungsartefakten Microelectrode to reject motion artifacts |
| 09/22/2011 | DE102010012042A1 Bauelement mit einem Chip in einem Hohlraum und einer spannungsreduzierten Befestigung Component with a chip in a cavity and a voltage reduced fastening |
| 09/22/2011 | DE102007021920B4 Vorrichtung zum Entewerfen eines mikromechanischen Bauelements mit angepasster Empfindlichkeit, Verfahren zur Herstellung eines mikromechanischen Bauelements und eines mikromechanischen Systems An apparatus for subjecting a duck micromechanical component with adapted sensitivity, methods of making a micromechanical device and a micromechanical system |
| 09/21/2011 | EP2366658A2 Electrode structure for a microdevice package |
| 09/21/2011 | EP2365934A1 Functional capping |
| 09/21/2011 | EP1866235B1 Mems actuators and switches |
| 09/21/2011 | EP1068638B1 Wafer-pair having chambers sealed with a deposited layer and method for forming wafer-pair |
| 09/21/2011 | CN102196989A An integrated component and a method of manufacturing an integrated component |
| 09/21/2011 | CN102190286A Method for fabricating MEMS device and MEMS device |
| 09/21/2011 | CN102190285A Manufacturing method of MEMS device, and substrate used therefor |
| 09/21/2011 | CN102190282A MEMS (Micro Electro Mechanical System) packaging structure and manufacturing method thereof |
| 09/21/2011 | CN102190281A Chip package and method for forming the same |
| 09/21/2011 | CN102190280A Micromechanical component and method for manufacturing a micromechanical component |
| 09/21/2011 | CN102190279A 半导体装置 Semiconductor device |
| 09/21/2011 | CN102190278A Semiconductor device and microphone |
| 09/21/2011 | CN102190277A Electrode structure and microdevice package provided therewith |
| 09/21/2011 | CN102190276A Micro electro mechanical device and packaging manufacture technology thereof |
| 09/21/2011 | CN101559914B Digital micro-droplet drive with deep submicron pore structure and manufacturing method thereof |
| 09/21/2011 | CN101519183B Mems packaging including integrated circuit dies |
| 09/20/2011 | CA2631009C Spring, mirror element, mirror array and optical switch |
| 09/15/2011 | WO2011110185A1 Micro-optical system for forming visual images |
| 09/15/2011 | WO2011060188A3 Manufacturing a mems having electrically connected front plate and back plate |
| 09/15/2011 | US20110220590 Temperature Adjustment of a Fluidic Sample within a Fluidic Device |
| 09/15/2011 | DE102010002682A1 Turning rate sensing device e.g. micromechanical turning rate sensor, for use in e.g. operation region of motor car, has display arm whose end region is connected with base part, and another display arm directed anti-parallel to former arm |
| 09/14/2011 | EP2365521A2 Thin film wafer level package |
| 09/14/2011 | CN201974257U 一种谐振式压力检测装置 One kind of resonant pressure detection device |
| 09/14/2011 | CN201974255U 压力传感器用微晶玻璃密封基座 Glass-ceramic pressure sensor seal base |
| 09/14/2011 | CN201974159U 包括mems反射镜的轮廓传感器 Including mems mirror profile sensors |
| 09/14/2011 | CN102180441A 微机电装置及其制作方法 MEMS device and manufacturing method thereof |
| 09/14/2011 | CN102180439A Carbon microtructure with graphene integrated on surface and preparation method thereof |
| 09/14/2011 | CN102180436A Semiconductor device and manufacturing method of the same |
| 09/14/2011 | CN101497422B Low-temperature glass solder bonding and encapsulating method based on disc level glass micro-chamber |
| 09/14/2011 | CN101298987B Robustness tuning fork vibrating type micromechanical gyroscope |
| 09/14/2011 | CN101279707B Deflectable structure, micromechanical structure comprising same, and method for adjusting a micromechanical structure |
| 09/13/2011 | US8018077 Electromechanical system having a controlled atmosphere, and method of fabricating same |
| 09/13/2011 | US8018049 Silicon condenser microphone and manufacturing method |
| 09/13/2011 | US8017443 Light transmissive cover, device provided with same and methods for manufacturing them |
| 09/13/2011 | CA2583107C High performance differential actuator for robotic interaction tasks |
| 09/09/2011 | WO2011071685A3 Micro electromechanical systems (mems) having a gap stop and method therefor |
| 09/07/2011 | CN201962063U 一种嵌入横向可动电极的微惯性传感器 A transversely movable electrode embedded micro inertial sensors |
| 09/07/2011 | CN102175909A Micro-electro-mechanical system (MEMS) cantilever type microwave power automatic detection system and detection method and preparation method thereof |
| 09/07/2011 | CN102175381A Pressure sensor and preparation method thereof based on composite plating of carbon nano tube and metallic copper |
| 09/07/2011 | CN102175362A Multifunctional flexible touch sensor |
| 09/07/2011 | CN102175305A Single chip integrated trivector vibration sensor |
| 09/07/2011 | CN102173377A Semiconductor device and manufacturing method thereof |
| 09/07/2011 | CN102173375A 电子装置 Electronic devices |
| 09/07/2011 | CN101819214B Integrated anemograph based on ceramics wafer level package and preparation method thereof |
| 09/07/2011 | CN101692123B Micro-electromechanical microwave loss compensating microwave power detector |
| 09/07/2011 | CN101683967B Wafer capsulation method used for radio-frequency micro electromechanical system |
| 09/07/2011 | CN101497017B Microflow control structure |
| 09/01/2011 | WO2011103720A1 Semiconductor package for mems device and method of manufacturing the same |
| 09/01/2011 | US20110210409 Surface Mount Silicon Condenser Microphone Package |
| 09/01/2011 | DE102010043980A1 Sensor i.e. gyroscope, has micromechanical structure comprising substrate, structure firmly connected with substrate, and another structure movably arranged at substrate, where latter structure is formed for enclosing former structure |
| 09/01/2011 | DE102009006822B4 Mikrostruktur, Verfahren zu deren Herstellung, Vorrichtung zum Bonden einer Mikrostruktur und Mikrosystem Microstructure, to processes for their preparation, to apparatus for bonding a micro-structure and micro-system |
| 08/31/2011 | CN102171134A Microvalve device with improved fluid routing |
| 08/31/2011 | CN102169249A Mixed type micro-electromechanical device |
| 08/31/2011 | CN102167281A Carbon micro structure with carbon nano structure integrated on surface, and preparation method thereof |
| 08/31/2011 | CN102167280A Super-hydrophobic silicon micron-nano composite structure and preparation method thereof |
| 08/31/2011 | CN102167279A Thermal sensor using a vibrating MEMS resonator of a chip interconnect layer |
| 08/31/2011 | CN102167278A Zinc oxide micro/nano composite structure array film and preparation method thereof |
| 08/31/2011 | CN102167277A Sensor system |
| 08/31/2011 | CN101759136B Fully-decoupled vibrating micromechanical gyroscope |
| 08/31/2011 | CN101738355B Micro electro mechanical system (MEMS) technology-based viscosity transducer chip and preparation method thereof |
| 08/31/2011 | CN101661853B Shutting electric heating bistable state microswitch |
| 08/31/2011 | CN101625372B Micro machine differential capacitance accelerometer with symmetrical structure |