Patents for G21K 5 - Irradiation devices (9,144)
12/2010
12/29/2010EP1112578B1 Apparatus for generating focused electromagnetic radiation
12/28/2010US7861207 Fragmentation point and simulation site adjustment for resolution enhancement techniques
12/28/2010US7858957 Illumination optics for projection microlithography
12/28/2010US7858956 UV irradiation unit for substrates
12/28/2010US7858950 Electrostatic dispersion lenses and ion beam dispersion methods
12/23/2010WO2010146482A1 Mobile imaging unit with environmental containment
12/23/2010US20100322378 X-ray ablation of hyaluronan hydrogels
12/23/2010US20100320401 Irradiation apparatus and manufacturing method for semiconductor device
12/23/2010US20100320383 Method for exciting a mobile element of a microstructure
12/23/2010US20100320171 Laser-assisted nanomaterial deposition, nanomanufacturing, in situ monitoring and associated apparatus
12/21/2010US7856613 Method for self-aligned doubled patterning lithography
12/21/2010US7856612 Lithography mask design through mask functional optimization and spatial frequency analysis
12/21/2010US7855373 Charged particle gun
12/16/2010WO2010143267A1 Particle beam radiation device
12/16/2010WO2010143266A1 Particle beam radiation device
12/16/2010US20100314560 D/A Converter and electron beam exposure apparatus
12/16/2010US20100314559 Implant mask with moveable mask segments
12/15/2010CN1994029B X-ray source
12/15/2010CN101449353B X-ray tube and x-ray irradiator employing it
12/14/2010US7853313 Apparatus and method for radiosurgery
12/14/2010US7852460 Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method
12/14/2010US7851771 Method of constructing chimeric plant by heavy-ion beam irradiation
12/14/2010US7851769 Motorized manipulator for positioning a TEM specimen
12/14/2010US7851755 Apparatus for detecting backscattered electrons in a beam apparatus
12/09/2010US20100308235 Programmable Particle Scatterer for Radiation Therapy Beam Formation
12/09/2010DE102009024319A1 Vorrichtung und Verfahren zur photoinduzierten Aushärtung von mittels elektromagnetischer Strahlung aushärtbaren Polymeren Apparatus and method for photo-induced curing of thermosetting polymers by means of electromagnetic radiation
12/08/2010CN201667219U Single-channel six-route cross source novel gamma irradiation device
12/08/2010CN1889995B Multiple room radiation treatment system
12/07/2010US7848487 Methods for sterilizing biological materials containing non-aqueous solvents
12/02/2010US20100303199 Grazing incidence collector for laser produced plasma sources
12/02/2010US20100301233 Ultraviolet irradiation device
11/2010
11/30/2010US7844941 Charged particle beam exposure method and charged particle beam exposure device
11/30/2010US7844940 Mask set for microarray, method of fabricating mask set, and method of fabricating microarray using mask set
11/30/2010US7842936 Lithography system and projection method
11/30/2010US7842934 ion implanter comprising ion source configured to provide ion beam, terminal structure defining a cavity, ion source disposed within cavity, insulated conductor having dielectric fin disposed proximate exterior portion of terminal structure to modify electric field; conductor is disposed within insulator
11/30/2010US7842933 System and method for measuring overlay errors
11/25/2010WO2010135661A1 Techniques for processing a substrate
11/25/2010WO2010134282A1 Sample support member for x-ray microscopes, sample-containing cell, x-ray microscope, and method for observing x-ray microscopic image
11/25/2010US20100296631 Filtering of a source of pulsed radiation
11/25/2010US20100294930 Scanning charged particle beams
11/25/2010DE10320141B4 Lichtpolymerisationsgerät Light-curing unit
11/25/2010DE102008058327A1 Verfahren und Vorrichtung zum Bestrahlen eines Körpers mit elektromagnetischer Strahlung Method and device for irradiating a body with electromagnetic radiation
11/24/2010EP1305984B1 Method and apparatus for generating x-ray radiation
11/24/2010EP0950256B1 Electron beam accelerator
11/24/2010CN101896980A Particle beam transport apparatus and method of transporting a particle beam with small beam spot size
11/24/2010CN101896035A Scanning magnet device used in electron irradiation accelerator
11/23/2010US7838855 Charged particle irradiation system
11/23/2010US7838851 Method and device for fabricating nano-structure with patterned particle beam
11/23/2010US7838850 External cathode ion source
11/18/2010WO2010131209A1 X-ray source with a plurality of electron emitters
11/18/2010US20100292847 Path planning and collision avoidance for movement of instruments in a radiation therapy environment
11/18/2010DE102009022344A1 Irradiation device for medical, cosmetic and industrial applications, comprises portable housing and semiconductor diode for emission of electromagnetic radiation in ultraviolet area, visible area or infrared area
11/17/2010CN201638583U Single-roll two-way traction film and thin film irradiation device
11/16/2010US7835494 Trajectory optimization method
11/16/2010US7834333 Charged particle beam lithography system and method for evaluating the same
11/11/2010WO2010128532A1 A unit and a method for sterilizing container closures
11/11/2010US20100284511 Zone-optimized mirrors and optical systems using same
11/11/2010US20100282986 Method of increasing the operation lifetime of a collector optics arranged in an irradiation device and corresponding irradiation device
11/11/2010US20100282984 Device and method for the contactless manipulation and alignment of sample particles in a measurement volume using a nonhomogeneous electric alternating field
11/11/2010CA2761077A1 A unit and a method for sterilizing container closures
11/09/2010US7829870 Method and apparatus for in-situ sample preparation
11/09/2010US7829867 Apparatus for photo reduction of contaminants in blood and blood products with calibration means
11/04/2010WO2010127344A2 In-situ plasma/laser hybrid scheme
11/04/2010US20100277782 Micromechanical Device and Method for Projecting Electromagnetic Radiation
11/04/2010US20100276612 Terahertz emitters
11/04/2010US20100276611 High-intensity electromagnetic radiation apparatus and methods
11/04/2010US20100276607 Method of depositing protective structures
11/04/2010US20100275845 Ultraviolet-resistant materials and devices and systems including same
11/04/2010CA2760612A1 In-situ plasma/laser hybrid scheme
11/03/2010CN1830039B Method and system for drying a substrate
11/02/2010US7826592 Cone-beam computed tomography with a flat-panel imager
11/02/2010US7826032 Circulation system for high refractive index liquid in pattern forming apparatus
11/02/2010US7825378 Method for obtaining a scanning transmission image of a sample in a particle-optical apparatus
11/02/2010US7824825 stencil mask in which various surface patterns can be formed, and in which deformation is suppressed when charged particles are introduced; mask for limiting an irradiation area of charged particles on a surface of a substrate to a predetermined shape; for semiconductor
10/2010
10/28/2010US20100270481 Systems, devices and methods for tuning a resonant wavelength of an optical resonator and dispersion properties of a photonic crystal waveguide
10/28/2010US20100270476 Reaction force treatment mechanism, xy stage apparatus, inspection apparatus
10/27/2010CN101023506B Electrostatic lens for ion beams
10/26/2010US7822175 Portable orthovoltage radiotherapy
10/26/2010US7820985 High tilt implant angle performance using in-axis tilt
10/26/2010US7820469 Stress-controlled dielectric integrated circuit
10/21/2010WO2010118982A1 Beam head
10/21/2010US20100267174 LED Substrate Processing
10/21/2010DE10242366B4 Lichthärtgerät zum Aushärten von lichthärtbaren Materialien Light curing device for curing light-curable materials
10/20/2010EP2240207A1 Device and method for treating formed parts by means of high-energy electron beams
10/20/2010EP1282900B1 Beam scanning system for a heavy ion gantry
10/19/2010US7817774 System and method for imaging and treatment of tumorous tissue in breasts using computed tomography and radiotherapy
10/19/2010US7816866 Photocathode comprising a plurality of openings on an electron emission layer
10/19/2010US7816643 Neutral atom trapping device
10/15/2010CA2698773A1 Method and system for simultaneous irradiation and elution capsule
10/14/2010WO2010116709A1 X-ray generator and composite device using the same and x-ray generating method
10/14/2010US20100258750 System, method and apparatus for aligning and synchronizing target material for optimum extreme ultraviolet light output
10/14/2010US20100258748 System, method and apparatus for droplet catcher for prevention of backsplash in a euv generation chamber
10/14/2010US20100258747 Systems and methods for protecting an EUV light source chamber from high pressure source material leaks
10/14/2010US20100258745 Optical article having anti-theft feature and a system and method for inhibiting theft of same
10/14/2010DE202010010337U1 Infrarot Kalibrierstrahler mit großer Apertur Infrared Calibration large aperture
10/14/2010CA2758022A1 X-ray generator and composite device using the same and x-ray generating method
10/13/2010EP2239755A2 Electron Beam Accelerator
10/13/2010CN101002978B Particle-beam exposure apparatus and particle-beam therapeutic apparatus
10/12/2010US7812929 Electrostatic chuck with temperature sensing unit, exposure equipment having the same, and method of detecting temperature from photomask
10/12/2010US7812329 System managing gas flow between chambers of an extreme ultraviolet (EUV) photolithography apparatus
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