Patents for G21K 5 - Irradiation devices (9,144) |
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12/29/2010 | EP1112578B1 Apparatus for generating focused electromagnetic radiation |
12/28/2010 | US7861207 Fragmentation point and simulation site adjustment for resolution enhancement techniques |
12/28/2010 | US7858957 Illumination optics for projection microlithography |
12/28/2010 | US7858956 UV irradiation unit for substrates |
12/28/2010 | US7858950 Electrostatic dispersion lenses and ion beam dispersion methods |
12/23/2010 | WO2010146482A1 Mobile imaging unit with environmental containment |
12/23/2010 | US20100322378 X-ray ablation of hyaluronan hydrogels |
12/23/2010 | US20100320401 Irradiation apparatus and manufacturing method for semiconductor device |
12/23/2010 | US20100320383 Method for exciting a mobile element of a microstructure |
12/23/2010 | US20100320171 Laser-assisted nanomaterial deposition, nanomanufacturing, in situ monitoring and associated apparatus |
12/21/2010 | US7856613 Method for self-aligned doubled patterning lithography |
12/21/2010 | US7856612 Lithography mask design through mask functional optimization and spatial frequency analysis |
12/21/2010 | US7855373 Charged particle gun |
12/16/2010 | WO2010143267A1 Particle beam radiation device |
12/16/2010 | WO2010143266A1 Particle beam radiation device |
12/16/2010 | US20100314560 D/A Converter and electron beam exposure apparatus |
12/16/2010 | US20100314559 Implant mask with moveable mask segments |
12/15/2010 | CN1994029B X-ray source |
12/15/2010 | CN101449353B X-ray tube and x-ray irradiator employing it |
12/14/2010 | US7853313 Apparatus and method for radiosurgery |
12/14/2010 | US7852460 Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method |
12/14/2010 | US7851771 Method of constructing chimeric plant by heavy-ion beam irradiation |
12/14/2010 | US7851769 Motorized manipulator for positioning a TEM specimen |
12/14/2010 | US7851755 Apparatus for detecting backscattered electrons in a beam apparatus |
12/09/2010 | US20100308235 Programmable Particle Scatterer for Radiation Therapy Beam Formation |
12/09/2010 | DE102009024319A1 Vorrichtung und Verfahren zur photoinduzierten Aushärtung von mittels elektromagnetischer Strahlung aushärtbaren Polymeren Apparatus and method for photo-induced curing of thermosetting polymers by means of electromagnetic radiation |
12/08/2010 | CN201667219U Single-channel six-route cross source novel gamma irradiation device |
12/08/2010 | CN1889995B Multiple room radiation treatment system |
12/07/2010 | US7848487 Methods for sterilizing biological materials containing non-aqueous solvents |
12/02/2010 | US20100303199 Grazing incidence collector for laser produced plasma sources |
12/02/2010 | US20100301233 Ultraviolet irradiation device |
11/30/2010 | US7844941 Charged particle beam exposure method and charged particle beam exposure device |
11/30/2010 | US7844940 Mask set for microarray, method of fabricating mask set, and method of fabricating microarray using mask set |
11/30/2010 | US7842936 Lithography system and projection method |
11/30/2010 | US7842934 ion implanter comprising ion source configured to provide ion beam, terminal structure defining a cavity, ion source disposed within cavity, insulated conductor having dielectric fin disposed proximate exterior portion of terminal structure to modify electric field; conductor is disposed within insulator |
11/30/2010 | US7842933 System and method for measuring overlay errors |
11/25/2010 | WO2010135661A1 Techniques for processing a substrate |
11/25/2010 | WO2010134282A1 Sample support member for x-ray microscopes, sample-containing cell, x-ray microscope, and method for observing x-ray microscopic image |
11/25/2010 | US20100296631 Filtering of a source of pulsed radiation |
11/25/2010 | US20100294930 Scanning charged particle beams |
11/25/2010 | DE10320141B4 Lichtpolymerisationsgerät Light-curing unit |
11/25/2010 | DE102008058327A1 Verfahren und Vorrichtung zum Bestrahlen eines Körpers mit elektromagnetischer Strahlung Method and device for irradiating a body with electromagnetic radiation |
11/24/2010 | EP1305984B1 Method and apparatus for generating x-ray radiation |
11/24/2010 | EP0950256B1 Electron beam accelerator |
11/24/2010 | CN101896980A Particle beam transport apparatus and method of transporting a particle beam with small beam spot size |
11/24/2010 | CN101896035A Scanning magnet device used in electron irradiation accelerator |
11/23/2010 | US7838855 Charged particle irradiation system |
11/23/2010 | US7838851 Method and device for fabricating nano-structure with patterned particle beam |
11/23/2010 | US7838850 External cathode ion source |
11/18/2010 | WO2010131209A1 X-ray source with a plurality of electron emitters |
11/18/2010 | US20100292847 Path planning and collision avoidance for movement of instruments in a radiation therapy environment |
11/18/2010 | DE102009022344A1 Irradiation device for medical, cosmetic and industrial applications, comprises portable housing and semiconductor diode for emission of electromagnetic radiation in ultraviolet area, visible area or infrared area |
11/17/2010 | CN201638583U Single-roll two-way traction film and thin film irradiation device |
11/16/2010 | US7835494 Trajectory optimization method |
11/16/2010 | US7834333 Charged particle beam lithography system and method for evaluating the same |
11/11/2010 | WO2010128532A1 A unit and a method for sterilizing container closures |
11/11/2010 | US20100284511 Zone-optimized mirrors and optical systems using same |
11/11/2010 | US20100282986 Method of increasing the operation lifetime of a collector optics arranged in an irradiation device and corresponding irradiation device |
11/11/2010 | US20100282984 Device and method for the contactless manipulation and alignment of sample particles in a measurement volume using a nonhomogeneous electric alternating field |
11/11/2010 | CA2761077A1 A unit and a method for sterilizing container closures |
11/09/2010 | US7829870 Method and apparatus for in-situ sample preparation |
11/09/2010 | US7829867 Apparatus for photo reduction of contaminants in blood and blood products with calibration means |
11/04/2010 | WO2010127344A2 In-situ plasma/laser hybrid scheme |
11/04/2010 | US20100277782 Micromechanical Device and Method for Projecting Electromagnetic Radiation |
11/04/2010 | US20100276612 Terahertz emitters |
11/04/2010 | US20100276611 High-intensity electromagnetic radiation apparatus and methods |
11/04/2010 | US20100276607 Method of depositing protective structures |
11/04/2010 | US20100275845 Ultraviolet-resistant materials and devices and systems including same |
11/04/2010 | CA2760612A1 In-situ plasma/laser hybrid scheme |
11/03/2010 | CN1830039B Method and system for drying a substrate |
11/02/2010 | US7826592 Cone-beam computed tomography with a flat-panel imager |
11/02/2010 | US7826032 Circulation system for high refractive index liquid in pattern forming apparatus |
11/02/2010 | US7825378 Method for obtaining a scanning transmission image of a sample in a particle-optical apparatus |
11/02/2010 | US7824825 stencil mask in which various surface patterns can be formed, and in which deformation is suppressed when charged particles are introduced; mask for limiting an irradiation area of charged particles on a surface of a substrate to a predetermined shape; for semiconductor |
10/28/2010 | US20100270481 Systems, devices and methods for tuning a resonant wavelength of an optical resonator and dispersion properties of a photonic crystal waveguide |
10/28/2010 | US20100270476 Reaction force treatment mechanism, xy stage apparatus, inspection apparatus |
10/27/2010 | CN101023506B Electrostatic lens for ion beams |
10/26/2010 | US7822175 Portable orthovoltage radiotherapy |
10/26/2010 | US7820985 High tilt implant angle performance using in-axis tilt |
10/26/2010 | US7820469 Stress-controlled dielectric integrated circuit |
10/21/2010 | WO2010118982A1 Beam head |
10/21/2010 | US20100267174 LED Substrate Processing |
10/21/2010 | DE10242366B4 Lichthärtgerät zum Aushärten von lichthärtbaren Materialien Light curing device for curing light-curable materials |
10/20/2010 | EP2240207A1 Device and method for treating formed parts by means of high-energy electron beams |
10/20/2010 | EP1282900B1 Beam scanning system for a heavy ion gantry |
10/19/2010 | US7817774 System and method for imaging and treatment of tumorous tissue in breasts using computed tomography and radiotherapy |
10/19/2010 | US7816866 Photocathode comprising a plurality of openings on an electron emission layer |
10/19/2010 | US7816643 Neutral atom trapping device |
10/15/2010 | CA2698773A1 Method and system for simultaneous irradiation and elution capsule |
10/14/2010 | WO2010116709A1 X-ray generator and composite device using the same and x-ray generating method |
10/14/2010 | US20100258750 System, method and apparatus for aligning and synchronizing target material for optimum extreme ultraviolet light output |
10/14/2010 | US20100258748 System, method and apparatus for droplet catcher for prevention of backsplash in a euv generation chamber |
10/14/2010 | US20100258747 Systems and methods for protecting an EUV light source chamber from high pressure source material leaks |
10/14/2010 | US20100258745 Optical article having anti-theft feature and a system and method for inhibiting theft of same |
10/14/2010 | DE202010010337U1 Infrarot Kalibrierstrahler mit großer Apertur Infrared Calibration large aperture |
10/14/2010 | CA2758022A1 X-ray generator and composite device using the same and x-ray generating method |
10/13/2010 | EP2239755A2 Electron Beam Accelerator |
10/13/2010 | CN101002978B Particle-beam exposure apparatus and particle-beam therapeutic apparatus |
10/12/2010 | US7812929 Electrostatic chuck with temperature sensing unit, exposure equipment having the same, and method of detecting temperature from photomask |
10/12/2010 | US7812329 System managing gas flow between chambers of an extreme ultraviolet (EUV) photolithography apparatus |