| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 10/07/2009 | EP1183707B1 Apparatus and methods for secondary electron emission microscopy with dual beam |
| 10/07/2009 | CN201323067Y Zero-clearance trolley device under irradiating electron beams |
| 10/06/2009 | US7598505 Multichannel ion gun |
| 10/06/2009 | US7598503 Lithographic apparatus and cleaning method therefor |
| 10/06/2009 | CA2510343C Internal circulating irradiation capsule for iodine-125 and method of producing iodine-125 using same |
| 10/01/2009 | US20090246655 Electron beam writing apparatus and method |
| 10/01/2009 | US20090242800 Electron-beam dimension measuring apparatus and electron-beam dimension measuring method |
| 10/01/2009 | US20090242796 Specimen pre-treatment apparatus and specimen holder |
| 10/01/2009 | US20090242795 Cryo-charging specimen holder for electron microscope |
| 10/01/2009 | US20090242794 Charged particle beam equipment |
| 10/01/2009 | US20090242787 Charged-particle beam writing method and charged-particle beam writing apparatus |
| 09/30/2009 | CN101546617A Charged particle beam irradiating apparatus |
| 09/29/2009 | US7595496 Optimized correction of wafer thermal deformations in a lithographic process |
| 09/24/2009 | WO2009117048A2 System and methods for target material delivery in a laser produced plasma euv light source |
| 09/23/2009 | EP1554621B1 Optical imaging device designs for solar-powered flight and powergeneration |
| 09/23/2009 | CN101536912A X射线成像设备及其控制方法 X-ray imaging apparatus and control method |
| 09/23/2009 | CN100543917C Axial flux motor driven anode target for x-ray tube |
| 09/22/2009 | US7592612 Method and apparatus for surface potential reflection electron mask lithography |
| 09/22/2009 | US7592610 Mirror for use in a lithographic apparatus, lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 09/22/2009 | US7592598 Illumination system particularly for microlithography |
| 09/22/2009 | US7592564 Plasma generation and processing with multiple radiation sources |
| 09/17/2009 | US20090233239 Reticle for Use in a Semiconductor Lithographic System and Method for Modifying the Same |
| 09/17/2009 | US20090232279 X-ray source with nonparallel geometry |
| 09/17/2009 | US20090230330 Method of repairing a specimen intended to be analysed by electron microscopy |
| 09/17/2009 | US20090230326 Systems and methods for target material delivery in a laser produced plasma EUV light source |
| 09/17/2009 | US20090230320 Scanning probe apparatus |
| 09/17/2009 | US20090230319 Specimen Stage-Moving Device for Charged-Particle Beam System |
| 09/16/2009 | EP2100814A1 Container sterilization apparatus |
| 09/16/2009 | EP1402124B1 Shielded structure for radiation treatment equipment and method of assembly |
| 09/16/2009 | CN100539945C X ray device |
| 09/15/2009 | US7590966 Data path for high performance pattern generator |
| 09/15/2009 | US7590217 Digital imaging method and apparatus for mammography |
| 09/15/2009 | US7588867 Reflection mask, use of the reflection mask and method for fabricating the reflection mask |
| 09/11/2009 | WO2009110447A1 X-ray irradiator |
| 09/10/2009 | US20090227121 Semiconductor device manufacturing method and semiconductor device manufacturing system |
| 09/10/2009 | US20090224180 Apparatus and method for processing a wafer |
| 09/10/2009 | US20090224179 Connection device |
| 09/09/2009 | EP2099056A2 Electrostatic lens for ion beams |
| 09/09/2009 | CN201307429Y Heat-insulation radiation can |
| 09/09/2009 | CN101529530A Neutron moderator, neutron irradiation method, and hazardous substance detector |
| 09/08/2009 | US7587704 System and method for mask verification using an individual mask error model |
| 09/08/2009 | US7587024 Particle beam irradiation system |
| 09/08/2009 | US7586112 Particle therapy system |
| 09/08/2009 | US7586110 Techniques for detecting ion beam contamination in an ion implantation system and interlocking same |
| 09/08/2009 | US7586108 Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector |
| 09/03/2009 | US20090218509 Charged particle beam apparatus |
| 09/02/2009 | EP2095374A2 Device and method for immobilizing patients for breast radiation therapy |
| 09/02/2009 | EP2095373A1 Collimator |
| 09/02/2009 | EP1461812B8 Compact self-shielded irradiation system and method |
| 09/02/2009 | EP1428006A4 Method and apparatus for scanned instrument calibration |
| 09/02/2009 | CN101521981A Target recovering device |
| 09/02/2009 | CN101518672A Radiation device for photodynamic therapy |
| 09/01/2009 | US7583433 Multi mirror system for an illumination system |
| 09/01/2009 | US7582884 Charged particle beam exposure method and charged particle beam exposure device |
| 09/01/2009 | US7582883 Method of scanning a substrate in an ion implanter |
| 09/01/2009 | US7582414 exposing thin film to a radiation source in a liquid immersion lithography, rotating the substrate and remove fluids; baking; development; transferring pattern |
| 08/27/2009 | US20090215251 Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking |
| 08/27/2009 | US20090213988 Sample module with sample stream spaced from window, for x-ray analysis system |
| 08/27/2009 | US20090212240 Charged particle beam exposure system |
| 08/27/2009 | US20090212233 Maldi chip holder |
| 08/27/2009 | DE102008009660A1 Cooking appliance for cooking e.g. meat, has sensor for determining condition of product to be cooked, where parameter calculated by central control unit/processing unit correlates with condition of product to be cooked |
| 08/26/2009 | CN101517695A Short wavelength ultraviolet discharge lamp and ultraviolet ray irradiator |
| 08/26/2009 | CN101516157A Target device |
| 08/26/2009 | CN100533649C Cathode and counter cathode arrangement in an ion source |
| 08/25/2009 | US7580506 System and method for non-destructive decontamination of sensitive electronics using soft X-ray radiation |
| 08/25/2009 | US7579608 Particle-beam treatment system |
| 08/25/2009 | US7579606 Method and system for logic design for cell projection particle beam lithography |
| 08/25/2009 | US7579604 Beam stop and beam tuning methods |
| 08/21/2009 | CA2653871A1 Apparatuses and methods for production of radioisotopes in nuclear reactor instrumentation tubes |
| 08/20/2009 | WO2009101772A1 X-ray inspection apparatus |
| 08/20/2009 | DE102009007873A1 Druckverfahren für eine Druckmaschine, sowie Druckmaschine Printing method for a printing press, and printing machine |
| 08/20/2009 | DE102005045203B4 Modulare Bestrahlungsvorrichtung Modular irradiation device |
| 08/19/2009 | CN100528516C Ultraviolet radiation apparatus |
| 08/18/2009 | US7577228 Transportable manufacturing facility for radioactive materials |
| 08/18/2009 | US7576343 Method and apparatus for generating laser produced plasma |
| 08/18/2009 | US7576341 Lithography systems and methods for operating the same |
| 08/18/2009 | US7576339 Ion implantation apparatus and method for obtaining non-uniform ion implantation energy |
| 08/13/2009 | WO2009097927A1 Device and method for treating formed parts by means of high-energy electron beams |
| 08/13/2009 | WO2009066023A3 Collimator for a non-destructive testing device using gamma radiography |
| 08/13/2009 | US20090202039 Methods for Sterilizing Biological Materials Containing Non-Aqueous Solvents |
| 08/13/2009 | US20090200495 Particle-beam exposure apparatus with overall-modulation of a patterned beam |
| 08/12/2009 | EP2088612A1 Method of heating or cleaning a web or foil |
| 08/12/2009 | EP2087842A1 Imaging device |
| 08/12/2009 | EP1493021B1 Method and apparatus for inferring item position based on multiple data |
| 08/12/2009 | CN101504905A X ray generating device |
| 08/12/2009 | CN100526984C Particle-optical device for object irradiation |
| 08/11/2009 | US7573047 Wafer holder and sample producing apparatus using it |
| 08/11/2009 | US7573031 Methods for SEM inspection of fluid containing samples |
| 08/05/2009 | CN100524542C Irradiation device for electronic accelerator |
| 08/05/2009 | CN100524023C Photoetching device and method for manufacturing the apparatus |
| 08/04/2009 | US7569842 Method for correcting electron beam exposure data |
| 07/30/2009 | US20090191367 Memory devices, stylus-shaped structures, electronic apparatuses, and methods for fabricating the same |
| 07/30/2009 | US20090190720 Mirror mounting, alignment, and scanning mechanism and scanning method for radiographic x-ray imaging, and x-ray imaging device having same |
| 07/30/2009 | US20090189091 Remote circuit interaction |
| 07/30/2009 | DE19983270B4 Laserplasmalichtquelle und Verfahren zur Erzeugung von Strahlung unter Verwendung derselben Laser plasma light source and method for generating radiation using the same |
| 07/29/2009 | EP1501632A4 Plasma-assisted carburizing |
| 07/29/2009 | EP1461812B1 Compact self-shielded irradiation system and method |
| 07/29/2009 | CN100521863C X ray generating device |
| 07/29/2009 | CN100520580C Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 07/28/2009 | US7566887 Method of reducing particle contamination for ion implanters |