| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 01/21/2010 | US20100014639 Negative ion source method and apparatus used in conjunction with a charged particle cancer therapy system |
| 01/21/2010 | US20100012862 Mechanism of adjusting irradiating angle for a far infrared radiator |
| 01/20/2010 | EP2146354A1 Irradiation system for ion beam scanning of moving targets |
| 01/20/2010 | EP1226587B1 Rotatable cylinder dual beam modulator |
| 01/20/2010 | CN100583375C Electrostatic lens for ion beams |
| 01/19/2010 | CA2345329C Integrated radiation shield |
| 01/14/2010 | WO2010004275A2 Sample holder |
| 01/14/2010 | US20100006771 Speciman holder and speciman holder movement device |
| 01/14/2010 | DE102008032608A1 Schnellstart für Quecksilber-Niederdruck-Amalgam-Lampen Quick Start for low-pressure mercury amalgam lamps |
| 01/14/2010 | DE102005001683B4 Verfahren und Vorrichtung zum Trocknen von Lackschichten Method and apparatus for drying varnish layers |
| 01/13/2010 | CN100580547C Method and apparatus for Z-axis tracking and collimation |
| 01/07/2010 | WO2010001953A1 Electron source device, ion source device and charged particle source device |
| 01/07/2010 | US20100002353 Systems and methods for affecting spinning atmospheric phenomena |
| 01/07/2010 | US20100001203 Method of acquiring offset deflection amount for shaped beam and lithography apparatus |
| 01/07/2010 | DE102008031094A1 Gerät zum Lichthärten eines Dentalobjekts Device to cure a dental object |
| 01/06/2010 | EP2141073A1 Electron beam sterilizer |
| 01/05/2010 | US7644387 Semiconductor mask correcting device and semiconductor mask correcting method |
| 01/05/2010 | US7643608 Method for checking for leakage from tubular batteries |
| 01/05/2010 | US7642533 Extreme ultraviolet light source |
| 01/05/2010 | US7642527 Multi-attribute light effects for use in curing and other applications involving photoreactions and processing |
| 01/05/2010 | US7642524 Sanitizing apparatus for writing utensils |
| 01/05/2010 | US7642523 Vacuum chamber stage with application of vacuum from below |
| 01/05/2010 | US7642150 Techniques for forming shallow junctions |
| 12/31/2009 | US20090323044 Catoptric illumination system for microlithography tool |
| 12/31/2009 | US20090321665 Irradiation Device |
| 12/31/2009 | DE102009024403A1 Einstellpositioniervorrichtung für eine Strahlungssvorrichtung Einstellpositioniervorrichtung for a Strahlungssvorrichtung |
| 12/31/2009 | DE102004004630B4 Röntgeneinrichtung X-ray equipment |
| 12/24/2009 | US20090316128 Illumination system particularly for microlithography |
| 12/24/2009 | US20090314967 Extreme ultra violet light source apparatus |
| 12/24/2009 | US20090314955 Specimen Holder, Specimen Inspection Apparatus, and Specimen Inspection Method |
| 12/24/2009 | DE202009010813U1 Strahlenbehandlung im Ringkanal Radiation treatment in the annular channel |
| 12/24/2009 | DE102006000474B4 Vorrichtung zur Führung von einem Strahlbündel und Bestrahlungsdetektionssystem mit einer solchen Vorrichtung An apparatus for guiding a radiation beam and detection system comprising such a device |
| 12/17/2009 | WO2009152368A1 Application specific implant system and method for use in solar cell fabrications |
| 12/17/2009 | US20090309048 Radiation System and Lithographic Apparatus Comprising the Same |
| 12/17/2009 | US20090309043 Charged particle beam apparatus and sample holding system |
| 12/17/2009 | US20090309041 Techniques for providing a multimode ion source |
| 12/17/2009 | DE19758739B4 Bestrahlungsvorrichtung Irradiation apparatus |
| 12/17/2009 | DE102008028233A1 Kompaktes UV-Bestrahlungsmodul Compact UV irradiation module |
| 12/15/2009 | US7634754 Simulation of aerial images |
| 12/15/2009 | US7634057 Radiotherapy system with turntable |
| 12/10/2009 | US20090304152 Method And Apparatus For Tagging And Identifying A Target |
| 12/10/2009 | US20090302234 Method and Apparatus for Observing Inside Structures, and Specimen Holder |
| 12/10/2009 | DE10306668B4 Anordnung zur Erzeugung von intensiver kurzwelliger Strahlung auf Basis eines Plasmas Arrangement for the generation of intense short-wave radiation based on a plasma |
| 12/08/2009 | US7630052 Exposure processing system, exposure processing method and method for manufacturing a semiconductor device |
| 12/08/2009 | US7629598 Particle beam irradiation method using depth and lateral direction irradiation field spread and particle beam irradiation apparatus used for the same |
| 12/08/2009 | US7629597 Deposition reduction system for an ion implanter |
| 12/08/2009 | US7629594 Lithographic apparatus, and device manufacturing method |
| 12/08/2009 | US7629593 Lithographic apparatus, radiation system, device manufacturing method, and radiation generating method |
| 12/08/2009 | US7628497 Mirror unit, method of producing the same, and exposure apparatus and method using the mirror unit |
| 12/03/2009 | DE102009018623A1 Lampenanordnungen, Lampensysteme und Verfahren zum Betreiben von Lampensystemen Lamp assemblies, the air systems and methods for operating lamp systems |
| 12/03/2009 | DE102008026066A1 Irradiation device cooling involves utilizing oblong radiation source arranged in housing, where radiation source includes liquid maturation at both ends |
| 12/02/2009 | EP1501604B1 Method for performing in vivo dosimetry |
| 12/01/2009 | US7626185 Patterning compositions, masks, and methods |
| 12/01/2009 | US7626184 Impurity introducing apparatus and impurity introducing method |
| 12/01/2009 | US7626183 Methods for modifying features of a workpiece using a gas cluster ion beam |
| 11/24/2009 | US7622724 High voltage insulator for preventing instability in an ion implanter due to triple-junction breakdown |
| 11/19/2009 | WO2009139399A1 Electron beam irradiating apparatus with monitor device |
| 11/19/2009 | WO2009139074A1 Electron beam irradiation device for aperture vessel |
| 11/19/2009 | WO2002073310A3 Binary and phase-shift photomasks |
| 11/19/2009 | US20090283701 Medical Implants |
| 11/19/2009 | US20090283697 System and method for monitoring blue-green algae in a fluid |
| 11/19/2009 | US20090283696 Pre-Cryogenic Electron Microscope Specimen Holder |
| 11/19/2009 | US20090283669 Ion Implanter For Photovoltaic Cell Fabrication |
| 11/19/2009 | DE102008023817A1 Anordnung zur UV-Bestrahlung von Objekten Arrangement for the UV irradiation of objects |
| 11/18/2009 | CN101582299A Irradiation target retention system, fuel assembly having the same, and method of using the same |
| 11/18/2009 | CN101582298A Industrial composite auxiliary lighting system with X rays and high-energy electron accelerator |
| 11/17/2009 | US7619230 Charged particle beam writing method and apparatus and readable storage medium |
| 11/12/2009 | US20090278060 Photoirradiation apparatus, crystallization apparatus, crystallization method, and device |
| 11/12/2009 | DE112005002171B4 Teilchenstrahl-Bestrahlungsverfahren und dafür verwendete Teilchenstrahl-Bestrahlungsvorrichtung Particle beam irradiation method and used for this particle beam irradiation apparatus |
| 11/11/2009 | EP2116471A1 Sterility keeping method and apparatus for sterilization electron beam irradiating device |
| 11/11/2009 | EP1650786B1 Light source unit, illumination optical apparatus and exposure apparatus |
| 11/10/2009 | US7616735 Tomosurgery |
| 11/10/2009 | US7615837 Lithography device for semiconductor circuit pattern generation |
| 11/10/2009 | US7614787 Marking apparatus used in a process for producing multi-layered printed circuit board |
| 11/05/2009 | US20090274256 Hydrogen-lithium fusion device, method and applications |
| 11/05/2009 | US20090272917 Radiation source |
| 11/05/2009 | US20090272916 Radiation source and lithographic apparatus |
| 11/04/2009 | EP1482888B1 Process for detection of marked components of a composite article using infrared blockers |
| 11/04/2009 | EP1482886B1 Infrared detection of composite article components |
| 11/03/2009 | US7613538 Compensation for distortion in contact lithography |
| 11/03/2009 | US7612352 Material activating device |
| 11/03/2009 | US7612351 Ion implanter with function of compensating wafer cut angle and ion implantation method using the same |
| 10/29/2009 | US20090267003 Semiconductor exposure device using extreme ultra violet radiation |
| 10/29/2009 | US20090267002 Apparatus and Method for Partial Ion Implantation Using Atom Vibration |
| 10/29/2009 | US20090267001 Low contamination, low energy beamline architecture for high current ion implantation |
| 10/28/2009 | CN100555471C Ultraviolet ray radiating device |
| 10/27/2009 | US7609805 Low cost, rapid alignment of multiple photoresist layers using pinhole pattern for pin insertion; x ray lithography, electroforming and plastic molding (LIGA) |
| 10/27/2009 | US7609804 Cast collimators for CT detectors and methods of making same |
| 10/27/2009 | US7608845 Charged particle beam writing apparatus and method thereof, and method for resizing dimension variation due to loading effect |
| 10/27/2009 | US7608844 Charged particle beam drawing apparatus |
| 10/27/2009 | US7608798 Plasma catalyst |
| 10/27/2009 | US7608528 Substrate cover, and charged particle beam writing apparatus and method |
| 10/22/2009 | DE102009017954A1 UV-Bestrahlungsvorrichtung UV irradiation device |
| 10/22/2009 | DE102008021301A1 UV-Reaktor und seine Verwendung UV reactor and its use |
| 10/21/2009 | CN101562060A Safe extraction system of electron beams |
| 10/20/2009 | US7605386 Optical device with raster elements, and illumination system with the optical device |
| 10/20/2009 | US7605383 Pattern writing apparatus using charged particle beam, and program-recorded readable recording medium |
| 10/08/2009 | WO2009122964A1 Ion implanter, ion implantation method and program |
| 10/08/2009 | WO2009122665A1 X-ray inspection device |
| 10/08/2009 | US20090250625 Specimen stage apparatus and specimen stage positioning control method |