| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 07/28/2009 | US7566884 Specimen holder for electron microscope |
| 07/23/2009 | US20090184265 Electron beam writing method, fine pattern writing system, and manufacturing method of uneven pattern carrying substrate |
| 07/22/2009 | EP1501959A4 Plasma-assisted enhanced coating |
| 07/22/2009 | EP1501631A4 Plasma-assisted formation of carbon structures |
| 07/22/2009 | CN100516643C Microwave powered lamphead having external shutter |
| 07/21/2009 | US7564048 Automated faraday sensor test system |
| 07/21/2009 | US7564024 Methods and apparatus for assigning a beam intensity profile to a gas cluster ion beam used to process workpieces |
| 07/15/2009 | EP1501649A4 Plasma-assisted sintering |
| 07/14/2009 | US7562337 OPC verification using auto-windowed regions |
| 07/14/2009 | US7560717 Particle beam irradiation apparatus, treatment planning unit, and particle beam irradiation method |
| 07/14/2009 | US7560715 System for the delivery of proton therapy |
| 07/14/2009 | US7560713 Correction lens system for a particle beam projection device |
| 07/14/2009 | US7559557 Sealing between vacuum chambers |
| 07/09/2009 | US20090175413 Compact and lightweight x-ray device |
| 07/09/2009 | US20090173894 Ion implanters |
| 07/09/2009 | US20090173360 Lithographic Apparatus, and Device Manufacturing Method |
| 07/08/2009 | EP2006860A9 Electron beam generating apparatus |
| 07/07/2009 | US7558679 System and method for irradiating a sample |
| 07/07/2009 | US7557364 Charge neutralizing device |
| 07/02/2009 | WO2009080411A1 Linear electron source, evaporator using linear electron source, and applications of electron sources |
| 07/02/2009 | WO2009080312A1 Linear electron source, evaporator using linear electron source, and applications of electron sources |
| 07/02/2009 | US20090168961 Radiotherapy system |
| 07/02/2009 | US20090166566 High tilt implant angle performance using in-axis tilt |
| 07/02/2009 | US20090166565 Ion implanters |
| 07/02/2009 | US20090166564 Methods for monitoring implanter performance |
| 07/02/2009 | US20090166561 Laser patterning apparatus |
| 07/02/2009 | US20090166558 Phase Contrast Electron Microscope Device |
| 07/02/2009 | US20090166557 Charge control apparatus and measurement apparatus equipped with the charge control apparatus |
| 07/02/2009 | DE102008059641A1 UV-Lampensystem sowie zugeordnetes Verfahren mit verbesserter Magnetronsteuerung UV lamp system and associated method with improved Magnetronsteuerung |
| 07/01/2009 | EP2075800A1 Neutron moderator, neutron irradiation method, and hazardous substance detector |
| 07/01/2009 | EP1502480A4 Plasma-assisted heat treatment |
| 07/01/2009 | EP1502012A4 Plasma-assisted engine exhaust treatment |
| 07/01/2009 | CN101471152A Workpiece transportation method and device |
| 06/30/2009 | US7554106 Partial ion implantation apparatus and method using bundled beam |
| 06/30/2009 | US7554105 Lithographic apparatus and device manufacturing method |
| 06/30/2009 | US7554099 Ultra-thin liquid control plate and combination of box-like member and the control plate |
| 06/30/2009 | US7554094 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements |
| 06/30/2009 | CA2370874C Article irradiation system having intermediate wall of radiation shielding material within loop of a conveyor system that transports the articles |
| 06/25/2009 | US20090162953 Predicting dose repeatability in an ion implantation |
| 06/25/2009 | DE102006028702B4 Bestrahlungseinrichtung Irradiation facility |
| 06/24/2009 | EP2073611A2 Method for the treatment of articles. |
| 06/24/2009 | EP2073248A1 Linear electron source, evaporator using linear electron source, and applications of electron sources |
| 06/24/2009 | EP2073243A1 Linear electron source, evaporator using linear electron source, and applications of electron sources |
| 06/24/2009 | CN101467217A Ion beam apparatus and method for ion implantation |
| 06/24/2009 | CN100505976C Plasma-assisted joining |
| 06/24/2009 | CN100505975C Plasma-assisted coating |
| 06/24/2009 | CN100505974C Radiation source, photoetching equipment and device manufacturing method |
| 06/24/2009 | CN100504605C Laser produced plasma radiation system with foil capturing |
| 06/23/2009 | US7551722 X-ray target and apparatuses using the same |
| 06/23/2009 | US7550805 Stress-controlled dielectric integrated circuit |
| 06/23/2009 | US7550750 Method and apparatus for processing a micro sample |
| 06/23/2009 | US7550749 Methods and processing systems for using a gas cluster ion beam to offset systematic non-uniformities in workpieces processed in a process tool |
| 06/23/2009 | US7550748 Apparatus and methods for systematic non-uniformity correction using a gas cluster ion beam |
| 06/23/2009 | US7550723 Atom probe apparatus and method for working sample preliminary for the same |
| 06/18/2009 | WO2009075920A2 Non-destructive component separation using infrared radiant energy |
| 06/18/2009 | US20090154642 System managing gas flow between chambers of an extreme ultraviolet (EUV) photolithography apparatus |
| 06/17/2009 | EP1377998A4 A dual fluid cooling system for high power x-ray tubes |
| 06/16/2009 | US7549143 Method and device for checking lithography data |
| 06/16/2009 | US7549142 Method and device for checking lithography data |
| 06/16/2009 | US7549140 Method and apparatus for decomposing semiconductor device patterns into phase and chrome regions for chromeless phase lithography |
| 06/16/2009 | US7547900 Techniques for providing a ribbon-shaped gas cluster ion beam |
| 06/16/2009 | US7547899 Charged beam dump and particle attractor |
| 06/16/2009 | US7547898 Particulate prevention in ion implantation |
| 06/11/2009 | US20090147915 Method and apparatus for detecting and classifying explosives and controlled substances |
| 06/11/2009 | US20090146082 Pattern Lock System for Particle-Beam Exposure Apparatus |
| 06/11/2009 | US20090146075 Motorized Manipulator for Positioning a TEM Specimen |
| 06/10/2009 | EP1617440B1 High-speed particle generator |
| 06/10/2009 | EP1586007A4 Electron beam processing for mask repair |
| 06/10/2009 | DE102008056238A1 Conveying device for use in chain conveyor and ultraviolet dryer for examining overprint on surface of transported printing product by radiation effect, is provided for conveying print product relative to arrangement emitting radiation |
| 06/10/2009 | DE102007058324A1 Hochreflektierendes Auskleidungselement und Bestrahlungsanordnung High reflective lining member and irradiation arrangement |
| 06/10/2009 | CN100498530C Lithographic apparatus and device manufacturing method |
| 06/09/2009 | US7544957 Non-uniform ion implantation |
| 06/09/2009 | US7544446 Masks of semiconductor devices and methods of forming patterns thereof |
| 06/04/2009 | WO2009068182A1 Radiation generation by means of laser radiation of a free droplet target |
| 06/04/2009 | WO2007021855A3 Atmospheric process and system for controlled and rapid removal of polymers from high aspect ratio holes |
| 06/04/2009 | US20090141750 Systems and methods for link processing with ultrafast and nanosecond laser pulses |
| 06/04/2009 | US20090140175 Method and system for fabricating a data storage medium |
| 06/04/2009 | US20090140173 Method and apparatus for processing thin metal layers |
| 06/04/2009 | US20090140165 Method and apparatus for controlling a gas cluster ion beam formed from a gas mixture |
| 06/04/2009 | US20090140143 Charged particle beam apparatus and control method therefor |
| 06/04/2009 | DE102007056276A1 Vorrichtung und Verfahren zur Darstellung eines Objektes mittels Durchstrahlung Apparatus and method for representation of an object, by means of radiation |
| 06/03/2009 | EP1338025B1 Cold-plate window in a metal-frame x-ray insert |
| 06/03/2009 | CN101447241A Gamma ray intense source irradiator |
| 06/03/2009 | CN101446773A Maskless photon-electron spot-grid array printer |
| 06/03/2009 | CN100495210C Photoetching equipment and device manufacturing method |
| 06/03/2009 | CN100495073C Beam measuring equipment and beam measuring method using the same, emission device and material |
| 06/03/2009 | CN100495072C Ion beam measuring method and ion implanting apparatus |
| 06/02/2009 | US7542599 Reducing number of relatively unimportant shapes from a set of shapes |
| 06/02/2009 | US7542549 X-ray source with nonparallel geometry |
| 06/02/2009 | US7542546 Sample mounts for microcrystal crystallography |
| 06/02/2009 | US7541603 Radiation system and lithographic apparatus comprising the same |
| 06/02/2009 | US7541601 Ion beam irradiating apparatus and method of adjusting uniformity of a beam |
| 06/02/2009 | US7541597 Automatic cleaning of ion sources |
| 05/28/2009 | US20090135867 Temperature compensation method for laser power of an optical disk drive |
| 05/28/2009 | US20090134343 Tracking control method and electron beam writing system |
| 05/28/2009 | DE102007053543A1 Vorrichtung zur Bestrahlung von Elementen mit UV-Licht sowie Verfahren zu deren Betrieb Device for irradiating with UV light elements and methods for their operation |
| 05/27/2009 | EP2063448A2 Pix array arrangement for a soft x-ray source |
| 05/27/2009 | EP2063221A1 Electron beam dimension measuring device and electron beam dimension measuring method |
| 05/27/2009 | EP1540664A4 Radiation sources and compact radiation scanning systems |
| 05/27/2009 | CN201247603Y Supporting case |