| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 05/27/2009 | CN100492684C Ultraviolet radiator, ultraviolet radiation condition setting method and ultraviolet radiation method |
| 05/27/2009 | CN100492584C Ion beam incident angle detector for ion implant systems |
| 05/26/2009 | US7539970 Method of manufacturing mask |
| 05/26/2009 | US7538852 Exposure apparatus and device manufacturing method |
| 05/26/2009 | US7537940 Method of manufacturing electronic device capable of controlling threshold voltage and ion implanter controller and system that perform the method |
| 05/21/2009 | US20090130863 Method and system for forming an air gap structure |
| 05/21/2009 | US20090130569 Adjustable Mask Blank Structure for an Euv Phase-Shift Mask |
| 05/21/2009 | US20090130498 Method for the improvement of the catalytic and photocatalytic processes by mean of laser irradiation |
| 05/21/2009 | US20090127476 Vacuum uv based optical measuring method and system |
| 05/21/2009 | US20090127474 Electric charged particle beam microscope and microscopy |
| 05/20/2009 | EP2059161A1 Machine for washing surgical and/or medical instruments |
| 05/20/2009 | EP1712254B1 Device for limiting field on which radiation is irradiated |
| 05/20/2009 | EP1146931A4 Electron beam multistage accelerator driven probe device |
| 05/20/2009 | CN101436439A Gamma-ray follower for radioactive source |
| 05/20/2009 | CN101435875A Method and device for monitoring electron-beam energy and irradiation system and method thereof |
| 05/19/2009 | US7536671 Mask for forming fine pattern and method of forming the same |
| 05/19/2009 | US7535220 Beam measuring equipment and beam measuring method using the same |
| 05/19/2009 | CA2384608C Electron beam apparatus having a low loss beam path |
| 05/14/2009 | WO2009060762A1 Electron beam source, electron beam irradiator and x-ray tube employing the electron beam source, x-ray irradiator in which the x-ray tube is arranged, and method for manufacturing electron beam source |
| 05/14/2009 | WO2007059164A3 Unified quality assurance for a radiation treatment delivery system |
| 05/14/2009 | US20090123870 Method of and system for electon beam lithography of micro-pattern and disc substrate having micro-pattern to be transferred |
| 05/14/2009 | US20090123665 Fluidized Bed Device |
| 05/14/2009 | US20090121152 Inspection method for semiconductor wafer and apparatus for reviewing defects |
| 05/13/2009 | EP2058027A1 Rotating irradiation therapy apparatus |
| 05/13/2009 | CN100487572C Photoetching projector with multi-suppressing silk screen and method for manufacturing the integrated structure |
| 05/07/2009 | WO2009057493A1 X-ray generator employing hemimorphic crystal |
| 05/07/2009 | US20090114842 Sample preparing device and sample posture shifting method |
| 05/06/2009 | CN101424286A Device for and method of fastening an emitter |
| 05/06/2009 | CN101422640A Multiple-objective optimization method and system capable of optimizing radiotherapy beam intensity distribution |
| 05/06/2009 | CN101422372A Cone-beam computerized tomography with a flat-panel imager |
| 05/06/2009 | CN100485864C EUV light source, EUV exposure equipment and semiconductor device manufacturing method |
| 05/06/2009 | CN100484759C Method for drying a printing ink on a printing substrate, and print unit suited for implementing the method |
| 05/05/2009 | US7528395 Radiation source, lithographic apparatus and device manufacturing method |
| 05/05/2009 | US7528394 Focused ion beam system |
| 04/30/2009 | US20090108215 Mask and method for forming a semiconductor device using the same |
| 04/30/2009 | DE102007050939A1 Verfahren zum Erwärmen eines extrudierten Kunststoffprofils durch Infrarotstrahlung A method of heating an extruded plastic profile by means of infrared radiation |
| 04/29/2009 | EP1258010B1 System and method for the production of 18 f-fluoride |
| 04/29/2009 | EP1232517A4 Plasma focus light source with improved pulse power system |
| 04/29/2009 | CN101421814A Ion beam scanning control methods and systems for ion implantation uniformity |
| 04/28/2009 | US7526066 Radiation therapy system for treating breasts and extremities |
| 04/28/2009 | US7525104 Particle beam irradiation method and particle beam irradiation apparatus used for the same |
| 04/23/2009 | WO2007041101A3 Beam exposure writing strategy system and method |
| 04/23/2009 | WO2007027965A3 Delivery of low pressure dopant gas to a high voltage ion source |
| 04/23/2009 | US20090103679 Image guided acquisition of quantitative dual energy data |
| 04/23/2009 | US20090101848 Local pressure sensing in a plasma processing system |
| 04/23/2009 | US20090101846 Ionizing-radiation-responsive compositions, methods, and systems |
| 04/23/2009 | US20090101840 Ionizing-radiation-responsive compositions, methods, and systems |
| 04/23/2009 | DE102007048564A1 Vorrichtung für eine Bestrahlungseinheit The apparatus for irradiation unit |
| 04/22/2009 | CN101416255A Electron beam emitter |
| 04/22/2009 | CN100479755C Stationary computerized tomography system with small-sized X-ray source assembly |
| 04/22/2009 | CN100479752C X-ray source support assembly |
| 04/21/2009 | US7522756 Method, system and apparatus for processing radiographic images of scanned objects |
| 04/21/2009 | US7522703 Aerosol particle charging device |
| 04/21/2009 | US7522702 Soft x-ray radiation for biological pathogen decontamination and medical sterilization applications |
| 04/21/2009 | US7521698 Apparatus and method for interlocking a power supply to ion implantation equipment, method and apparatus for generating an interlocking signal, method and apparatus for interrupting an ion implantation process, and an interlocking system |
| 04/21/2009 | US7521691 Magnetic monitoring of a Faraday cup for an ion implanter |
| 04/16/2009 | US20090098473 Photomask, method of lithography, and method for manufacturing the photomask |
| 04/16/2009 | US20090097617 Modular, imaging, large x-ray detector |
| 04/16/2009 | DE102004054885B4 Kollimator, Röntgenbestrahlungsquelle und Röntgeneinrichtung Collimator, X-ray radiation source and X-ray equipment |
| 04/15/2009 | EP1774559B1 Electrostatic lens for ion beams |
| 04/14/2009 | US7519159 Method and device for cooling and electrically insulating a high voltage, heat-generating component such as an x-ray tube for analyzing fluid streams |
| 04/14/2009 | US7519152 Inspection system with material identification |
| 04/14/2009 | US7518129 Preventing dosage drift with duplicate dose integrators |
| 04/14/2009 | US7518127 Sub-wavelength imaging and irradiation with entangled particles |
| 04/14/2009 | US7517617 Mask blank for use in EUV lithography and method for its production |
| 04/09/2009 | WO2006086630A3 Methods for using arrays of x-ray microplanar beam |
| 04/09/2009 | US20090093135 Semiconductor manufacturing apparatus and method for curing material with uv light |
| 04/09/2009 | US20090092922 Imaging Layers, Structures Including Imaging Layers, Methods of Making Imaging Layers, and Imaging Systems |
| 04/09/2009 | US20090090876 Implant beam utilization in an ion implanter |
| 04/08/2009 | EP2043743A1 Method for treating a target volume with a particle beam and device implementing same |
| 04/08/2009 | EP1409078A4 Optically driven therapeutic radiation source |
| 04/08/2009 | CN101404188A Ultraviolet irradiation apparatus |
| 04/08/2009 | CN100476585C Impurity shielding with extendable slice |
| 04/07/2009 | US7515686 Irradiation method and apparatus |
| 04/07/2009 | US7515684 Detection apparatus for x-ray analysis, including semiconductor detectors having uncooled active areas |
| 04/02/2009 | WO2009040424A1 Particle beam transport apparatus and method of transporting a particle beam with small beam spot size |
| 04/02/2009 | WO2009039884A1 Particle beam transport apparatus and method of transporting a particle beam with small beam spot size |
| 04/02/2009 | US20090084990 Charged-particle beam writing apparatus and charged-particle beam writing method |
| 04/02/2009 | US20090084989 Beam irradiation apparatus with deep ultraviolet light emission device for lithographic pattern inspection system |
| 04/02/2009 | US20090084988 Single wafer implanter for silicon-on-insulator wafer fabrication |
| 04/02/2009 | US20090084983 Non-destructive component separation using infrared radiant energy |
| 04/01/2009 | CN101401168A Electron beam generating apparatus |
| 04/01/2009 | CN100474497C Discharge lamp and ultraviolet irradiation system and operation method therefor |
| 03/31/2009 | US7511888 Projection optical system, exposure apparatus, device manufacturing method, and device manufactured by using the same |
| 03/31/2009 | US7511289 Working method utilizing irradiation of charged particle beam onto sample through passage in gas blowing nozzle |
| 03/31/2009 | US7511282 Sample preparation |
| 03/26/2009 | WO2009036599A1 Irradiation device and system |
| 03/26/2009 | US20090080618 X-ray diagnostic apparatus |
| 03/25/2009 | CN100471674C Method for drying a printing ink on a printing substrate in a printing press, and a printing press |
| 03/24/2009 | US7508580 8-mirror microlithography projection objective |
| 03/24/2009 | US7507977 System and method of ion beam control in response to a beam glitch |
| 03/19/2009 | US20090077528 Pattern correction method, pattern correction system, mask manufacturing method, semiconductor device manufacturing method, recording medium, and designed pattern |
| 03/19/2009 | US20090074150 Cone-beam computed tomography with a flat-panel imager |
| 03/19/2009 | US20090073410 Illumination system particularly for microlithography |
| 03/19/2009 | US20090072164 Ion implanting apparatus |
| 03/19/2009 | US20090072163 Techniques for controlling a charged particle beam |
| 03/19/2009 | DE102007031629B3 Microwave stimulated-radiation source for use in printing medium fixing device, has segments positioned on different areas of lamp body, where microwave power output of one segment is adjusted independent of other segment |
| 03/18/2009 | CN100470381C A method of patterning photoresist on a wafer using an attenuated phase shift mask |
| 03/12/2009 | US20090068769 Method and Apparatus for Plasma Processing |
| 03/12/2009 | US20090067577 Patient alignment system with external measurement and object coordination for radiation therapy system |