| Patents for B81B 7 - Micro-structural systems (8,983) |
|---|
| 01/16/2013 | CN102874742A Cobaltosic oxide micro-nano composite structure array and manufacturing method thereof |
| 01/16/2013 | CN102874741A Spherical optical microcavity on chip and preparation method of spherical optical microcavity |
| 01/16/2013 | CN102874740A Infrared detection device and manufacturing method thereof |
| 01/16/2013 | CN102874739A 自锁圆片键合结构及制作方法 Self-locking wafer bonding structure and production methods |
| 01/16/2013 | CN102874738A Infrared probe and manufacture method thereof |
| 01/16/2013 | CN102874737A micro system and/or nano system type of device and manufacturing method thereof |
| 01/16/2013 | CN102874736A Transverse comb tooth type micro-electromechanical vibration energy collector |
| 01/16/2013 | CN101734606B Sensing film and micro-electromechanical system device applying same |
| 01/10/2013 | WO2013006140A1 A system and method for detecting one or more analytes in a fluid |
| 01/10/2013 | WO2012154688A3 Methods and devices to control fluid volumes, reagent and particle concentration in arrays of microfluidic drops |
| 01/10/2013 | WO2012141484A3 Bowl-shaped structure, method for manufacturing same, and bowl array |
| 01/10/2013 | DE102011078770A1 Mikrofluidische Vorrichtung, mikrofluidisches System und Verfahren zum Transport von Fluiden A microfluidic device, a microfluidic system and method for conveyance of fluids |
| 01/09/2013 | CN202657950U Real-time color dynamic regulation and control micro-device |
| 01/09/2013 | CN102862947A MEMS (micro-electromechanical systems) device and vacuum encapsulation method of wafer level thereof |
| 01/09/2013 | CN102862946A Structure of plastic packaging premolding of hollow packaging |
| 01/09/2013 | CN102862945A Structure of plastic packaging of hollow packaging |
| 01/09/2013 | CN102862944A Microfluidic device, microfluidic system and method for transporting fluids |
| 01/09/2013 | CN102163531B Flat line type ion trap mass analyzer based on MEMS (micro electro mechanical system) process and manufacturing method thereof |
| 01/09/2013 | CN102050418B Three-dimensional integrated structure and production methods thereof |
| 01/09/2013 | CN101625345B Large area MEMS membrane type gas enricher |
| 01/09/2013 | CN101539586B Element wafer and method for manufacturing the same |
| 01/08/2013 | CA2429508C Piano mems micromirror |
| 01/03/2013 | WO2013003078A1 Bonded double substrate approach to solve laser drilling problems |
| 01/03/2013 | WO2013002809A1 Calibration of mems sensor |
| 01/03/2013 | WO2013002767A1 Out-of-plane travel restriction structures |
| 01/03/2013 | WO2013000224A1 Artificial microstructure and artificial electromagnetic material applying same |
| 01/03/2013 | DE102012211058A1 Winkelgeschwindigkeitssensor Angular velocity sensor |
| 01/03/2013 | DE102009026682A9 Bauelement mit einer mikromechanischen Mikrofonstruktur und Verfahren zu dessen Herstellung Component having a micromechanical microphone structure and process for its preparation |
| 01/03/2013 | DE102008000128B4 Halbleitersensorvorrichtung und deren Herstellungsverfahren A semiconductor sensor device and its manufacturing method |
| 01/02/2013 | CN102860038A Microphone |
| 01/02/2013 | CN102859735A Ferroelectric device |
| 01/02/2013 | CN102859688A Semiconductor package for mems device and method of manufacturing the same |
| 01/02/2013 | CN102853926A Packing structure of MEMS (Micro-electromechanical Systems) temperature sensor and manufacturing method of packing structure |
| 01/02/2013 | CN101482528B Production method for integrated concentrated nano-particle monolayer film hydrogen sensor |
| 12/27/2012 | WO2012176475A1 Magnetostrictive power-generating thin film strip, method for producing same, and magnetostrictive power-generating module |
| 12/27/2012 | WO2012145301A3 Single-layer pcb microfluidics |
| 12/27/2012 | US20120328834 Microfabricated elastomeric valve and pump systems |
| 12/27/2012 | DE102011077933A1 Method for bonding substrates for use in semiconductor device, involves cooling composite substrate to specific temperature below another temperature with defined cooling rate |
| 12/26/2012 | EP2538175A1 Angular speed sensor and composite sensor for detecting angular speed and acceleration |
| 12/26/2012 | EP2537797A1 Structure with getter material hermetically protected during the manufacturing thereof |
| 12/26/2012 | EP2537796A1 Getter structure comprising a gas-permeable material |
| 12/26/2012 | EP2537181A1 Device including electrical, electronic, electromechanical or electro-optical components having reduced sensitivity at a low dose rate |
| 12/26/2012 | CN102844263A Electromagnetically actuated micro-shutter |
| 12/26/2012 | CN102838080A Three-dimensional photon limiting optical microcavity structure and preparation method thereof |
| 12/26/2012 | CN101566510B Pressure sensor, manufacturing method thereof, and electronic component provided therewith |
| 12/26/2012 | CN101331080B Substrate-level assembly for an integrated device, manufacturing process thereof and related integrated device |
| 12/20/2012 | WO2012172204A1 Measuring system having electromechanical resonators, method for manufacturing such a system, and method for reading at least two resonators |
| 12/20/2012 | WO2012171295A1 Artificial microstructure and artificial electromagnetic material using same |
| 12/20/2012 | CA2831532A1 Measuring system having electromechanical resonators, method for manufacturing such a system, and method for reading at least two resonators |
| 12/19/2012 | EP2535927A2 Covering material for a microchip, microchip with covering material and method for producing such a microchip |
| 12/19/2012 | EP2534093A2 Microelectromechanical system with reduced speckle contrast |
| 12/19/2012 | EP2534092A2 Semiconductor component and corresponding production method |
| 12/19/2012 | CN202614584U Micro-mechanical structure for detecting nanometer material tensile and compressive mechanical properties |
| 12/19/2012 | CN102826502A MEMS devices and methods of fabrication thereof |
| 12/19/2012 | CN102826501A Quartz fiber surface microstructure and preparation method thereof |
| 12/19/2012 | CN102180441B 微机电装置及其制作方法 MEMS device and manufacturing method thereof |
| 12/18/2012 | US8333896 Component separation device, method of manufacturing the same, and method of separating components using the same |
| 12/18/2012 | CA2565772C High-performance heat engine |
| 12/13/2012 | DE102009036951B4 Keramik-Mehrlagenschaltung mit elektrischem Bauteil Ceramic multilayer circuit with electrical component |
| 12/13/2012 | DE102008059634B4 Mikromechanischer Aktuator mit elektrostatischem Kamm-Antrieb The micromechanical actuator with electrostatic comb-drive |
| 12/12/2012 | CN102822084A CMOS compatible MEMS microphone and method for manufacturing the same |
| 12/12/2012 | CN102820504A Micro mechanical filter of full-sealing structure |
| 12/12/2012 | CN102815660A Packaged device including interposer and method of attaching die to substrate |
| 12/12/2012 | CN102815659A Semiconductor Devices With Moving Members and Methods for Making the Same |
| 12/12/2012 | CN102815658A Semiconductor apparatus |
| 12/12/2012 | CN102815657A Packaging structure and packaging method thereof |
| 12/12/2012 | CN101792113B Method and apparatus for protecting wiring and integrated circuit device |
| 12/06/2012 | DE102011104709A1 Ionization source for mass spectrometer, has capillary channel that is provided with photo-effect material in its interior, such that electrons can be triggered via photoelectric effect from irradiation with light |
| 12/06/2012 | DE102011103749A1 Multi-channel detection device for detecting field components of magnetic field vector produced by magnetic field line camera, has sensor chips whose respective associated Hall-sensors form separate measuring channel |
| 12/06/2012 | DE102011103516A1 Method for filling cavity within micro-electro mechanical system (MEMS) component e.g. microphone, involves forming aperture in the sealing layer using pulsed laser beam so as to open the closed cavity |
| 12/06/2012 | DE102011075260B4 MEMS-Mikrofon MEMS microphone |
| 12/05/2012 | CN202582797U Impact-resistance pressure sensor |
| 12/05/2012 | CN102807189A Micro-electromechanical device |
| 12/05/2012 | CN102807188A Micro atomic cavity subjected to negative pressure forming, micro atomic clock chip and preparation method for micro atomic cavity and micro atomic clock chip |
| 12/05/2012 | CN101316461B Packaging body and packaging component for microphone of micro electro-mechanical systems |
| 11/29/2012 | WO2012162155A1 Mems anchor and spacer structure |
| 11/29/2012 | DE102012104358A1 Verfahren und System für eine Quadraturfehlerkompensation A method and system for a quadrature error compensation |
| 11/29/2012 | DE102011102266A1 Anordnung mit einem MEMS-Bauelement und Verfahren zur Herstellung Assembly comprising a MEMS device and methods for preparing |
| 11/28/2012 | CN202564519U Microwave attenuator |
| 11/28/2012 | CN1668527B Actuator in a microfluidic system for inducing electroosmotic liquid movement in a micro channel |
| 11/28/2012 | CN102803125A MEMS Devices |
| 11/28/2012 | CN102802779A Microreactors |
| 11/28/2012 | CN102798615A Periodic nanostructure-based biosensor and preparation method thereof |
| 11/28/2012 | CN102798474A High-performance MEMS (Micro Electro Mechanical System) thermopile infrared detector structure and preparation method thereof |
| 11/28/2012 | CN102798403A MEMS (Micro Electro Mechanical System) film capacitive type multi-parameter sensor structure and integrated manufacturing method thereof |
| 11/28/2012 | CN102795594A MEMS (micro electro mechanical systems) package structure and package method |
| 11/28/2012 | CN102795590A Device for measuring environmental forces and method of fabricating the same |
| 11/28/2012 | CN101920926B Unmatched seal stress release structure |
| 11/28/2012 | CN101694895B Series radio-frequency micro-electromechanical switch amplified on basis of heat driving and preparation method of same |
| 11/28/2012 | CN101316462B Packaging body and packaging component for microphone of micro electro-mechanical systems |
| 11/22/2012 | DE112010005010T5 Wärmesensoren mit flexiblen Substraten und Verwendungen derselben Heat sensors with flexible substrates and uses thereof |
| 11/21/2012 | EP2524897A2 Method and device for preventing corrosion on sensors |
| 11/21/2012 | CN102786026A Film seal cap packaging structure for MEMS (micro electro mechanical system) optical device and manufacturing method of film seal cap packaging structure |
| 11/21/2012 | CN102786025A Integrated pressure sensor seal |
| 11/21/2012 | CN102786024A Package structure having mems elements and fabrication method thereof |
| 11/21/2012 | CN102786023A Cover plate-free carbon nanotube device structure and manufacturing method thereof |
| 11/21/2012 | CN102053167B Hot air bubble type angular accelerometer applying radio frequency identification tag technology |
| 11/21/2012 | CN101762623B Semiconductor-type gas sensor with A1N heat isolation panel double-side micro structure and manufacturing method thereof |
| 11/21/2012 | CN101593863B Adjustable microwave band-pass filter |
| 11/21/2012 | CN101494814B Voltage variation capacitance device |