Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
09/2014
09/18/2014US20140272344 Composite coatings and methods therefor
09/18/2014US20140272333 Metamaterial and Method for Forming a Metamaterial Using Atomic Layer Deposition
09/18/2014US20140272291 Fabrication method for hydrophilic aluminum surface and hydrophilic aluminum surface body
09/18/2014US20140272197 Directed vapor deposition of environmental barrier coatings
09/18/2014US20140272195 Methods of manufacture of engineered materials and devices
09/18/2014US20140272194 Organoaminosilane precursors and methods for making and using same
09/18/2014US20140272187 Adhesion improvement between cvd dielectric film and cu substrate
09/18/2014US20140272185 Systems and methods for remote plasma atomic layer deposition
09/18/2014US20140272184 Methods for maintaining clean etch rate and reducing particulate contamination with pecvd of amorphous silicon filims
09/18/2014US20140272169 Method for fabricating multilayer environmental barrier coatings
09/18/2014US20140272168 Method for fabricating multilayer environmental barrier coatings
09/18/2014US20140272108 Toroidal Plasma Processing Apparatus
09/18/2014US20140268272 Mems shutter assemblies for high-resolution displays
09/18/2014US20140264196 Multi-Layer-Coated Quantum Dot Beads
09/18/2014US20140264120 Vacuum evaporating apparatus
09/18/2014US20140263272 Yttria-based material coated chemical vapor deposition chamber heater
09/18/2014US20140263181 Method and apparatus for generating highly repetitive pulsed plasmas
09/18/2014US20140263169 Methods for processing a substrate using multiple substrate support positions
09/18/2014US20140261702 Apparatus and method for collecting powder generated during film deposition process
09/18/2014US20140261186 Method and apparatus for manufacturing three-dimensional-structure memory device
09/18/2014US20140261185 Epi base ring
09/18/2014US20140261182 Substrate processing apparatus
09/18/2014US20140261178 Peald apparatus to enable rapid cycling
09/18/2014US20140261177 Apparatus for gas injection in a physical vapor deposition chamber
09/18/2014US20140261176 Pumping liner for chemical vapor deposition
09/18/2014DE112012003749T5 C-Reiche Carbobornitriddielektrikum-Dünnschichten für die Verwendung in elektronischen Einheiten C-rich Carbobornitriddielektrikum thin films for use in electronic devices
09/18/2014DE102013204591A1 Vakuum-Substratbehandlungsanlage Vacuum substrate treatment plant
09/18/2014DE102013004611A1 Beschichtung, Verfahren zu deren Herstellung und ihre Verwendung Coating, processes for their preparation and their use
09/17/2014EP2776603A1 PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL PACKAGE, COATING PROCESS AND APPARATUS
09/17/2014EP2776601A1 High emissivity distribution plate in vapor deposition apparatus and processes
09/17/2014EP2776596A1 Method for manufacturing a titanium alloy for biomedical devices
09/17/2014EP2776204A1 Friction stir welding tool made of cemented tungsten carbid with nickel and with a al203 surface coating
09/16/2014US8836039 Semiconductor device including high-k/metal gate electrode
09/16/2014US8835909 Hybrid dielectric material for thin film transistors
09/16/2014US8835756 Zinc oxide photoelectrodes and methods of fabrication
09/16/2014US8835331 Vapor-phase growing apparatus and vapor-phase growing method
09/16/2014US8834968 Method of forming phase change material layer using Ge(II) source, and method of fabricating phase change memory device
09/16/2014US8834963 Method for applying material to a surface
09/16/2014US8834955 Methods and apparatus for a gas panel with constant gas flow
09/16/2014US8834817 Method for removing metal impurity from quartz component part used in heat processing apparatus of batch type
09/16/2014US8834730 Nanoporous membrane and manufacturing method thereof
09/16/2014US8834686 Microporous article having metallic nanoparticle coating
09/16/2014US8834673 Process chamber having gate slit opening and closing apparatus
09/16/2014US8834631 Processing apparatus and valve operation checking method
09/16/2014US8833299 Divided annular rib type plasma processing apparatus
09/16/2014US8833298 Film forming apparatus
09/15/2014CA2846177A1 Low pressure arc plasma immersion coating vapor deposition and ion treatment
09/12/2014WO2014138361A2 High temperature conversion coating on steel and iron substrates
09/12/2014WO2014136749A1 Nitride semiconductor crystals and production method therefor
09/12/2014WO2014136416A1 Method for producing semiconductor device and method for growing crystal of group iii-v semiconductor
09/12/2014WO2014135283A1 Method for optimizing a deposition process, method for adjusting a deposition device, and deposition device
09/11/2014US20140255616 Crystallization and bleaching of diamond-like carbon and silicon oxynitride thin films
09/11/2014US20140255606 Methods For Depositing Films Comprising Cobalt And Cobalt Nitrides
09/11/2014US20140255286 Method for manufacturing cubic boron nitride thin film with reduced compressive residual stress and cubic boron nitride thin film manufactured using the same
09/11/2014US20140254037 Mirror comprising a silvering-modifying layer
09/11/2014US20140251503 High Temperature Conversion Coating on Steel and Iron Substrates
09/11/2014US20140251216 Flip edge shadow frame
09/11/2014DE102013217629A1 Wabenmasken für beschichtungsverfahren sowie ihre herstellung und anwendung Honeycomb masks for coating processes as well as their production and application
09/11/2014DE102013203995A1 Verfahren und Vorrichtung zum Schützen eines Substrats während einer Bearbeitung mit einem Teilchenstrahl Method and apparatus for protecting a substrate during a particle beam processing with a
09/11/2014DE102013004116A1 Verfahren zum Optimieren eines Abscheidungsprozesses, Verfahren zum Einstellen einer Depositionsanlage und Depositionsanlage A method for optimizing a deposition process method for adjusting a deposition system and deposition system
09/11/2014DE102010002839B4 Beschichtungsanlage und Verfahren zur Beschichtung von Halbleiterscheiben in Beschichtungsanlagen Coating system and method for coating of semiconductor wafers in coating equipment
09/10/2014EP2773793A1 Methods for applying a coating to a substrate in rolled form
09/09/2014USRE45124 Methods of atomic layer deposition using titanium-based precursors
09/09/2014US8829647 High temperature ALD process for metal oxide for DRAM applications
09/09/2014US8829468 Magnetically enhanced, inductively coupled plasma source for a focused ion beam system
09/09/2014US8829444 Synthesis of advanced scintillators via vapor deposition techniques
09/09/2014US8829397 Corrosion-resistant multilayer ceramic member
09/09/2014US8829393 Scanned laser light source
09/09/2014US8828890 Method for depositing cyclic thin film
09/09/2014US8828886 Low dielectric constant insulating film and method for forming the same
09/09/2014US8828856 Substrate on which film is formed, and organic EL display device
09/09/2014US8828821 Fabrication of semiconductor stacks with ruthenium-based materials
09/09/2014US8828563 Cutting tool for machining metallic materials
09/09/2014US8828528 Barrier film and method of manufacturing the same
09/09/2014US8828527 Surface-coated cutting tool
09/09/2014US8828505 Plasma enhanced cyclic chemical vapor deposition of silicon-containing films
09/09/2014US8828504 Deposition of hydrogenated thin film
09/09/2014US8828498 Method of coating a surface with a water and oil repellant polymer layer
09/09/2014US8828492 Method of making aluminum oxynitride coated article
09/09/2014US8828491 Methods for manufacturing architectural constructs
09/09/2014US8828490 Vapor deposition method
09/09/2014US8828481 Method of depositing silicon on carbon materials and forming an anode for use in lithium ion batteries
09/09/2014US8828184 Plasma processing apparatus and plasma processing method
09/09/2014US8828141 Substrate processing apparatus and method for manufacturing semiconductor device
09/09/2014US8826857 Plasma processing assemblies including hinge assemblies
09/09/2014US8826856 Optical thin-film vapor deposition apparatus and optical thin-film production method
09/09/2014US8826855 C-shaped confinement ring for a plasma processing chamber
09/09/2014US8826854 Direct-current plasma CVD apparatus and method for producing diamond using the same
09/09/2014US8826853 Apparatus for PECVD deposition of an internal barrier layer on a receptacle, the apparatus including an optical plasma analysis device
09/09/2014US8826851 Cover for a roller
09/04/2014WO2014134577A1 Plasma or cvd pre-treatment for lubricated pharmaceutical package, coating process and apparatus
09/04/2014WO2014134524A1 Synthesis of transition metal disulfide layers
09/04/2014WO2014134481A1 Metal amide deposition precursors and their stabilization with an inert ampoule liner
09/04/2014WO2014134476A1 LOW TEMPERATURE ATOMIC LAYER DEPOSITION OF FILMS COMPRISING SiCN OR SiCON
09/04/2014WO2014134204A1 Mixed metal-silicon-oxide barriers
09/04/2014WO2014134019A1 Corrosion resistance metallic components for batteries
09/04/2014WO2014133465A1 A capacitively coupled electrodeless plasma apparatus and a method using capacitively coupled electrodeless plasma for processing a silicon substrate
09/04/2014US20140248444 Plasma Treatment Of Substrates
09/04/2014US20140248442 Installation and method for the functionalization of particulate and powdered products
09/04/2014US20140246483 Aluminium alloy sheet product or extruded product for fluxless brazing
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