Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
---|
09/18/2014 | US20140272344 Composite coatings and methods therefor |
09/18/2014 | US20140272333 Metamaterial and Method for Forming a Metamaterial Using Atomic Layer Deposition |
09/18/2014 | US20140272291 Fabrication method for hydrophilic aluminum surface and hydrophilic aluminum surface body |
09/18/2014 | US20140272197 Directed vapor deposition of environmental barrier coatings |
09/18/2014 | US20140272195 Methods of manufacture of engineered materials and devices |
09/18/2014 | US20140272194 Organoaminosilane precursors and methods for making and using same |
09/18/2014 | US20140272187 Adhesion improvement between cvd dielectric film and cu substrate |
09/18/2014 | US20140272185 Systems and methods for remote plasma atomic layer deposition |
09/18/2014 | US20140272184 Methods for maintaining clean etch rate and reducing particulate contamination with pecvd of amorphous silicon filims |
09/18/2014 | US20140272169 Method for fabricating multilayer environmental barrier coatings |
09/18/2014 | US20140272168 Method for fabricating multilayer environmental barrier coatings |
09/18/2014 | US20140272108 Toroidal Plasma Processing Apparatus |
09/18/2014 | US20140268272 Mems shutter assemblies for high-resolution displays |
09/18/2014 | US20140264196 Multi-Layer-Coated Quantum Dot Beads |
09/18/2014 | US20140264120 Vacuum evaporating apparatus |
09/18/2014 | US20140263272 Yttria-based material coated chemical vapor deposition chamber heater |
09/18/2014 | US20140263181 Method and apparatus for generating highly repetitive pulsed plasmas |
09/18/2014 | US20140263169 Methods for processing a substrate using multiple substrate support positions |
09/18/2014 | US20140261702 Apparatus and method for collecting powder generated during film deposition process |
09/18/2014 | US20140261186 Method and apparatus for manufacturing three-dimensional-structure memory device |
09/18/2014 | US20140261185 Epi base ring |
09/18/2014 | US20140261182 Substrate processing apparatus |
09/18/2014 | US20140261178 Peald apparatus to enable rapid cycling |
09/18/2014 | US20140261177 Apparatus for gas injection in a physical vapor deposition chamber |
09/18/2014 | US20140261176 Pumping liner for chemical vapor deposition |
09/18/2014 | DE112012003749T5 C-Reiche Carbobornitriddielektrikum-Dünnschichten für die Verwendung in elektronischen Einheiten C-rich Carbobornitriddielektrikum thin films for use in electronic devices |
09/18/2014 | DE102013204591A1 Vakuum-Substratbehandlungsanlage Vacuum substrate treatment plant |
09/18/2014 | DE102013004611A1 Beschichtung, Verfahren zu deren Herstellung und ihre Verwendung Coating, processes for their preparation and their use |
09/17/2014 | EP2776603A1 PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL PACKAGE, COATING PROCESS AND APPARATUS |
09/17/2014 | EP2776601A1 High emissivity distribution plate in vapor deposition apparatus and processes |
09/17/2014 | EP2776596A1 Method for manufacturing a titanium alloy for biomedical devices |
09/17/2014 | EP2776204A1 Friction stir welding tool made of cemented tungsten carbid with nickel and with a al203 surface coating |
09/16/2014 | US8836039 Semiconductor device including high-k/metal gate electrode |
09/16/2014 | US8835909 Hybrid dielectric material for thin film transistors |
09/16/2014 | US8835756 Zinc oxide photoelectrodes and methods of fabrication |
09/16/2014 | US8835331 Vapor-phase growing apparatus and vapor-phase growing method |
09/16/2014 | US8834968 Method of forming phase change material layer using Ge(II) source, and method of fabricating phase change memory device |
09/16/2014 | US8834963 Method for applying material to a surface |
09/16/2014 | US8834955 Methods and apparatus for a gas panel with constant gas flow |
09/16/2014 | US8834817 Method for removing metal impurity from quartz component part used in heat processing apparatus of batch type |
09/16/2014 | US8834730 Nanoporous membrane and manufacturing method thereof |
09/16/2014 | US8834686 Microporous article having metallic nanoparticle coating |
09/16/2014 | US8834673 Process chamber having gate slit opening and closing apparatus |
09/16/2014 | US8834631 Processing apparatus and valve operation checking method |
09/16/2014 | US8833299 Divided annular rib type plasma processing apparatus |
09/16/2014 | US8833298 Film forming apparatus |
09/15/2014 | CA2846177A1 Low pressure arc plasma immersion coating vapor deposition and ion treatment |
09/12/2014 | WO2014138361A2 High temperature conversion coating on steel and iron substrates |
09/12/2014 | WO2014136749A1 Nitride semiconductor crystals and production method therefor |
09/12/2014 | WO2014136416A1 Method for producing semiconductor device and method for growing crystal of group iii-v semiconductor |
09/12/2014 | WO2014135283A1 Method for optimizing a deposition process, method for adjusting a deposition device, and deposition device |
09/11/2014 | US20140255616 Crystallization and bleaching of diamond-like carbon and silicon oxynitride thin films |
09/11/2014 | US20140255606 Methods For Depositing Films Comprising Cobalt And Cobalt Nitrides |
09/11/2014 | US20140255286 Method for manufacturing cubic boron nitride thin film with reduced compressive residual stress and cubic boron nitride thin film manufactured using the same |
09/11/2014 | US20140254037 Mirror comprising a silvering-modifying layer |
09/11/2014 | US20140251503 High Temperature Conversion Coating on Steel and Iron Substrates |
09/11/2014 | US20140251216 Flip edge shadow frame |
09/11/2014 | DE102013217629A1 Wabenmasken für beschichtungsverfahren sowie ihre herstellung und anwendung Honeycomb masks for coating processes as well as their production and application |
09/11/2014 | DE102013203995A1 Verfahren und Vorrichtung zum Schützen eines Substrats während einer Bearbeitung mit einem Teilchenstrahl Method and apparatus for protecting a substrate during a particle beam processing with a |
09/11/2014 | DE102013004116A1 Verfahren zum Optimieren eines Abscheidungsprozesses, Verfahren zum Einstellen einer Depositionsanlage und Depositionsanlage A method for optimizing a deposition process method for adjusting a deposition system and deposition system |
09/11/2014 | DE102010002839B4 Beschichtungsanlage und Verfahren zur Beschichtung von Halbleiterscheiben in Beschichtungsanlagen Coating system and method for coating of semiconductor wafers in coating equipment |
09/10/2014 | EP2773793A1 Methods for applying a coating to a substrate in rolled form |
09/09/2014 | USRE45124 Methods of atomic layer deposition using titanium-based precursors |
09/09/2014 | US8829647 High temperature ALD process for metal oxide for DRAM applications |
09/09/2014 | US8829468 Magnetically enhanced, inductively coupled plasma source for a focused ion beam system |
09/09/2014 | US8829444 Synthesis of advanced scintillators via vapor deposition techniques |
09/09/2014 | US8829397 Corrosion-resistant multilayer ceramic member |
09/09/2014 | US8829393 Scanned laser light source |
09/09/2014 | US8828890 Method for depositing cyclic thin film |
09/09/2014 | US8828886 Low dielectric constant insulating film and method for forming the same |
09/09/2014 | US8828856 Substrate on which film is formed, and organic EL display device |
09/09/2014 | US8828821 Fabrication of semiconductor stacks with ruthenium-based materials |
09/09/2014 | US8828563 Cutting tool for machining metallic materials |
09/09/2014 | US8828528 Barrier film and method of manufacturing the same |
09/09/2014 | US8828527 Surface-coated cutting tool |
09/09/2014 | US8828505 Plasma enhanced cyclic chemical vapor deposition of silicon-containing films |
09/09/2014 | US8828504 Deposition of hydrogenated thin film |
09/09/2014 | US8828498 Method of coating a surface with a water and oil repellant polymer layer |
09/09/2014 | US8828492 Method of making aluminum oxynitride coated article |
09/09/2014 | US8828491 Methods for manufacturing architectural constructs |
09/09/2014 | US8828490 Vapor deposition method |
09/09/2014 | US8828481 Method of depositing silicon on carbon materials and forming an anode for use in lithium ion batteries |
09/09/2014 | US8828184 Plasma processing apparatus and plasma processing method |
09/09/2014 | US8828141 Substrate processing apparatus and method for manufacturing semiconductor device |
09/09/2014 | US8826857 Plasma processing assemblies including hinge assemblies |
09/09/2014 | US8826856 Optical thin-film vapor deposition apparatus and optical thin-film production method |
09/09/2014 | US8826855 C-shaped confinement ring for a plasma processing chamber |
09/09/2014 | US8826854 Direct-current plasma CVD apparatus and method for producing diamond using the same |
09/09/2014 | US8826853 Apparatus for PECVD deposition of an internal barrier layer on a receptacle, the apparatus including an optical plasma analysis device |
09/09/2014 | US8826851 Cover for a roller |
09/04/2014 | WO2014134577A1 Plasma or cvd pre-treatment for lubricated pharmaceutical package, coating process and apparatus |
09/04/2014 | WO2014134524A1 Synthesis of transition metal disulfide layers |
09/04/2014 | WO2014134481A1 Metal amide deposition precursors and their stabilization with an inert ampoule liner |
09/04/2014 | WO2014134476A1 LOW TEMPERATURE ATOMIC LAYER DEPOSITION OF FILMS COMPRISING SiCN OR SiCON |
09/04/2014 | WO2014134204A1 Mixed metal-silicon-oxide barriers |
09/04/2014 | WO2014134019A1 Corrosion resistance metallic components for batteries |
09/04/2014 | WO2014133465A1 A capacitively coupled electrodeless plasma apparatus and a method using capacitively coupled electrodeless plasma for processing a silicon substrate |
09/04/2014 | US20140248444 Plasma Treatment Of Substrates |
09/04/2014 | US20140248442 Installation and method for the functionalization of particulate and powdered products |
09/04/2014 | US20140246483 Aluminium alloy sheet product or extruded product for fluxless brazing |