| Patents for G21K 7 - Gamma ray or x-ray microscopes (1,690) |
|---|
| 02/26/2015 | WO2015027029A1 Phase contrast imaging using patterned illumination/detector and phase mask |
| 02/26/2015 | US20150055745 Phase Contrast Imaging Using Patterned Illumination/Detector and Phase Mask |
| 02/17/2015 | US8957959 Charged particle microscope and measurement image correction method thereof |
| 02/10/2015 | US8952330 System and method for electromagnetic interference shielding for critical dimension-scanning electron microscope |
| 02/10/2015 | US8952329 3D image profiling techniques for lithography |
| 02/03/2015 | US8946629 Inspection apparatus |
| 02/03/2015 | US8946628 Electron beam interference device and electron beam interferometry |
| 01/13/2015 | US8933401 System and method for compressive scanning electron microscopy |
| 01/07/2015 | CN204087839U 成像窗口 Imaging window |
| 01/07/2015 | CN204087838U 氮化硅薄膜窗口 Silicon nitride film window |
| 12/16/2014 | US8912491 Method of performing tomographic imaging of a sample in a charged-particle microscope |
| 12/09/2014 | US8907278 Charged particle beam applied apparatus, and irradiation method |
| 11/18/2014 | US8891728 Specimen supporting member for X-ray microscope image observation, specimen containing cell for X-ray microscope image observation, and X-ray microscope |
| 10/23/2014 | US20140313314 Data Management in a Linear-Array-Based Microscope Slide Scanner |
| 10/23/2014 | US20140313313 Fully automatic rapid microscope slide scanner |
| 09/18/2014 | WO2014139807A1 Illumination optical unit for a mask inspection system and mask inspection system with such an illumination optical unit |
| 09/16/2014 | US8835847 Sample holding apparatus for electron microscope, and electron microscope apparatus |
| 09/16/2014 | US8835844 Sample electrification measurement method and charged particle beam apparatus |
| 09/09/2014 | US8829436 Phase plate and method of fabricating same |
| 09/09/2014 | US8827467 Magnifying imaging optical unit and metrology system including same |
| 08/21/2014 | WO2014126672A2 Multi energy x-ray microscope data acquisition and image reconstruction system and method |
| 08/21/2014 | DE102013202487A1 Vorrichtung zur räumlichen Ausrichtung einer Röntgenoptik und Apparatur mit einer solchen Apparatus for spatial orientation of X-ray optics and apparatus with such a |
| 08/14/2014 | US20140226797 Sample-containing cell for x-ray microscope and method for observing x-ray microscopic image |
| 08/12/2014 | US8803087 Spectrum analyzer and method of spectrum analysis |
| 08/05/2014 | US8796621 Detector and inspecting apparatus |
| 07/16/2014 | EP2755209A1 Sample-containing cell for x-ray microscope and method for observing x-ray microscopic image |
| 07/08/2014 | US8774477 System and method to determine slide quality of a digitized microscope slide |
| 07/08/2014 | US8772716 Phase plate for a TEM |
| 06/24/2014 | US8759765 Method for processing samples held by a nanomanipulator |
| 06/17/2014 | US8755579 Fully automatic rapid microscope slide scanner |
| 06/17/2014 | US8754935 Microstructure inspection method, microstructure inspection apparatus, and microstructure inspection program |
| 06/17/2014 | US8754384 Sample preparation stage |
| 06/05/2014 | WO2014083206A1 X-ray machine |
| 06/03/2014 | US8742344 Inspection apparatus |
| 06/03/2014 | US8742341 Testing apparatus using charged particles and device manufacturing method using the testing apparatus |
| 05/27/2014 | US8735816 Standard member for calibration and method of manufacturing the same and scanning electron microscope using the same |
| 05/27/2014 | US8735815 Method and apparatus for electron pattern imaging |
| 05/27/2014 | US8735814 Electron beam device |
| 05/20/2014 | US8731260 Data management in a linear-array-based microscope slide scanner |
| 05/08/2014 | WO2014070996A1 Stacked zone plates for pitch frequency multiplication |
| 05/08/2014 | US20140126691 Fourier Ptychographic X-ray Imaging Systems, Devices, and Methods |
| 04/29/2014 | US8710438 Scanning transmission electron microscope and axial adjustment method thereof |
| 04/22/2014 | US8704177 Electron microscope, electron-microscope image-reconstruction system and electron-microscope image-reconstruction method |
| 04/01/2014 | US8686359 Characterization of nanoscale structures using an ultrafast electron microscope |
| 03/18/2014 | US8674317 Sample surface inspection apparatus and method |
| 03/13/2014 | WO2014039644A1 High speed x-ray inspection microscope |
| 03/12/2014 | EP2706537A1 x-ray source generating a nanometer-sized beam and imaging device comprising at least one such source |
| 03/06/2014 | WO2014033459A1 Improvements in phase retrieval from ptychography |
| 03/06/2014 | US20140064445 High speed x-ray inspection microscope |
| 03/04/2014 | US8666165 Scanning electron microscope |
| 03/04/2014 | US8664595 Cluster analysis of unknowns in SEM-EDS dataset |
| 03/04/2014 | US8664594 Electron-optical system for high-speed and high-sensitivity inspections |
| 02/18/2014 | US8656509 Scanning probe microscope and surface shape measuring method using same |
| 02/18/2014 | US8653457 Spectroscopy technique using merged spectral data |
| 02/18/2014 | US8653456 Pattern inspection method, pattern inspection program, and electronic device inspection system |
| 02/11/2014 | US8648300 Charged particle beam apparatus |
| 02/06/2014 | US20140037052 X-ray photoemission microscope for integrated devices |
| 01/28/2014 | US8637821 Blocking member for use in the diffraction plane of a TEM |
| 01/21/2014 | US8633823 Systems and methods for automated, rapid detection of high-atomic-number materials |
| 01/21/2014 | US8633439 System and method for electromagnetic interference shielding for critical dimension-scanning electron microscope |
| 01/07/2014 | US8624183 Determining a reconstructed image with viterbi detection using a particle-optical apparatus |
| 12/10/2013 | US8604430 Method and an apparatus of an inspection system using an electron beam |
| 12/10/2013 | US8602648 X-ray microscope system with cryogenic handling system and method |
| 11/26/2013 | US8592763 Ion beam sample preparation apparatus and methods |
| 11/19/2013 | US8586923 Low-voltage transmission electron microscopy |
| 11/19/2013 | US8586919 Low-voltage transmission electron microscopy |
| 11/12/2013 | US8581188 Electron detector including one or more intimately-coupled scintillator-photomultiplier combinations, and electron microscope employing same |
| 11/06/2013 | CN102047344B Source grating for x-rays, imaging apparatus for x-ray phase contrast image and x-ray computed tomography system |
| 11/05/2013 | US8577124 Method and apparatus of pattern inspection and semiconductor inspection system using the same |
| 11/05/2013 | US8575547 Electron beam measurement apparatus |
| 10/30/2013 | CN103377746A Super-resolution imaging achieving method of microscope system |
| 10/29/2013 | US8569693 Distortion free stigmation of a TEM |
| 10/29/2013 | US8569692 Measurement system with thickness calculation and method of operation thereof |
| 10/22/2013 | US8565503 System and method to determine slide quality of a digitized microscope slide |
| 10/22/2013 | US8563927 Shielding member having a charge control electrode, and a charged particle beam apparatus |
| 10/22/2013 | US8563926 Method of making axial alignment of charged particle beam and charged particle beam system |
| 10/10/2013 | WO2013151284A1 Neutron source |
| 09/10/2013 | US8530837 Arrangement and method for the contrast improvement in a charged particle beam device for inspecting a specimen |
| 08/29/2013 | DE102012013530B3 Vorrichtung zur Messung resonanter inelastischer Röntgenstreuung einer Probe Device for measuring resonant inelastic X-ray scattering of a sample |
| 08/20/2013 | US8513627 Charged particle beam apparatus |
| 08/20/2013 | US8513603 In-situ determination of thin film and multilayer structure and chemical composition using x-ray fluorescence induced by grazing incidence electron beams during thin film growth |
| 08/13/2013 | US8507857 Charged particle beam inspection apparatus and inspection method using charged particle beam |
| 08/06/2013 | US8502145 Electron microscope system and method for evaluating film thickness reduction of resist patterns |
| 08/06/2013 | US8502141 Graphical user interface for use with electron beam wafer inspection |
| 07/23/2013 | US8492715 Method of protecting a radiation detector in a charged particle instrument |
| 07/02/2013 | US8476588 Method of electron diffraction tomography |
| 06/27/2013 | US20130162802 Fully Automatic Rapid Microscope Slide Scanner |
| 05/28/2013 | US8450699 Electron beam device and electron beam application device using the same |
| 05/21/2013 | US8445846 Beam optical component having a charged particle lens |
| 05/14/2013 | US8440970 Characterization of nanoscale structures using an ultrafast electron microscope |
| 05/02/2013 | DE102012011309A1 Transmission type x-ray tube, comprises target and filter material where target has minimum one element as excited producing x-rays |
| 04/30/2013 | US8431894 Electron beam device |
| 04/30/2013 | US8431892 Detector and inspecting apparatus |
| 04/30/2013 | US8431891 Dual beam apparatus with tilting sample stage |
| 04/25/2013 | DE102005056404B4 Röntgenmikroskop mit Kondensor-Monochromator-Anordnung hoher spektraler Auflösung X-ray microscope with condenser-monochromator arrangement of high spectral resolution |
| 04/23/2013 | US8426811 Electron microscope |
| 04/10/2013 | EP2577325A1 Device for topographical characterisation and chemical mapping of surfaces |
| 04/02/2013 | US8410440 Specimen observation method |
| 04/02/2013 | US8410438 Charged particle beam device |
| 03/19/2013 | US8401269 System and method for automatic measurements and calibration of computerized magnifying instruments |