| Patents for G21K 7 - Gamma ray or x-ray microscopes (1,690) |
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| 04/10/2008 | WO2007070475A3 Scanning electron microscope with crt-type electron optics |
| 04/08/2008 | US7355176 Method of forming TEM specimen and related protection layer |
| 04/08/2008 | US7355175 Method and apparatus for automatically correcting charged-particle beam and method of controlling aberration corrector for charged-particle beam |
| 04/03/2008 | US20080078934 Charged Particle Beam Instrument and Method of Detecting Charged Particles |
| 04/03/2008 | US20080078933 Electron Beam Exposure or System Inspection Or Measurement Apparatus And Its Method And Height Detection Apparatus |
| 04/03/2008 | DE10250893B4 Verfahren und Vorrichtung zum Bestimmen der Abmessung eines Strukturelements durch Variieren eines die Auflösung bestimmenden Parameters Method and apparatus for determining the dimension of a structural element by varying a parameter determining the resolution |
| 04/01/2008 | US7352195 Electron beam apparatus with detailed observation function and sample inspecting and observing method using electron beam apparatus |
| 04/01/2008 | US7351971 Charged-particle beam instrument and method of detection |
| 04/01/2008 | US7351969 Electron beam inspection system and inspection method and method of manufacturing devices using the system |
| 04/01/2008 | US7350404 Scanning type probe microscope and probe moving control method therefor |
| 03/27/2008 | US20080073535 Planar view sample preparation |
| 03/27/2008 | US20080073534 Scanning electron microscope |
| 03/27/2008 | US20080073533 Inspection system and inspection method |
| 03/27/2008 | US20080073532 Observational liquid/gas environment combined with specimen chamber of electron microscope |
| 03/27/2008 | US20080073531 Charged particle beam system and a method for inspecting a sample |
| 03/27/2008 | US20080073530 Method and apparatus for detecting positively charged and negatively charged ionized particles |
| 03/20/2008 | US20080067387 Crosswire sensor |
| 03/20/2008 | US20080067384 Method and apparatus of measuring thin film sample and method and apparatus of fabricating thin film sample |
| 03/20/2008 | US20080067383 Electron-beam size measuring apparatus and size measuring method with electron beams |
| 03/20/2008 | US20080067382 Full spectrum lapidary 3D image scanner and method |
| 03/20/2008 | US20080067381 Semiconductor wafer inspection tool and semiconductor wafer inspection method |
| 03/20/2008 | US20080067380 Charged particle beam equipment |
| 03/20/2008 | US20080067379 X-ray analyzer using electron beam |
| 03/20/2008 | US20080067378 Charged particle beam apparatus |
| 03/20/2008 | US20080067377 Electron beam apparatus and an aberration correction optical apparatus |
| 03/20/2008 | US20080067376 Charged particle beam apparatus |
| 03/20/2008 | US20080067375 Electron Beam Holography Observation Apparatus |
| 03/20/2008 | US20080067374 Specimen Analyzing Apparatus and Specimen Holder |
| 03/20/2008 | US20080067373 Measurement of critical dimension and quantification of electron beam size at real time using electron beam induced current |
| 03/20/2008 | US20080067372 Defect imaging device and method |
| 03/13/2008 | US20080063258 Defect inspection apparatus |
| 03/05/2008 | CN100373993C Method for obtaining an extraeme ultraviolet radiation source, radiation source and use in lithography |
| 02/21/2008 | WO2007089641A3 Process and apparatus for imaging |
| 02/14/2008 | CA2660044A1 Method for detecting fluorescent signals in a biological sample |
| 02/12/2008 | US7330307 Stage apparatus |
| 02/12/2008 | US7330032 Techniques for building-scale electrostatic tomography |
| 02/12/2008 | US7329889 Electron beam apparatus and method with surface height calculator and a dual projection optical unit |
| 02/12/2008 | US7329878 Method for manufacturing a lens assembly of microcolumn and lens assembly of microcolumn manufactured by the same |
| 01/30/2008 | CN100366129C Method and arrangement for producing radiation |
| 01/15/2008 | US7319224 Semiconductor probe with resistive tip and method of fabricating the same |
| 01/03/2008 | WO2004053920A3 Humidified imaging with an environmental scanning electron microscope |
| 01/01/2008 | US7315024 Monochromator and scanning electron microscope using the same |
| 01/01/2008 | US7315023 Method of preparing a sample for examination in a TEM |
| 12/25/2007 | US7312449 Electron beam system and method of manufacturing devices using the system |
| 12/13/2007 | WO2007141868A1 X-ray microscope and x-ray microscopic method |
| 12/13/2007 | US20070284527 Apparatus and method for controlled particle beam manufacturing |
| 12/12/2007 | EP1509941A4 Low-pressure chamber for scanning electron microscopy in a wet environment |
| 12/11/2007 | US7308078 X-ray micro-target source |
| 12/11/2007 | US7307254 Scanning electron microscope |
| 12/04/2007 | US7304313 Low-pressure chamber for scanning electron microscopy in a wet environment |
| 12/04/2007 | CA2285296C High resolution x-ray imaging of very small objects |
| 11/27/2007 | US7301146 Probe driving method, and probe apparatus |
| 11/20/2007 | US7297950 Transmission electron microscope specimen and method of manufacturing the same |
| 11/13/2007 | US7294780 Photoelectric current multiplier using molecular crystal and production method therefor |
| 11/08/2007 | US20070258114 Method and Device for Optically Scanning a Sample |
| 11/07/2007 | EP1482520A4 X-ray microscope |
| 11/06/2007 | US7292327 Circuit-pattern inspection apparatus |
| 10/30/2007 | US7289597 Optical axis adjusting mechanism for X-ray lens, X-ray analytical instrument, and method of adjusting optical axis of X-ray lens |
| 10/30/2007 | US7288948 Patterned wafer inspection method and apparatus therefor |
| 10/30/2007 | US7288764 Pattern measuring method |
| 10/30/2007 | US7288763 Method of measurement accuracy improvement by control of pattern shrinkage |
| 10/25/2007 | US20070248215 X-Ray Target and Apparatuses Using the Same |
| 10/23/2007 | US7285780 Detector system for a scanning electron microscope and a scanning electron microscope incorporating said detector system |
| 10/23/2007 | US7285779 Methods of scanning an object that includes multiple regions of interest using an array of scanning beams |
| 10/23/2007 | US7285778 Probe current imaging |
| 10/11/2007 | US20070235645 Charged particle beam device |
| 10/04/2007 | WO2007094811A3 Detector optics for multiple electron beam test system |
| 10/04/2007 | US20070228276 Inspection Apparatus and Inspection Method |
| 10/04/2007 | US20070228275 Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate |
| 09/27/2007 | US20070221845 Charged particle beam system |
| 09/27/2007 | US20070221844 Metrology System of Fine pattern for Process Control by Charged Particle Beam |
| 09/25/2007 | US7274027 Scanning systems and methods with time delay sensing |
| 09/20/2007 | WO2005076832A3 Method for manufacturing single wall carbon nanotube tips |
| 09/20/2007 | US20070215803 Method and an apparatus of an inspection system using an electron beam |
| 09/13/2007 | US20070210261 Specimen holding device and charged particle beam device |
| 09/13/2007 | US20070210253 Methods for SEM inspection of fluid containing samples |
| 09/13/2007 | US20070210252 Scanning electron microscope and a method for imaging a specimen using the same |
| 08/30/2007 | US20070200569 Electron beam apparatus with detailed observation function and sample inspecting and observing method using electron beam apparatus |
| 08/23/2007 | US20070194236 Semiconductor inspection system |
| 08/23/2007 | US20070194234 Scanning electron microscope |
| 08/23/2007 | US20070194233 Pattern inspection method, pattern inspection apparatus, semiconductor device manufacturing method, and program |
| 08/23/2007 | US20070194232 Substrate inspection apparatus, substrate inspection method and semiconductor device manufacturing method |
| 08/23/2007 | US20070194231 Method and apparatus for displaying detected defects |
| 08/23/2007 | US20070194230 Inspection instrument of a magnetic specimen |
| 08/23/2007 | US20070194229 Method and apparatus for inspecting pattern defects and mirror electron projection Type or multi-beam scanning type electron beam apparatus |
| 08/23/2007 | US20070194228 Charged particle beam device |
| 08/23/2007 | US20070194227 Method of characterizing an ion beam |
| 08/23/2007 | US20070194226 Ion sources, systems and methods |
| 08/23/2007 | US20070194225 Coherent electron junction scanning probe interference microscope, nanomanipulator and spectrometer with assembler and DNA sequencing applications |
| 08/21/2007 | US7259373 Apparatus and method for controlled particle beam manufacturing |
| 08/16/2007 | US20070187601 Charged particle beam apparatus |
| 08/16/2007 | US20070187600 Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device |
| 08/16/2007 | US20070187599 Charged particle beam apparatus, charged particle beam focusing method, microstructure measuring method, microstructure inspecting method, semiconductor device manufacturing method, and program |
| 08/16/2007 | US20070187598 Scanning electron microscope and apparatus for detecting defect |
| 08/16/2007 | US20070187597 Focused ion beam system and a method of sample preparation and observation |
| 08/16/2007 | US20070187596 Large area, pico-second resolution, time of flight detectors |
| 08/16/2007 | US20070187594 Scanning probe apparatus |
| 08/14/2007 | US7256405 Sample repairing apparatus, a sample repairing method and a device manufacturing method using the same method |
| 08/09/2007 | US20070181808 Electron microscope and electron bean inspection system. |
| 08/09/2007 | US20070181807 Charged particle apparatus, scanning electron microscope, and sample inspection method |