Patents for G21K 7 - Gamma ray or x-ray microscopes (1,690)
08/2007
08/09/2007US20070181806 Charged particle optical apparatus with aberration corrector
08/09/2007US20070181805 Scanning electron microscope having a monochromator
08/09/2007CA2640572A1 Process and apparatus for imaging
08/07/2007US7253901 Laser-based cleaning device for film analysis tool
08/07/2007US7253418 Device and method for the examination of samples in a non vacuum environment using a scanning electron microscope
08/07/2007US7253409 Electrochemical nano-patterning using ionic conductors
08/02/2007US20070176103 Method and device for observing a specimen in a field of view of an electron microscope
08/02/2007US20070176102 Particle optical apparatus with a predetermined final vacuum pressure
07/2007
07/26/2007US20070170358 Scanning electron microscope
07/19/2007US20070164219 Charged particle beam apparatus and methods for capturing images using the same
07/19/2007US20070164218 SEM technique for imaging and measuring electronic transport in nanocomposites based on electric field induced contrast
07/19/2007US20070164217 Projection electron microscope, electron microscope, specimen surface observing method and micro device producing method
07/17/2007US7245696 Element-specific X-ray fluorescence microscope and method of operation
07/17/2007US7244949 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
07/12/2007US20070158568 Apparatus and measuring method of aberration coefficient of scanning transmission electron microscope
07/12/2007US20070158567 Apparatus and adjusting method for a scanning transmission electron microscope
07/12/2007US20070158566 Method for creating observational sample
07/12/2007US20070158565 Electron beam apparatus and device manufacturing method using the same
07/12/2007US20070158564 Method and apparatus for processing a micro sample
07/12/2007US20070158563 Charged-particle beam instrument
07/12/2007US20070158562 Three-dimensional imaging using electron beam activated chemical etch
07/12/2007US20070158561 Single stage charged particle beam energy width reduction system for charged particle beam system
07/12/2007US20070158560 Charged particle beam system, semiconductor inspection system, and method of machining sample
07/12/2007US20070158559 Scanning probe apparatus
07/12/2007US20070158558 Ion sources, systems and methods
07/12/2007US20070158557 Ion sources, systems and methods
07/12/2007US20070158556 Ion sources, systems and methods
07/12/2007US20070158554 Probe for probe microscope using transparent substrate, method of producing the same, and probe microscope device
07/12/2007US20070158553 Dynamics bionems sensors and arrays of bionems sensor immersed in fluids
07/10/2007US7241995 Electron microscope equipped with magnetic microprobe
07/10/2007US7241987 Probe for near-field microscope, the method for manufacturing the probe and scanning probe microscope using the probe
07/05/2007US20070152150 Charged particle beam apparatus
07/03/2007US7239686 Method and arrangement for producing radiation
06/2007
06/28/2007US20070145270 Method and apparatus of reviewing defects on a semiconductor device
06/28/2007US20070145269 Electron anti-fogging baffle used as a detector
06/28/2007US20070145268 Ultra-thin liquid control plate and combination of box-like member and the control plate
06/28/2007US20070145267 Portable scanning electron microscope
06/28/2007US20070145266 Electron microscope apparatus using CRT-type optics
06/28/2007US20070145265 Method of scanning
06/26/2007US7236651 Image evaluation method and microscope
06/26/2007US7235784 Transmission electron microscope and image observation method using it
06/21/2007WO2007070475A2 Scanning electron microscope with crt-type electron optics
06/21/2007WO2006113933A3 Scintillator-based micro-radiographic imaging device
06/21/2007US20070138390 Inspection method and inspection system using charged particle beam
06/19/2007US7232996 Method and an apparatus of an inspection system using an electron beam
06/19/2007US7232995 Method of removing particle of photomask using atomic force microscope
06/12/2007US7230243 Method and apparatus for measuring three-dimensional shape of specimen by using SEM
06/12/2007US7230242 Methods for SEM inspection of fluid containing samples
06/07/2007US20070125948 Method of measuring a critical dimension of a semiconductor device and a related apparatus
06/07/2007US20070125947 Sample enclosure for a scanning electron microscope and methods of use thereof
06/07/2007US20070125946 Y-shaped carbon nanotubes as afm probe for analyzing substrates with angled topography
06/05/2007US7227144 Scanning transmission electron microscope and scanning transmission electron microscopy
06/05/2007US7227143 X-ray detecting devices and apparatus for analyzing a sample using the same
05/2007
05/31/2007US20070120056 Method and apparatus for evaluating pattern shape of a semiconductor device
05/24/2007US20070114410 Testing method for semiconductor device, testing apparatus therefor, and semiconductor device suitable for the test
05/24/2007US20070114409 Electron beam apparatus with aberration corrector
05/24/2007US20070114408 Charged-particle beam system
05/24/2007US20070114407 Particle detection auditing system and method
05/24/2007US20070114406 Scanning probe in pulsed-force mode, digital and in real time
05/24/2007US20070114405 Tool-to-tool matching control method and its system for scanning electron microscope
05/24/2007US20070114404 Method and system for detecting hidden defects
05/24/2007US20070114403 Electron microscope
05/24/2007US20070114402 Object inspection and/or modification system and method
05/24/2007US20070114401 Direct write nanolithography using heated tip
05/24/2007US20070114400 Probe
05/24/2007US20070114399 Pattern measuring method
05/24/2007DE102005056404A1 Röntgenmikroskop mit Kondensor-Monochromator-Anordnung hoher spektraler Auflösung X-ray microscope with condenser-monochromator arrangement of high spectral resolution
05/22/2007US7221731 X-ray microscopic inspection apparatus
05/22/2007US7220986 Photoelectric current multiplier using molecular crystal and production method therefor
05/22/2007US7220973 Modular manipulation system for manipulating a sample under study with a microscope
05/22/2007US7219538 Balanced momentum probe holder
05/15/2007US7218703 X-ray microscopic inspection apparatus
05/15/2007US7217925 Scanning electron microscope
05/10/2007WO2005065090A3 Techniques for building-scale electrostatic tomography
05/09/2007EP1782435A2 Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope
05/08/2007US7214938 Sample observation method and transmission electron microscope
05/08/2007US7214937 Electron microscope
05/01/2007US7212017 Electron beam apparatus with detailed observation function and sample inspecting and observing method using electron beam apparatus
05/01/2007US7211805 Liquid metal ion gun
05/01/2007US7211804 Chromatic aberration corrector for charged particles and charged-particle optical apparatus using the corrector
05/01/2007US7211797 Inspection method and inspection system using charged particle beam
05/01/2007US7211795 Method for manufacturing single wall carbon nanotube tips
04/2007
04/24/2007US7209596 Method of precision calibration of a microscope and the like
04/19/2007WO2007044696A1 Multi-reflecting time-of-flight mass spectrometer with orthogonal acceleration
04/19/2007WO2007016484A3 X-ray imaging systems employing point-focusing, curved monochromating optics
04/19/2007WO2007016484A2 X-ray imaging systems employing point-focusing, curved monochromating optics
04/19/2007WO2006083650A3 A method of determining the cuticle scale height of fibers
04/19/2007US20070085007 Charged particle beam device with DF-STEM image valuation method
04/19/2007US20070085006 Pattern observation apparatus, pattern observation method, method of manufacturing semiconductor device, and program
04/19/2007US20070085005 Pattern defect inspection method and apparatus thereof
04/19/2007US20070085004 Substrate-examining apparatus
04/19/2007US20070085003 Electron beam applying apparatus and drawing apparatus
04/19/2007CA2624926A1 Multi-reflecting time-of-flight mass spectrometer with orthogonal acceleration
04/17/2007US7205560 Method and apparatus for processing a micro sample
04/17/2007US7205555 Defect inspection apparatus and defect inspection method
04/17/2007US7205540 Electron beam apparatus and device manufacturing method using same
04/12/2007US20070080291 Cluster tool for microscopic processing of samples
04/11/2007CN1310025C Manufacturing method for test apparatus and parts
04/10/2007US7202951 Laser-based cleaning device for film analysis tool
04/10/2007US7202476 Charged-particle beam instrument
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