Patents for G21K 7 - Gamma ray or x-ray microscopes (1,690)
03/2013
03/14/2013WO2013035292A1 Sample-containing cell for x-ray microscope and method for observing x-ray microscopic image
03/05/2013US8389936 Method for inspecting a sample
03/05/2013US8389935 Charged particle beam apparatus permitting high-resolution and high-contrast observation
02/2013
02/27/2013CN102945688A X-ray KBA microscopic imaging system
02/27/2013CN101356589B X-ray imaging systems employing point-focusing, curved monochromating optics
02/26/2013US8385619 Fully automatic rapid microscope slide scanner
02/05/2013US8368015 Particle-optical system
01/2013
01/30/2013CN102903413A Four-channel KB microimaging system working under small-size backlight
01/29/2013US8362428 Transmission electron microscope
01/22/2013US8357896 Method of analyzing a substance
01/16/2013CN101960298B X-ray imaging apparatus, X-ray imaging method and method of controlling X-ray imaging apparatus
01/09/2013CN102867561A High-precision displacement device for focal plane of space-borne imaging instrument
01/02/2013EP2541558A1 Member supporting sample for observing x-ray microscopic image, cell containing sample for observing x-ray microscopic image, and x-ray microscope
12/2012
12/27/2012US20120326029 X-Ray Scanners and X-Ray Sources Therefor
12/25/2012US8338782 Detector system for transmission electron microscope
12/20/2012US20120321037 Specimen supporting member for x-ray microscope image observation, specimen containing cell for x-ray microscope image observation, and x-ray microscope
12/19/2012EP2534440A1 Analyzing method of phase information, analyzing program of the phase information, storage medium, and x-ray imaging apparatus
12/11/2012US8330105 Phase contrast electron microscope
12/11/2012US8330103 Charged particle beam apparatus and specimen inspection method
12/04/2012US8324573 Detector for electron column and method for detecting electrons for electron column
11/2012
11/13/2012US8309919 Inspection method for semiconductor wafer and apparatus for reviewing defects
11/06/2012US8305435 Image processing system and scanning electron microscope
10/2012
10/24/2012CN102753935A Analyzing method of phase information, analyzing program of the phase information, storage medium, and x-ray imaging apparatus
10/23/2012US8294094 Method and apparatus for reducing substrate edge effect during inspection
10/17/2012EP2511844A2 Advanced drug development and manufacturing
10/09/2012US8286261 Scanning probe in pulsed-force mode, digital and in real time
10/09/2012US8283631 In-situ differential spectroscopy
10/09/2012US8283630 Method and apparatus for measuring dimension of circuit pattern formed on substrate by using scanning electron microscope
10/02/2012CA2461274C Photoelectric current multiplier using molecular crystal and production method therefor
09/2012
09/26/2012CN101845618B Manufacturing method of silicon nitride film window for imaging of X-ray microlens
09/11/2012US8263936 Transmission electron microscope having electron spectroscope
09/11/2012US8263935 Charged particle beam apparatus
08/2012
08/21/2012US8247769 Characterization of nanoscale structures using an ultrafast electron microscope
08/07/2012US8237119 Scanning type charged particle beam microscope and an image processing method using the same
07/2012
07/31/2012US8232523 SEM imaging method
07/10/2012US8217348 Electron microscope system and method for evaluating film thickness reduction of resist patterns
07/05/2012WO2012091269A1 Method for manufacturing x-ray/γ-ray focusing optical system using atomic layer deposition
07/03/2012US8212227 Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus
06/2012
06/28/2012DE102010056321A1 Particle beam microscope for use with optical path, has magnet lens with optical axis and front pole piece, which is arranged in optical path along optical axis with spacing before object plane
06/26/2012US8208711 Method for automatic identification of defects in turbine engine blades
06/26/2012US8207512 Charged particle beam apparatus and methods for capturing images using the same
06/19/2012US8203120 4D imaging in an ultrafast electron microscope
06/19/2012US8203119 Charged particle beam device with retarding field analyzer
06/14/2012US20120145898 Particle detection system
06/06/2012CN102004276B Photon sieve phase contrast objective lens, manufacturing method and imaging method
05/2012
05/31/2012US20120132801 Method and an apparatus of an inspection system using an electron beam
05/29/2012US8188427 Scanning electron microscope alignment method and scanning electron microscope
05/15/2012US8178837 Logical CAD navigation for device characteristics evaluation system
05/15/2012US8178836 Electrostatic charge measurement method, focus adjustment method, and scanning electron microscope
05/10/2012US20120113242 Data Management in a Linear-Array-Based Microscope Slide Scanner
04/2012
04/24/2012US8164058 Specimen observation method
03/2012
03/29/2012US20120075457 Fully Automatic Rapid Microscope Slide Scanner
03/28/2012EP2063434B1 X-ray condensing method and its device using phase restoration method
03/20/2012US8139105 Method and device for optically scanning a sample
03/13/2012US8134125 Method and apparatus of an inspection system using an electron beam
03/01/2012US20120051496 Thick targets for transmission x-ray tubes
02/2012
02/29/2012CN102365052A Differential phase-contrast imaging with circular gratings
02/23/2012WO2011142782A3 Zone compensated multilayer laue lens and apparatus and method of fabricating the same
02/14/2012US8115169 Method and apparatus of pattern inspection and semiconductor inspection system using the same
02/09/2012US20120032076 Method for inspecting euv reticle and apparatus thereof
02/02/2012DE10262340B4 Korrektureinrichtung zur Korrektur der sphärischen Aberration Correction means for correcting the spherical aberration
02/01/2012EP2410921A1 Differential phase-contrast imaging with circular gratings
01/2012
01/31/2012US8106355 Automated inspection using cell-cell subtraction perpendicular to stage motion direction
01/10/2012US8094902 Data management in a linear-array-based microscope slide scanner
12/2011
12/15/2011WO2011154877A1 Device for topographical characterisation and chemical mapping of surfaces
12/13/2011US8076654 Sample surface inspection apparatus and method
12/01/2011WO2011149033A1 X-ray imaging apparatus
12/01/2011US20110291009 Semiconductor inspection method and device that consider the effects of electron beams
11/2011
11/22/2011US8063383 Inertial positioner and an optical instrument for precise positioning
11/15/2011US8058614 Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof
11/09/2011EP1529226B1 Mission-specific positron emission tomography
11/08/2011US8055042 Fully automatic rapid microscope slide scanner
11/03/2011US20110266440 SEM Imaging Method
10/2011
10/19/2011CN102224548A Probe cards including nanotube probes and methods of fabricating
10/18/2011US8039796 Phase contrast electron microscope
09/2011
09/27/2011US8026481 Charged particle apparatus, scanning electron microscope, and sample inspection method
09/20/2011US8022356 Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope
09/15/2011US20110221882 Data Management in a Linear-Array-Based Microscope Slide Scanner
09/01/2011WO2011105421A1 Member supporting sample for observing x-ray microscopic image, cell containing sample for observing x-ray microscopic image, and x-ray microscope
08/2011
08/18/2011WO2011099377A1 Analyzing method of phase information, analyzing program of the phase information, storage medium, and x-ray imaging apparatus
08/11/2011US20110192975 Selectable coulomb aperture in e-beam system
08/09/2011US7994476 Apparatus and method for enhancing voltage contrast of a wafer
08/04/2011US20110186735 Electron source, electron gun, and electron microscope device and electron beam lithography device using it
07/2011
07/20/2011CN1940546B Check out test set and method for manufacturing components
07/19/2011US7982188 Apparatus and method for wafer pattern inspection
07/19/2011US7982186 Method and apparatus for obtaining images by raster scanning charged particle beam over patterned substrate on a continuous mode stage
07/12/2011US7978894 Fully automatic rapid microscope slide scanner
07/12/2011US7977632 Scanning electron microscope
07/12/2011US7977631 Method for obtaining images from slices of specimen
07/05/2011US7973942 Optical displacement detection mechanism and surface information measurement device using the same
06/2011
06/16/2011US20110139978 Charged particle beam device, method of operating a charged particle beam device
06/15/2011CN102097151A Application and preparation method of quasi-single energy pulse gamma ray source
06/14/2011US7959779 Macroscopically manipulable nanoscale devices made from nanotube assemblies
05/2011
05/31/2011US7952073 Apparatus and method including a direct bombardment detector and a secondary detector for use in electron microscopy
05/24/2011US7949168 Data management in a linear-array-based microscope slide scanner
05/18/2011EP1340241B1 Device and method for the examination of samples in a non-vacuum environment using a scanning electron microscope
05/04/2011CN102047344A Source grating for x-rays, imaging apparatus for x-ray phase contrast image and x-ray computed tomography system
04/2011
04/28/2011US20110095185 Semiconductor inspecting apparatus
04/26/2011US7932495 Fast wafer inspection system
04/26/2011US7932494 Method for characterizing vibrational performance of charged particle beam microscope system and application thereof
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