| Patents for G21K 7 - Gamma ray or x-ray microscopes (1,690) |
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| 04/10/2007 | US7202475 Rapid defect composition mapping using multiple X-ray emission perspective detection scheme |
| 04/05/2007 | DE112005000798T5 Röntgenstrahlen-Target und Vorrichtungen, die es verwenden X-ray target and devices that use it |
| 04/04/2007 | CN1940546A Check out test set and apparatus for manufacturing same |
| 04/03/2007 | US7200204 Diaphragm fastening device and computed tomography apparatus embodying same |
| 04/03/2007 | US7199365 Electron beam apparatus with aberration corrector |
| 03/29/2007 | WO2006138593A3 Atom probe component treatments |
| 03/29/2007 | US20070071164 Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument |
| 03/29/2007 | US20070069127 Apparatus and method for electron beam inspection with projection electron microscopy |
| 03/27/2007 | US7196338 Ultra-thin sample preparation for transmission electron microscopy |
| 03/27/2007 | US7194897 Non-contact scanning apparatus using frequency response scheme and scanning method thereof |
| 03/22/2007 | US20070063141 Device and method for sensing a position of a probe |
| 03/20/2007 | US7193424 Electrical scanning probe microscope apparatus |
| 03/15/2007 | US20070057186 Inspection system by charged particle beam and method of manufacturing devices using the system |
| 03/15/2007 | US20070057183 Scanning electron microscope |
| 03/15/2007 | US20070057182 Apparatus and method for inspecting a sample of a specimen by means of an electron beam |
| 03/08/2007 | US20070053487 Soft X-ray microscope |
| 03/08/2007 | US20070051888 System and method for determining a cross sectional feature of a structural element using a reference structural element |
| 03/08/2007 | US20070051887 Cantilever and inspecting apparatus |
| 03/07/2007 | EP1760725A2 Soft X-ray microscope |
| 03/07/2007 | EP1290430A4 Apparatus for inspection of semiconductor wafers and masks using a low energy electron microscope with two illuminating beams |
| 03/07/2007 | EP1054249B1 Electronic device surface signal control probe and method of manufacturing the probe |
| 03/06/2007 | US7186975 Scanning charged-particle microscope |
| 03/01/2007 | US20070045539 Scanning electron microscope |
| 03/01/2007 | US20070045538 Image processing apparatus for analysis of pattern matching failure |
| 03/01/2007 | US20070045537 Microsystem Manipulation Apparatus |
| 03/01/2007 | US20070045536 Method for inspecting substrate, substrate inspecting system and electron beam apparatus |
| 03/01/2007 | US20070045535 Electrical contact device of probe card |
| 03/01/2007 | US20070045534 Apparatus and method for controlled particle beam manufacturing |
| 02/27/2007 | US7183562 Charged-particle-beam mapping projection-optical systems and methods for adjusting same |
| 02/27/2007 | US7183547 Element-specific X-ray fluorescence microscope and method of operation |
| 02/27/2007 | US7183546 System and method for voltage contrast analysis of a wafer |
| 02/22/2007 | US20070042523 Photoelectric current multiplier using molecular crystal and production method therefor |
| 02/22/2007 | US20070041492 X-ray diffraction microscope apparatus and x-ray diffraction measuring method with the x-ray diffraction microscope apparatus |
| 02/22/2007 | US20070040118 Method and apparatus for scanning and measurement by electron beam |
| 02/22/2007 | US20070040117 Standard specimen for probe shape evaluation and method for evaluating probe shape |
| 02/20/2007 | US7180062 Pattern measuring method |
| 02/20/2007 | US7180061 Method for electron beam-initiated coating for application of transmission electron microscopy |
| 02/15/2007 | WO2006020324A3 Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope |
| 02/15/2007 | US20070036462 System and Method for Data Management in a Linear-Array-Based Microscope Slide Scanner |
| 02/15/2007 | US20070034797 Electron beam apparatus, and inspection instrument and inspection process thereof |
| 02/14/2007 | EP1155419B1 "x-ray microscope having an x-ray source for soft x-rays |
| 02/13/2007 | US7176457 MEMS differential actuated nano probe and method for fabrication |
| 02/13/2007 | US7176450 Long travel near-field scanning optical microscope |
| 02/08/2007 | US20070033680 Optical inspection system and its illumination method |
| 02/08/2007 | US20070029481 Specimen tip and tip holder assembly |
| 02/08/2007 | US20070029480 Integrated electron beam tip and sample heating device for a scanning tunneling microscope |
| 02/08/2007 | US20070029479 Method for SEM measurement of features using magnetically filtered low loss electron microscopy |
| 02/08/2007 | US20070029478 Method of forming a sample image and charged particle beam apparatus |
| 02/06/2007 | US7173999 X-ray microscope having an X-ray source for soft X-ray |
| 02/06/2007 | US7173328 Integrated circuit package and method having wire-bonded intra-die electrical connections |
| 02/01/2007 | US20070025504 System for molecular imaging |
| 02/01/2007 | US20070023659 Method for measuring diffraction patterns from a transmission electron microscopy to determine crystal structures and a device therefor |
| 02/01/2007 | US20070023658 Method of inspecting pattern and inspecting instrument |
| 02/01/2007 | US20070023657 Charged particle beam apparatus |
| 02/01/2007 | US20070023656 Method for inspecting substrate, and method and apparatus for inspecting array substrates |
| 02/01/2007 | US20070023655 Sample measuring device |
| 02/01/2007 | US20070023653 Method and apparatus of pattern inspection and semiconductor inspection system using the same |
| 02/01/2007 | US20070023652 Electron beam detection device and electron tube |
| 02/01/2007 | US20070023650 Irrigation control system and method |
| 01/31/2007 | EP1747421A1 Method and device for optically scanning a sample |
| 01/30/2007 | US7170969 X-ray microscope capillary condenser system |
| 01/30/2007 | US7170593 Method of reviewing detected defects |
| 01/30/2007 | US7170068 Method and system for discharging a sample |
| 01/25/2007 | US20070018101 Electron beam apparatus and method of manufacturing semiconductor device using the apparatus |
| 01/25/2007 | US20070018099 Method of measuring three-dimensional surface roughness of a structure |
| 01/25/2007 | US20070018098 Nanotube probe and method for manufacturing the same |
| 01/25/2007 | US20070018097 Scanning probe microscope and method of operating the same |
| 01/25/2007 | US20070018096 Cantilever array, method for fabricating the same, scanning probe microscope, sliding apparatus of guiding and rotating mechanism, sensor, homodyne laser interferometer, laser doppler interferometer having optically exciting function for exciting sample, each using the same, and method for exciting cantilevers |
| 01/24/2007 | EP1745492A1 Multi-column charged particle optics assembly |
| 01/23/2007 | US7166839 Apparatus for measuring a three-dimensional shape |
| 01/04/2007 | US20070002215 Phase Contrast Microscope for Short Wavelength Radiation and Imaging Method |
| 01/02/2007 | US7157720 Multi-mode charged particle beam device |
| 01/02/2007 | US7157702 High resolution atom probe |
| 12/28/2006 | US20060289757 Electron beam system and electron beam measuring and observing methods |
| 12/28/2006 | US20060289756 Standard reference for metrology and calibration method of electron-beam metrology system using the same |
| 12/28/2006 | US20060289755 Electron microscope application apparatus and sample inspection method |
| 12/28/2006 | US20060289754 Charged particle beam apparatus |
| 12/28/2006 | US20060289753 Charged particle beam apparatus |
| 12/28/2006 | US20060289752 Observing method and its apparatus using electron microscope |
| 12/28/2006 | US20060289751 Charged particle beam apparatus and automatic astigmatism adjustment method |
| 12/27/2006 | EP0974149B1 High resolution x-ray imaging of very small objects |
| 12/26/2006 | US7154092 Method of three-dimensional image reconstruction and transmission electron microscope |
| 12/26/2006 | US7154090 Method for controlling charged particle beam, and charged particle beam apparatus |
| 12/21/2006 | US20060284093 Electron beam device |
| 12/21/2006 | US20060284092 Scanning transmission ion microscope |
| 12/21/2006 | US20060284091 Transmission ion microscope |
| 12/21/2006 | US20060284090 Material processing system and method |
| 12/21/2006 | US20060284089 Calibration standard |
| 12/21/2006 | US20060284088 Focus correction method for inspection of circuit patterns |
| 12/21/2006 | US20060284087 Defect inspection and changed particle beam apparatus |
| 12/21/2006 | US20060284086 Ultrasonic probe |
| 12/21/2006 | US20060284085 Electrochemical nano-patterning using ionic conductors |
| 12/21/2006 | US20060284084 Probe manufacturing method, probe, and scanning probe microsope |
| 12/21/2006 | US20060284083 Scanning type probe microscope and probe moving control method therefor |
| 12/21/2006 | US20060284081 Method and apparatus for arranging recipe of scanning electron microscope and apparatus for evaluating shape of semiconductor device pattern |
| 12/19/2006 | US7151257 Tailoring domain engineered structures in ferroelectric materials |
| 12/05/2006 | US7145154 Method of automatically correcting aberrations in charged-particle beam and apparatus therefor |
| 11/30/2006 | WO2006009728A3 A system for automatically locating and manipulating positions on an object |
| 11/30/2006 | DE10027060B4 Abtastspitzen,Verfahren zur Herstellung und Verwendung derselben, insbesondere für die Rastersondenmikroskopie Scanning tips, method for preparation and use thereof, in particular for scanning probe microscopy |
| 11/28/2006 | US7141790 Defect inspection instrument and positron beam apparatus |