| Patents for G21K 7 - Gamma ray or x-ray microscopes (1,690) |
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| 07/27/2006 | US20060163477 Method and apparatus for inspecting patterns |
| 07/27/2006 | US20060163476 Method of detecting array of liquid crystal display and apparatus thereof |
| 07/27/2006 | US20060163475 TFT array inspecting apparatus |
| 07/25/2006 | US7081625 Charged particle beam apparatus |
| 07/18/2006 | US7078687 Thin film analyzing method |
| 07/13/2006 | US20060151701 Scanning transmission electron microscope and scanning transmission electron microscopy |
| 07/13/2006 | US20060151700 Scanning electron microscope and method for detecting an image using the same |
| 07/13/2006 | US20060151699 Method and an apparatus of an inspection system using an electron beam |
| 07/13/2006 | US20060151698 Charged particle beam apparatus |
| 07/13/2006 | US20060151697 Charged particle beam equipment and charged particle microscopy |
| 07/13/2006 | US20060151696 Electron microscope and a method of imaging objects |
| 07/13/2006 | US20060151695 Process and device for measuring ions |
| 07/12/2006 | EP1679733A2 X-ray microscopic inspection apparatus |
| 07/11/2006 | US7075078 Scanning electron microscope |
| 07/11/2006 | US7075077 Method of observing a specimen using a scanning electron microscope |
| 07/11/2006 | US7075074 Electron beam inspection apparatus and method for testing an operation state of an electron beam inspection apparatus |
| 07/11/2006 | US7075072 Detecting apparatus and device manufacturing method |
| 07/11/2006 | US7075071 Conductive transparent probe and probe control apparatus |
| 07/06/2006 | US20060145076 High-accuracy pattern shape evaluating method and apparatus |
| 07/06/2006 | US20060145075 Method and apparatus for evaluating thin films |
| 06/29/2006 | US20060138326 Method of nano thin film thickness measurement by auger electron spectroscopy |
| 06/29/2006 | US20060138325 X-ray detecting devices and apparatus for analyzing a sample using the same |
| 06/29/2006 | US20060138324 Scanning electron microscope |
| 06/27/2006 | US7067808 Electron beam system and electron beam measuring and observing method |
| 06/27/2006 | US7067098 Scanning tunneling microscopes; masking, binding carbon nanotube to substrate |
| 06/27/2006 | US7066015 Scanning probe microscope |
| 06/22/2006 | US20060133576 X-ray micro-target source |
| 06/21/2006 | EP1672361A1 X-ray diffraction microscope and x-ray diffraction measurement method using x-ray diffraction microscope |
| 06/20/2006 | US7064341 Coated nanotube surface signal probe |
| 06/20/2006 | US7064339 Charged-particle-beam mapping projection-optical systems and methods for adjusting same |
| 06/20/2006 | US7064326 Electron microscope |
| 06/15/2006 | US20060126915 Method and system for determining dimensions of a structure having a re-entrant profile |
| 06/15/2006 | US20060124850 Scanning interference electron microscope |
| 06/13/2006 | US7060986 Automated method of correcting aberrations in electron beam, method of visualizing aberrations, and automated aberration corrector |
| 06/08/2006 | US20060118719 Electron beam inspection system and inspection method and method of manufacturing devices using the system |
| 06/01/2006 | US20060113488 Probe-holding apparatus, sample-obtaining apparatus, sample-processing apparatus, sample-processing method and sample-evaluating method |
| 06/01/2006 | US20060113478 Kit for preparing a TEM sample holder |
| 06/01/2006 | US20060113477 Apparatus for preparing a TEM sample holder |
| 06/01/2006 | US20060113476 Method of preparing a sample for examination in a TEM |
| 06/01/2006 | US20060113475 TEM sample holder |
| 06/01/2006 | US20060113474 Scanning electron microscope |
| 06/01/2006 | US20060113473 Method and apparatus for measuring the physical properties of micro region |
| 06/01/2006 | US20060113472 Scanning probe microscope and scanning method |
| 06/01/2006 | US20060113471 Contact opening metrology |
| 06/01/2006 | US20060113470 High resolution atom probe |
| 06/01/2006 | US20060113469 Scanning probe microscope and sample observing method using this and semiconductor device production method |
| 05/30/2006 | US7052666 Annealing; oxidative etching |
| 05/25/2006 | US20060108545 Method and device for measuring quantity of wear |
| 05/25/2006 | US20060108527 Scanning electron microscope |
| 05/25/2006 | US20060108526 Apparatus for measuring a three-dimensional shape |
| 05/25/2006 | US20060108525 Scanning electron microscope and system for inspecting semiconductor device |
| 05/25/2006 | US20060108524 Dimension measuring SEM system, method of evaluating shape of circuit pattern and a system for carrying out the method |
| 05/25/2006 | US20060108523 Scanning mechanism for scanning probe microscope and scanning probe microscope |
| 05/23/2006 | US7050540 X-ray micro-target source |
| 05/23/2006 | US7049592 Lithographic apparatus and device manufacturing method |
| 05/23/2006 | US7049587 Apparatus for inspecting a specimen |
| 05/23/2006 | US7048903 use of nanotubes attached to macroscale mounting members as nanoscale probes, fabricators and manipulators; all its constituent atoms are covalently bonded in place and are do not move under extreme stress |
| 05/18/2006 | US20060102841 Method for data processing in a scan microscope comprising a fast scanner and scan microscope comprising a fast scanner |
| 05/18/2006 | US20060102840 Scanning electron microscope |
| 05/18/2006 | US20060102839 Apparatus and methods for analyzing defects on a sample |
| 05/16/2006 | US7045782 Method of measurement accuracy improvement by control of pattern shrinkage |
| 05/16/2006 | US7045780 Scanning probe microscopy inspection and modification system |
| 05/11/2006 | WO2006048562A1 Use of fluorescence markers for x-ray microscopy |
| 05/11/2006 | US20060097198 Column simultaneously focusing a particle beam and an optical beam |
| 05/11/2006 | US20060097169 Method and device for observing a specimen in a field of view of an electron microscope |
| 05/11/2006 | US20060097168 Transmission electron microscope specimen and method of manufacturing the same |
| 05/11/2006 | US20060097167 System and method for improving spatial resolution of electron holography |
| 05/11/2006 | US20060097166 Charged particle beam apparatus and sample manufacturing method |
| 05/11/2006 | US20060097165 Electron beam apparatus and method for manufacturing semiconductor device |
| 05/11/2006 | US20060097164 Method for locally highly resolved, mass-spectroscopic characterisation of surfaces using scanning probe technology |
| 05/11/2006 | US20060097163 Scanning probe microscope using a surface drive actuator to position the scanning tip |
| 05/11/2006 | US20060097162 Apparatus and method for determining surface profiles using a scanning probe microscope |
| 05/11/2006 | US20060097161 Programmable molecular manipulating devices |
| 05/11/2006 | US20060097160 Programmable molecular manipulating processes |
| 05/11/2006 | US20060097158 Scanning electron microscope |
| 05/09/2006 | US7042982 Focusable and steerable micro-miniature x-ray apparatus |
| 05/09/2006 | US7041974 Conductive transparent probe and probe control apparatus |
| 05/04/2006 | US20060092286 Remote operation of wireless telescope over a network |
| 05/04/2006 | US20060091309 Scanning electron microscope, method for measuring a dimension of a pattern using the same, and apparatus for correcting difference between scanning electron microscopes |
| 05/02/2006 | US7039157 X-ray microscope apparatus |
| 05/02/2006 | US7038202 Conductive transparent probe and probe control apparatus |
| 04/25/2006 | US7035478 System and method for data management in a linear-array-based microscope slide scanner |
| 04/25/2006 | US7034296 Method of forming a sample image and charged particle beam apparatus |
| 04/25/2006 | US7034295 Photoemission electron microscopy and measuring method using the microscopy |
| 04/20/2006 | US20060081776 Probe with hollow waveguide and method for producing the same |
| 04/19/2006 | EP1198820B1 X-ray anode |
| 04/18/2006 | US7030389 Electron beam apparatus having electron analyzer and method of controlling lenses |
| 04/13/2006 | US20060076511 Shallow angle cut along a longitudinal direction of a feature in a semiconductor wafer |
| 04/13/2006 | US20060076492 Transmission electron microscope and image observation method using it |
| 04/13/2006 | US20060076491 Mask inspection apparatus, mask inspection method, and electron beam exposure system |
| 04/13/2006 | US20060076490 Inspection method and inspection apparatus using electron beam |
| 04/13/2006 | US20060076489 Charged particle beam apparatus |
| 04/13/2006 | US20060076488 Surface shape measuring apparatus, surface measuring method, and exposure apparatus |
| 04/13/2006 | DE4432811B4 Phasenkontrast-Röntgenmikroskop Phase contrast X-ray microscope |
| 04/13/2006 | DE102004028851B4 Verfahren und Vorrichtung zum Vermessen eines Oberflächenprofils einer Probe Method and apparatus for measuring a surface profile of a sample |
| 04/11/2006 | US7026615 Semiconductor inspection system |
| 04/11/2006 | US7026607 Scanning probe microscope |
| 04/06/2006 | US20060071167 Scanning electron microscope |
| 04/06/2006 | US20060071166 Charged particle beam apparatus and dimension measuring method |
| 04/06/2006 | US20060071165 Bulk synthesis of long nanotubes of transition metal chalcogenides |