| Patents for G21K 7 - Gamma ray or x-ray microscopes (1,690) |
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| 02/10/2009 | US7487667 Probe apparatus for measuring an electron state on a sample surface |
| 02/04/2009 | EP0954951B1 Phase retrieval in phase contrast imaging |
| 02/03/2009 | US7485872 Large area, pico-second resolution, time of flight detectors |
| 02/03/2009 | US7485858 Inspection method for semiconductor wafer and apparatus for reviewing defects |
| 02/03/2009 | US7485856 Scanning probe microscopy inspection and modification system |
| 01/29/2009 | US20090028414 Data Management in a Linear-Array-Based Microscope Slide Scanner |
| 01/28/2009 | CN101356589A X-ray imaging systems employing point-focusing, curved monochromating optics |
| 01/27/2009 | US7482586 Methods for sample preparation and observation, charged particle apparatus |
| 01/20/2009 | US7479634 Electron beam apparatus and device manufacturing method using the same |
| 01/13/2009 | US7476882 Calibration method for electron-beam system and electron-beam system |
| 01/08/2009 | US20090008551 Electron beam apparatus with aberration corrector |
| 01/06/2009 | US7474729 Soft X-ray microscope |
| 01/06/2009 | US7473894 Apparatus and method for a scanning probe microscope |
| 01/01/2009 | US20090000363 Materials and Methods for Identifying Biointeractive Nanostructures and/or Nanoparticles |
| 12/25/2008 | US20080315097 Charged particle beam apparatus and specimen holder |
| 12/16/2008 | US7465922 Accelerating electrostatic lens gun for high-speed electron beam inspection |
| 11/25/2008 | US7457446 Fully automatic rapid microscope slide scanner |
| 11/20/2008 | WO2008019324A3 Method for detecting fluorescent signals in a biological sample |
| 11/20/2008 | US20080283748 Electron microscope |
| 11/20/2008 | US20080283744 Charged Particle Beam Device |
| 11/13/2008 | US20080277582 Closed loop controller and method for fast scanning probe microscopy |
| 11/12/2008 | EP1990667A1 Fully automatic rapid microscope slide scanner |
| 11/11/2008 | US7449691 Detecting apparatus and device manufacturing method |
| 11/11/2008 | US7449690 Inspection method and inspection apparatus using charged particle beam |
| 11/11/2008 | US7449689 Dimension measuring SEM system, method of evaluating shape of circuit pattern and a system for carrying out the method |
| 11/11/2008 | US7449688 Deconvolving far-field images using scanned probe data |
| 11/06/2008 | WO2008133506A1 Extreme ultraviolet microscope |
| 11/05/2008 | EP1987523A2 Process and apparatus for imaging |
| 10/30/2008 | US20080265161 Electron Microscope And Electron Beam Inspection System |
| 10/28/2008 | US7442924 Repetitive circumferential milling for sample preparation |
| 10/28/2008 | US7442922 Method for locally highly resolved, mass-spectroscopic characterization of surfaces using scanning probe technology |
| 10/23/2008 | US20080258059 Scanning Probe Microscope System |
| 10/21/2008 | US7439506 Method and an apparatus of an inspection system using an electron beam |
| 10/21/2008 | US7439505 Scanning electron microscope |
| 10/21/2008 | US7439504 Pattern inspection method and apparatus using electron beam |
| 10/14/2008 | US7435973 Material processing system and method |
| 10/02/2008 | US20080240347 Method, apparatus, and system for extending depth of field (dof) in a short-wavelength microscope using wavefront encoding |
| 10/02/2008 | US20080237461 Autofocus method in a scanning electron microscope |
| 09/23/2008 | US7428324 System and method for data management in a linear-array-based microscope slide scanner |
| 09/23/2008 | US7427757 Large collection angle x-ray monochromators for electron probe microanalysis |
| 09/18/2008 | US20080224038 Method of determining the power transfer of nuclear component with a layer of material placed upon a heating surface of the component |
| 09/09/2008 | US7423269 Automated feature analysis with off-axis tilting |
| 09/09/2008 | US7423268 Projection imaging type electron microscope |
| 09/09/2008 | US7423266 Sample height regulating method, sample observing method, sample processing method and charged particle beam apparatus |
| 09/02/2008 | US7420167 Apparatus and method for electron beam inspection with projection electron microscopy |
| 09/02/2008 | US7420106 Scanning probe characterization of surfaces |
| 08/26/2008 | US7417227 Scanning interference electron microscope |
| 08/26/2008 | CA2216907C Simplified conditions and configurations for phase-contrast imaging with hard x-rays |
| 08/21/2008 | US20080201091 Sample electrification measurement method and charged particle beam apparatus |
| 08/19/2008 | US7414787 Phase contrast microscope for short wavelength radiation and imaging method |
| 08/19/2008 | US7414245 Scintillator-based micro-radiographic imaging device |
| 08/12/2008 | US7411192 Focused ion beam apparatus and focused ion beam irradiation method |
| 08/05/2008 | US7408154 Scanning electron microscope, method for measuring a dimension of a pattern using the same, and apparatus for correcting difference between scanning electron microscopes |
| 07/31/2008 | WO2008091139A1 Source scanning x-ray microscope system |
| 07/30/2008 | EP1949410A1 Multi-reflecting time-of-flight mass spectrometer with orthogonal acceleration |
| 07/29/2008 | US7406151 X-ray microscope with microfocus source and Wolter condenser |
| 07/29/2008 | US7405402 Method and apparatus for aberration-insensitive electron beam imaging |
| 07/29/2008 | US7405089 Method and apparatus for measuring a surface profile of a sample |
| 07/22/2008 | US7402736 Method of fabricating a probe having a field effect transistor channel structure |
| 07/15/2008 | US7399964 Electron microscope, measuring method using the same, electron microscope system, and method for controlling the system |
| 07/10/2008 | WO2008081873A1 X-ray condensing method and its device using phase restoration method |
| 07/10/2008 | US20080164410 Emission detecting analysis system and method of detecting emission on object |
| 07/01/2008 | US7394070 Method and apparatus for inspecting patterns |
| 07/01/2008 | US7394066 Electron microscope and electron beam inspection system |
| 06/26/2008 | WO2005008707A3 Improved tip for nanoscanning electron microscope |
| 06/24/2008 | US7391039 Semiconductor processing method and system |
| 06/24/2008 | US7391034 Electron imaging beam with reduced space charge defocusing |
| 06/24/2008 | US7391023 Lithography tool image quality evaluating and correcting |
| 06/17/2008 | US7388199 Probe manufacturing method, probe, and scanning probe microscope |
| 06/17/2008 | US7388198 Electron microscope |
| 06/12/2008 | US20080135752 Probe-Holding Apparatus, Sample-Obtaining Apparatus, Sample-Processing Apparatus, Sample-Processsing Method and Sample-Evaluating Method |
| 06/10/2008 | US7385209 Micromachining process, system and product |
| 06/10/2008 | US7385206 Probe-holding apparatus, sample-obtaining apparatus, sample-processing apparatus, sample-processing method and sample-evaluating method |
| 06/10/2008 | US7385202 Divergent charged particle implantation for improved transistor symmetry |
| 06/03/2008 | US7381971 Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope |
| 06/03/2008 | US7381968 Charged particle beam apparatus and specimen holder |
| 06/03/2008 | US7381951 Charged particle beam adjustment method and apparatus |
| 05/20/2008 | US7375352 Photomask defect correction method employing a combined device of a focused electron beam device and an atomic force microscope |
| 05/20/2008 | US7375329 Scanning electron microscope |
| 05/20/2008 | US7375328 Charged particle beam apparatus and contamination removal method therefor |
| 05/20/2008 | US7375327 Method and device for measuring quantity of wear |
| 05/20/2008 | US7375326 Method and system for focusing a charged particle beam |
| 05/20/2008 | US7375323 Electron beam apparatus with aberration corrector |
| 05/13/2008 | US7372051 Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system |
| 05/13/2008 | US7372029 Scanning transmission electron microscope and scanning transmission electron microscopy |
| 05/13/2008 | US7372028 Sample electrification measurement method and charged particle beam apparatus |
| 05/13/2008 | US7372026 System for repositioning a microfabricated cantilever |
| 05/13/2008 | US7372025 Scanning probe microscope using a surface drive actuator to position the scanning tip |
| 05/06/2008 | US7368713 Method and apparatus for inspecting semiconductor device |
| 05/06/2008 | US7368712 Y-shaped carbon nanotubes as AFM probe for analyzing substrates with angled topography |
| 04/29/2008 | US7365324 Testing apparatus using charged particles and device manufacturing method using the testing apparatus |
| 04/29/2008 | US7365322 Method and apparatus for arranging recipe of scanning electron microscope and apparatus for evaluating shape of semiconductor device pattern |
| 04/29/2008 | US7365320 Methods and systems for process monitoring using x-ray emission |
| 04/29/2008 | US7365306 Standard member for length measurement, method for producing the same, and electron beam length measuring device using the same |
| 04/22/2008 | US7361896 Scanning electron microscope and a method for adjusting a focal point of an electron beam of said scanning electron microscope |
| 04/22/2008 | US7361894 Method of forming a sample image and charged particle beam apparatus |
| 04/15/2008 | US7358495 Standard reference for metrology and calibration method of electron-beam metrology system using the same |
| 04/15/2008 | US7358493 Method and apparatus for automated beam optimization in a scanning electron microscope |
| 04/15/2008 | US7357906 Method for fractionating single-wall carbon nanotubes |
| 04/10/2008 | WO2007100933A3 Etch selectivity enhancement, deposition quality evaluation, structural modification and three-dimensional imaging using electron beam activated chemical etch |