| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 10/01/2013 | US8545669 Sensor array for measuring plasma characteristics in plasma processing environments |
| 10/01/2013 | US8545632 Coating holder and coating device having same |
| 10/01/2013 | US8545631 Mask device, method of fabricating the same, and method of fabricating organic light emitting display device using the same |
| 10/01/2013 | US8545630 Coating apparatus |
| 10/01/2013 | US8545628 Temperature-controlled purge gate valve for chemical vapor deposition chamber |
| 10/01/2013 | US8544411 Batch-type remote plasma processing apparatus |
| 09/26/2013 | WO2013142344A1 Methods and apparatus for atmospheric pressure atomic layer deposition |
| 09/26/2013 | WO2013142173A1 Methods and apparatus for correcting for non-uniformity in a plasma processing system |
| 09/26/2013 | WO2013142082A1 Vapor deposition system and method |
| 09/26/2013 | WO2013142030A1 Keyed wafer carrier |
| 09/26/2013 | WO2013141371A1 Substrate processing device and substrate processing method |
| 09/26/2013 | WO2013141370A1 Method for manufacturing semiconductor device, method for processing substrate, substrate processing device and recording medium |
| 09/26/2013 | WO2013141159A1 Substrate processing device, method for manufacturing semiconductor device, and method for processing substrate |
| 09/26/2013 | WO2013141099A1 Self-supporting gallium nitride crystal substrate and method for manufacturing same |
| 09/26/2013 | WO2013141084A1 Trap device and film formation device |
| 09/26/2013 | WO2013141070A1 Air filter for cvd apparatus, and cvd apparatus having same |
| 09/26/2013 | WO2013140986A1 Colored rigid decorative member |
| 09/26/2013 | WO2013140926A1 Method for dry-cleaning metal film in film-formation apparatus |
| 09/26/2013 | WO2013140868A1 Polylactic acid molding provided with deposited film and method for producing same |
| 09/26/2013 | WO2013140021A1 Atomic layer deposition method and apparatuses |
| 09/26/2013 | WO2013139288A1 Apparatus and method for controlling heating of base within chemical vapour deposition chamber |
| 09/26/2013 | US20130252404 Keyed wafer carrier |
| 09/26/2013 | US20130252016 Metamaterial thin films |
| 09/26/2013 | US20130251998 Graphene-Coated Steel Sheet, and Method for Manufacturing Same |
| 09/26/2013 | US20130251918 Strontium and barium precursors for use in chemical vapor deposition, atomic layer deposition and rapid vapor deposition |
| 09/26/2013 | US20130251917 Device for Plasma Coating Product Containers, Such as Bottles |
| 09/26/2013 | US20130251916 Suction valve in a plasma coating apparatus |
| 09/26/2013 | US20130251914 Sample preparation method |
| 09/26/2013 | US20130251907 Vapor deposition shadow mask system for backplane and display screen with any size and method thereof |
| 09/26/2013 | US20130251904 Film deposition method and computer readable storage medium |
| 09/26/2013 | US20130251903 Diazadiene-based metal compound, method for preparing same and method for forming a thin film using same |
| 09/26/2013 | US20130251902 Thin Film Depositing Apparatus and Thin Film Depositing Method Used by the Same |
| 09/26/2013 | US20130251889 Apparatuses, systems and methods for applying protective coatings to electronic device assemblies |
| 09/26/2013 | US20130251769 Self-lubricating surfaces for food packaging and food processing equipment |
| 09/26/2013 | US20130250017 Recording medium surface property modifying apparatus, recording medium, and inkjet printer system |
| 09/26/2013 | US20130248769 Metal passivation of heat-exchanger exposed to synthesis gas |
| 09/26/2013 | US20130248611 Epitaxial Deposition Apparatus, Gas Injectors, and Chemical Vapor Management System Associated Therewith |
| 09/26/2013 | US20130247826 Apparatus for variable substrate temperature control |
| 09/26/2013 | US20130247824 Method and system for modifying photoresist using electromagnetic radiation and ion implantion |
| 09/26/2013 | US20130247822 Deposition apparatus |
| 09/26/2013 | US20130247651 Valve-cell vacuum deposition apparatus including a leak detection device and method for detecting a leak in a vacuum deposition apparatus |
| 09/26/2013 | DE112011104309T5 Vorrichtung zum Bilden einer organischen Dünnschicht An apparatus for forming an organic thin film |
| 09/26/2013 | DE112011103491T5 Suszeptor und Verfahren zum Herstellen eines Epitaxialwafers Susceptor and method for manufacturing an epitaxial wafer |
| 09/26/2013 | DE112010002747T5 Siliziumepitaxialwafer und Verfahren zur Herstellung desselben Siliziumepitaxialwafer and method of manufacturing the same |
| 09/26/2013 | DE102012204690A1 Vorrichtung zum Plasmabeschichten von Füllgutbehältern, wie Flaschen An apparatus for plasma coating Füllgutbehältern, such as bottles |
| 09/26/2013 | DE102012204689A1 Absaugventil in Plasmabeschichtungsvorrichtung Purge in plasma coater |
| 09/26/2013 | DE102012102465A1 Telescopic arm for transporting bi-directional translational substrate within vacuum treatment equipment for aircraft engine, has clutches provided inside main tube to move telescopic pipes parallel to thrust units relative to tube |
| 09/25/2013 | EP2642001A1 Method for producing epitaxial silicon carbide single crystal substrate |
| 09/25/2013 | EP2641996A1 Method for growing magnesium-zinc-oxide-based crystal |
| 09/25/2013 | EP2641995A1 Purge valve in a plasma deposition apparatus |
| 09/25/2013 | EP2641994A1 Device for the plasma coating of bulk material containers, such as bottles |
| 09/25/2013 | EP2640867A1 Surface treatment of metal objects |
| 09/25/2013 | EP2640866A1 Method for connecting substrates, and composite structure obtainable thereby |
| 09/25/2013 | CN203212644U Linear air distribution mechanism |
| 09/25/2013 | CN203212636U Auxiliary mounting mechanism for optical coating machine workpiece clamp |
| 09/25/2013 | CN203212635U Adjustable rotating bracket for optical coating machine workpiece tray |
| 09/25/2013 | CN203212627U Manual door catch mechanism for small vacuum coating chamber |
| 09/25/2013 | CN103325663A Preparation method of composite nanofiltration heterostructure capable of generating quantum dots on side wall of nanowire |
| 09/25/2013 | CN103320773A Device for plasma coating product containers, such as bottles |
| 09/25/2013 | CN103320772A Metal inner surface modification device and method |
| 09/25/2013 | CN103320771A Shower head and vapor deposition equipment |
| 09/25/2013 | CN103320770A Gas spraying head and vapor phase deposition reaction cavity |
| 09/25/2013 | CN103320769A Reaction cavity |
| 09/25/2013 | CN103320768A Chemical vapor deposition apparatus |
| 09/25/2013 | CN103320767A Purge valve in plasma deposition apparatus |
| 09/25/2013 | CN103320766A Method for depositing diamond like carbon film on surface of hard alloy cutting tool, and hard alloy cutting tool |
| 09/25/2013 | CN103320765A Improvement of vacuum equipment |
| 09/25/2013 | CN103320764A Method for preparing InN semiconductor device based on a-side GaN buffer layer on a-side 6H-SiC substrate |
| 09/25/2013 | CN103320763A Metal chloride gas generator, hydride vapor phase epitaxy growth apparatus, and method for fabricating a nitride semiconductor template |
| 09/25/2013 | CN103320762A Film-forming apparatus for the formation of silicon carbide and film-forming method for the formation of silicon carbide |
| 09/25/2013 | CN102583331B Preparation method for large-area graphene based on Ni film auxiliary annealing and Cl2 reaction |
| 09/25/2013 | CN102132380B Polysilicon deposition apparatus |
| 09/25/2013 | CN101871099B Plasma uniformity control by gas diffuser curvature |
| 09/25/2013 | CN101855707B Plasma processing apparatus |
| 09/25/2013 | CN101660140B Film deposition apparatus and method, substrate processing apparatus |
| 09/25/2013 | CN101621001B Mechanical enhancement of dense and porous organosilicate materials by uv exposure |
| 09/25/2013 | CN101512041B High-throughput deposition system for oxide thin film growth by reactive coevaportation |
| 09/24/2013 | US8542474 Electrostatic chuck |
| 09/24/2013 | US8541292 Group III nitride semiconductor epitaxial substrate and method for manufacturing the same |
| 09/24/2013 | US8541068 Process for producing an amorphous carbon film |
| 09/24/2013 | US8541055 Reflective coatings for glass articles, methods of deposition, and articles made thereby |
| 09/24/2013 | US8541054 Vapor depositing metallorganic layer of iron or molybdenum phthalocyanine on unmasked substrate portion; removing deposition mask of silicon dioxide or alumina; oxidation to form growth catalyst; exposing to carbon precursor of methane, ethane, propane, ethylene, propylene or carbon dioxide; pyrolysis |
| 09/24/2013 | US8540844 Plasma confinement structures in plasma processing systems |
| 09/24/2013 | US8540843 Plasma chamber top piece assembly |
| 09/24/2013 | US8540819 Ceramic heater |
| 09/24/2013 | US8540818 Polycrystalline silicon reactor |
| 09/24/2013 | US8539908 Film forming apparatus, film forming method and storage medium |
| 09/19/2013 | WO2013138733A1 Nanoporous to solid tailoring of materials via polymer cvd into nanostructured scaffolds |
| 09/19/2013 | WO2013138216A1 Apparatus and process for atomic layer deposition with horizontal laser |
| 09/19/2013 | WO2013138069A1 Methods for depositing a tin-containing layer on a substrate |
| 09/19/2013 | WO2013138049A1 Plasma reactor with conductive member in reaction chamber for shielding substrate from undesirable irradiation |
| 09/19/2013 | WO2013137602A1 Food container having si-dlc layer and manufacturing method thereof |
| 09/19/2013 | WO2013137116A1 Organic electronic device, organic electronic device manufacturing method and plasma processing device |
| 09/19/2013 | WO2013137115A1 Film forming process and film forming apparatus |
| 09/19/2013 | WO2013136656A1 Film forming device |
| 09/19/2013 | WO2013136576A1 Film forming device |
| 09/19/2013 | WO2013136384A1 Fastening member and vacuum device |
| 09/19/2013 | WO2013136052A2 Chemical vapor deposition process for depositing zinc oxide coatings, method for forming a conductive glass article and the coated glass articles produced thereby |
| 09/19/2013 | WO2013134796A1 Coated body and method for coating a body |
| 09/19/2013 | WO2013110491A3 Component for a household appliance |