Patents
Sitemap › G21 - Nuclear physics; Nuclear engineering › G21K - Techniques for handling particles or ionising radiation not otherwise provided for; Irradiation devices; Gamma ray or x-ray microscopes › G21K 7 - Gamma ray or x-ray microscopes
Patents for G21K 7 - Gamma ray or x-ray microscopes (1,690)
11/2005
11/03/2005US20050242282 Conductive transparent probe and probe control apparatus
11/01/2005US6960767 Apparatus for measuring features of a semiconductor device
10/2005
10/27/2005US20050236570 Charged particle beam adjusting method and charged particle beam apparatus
10/27/2005US20050236569 Scanning electron microscope
10/27/2005US20050236567 Lithography tool image quality evaluating and correcting
10/20/2005WO2005098871A1 X-ray-use target and device using it
10/20/2005US20050230636 Charged particle beam apparatus and specimen holder
10/20/2005US20050230622 Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device
10/13/2005US20050226372 X-ray image magnifying device
10/13/2005US20050224964 Integrated circuit package and method having wire-bonded intra-die electrical connections
10/11/2005US6953930 Conductive transparent probe and probe control apparatus
10/06/2005US20050220266 Methods for achieving high resolution microfluoroscopy
10/06/2005US20050218325 Inspection method and inspection system using charged particle beam
10/06/2005US20050217354 Scanning probe microscope
10/05/2005EP1342049B1 Scanning probe with digitised pulsed-force mode operation and real-time evaluation
09/2005
09/29/2005US20050211925 Sample repairing apparatus, a sample repairing method and a device manufacturing method using the same method
09/29/2005US20050211897 Pattern measuring method
09/29/2005US20050211896 Pt coating initiated by indirect electron beam for resist contact hole metrology
09/22/2005US20050205783 Electron beam apparatus and device manufacturing method using same
09/22/2005US20050205782 Method and an apparatus of an inspection system using an electron beam
09/22/2005US20050205781 Defect inspection apparatus
09/22/2005US20050205779 Scanning systems and methods with time delay sensing
09/22/2005US20050205778 Laser trim motion, calibration, imaging, and fixturing techniques
09/22/2005US20050205777 Method of evaluating of a scanning electron microscope for precise measurements
09/20/2005US6946656 Sample electrification measurement method and charged particle beam apparatus
09/15/2005US20050201514 Reflective X-ray microscope and inspection system for examining objects with wavelengths < 100 nm
09/15/2005US20050199807 Electron beam apparatus with detailed observation function and sample inspecting and observing method using electron beam apparatus
09/15/2005DE102005007533A1 Objektträgervorrichtung Slide device
09/13/2005US6943356 Tip for nanoscanning electron microscope
09/13/2005US6943351 Multi-column charged particle optics assembly
09/13/2005US6943350 Methods and apparatus for electron beam inspection of samples
09/13/2005US6943043 Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device
09/08/2005US20050194535 Sample surface inspection method and inspection system
09/08/2005US20050194534 Method of operating a probe microscope
09/08/2005US20050194533 Method of observing a specimen using a scanning electron microscope
09/06/2005US6940069 Pattern inspection method and apparatus using electron beam
09/06/2005US6939525 forming an array from more than one separately prepared molecular arrays or templates to prepare a composite structure; multiple arrays can be the same or different with respect to the SWNT type or geometric arrangement in the array
09/01/2005US20050189490 Scanning probe microscopy and method of measurement by the same
08/2005
08/31/2005CN1663326A Method and arrangement for producing radiation
08/25/2005WO2005076832A2 Method for manufacturing single wall carbon nanotube tips
08/23/2005US6933512 Charged particle beam instrument
08/23/2005US6933499 Electron microscope, method for operating the same, and computer-readable medium
08/18/2005US20050178976 Stage apparatus
08/18/2005US20050178965 Scanning electron microscope
08/17/2005CN1656373A Element-specific x-ray fluorescence microscope and method of operation
08/16/2005US6931337 Lithography tool image quality evaluating and correcting
08/11/2005US20050173632 Methods for sem inspection of fluid containing samples
08/09/2005US6927405 Method for obtaining an extreme ultraviolet radiation source, radiation source and use in lithography
08/04/2005US20050167588 Techniques for building-scale electrostatic tomography
07/2005
07/28/2005US20050161602 Method of measurement accuracy improvement by control of pattern shrinkage
07/28/2005US20050161601 Electron beam system and electron beam measuring and observing method
07/28/2005US20050161600 Sample electrification measurement method and charged particle beam apparatus
07/27/2005EP1557865A1 Microfocus x-ray tube for microscopic inspection apparatus
07/27/2005EP1557864A1 X-ray microscopic inspection apparatus
07/21/2005WO2005065090A2 Techniques for building-scale electrostatic tomography
07/20/2005EP1555676A2 Method of operating a probe microscope
07/19/2005US6919577 Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus
07/12/2005US6917696 Fully automatic rapid microscope slide scanner
07/07/2005US20050145793 Electron microscope
07/07/2005US20050145791 Scanning electron microscope
06/2005
06/30/2005WO2005014784B1 System for molecular imaging
06/30/2005US20050139773 Scanning electron microscope
06/30/2005US20050139772 Patterned wafer inspection method and apparatus therefor
06/30/2005US20050139771 Thin film transistor array inspection apparatus
06/23/2005US20050133733 Electron beam system and method of manufacturing devices using the system
06/21/2005US6909092 Electron beam apparatus and device manufacturing method using same
06/16/2005US20050129177 Method and arrangement for producing radiation
06/14/2005US6906335 Lens for a scanning electron microscope
06/14/2005US6905986 Composites comprising superabsorbent materials having a bimodal particle size distribution and methods of making the same
06/14/2005US6904791 Scanning probe microscope
06/07/2005US6903338 Automated electron-beam inspection systems for semiconductor manufacturing
06/02/2005US20050116164 Method and system for the examination of specimen
06/01/2005CN1623209A X-ray microscope
05/2005
05/31/2005US6900447 Focused ion beam system with coaxial scanning electron microscope
05/26/2005US20050111624 X-ray microscopic inspection apparatus
05/26/2005US20050109937 Scanning electron microscope
05/26/2005US20050109936 Element-specific X-ray fluorescence microscope and method of operation
05/24/2005US6897445 Scanning electron microscope
05/19/2005WO2005014784A3 System for molecular imaging
05/19/2005US20050105690 Focusable and steerable micro-miniature x-ray apparatus
05/19/2005US20050103994 Conductive transparent probe and probe control apparatus
05/17/2005US6894837 Imaging system for an extreme ultraviolet (EUV) beam-based microscope
05/11/2005EP1529226A2 Mission-specific positron emission tomography
05/10/2005US6891159 Converting scanning electron microscopes
05/05/2005US20050092933 Specimen holder, observation system, and method of rotating specimen
05/05/2005US20050092922 Ion beam apparatus and sample processing method
05/03/2005US6888921 Laser plasma X-ray generating apparatus
05/03/2005US6888140 Particle detectors
05/03/2005US6888139 Electron microscope
04/2005
04/28/2005US20050087686 Method of observing defects
04/26/2005US6885001 Scanning electron microscope
04/26/2005US6884999 Use of scanning probe microscope for defect detection and repair
04/14/2005DE102004046747A1 Photoemissions-Elektronen-Mikroskopie und Messverfahren unter Verwendung der Mikroskopie Photoemission electron microscopy and measurement method using the microscopy
04/12/2005US6878936 Applications operating with beams of charged particles
04/12/2005US6878935 Method of measuring sizes in scan microscopes
03/2005
03/31/2005US20050069082 Scanning x-ray microscope with a plurality of simultaneous x-ray probes on the sample
03/31/2005US20050067566 Photoemission electron microscopy and measuring method using the microscopy
03/30/2005EP1518108A1 A method for detection of micrometric and sub-micrometric images by means of irradiation of a mask or of a biological specimen with ionizing radiation
03/24/2005WO2005026708A1 X-ray diffraction microscope and x-ray diffraction measurement method using x-ray diffraction microscope
03/17/2005US20050056784 Structure determination of materials using electron microscopy
1 ... 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17