| Patents for B81B 7 - Micro-structural systems (8,983) |
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| 10/02/2014 | US20140291783 Cover for a mems microphone |
| 10/02/2014 | US20140291782 Methods and devices for packaging integrated circuits |
| 10/02/2014 | US20140291781 Method of packaging a mems transducer device and packaged mems transducer device |
| 10/02/2014 | DE102014104171A1 Halbleiterbauelemente und Verfahren zum Herstellen von Halbleiterbauelementen Semiconductor devices and methods of manufacturing of semiconductor devices |
| 10/01/2014 | EP2782867A1 Chip with a micro-electromechanical structure and covering element, and a method for the production of same |
| 09/30/2014 | US8848392 Co-support module and microelectronic assembly |
| 09/30/2014 | US8847340 Packaged sensor structure having sensor opening and package opening aligned with sensor element |
| 09/30/2014 | US8846521 Method for manufacturing an electronic component package and electronic component package |
| 09/25/2014 | WO2014150798A1 Interface for microfluidic chip |
| 09/25/2014 | US20140285060 Electrical component and method of manufacturing the same |
| 09/25/2014 | US20140284729 Electrical component and method of manufacturing the same |
| 09/25/2014 | US20140283604 Three-dimensional microelectromechanical systems structure |
| 09/25/2014 | DE102013204811A1 Sensorvorrichtung zum Sensieren eines Gases, Verfahren zum Betreiben einer Sensorvorrichtung zum Sensieren eines Gases und Herstellungsverfahren für eine Sensorvorrichtung zum Sensieren eines Gases Sensor device for sensing a gas, A method of operating a sensor device for sensing a gas and manufacturing method for a sensor device for sensing a gas |
| 09/25/2014 | DE102013204804A1 Sensorvorrichtung und Verfahren zum Herstellen einer Sensorvorrichtung Sensor device and method of manufacturing a sensor device |
| 09/25/2014 | DE102013204763A1 Mikromechanische Sensorvorrichtung und entsprechendes Herstellungsverfahren Micromechanical sensor device and corresponding manufacturing method |
| 09/23/2014 | CA2584145C Piano mems with hidden hinge |
| 09/18/2014 | WO2014145882A1 Methods of manufacture of engineered materials and devices |
| 09/18/2014 | WO2014145752A1 Enhanced microfluidic valves for media diagnostics |
| 09/18/2014 | WO2014145646A1 Actuator plate partitioning and control devices and methods |
| 09/18/2014 | WO2014142910A1 Nanowire-based mechanical switching device |
| 09/18/2014 | WO2014142794A1 Mems scanning mirror field of view provision methods and apparatus |
| 09/18/2014 | US20140268300 Packages of MEMS |
| 09/18/2014 | US20140268275 Display apparatus incorporating an interconnect-supporting elevated aperture layer |
| 09/18/2014 | US20140266246 Mcu-based compensation and calibration for mems devices |
| 09/18/2014 | US20140266170 Magnetometer using magnetic materials on accelerometer |
| 09/18/2014 | US20140264909 Microelectromechanical system devices having through substrate vias and methods for the fabrication thereof |
| 09/18/2014 | US20140264900 Anisotropic conductor and method of fabrication thereof |
| 09/18/2014 | US20140264661 MEMS Devices and Methods for Forming Same |
| 09/18/2014 | US20140264659 Transportation device having a monolithically integrated multi-sensor device on a semiconductor substrate and method therefor |
| 09/18/2014 | US20140264656 Mems acoustic sensor with integrated back cavity |
| 09/18/2014 | US20140264654 Microphone package with integrated substrate |
| 09/18/2014 | US20140264649 Micromechanical structure and corresponding production process |
| 09/18/2014 | US20140264643 Methods of forming buried electromechanical structures coupled with device substrates and structures formed thereby |
| 09/18/2014 | US20140264475 Mems device structure with a capping structure |
| 09/18/2014 | US20140262838 Microelectrochemical Sensor and Method for Operating a Microelectrochemical Sensor |
| 09/18/2014 | US20140260704 Device and system for integrated sensor system (iss) |
| 09/18/2014 | US20140260616 Mems device having variable gap width and method of manufacture |
| 09/18/2014 | DE102014204712A1 MEMS-Akustikwandler, MEMS-Mikrofon, MEMS-Mikrolautsprecher, Lautsprecher-Array und Verfahren zur Herstellung eines Akustikwandlers MEMS-acoustic transducer, the MEMS microphone, MEMS micro-speaker, the speaker array and methods for producing an acoustic transducer |
| 09/18/2014 | DE102014103389A1 Mikroelektromechanische Resonatoren Microelectromechanical resonators |
| 09/18/2014 | DE102014103341A1 Halbleiterbauelemente und Verfahren zu ihrer Bildung Semiconductor devices and methods for their formation |
| 09/18/2014 | DE102013204665A1 Mikroelektrochemischer Sensor und Verfahren zum Betreiben eines mikro-elektrochemischen Sensors The micro-electro chemical sensor and method for operating a micro-electro-chemical sensor |
| 09/18/2014 | DE102013204234A1 Sensor und Verfahren zum Herstellen einer Lötverbindung zwischen einem Sensor und einer Leiterplatte Sensor and method for forming a solder connection between a sensor and a printed circuit board |
| 09/17/2014 | EP2778120A1 Mems sensor packaging and method thereof |
| 09/17/2014 | EP2778119A2 Sensor and method for the production of a flexible soldered joint between a sensor and a printed circuit board |
| 09/17/2014 | EP2776849A1 Apparatus and method for measuring phase behavior |
| 09/16/2014 | US8836099 Leadless package housing having a symmetrical construction with deformation compensation |
| 09/14/2014 | CA2844780A1 Fully differential capacitive architecture for mems accelerometer |
| 09/14/2014 | CA2844685A1 Force feedback electrodes in mems accelerometer |
| 09/11/2014 | US20140253219 Compensation of changes in mems capacitive transduction |
| 09/11/2014 | US20140252510 Signal boosting apparatus and method of boosting signals |
| 09/11/2014 | US20140252507 Self-sealing membrane for mems devices |
| 09/11/2014 | US20140252422 Cavity structures for mems devices |
| 09/11/2014 | US20140250969 Spread-Spectrum MEMS Self-Test System and Method |
| 09/11/2014 | DE102013102213A1 Miniaturisiertes Bauelement und Verfahren zur Herstellung Miniaturized device and method for producing |
| 09/11/2014 | DE102013102210A1 Zur Minaturisierung geeignetes elektrisches Bauelement mit verringerter Verkopplung To miniaturization suitable electrical component with reduced coupling |
| 09/10/2014 | EP2773586A2 Micromechanical element, component having a micromechanical element, and method for producing a component |
| 09/09/2014 | US8829629 Capacitance type sensor |
| 09/09/2014 | US8829627 Dynamic quantity sensor device and manufacturing method of the same |
| 09/09/2014 | US8826734 Inertial force sensor |
| 09/04/2014 | WO2014134228A1 Multiplex chemotyping microarray (mcm) system and methods |
| 09/04/2014 | US20140246740 Implantation of gaseous chemicals into cavities formed in intermediate dielectrics layers for subsequent thermal diffusion release |
| 09/04/2014 | US20140246739 Top Port MEMS Cavity Package and Method of Manufacture Thereof |
| 09/04/2014 | US20140246738 Top Port MEMS Cavity Package and Method of Manufacture Thereof |
| 09/04/2014 | US20140246708 MEMS Structures and Methods of Forming the Same |
| 09/04/2014 | DE102010061340B4 Mehrkomponentenspritzgusssystem und Verfahren zu dessen Herstellung Multi-component injection molding system and process for its preparation |
| 09/03/2014 | EP2770904A1 Apparatus, system and methods for measuring a blood pressure gradient |
| 08/28/2014 | WO2014130135A1 Capacitive micromachined ultrasound transducers with pressurized cavities |
| 08/28/2014 | WO2014130047A1 Component assembly using a temporary attach material |
| 08/28/2014 | US20140240944 Insulating low signal loss substrate, integrated circuits including a non-silicon substrate and methods of manufacture of integrated circuits |
| 08/28/2014 | US20140239421 Surface charge mitigation layer for mems sensors |
| 08/28/2014 | US20140239353 Method for mems structure with dual-level structural layer and acoustic port |
| 08/28/2014 | DE112013000341T5 Hybride Hochfrequenzkomponente A hybrid high-frequency component |
| 08/28/2014 | DE102013101051B4 Plasmazelle und Verfahren zur Herstellung einer Plasmazelle Plasma cell and method of manufacturing a plasma cell |
| 08/27/2014 | EP2769957A2 Vacuum sealed semiconductor device and method of manufacturing the same |
| 08/27/2014 | EP2769956A1 Circuit board comprising spatial light modulator |
| 08/27/2014 | EP2768767A1 Stacked vias for vertical integration |
| 08/26/2014 | US8816453 MEMS component and a semiconductor component in a common housing having at least one access opening |
| 08/21/2014 | US20140232241 Piezoelectric array employing integrated mems switches |
| 08/21/2014 | US20140231986 Through substrate via (tsuv) structures and method of making the same |
| 08/21/2014 | US20140231979 Stacked assembly of a mems integrated device having a reduced thickness |
| 08/21/2014 | US20140231938 Micro-electro-mechanical device with buried conductive regions, and manufacturing process thereof |
| 08/21/2014 | US20140231937 Method for manufacturing a protective layer against hf etching, semiconductor device provided with the protective layer and method for manufacturing the semiconductor device |
| 08/21/2014 | US20140231936 Micro-electro-mechanical system (mems) and related actuator bumps, methods of manufacture and design structures |
| 08/21/2014 | US20140231934 Electrical component and method of manufacturing the same |
| 08/21/2014 | US20140230546 Microelectromechanical device with signal routing through a protective cap |
| 08/21/2014 | DE102014101448A1 Beschleunigungsaufnehmer mit niedriger Empfindlichkeit gegenüber thermomechanischer Spannung Accelerometer with low sensitivity to thermo-mechanical stress |
| 08/19/2014 | US8810110 Micro-mechanical component with cantilever integrated electrical functional element |
| 08/19/2014 | US8809784 Incident radiation detector packaging |
| 08/19/2014 | US8809135 MEMS device and interposer and method for integrating MEMS device and interposer |
| 08/14/2014 | US20140225759 Micro-electro-mechanical systems (mems), systems, and operating methods thereof |
| 08/14/2014 | US20140225250 Methods and systems for fabrication of low-profile mems cmos devices |
| 08/14/2014 | US20140225206 Pressure level adjustment in a cavity of a semiconductor die |
| 08/14/2014 | US20140225203 Packages and methods for packaging mems microphone devices |
| 08/14/2014 | US20140224018 MEMS Force Sensors Fabricated Using Paper Substrates |
| 08/14/2014 | DE112012004560T5 Mikroelektromechanische Vorrichtung mit vergrabenen leitfähigen Bereichen sowie Verfahren zum Herstellen derselben A microelectromechanical device with buried conductive regions and methods of making the same |
| 08/13/2014 | CN203774310U 电子器件 Electronic devices |
| 08/13/2014 | CN203768004U 双压力mems芯片 Dual pressure mems chips |
| 08/13/2014 | CN203768003U Mems传感器及半导体封装器件 Mems sensor and a semiconductor package device |
| 08/13/2014 | CN103985649A 晶圆级封装方法及晶圆 Wafer and wafer-level packaging method |
| 08/13/2014 | CN103979482A 一种能清除全氟污染物的金纳米颗粒阵列 One kind can remove perfluorinated pollutants array of gold nanoparticles |