| Patents for B81B 7 - Micro-structural systems (8,983) |
|---|
| 12/27/2013 | WO2013191618A1 Precise definition of transducer electrodes |
| 12/27/2013 | WO2013188958A1 Superoleophobic surfaces and methods of making same |
| 12/27/2013 | CA2877244A1 Superoleophobic surfaces and methods of making same |
| 12/26/2013 | US20130346015 Semiconductor Physical Quantity Detecting Sensor |
| 12/26/2013 | US20130341773 Encapsulation of an mems component and a method for producing said component |
| 12/25/2013 | CN103476702A Process for manufacturing electro-mechanical systems |
| 12/25/2013 | CN103475262A Nanometer generator with piezoelectricity and frictional electricity mixed |
| 12/25/2013 | CN103472480A Electrochemical sensitive element, manufacturing method of electrochemical sensitive element and seismic detector applying electrochemical sensitive element |
| 12/25/2013 | CN103472260A MEMS cross beam capacitor accelerometer and manufacture method thereof |
| 12/25/2013 | CN103466541A 晶圆级封装方法以及晶圆 Wafer-level packaging method and wafer |
| 12/25/2013 | CN103466539A Super-lyophobic surface and preparation method thereof |
| 12/25/2013 | CN103466538A Infrared and millimeter wave frequency division micro nano structure film device |
| 12/25/2013 | CN102001614B MEMS devices and method for manufacturing same |
| 12/25/2013 | CN101959108B Miniature microphone |
| 12/24/2013 | DE102013211943A1 Microelectromechanical system (MEMS) structure e.g. pressure sensor used in MEMS device, has adjustable ventilation opening that is passively actuated as function of pressure difference between preset space and predetermined space |
| 12/24/2013 | DE102012210480A1 Verfahren zum Herstellen eines Bauelements mit einer elektrischen Durchkontaktierung A method of manufacturing a device having an electrical plated-through hole |
| 12/24/2013 | DE102012210472A1 Verfahren zum Herstellen eines Bauelements mit einer elektrischen Durchkontaktierung A method of manufacturing a device having an electrical plated-through hole |
| 12/24/2013 | DE102012210470A1 MEMS-Mikroviskosimeter MEMS Microviscometer |
| 12/24/2013 | DE102012210374A1 Drehratensensor Rotation rate sensor |
| 12/24/2013 | CA2598825C Methods and apparatus for spatial light modulation |
| 12/19/2013 | WO2013188662A1 Teeter-totter type mems accelerometer with electrodes on circuit wafer |
| 12/19/2013 | WO2013188131A1 Microelectromechanical system and methods of use |
| 12/19/2013 | WO2013187987A1 Micro-sensor package and associated method of assembling the same |
| 12/19/2013 | WO2013185204A1 Aggregation and control of magneto-responsive entities |
| 12/19/2013 | US20130335939 Shaped and oriented solder joints |
| 12/19/2013 | US20130335878 Mems lifetime enhancement |
| 12/19/2013 | US20130335161 Antenna switching circuitry for mimo/diversity modes |
| 12/19/2013 | US20130334713 Electrostatic discharge compliant patterned adhesive tape |
| 12/19/2013 | DE102013202372A1 Method for preparing electromagnetic wave-diffracting structure of wavefront source, involves applying beam of charged or uncharged particles on substrate, and removing material of basic structure on substrate |
| 12/19/2013 | DE102012210144A1 Verfahren zum Betrieb und/oder zur Vermessung einer mikromechanischen Vorrichtung und mikromechanische Vorrichtung Method for operating and / or for measuring a micromechanical device and micromechanical device |
| 12/19/2013 | DE102012210052A1 Hybrid integriertes Bauteil und Verfahren zu dessen Herstellung Hybrid integrated component and method for its production |
| 12/19/2013 | DE102012210049A1 Hybrid integriertes Bauteil und Verfahren zu dessen Herstellung Hybrid integrated component and method for its production |
| 12/19/2013 | DE102012209973A1 Mikromechanische Vorrichtung und Verfahren zur Herstellung einer mikromechanischen Vorrichtung Micromechanical device and method of manufacturing a micromechanical device |
| 12/19/2013 | CA2875711A1 Aggregation and control of magneto-responsive entities |
| 12/18/2013 | EP1765724B1 Method for improving alignment precision of parts in mems |
| 12/18/2013 | CN103454450A Mems sensor |
| 12/18/2013 | CN103449357A Hybridly integrated component and method for the production thereof |
| 12/18/2013 | CN103449354A MEMS sensor and producing method thereof |
| 12/18/2013 | CN103449353A 传感器模块 The sensor module |
| 12/18/2013 | CN103449352A Electronic device, electronic apparatus, and method of manufacturing electronic device |
| 12/18/2013 | CN103449351A Hybrid integrated component and method for the manufacture thereof |
| 12/12/2013 | US20130328739 RF Power Conversion to DC Power with a Leaky Wave Antenna |
| 12/12/2013 | US20130328141 Hermetic plastic molded mems device package and method of fabrication |
| 12/11/2013 | EP2671840A2 Systems and methods for particle contaminant entrapment |
| 12/11/2013 | CN103439527A Capacitance type minitype machine wind speed wind direction sensor |
| 12/11/2013 | CN103438837A Bidirectional deflection pointer of micro electro mechanical system |
| 12/11/2013 | CN103435001A Hybrid integrated circuit device and packaging method |
| 12/11/2013 | CN103435000A Wafer-level packaging structure and packaging method of sensor of integrated MEMS (micro-electromechanical system) device |
| 12/11/2013 | CN103434999A Integrated manufacturing method for capacitance type temperature, humidity, air pressure and acceleration sensors based on anodic bonding of SOI (silicon on insulator) sheet silicon substrate |
| 12/11/2013 | CN103434998A Test structure and test method of wafer level airtightness |
| 12/11/2013 | CN102435837B Micro electro mechanical system (MEMS) coupling degree-reconfigurable online detector for microwave power and preparation method thereof |
| 12/11/2013 | CN101798429B Solid electrolyte polymer, actuator using polymer and manufacturing method of the same |
| 12/11/2013 | CN101726526B Solid electrolyte SO2 gas sensor and manufacturing method thereof |
| 12/10/2013 | CA2655322C Mems bubble generator |
| 12/05/2013 | US20130320559 Chip package and method for forming the same |
| 12/05/2013 | DE102012209238A1 Ultraschallsensor sowie Vorrichtung und Verfahren zur Messung eines Abstands zwischen einem Fahrzeug und einem Hindernis Ultrasonic sensor, as well as apparatus and method for measuring a distance between a vehicle and an obstacle |
| 12/05/2013 | DE102012209235A1 Sensormodul Sensor module |
| 12/05/2013 | DE102012010549A1 Verfahren zur Fixierung einer beweglichen Komponente eines mikromechanischenBauelementes Method for fixing a movable component of a micromechanical component |
| 12/05/2013 | DE102010000818B4 MEMS-Resonatorbauelemente MEMS resonator devices |
| 12/05/2013 | CA2875146A1 Bioactive agent delivery devices and methods of making and using the same |
| 12/04/2013 | EP2668131A2 Method for manufacturing a sensor chip comprising a device for testing it |
| 12/04/2013 | EP2668130A1 Sensor chip comprising a spacer for protecting the sensor element |
| 12/04/2013 | CN103430340A Microelectromechanical system device including metal proof mass and piezoelectric component |
| 12/04/2013 | CN103430308A Structures and methods for electrically and mechanically linked monolithically integrated transistor and MEMS/NEMS devices |
| 12/04/2013 | CN103424208A High-sensitivity capacitance type micro-machinery temperature sensor |
| 12/04/2013 | CN103424064A High-resolution micrometer vernier scale for micro electro mechanical system |
| 12/04/2013 | CN103420332A Method for manufacturing a hybrid integrated component |
| 12/04/2013 | CN103420331A Cavity-type semiconductor package and method of packaging same |
| 12/04/2013 | CN103420326A MEMS (micro-electromechanical systems) piezoelectric energy collecting device and method for manufacturing same |
| 12/04/2013 | CN103420324A 混合集成的构件 Hybrid integrated components |
| 12/04/2013 | CN103420323A Micromechanical component and method for manufacturing a micromechanical component |
| 12/04/2013 | CN103420322A Chip package and method for forming the same |
| 12/04/2013 | CN103420321A Hybrid integrated component and method for the manufacture thereof |
| 11/28/2013 | WO2013176585A1 A method and a device for assembling a composite structure |
| 11/28/2013 | WO2013176416A1 Device for selectively processing fine particles by using thin film structure |
| 11/28/2013 | US20130313662 Mems microphone device and method for making same |
| 11/28/2013 | US20130313660 Capacitance type sensor |
| 11/27/2013 | CN203313156U Phase locked loop based on micromechanical cantilever capacitive power sensor |
| 11/27/2013 | CN203310916U Phase detector based on micromechanical cantilever capacitive power sensor |
| 11/27/2013 | CN203310915U Phase detector based on micro mechanical direct thermoelectric power sensor |
| 11/27/2013 | CN203310419U Two-chip integrated silicon-based ultrathin micro-hemispherical resonator gyroscope |
| 11/27/2013 | CN102435634B OTFT (Organic Field-Effect Transistor) integrated sensor array and production method thereof |
| 11/27/2013 | CN102167278B Zinc oxide micro/nano composite structure array film and preparation method thereof |
| 11/27/2013 | CN102009943B Microelectronic device and manufacturing method of micro-electromechanical resonator thereof |
| 11/26/2013 | CA2599579C A display utilizing a control matrix to control movement of mems-based light modulators |
| 11/22/2013 | CA2816897A1 Microwave heating with susceptor |
| 11/21/2013 | WO2013170624A1 Nano porous material capable of being directly lithographically patterned and preparation method thereof |
| 11/21/2013 | US20130307096 Hybrid intergrated component |
| 11/21/2013 | US20130307095 Composite Wafer Semiconductor |
| 11/21/2013 | DE102012208220A1 Infrarot-Sensorvorrichtung und Verfahren zur Herstellung einer Infrarot-Sensorvorrichtung Infrared sensor apparatus and method for producing an infrared sensor device |
| 11/21/2013 | DE102012208192A1 Infrarot-Sensorvorrichtung und Verfahren zur Herstellung einer Infrarot-Sensorvorrichtung Infrared sensor apparatus and method for producing an infrared sensor device |
| 11/21/2013 | DE102012208117A1 Mikromechanisches Bauteil, Herstellungsverfahren für ein mikromechanisches Bauteil und Verfahren zum Betreiben eines mikromechanischen Bauteils Micromechanical element, manufacturing method for a micromechanical component and method for operating a micromechanical component |
| 11/21/2013 | DE102011015184B4 Vorrichtung für den Transport kleiner Volumina eines Fluids, insbesondere Mikropumpe oder Mikroventil A device for the transport of small volumes of a fluid, in particular micropump or microvalve |
| 11/21/2013 | DE102010032799B4 Mikroventil mit elastisch verformbarer Ventillippe, Herstellungsverfahren und Mikropumpe Microvalve with elastically deformable valve lip, manufacturing processes and micropump |
| 11/20/2013 | EP2664221A1 Printed circuit board with an acoustic channel for a microphone |
| 11/20/2013 | CN203300770U Microwave phase shifter based on micro-electromechanical technology |
| 11/20/2013 | CN103403557A Microfluidic processing of target species in ferrofluids |
| 11/20/2013 | CN103402451A Bone and tool tracking with MEMS in computer-assisted surgery |
| 11/20/2013 | CN103400801A Vacuum encapsulation CMOS (complementary metal-oxide-semiconductor transistor) and MEMS (micro electronic mechanical system) chip and processing method of vacuum encapsulation CMOS and MEMS chip |
| 11/20/2013 | CN103395738A Bayonet-lock-free blocking mechanism depending on backseat centrifugal compound environment and used for microstructure |