Patents for C30B 25 - Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth (13,302)
01/1992
01/21/1992US5082798 Crystal growth method
01/21/1992US5082522 Dielectric layer in semiconductor
01/21/1992US5082359 Diamond films and method of growing diamond films on nondiamond substrates
01/15/1992CN1057869A Isotopically pure single crystal epitaxial diamond films and their preparation
01/14/1992US5080975 Composite diamond granules
01/14/1992US5080879 Process for producing silicon carbide platelets and the platelets so produced
01/09/1992WO1992000406A1 Uniform deposition of a thin film on a surface
01/08/1992EP0464611A1 Isotopically pure single crystal epitaxial diamond films and their preparation
01/07/1992US5077875 Reactor vessel for the growth of heterojunction devices
01/03/1992CA2042268A1 Isotopically pure single crystal epitaxial diamond films and their preparation
01/02/1992EP0463863A1 Gas-phase growing method for the method
01/02/1992EP0463633A1 Chemical-vapor-deposition apparatus and method for reducing particulate contamination in a chemical-vapor-deposition process
12/1991
12/31/1991US5076206 Vertical LPCVD reactor
12/27/1991EP0462158A1 Use of metallo-organic compounds for vapour deposition of thin films
12/27/1991EP0462135A1 Metallo-organic adduct compounds.
12/26/1991WO1991020093A1 Ellipsometric control of material growth
12/24/1991US5075096 Using reducing atmosphere of combustion flame
12/24/1991US5074954 Process and apparatus for growing compound semiconductor monocrystal
12/24/1991US5074017 Susceptor
12/18/1991EP0461406A1 Single ended ultra-high vacuum chemical vapor deposition (UHV/CVD) reactor
12/18/1991EP0461194A1 A high capacity epitaxial reactor
12/14/1991CA2042210A1 Free standing diamond sheet and method and apparatus for making same
12/12/1991WO1991019028A1 Organo-element compounds for use in the electronics field
12/12/1991WO1991019025A1 Process for the measurement of the thickness and refractive index of a thin film on a substrate, and a device for carrying out the process
12/11/1991EP0460598A1 Organic compounds for application in the field of electronics
12/10/1991US5071708 Composite diamond grain
12/10/1991US5070814 Cvd reactor vessel for forming a solid state electronic device
12/03/1991US5069930 Method for the evaporation of monomers that are liquid at room temperature
12/03/1991US5069244 Liquid source container device
12/03/1991CA1292662C Process for forming deposited film
11/1991
11/26/1991WO1991019027A1 Process for producing unagglomerated single crystals of aluminum nitride
11/26/1991US5068871 Process for synthesizing diamond and apparatus therefor
11/26/1991CA2083708A1 Process for producing unagglomerated single crystals of aluminum nitride
11/21/1991EP0457076A2 Method for producing synthetic diamond thin film, the thin film and device using it
11/19/1991US5066475 Reinforcing Materials
11/13/1991EP0456426A1 Vacuum type wafer holder
11/13/1991EP0456372A1 Perimeter wafer seal with gas exclusion
11/13/1991EP0455981A1 Method of forming crystals
11/12/1991US5064778 Vapor-phase epitaxial growth method
11/12/1991US5063783 Pressure monitoring and method
11/12/1991CA1291926C Semi-insulating group iii-v based compositions doped using bis arene titanium sources
11/05/1991US5062386 Induction heated pancake epitaxial reactor
11/05/1991CA1291634C Method of manufacturing an optical stripline waveguide for non-reciprocal optical components
10/1991
10/30/1991EP0263141B1 Method for depositing materials containing tellurium
10/29/1991US5061643 Method of doping a growing crystalline semiconductor film
10/29/1991US5061072 Differential ellipsometer
10/23/1991EP0452950A2 Semiconductor device using whiskers and manufacturing method of the same
10/17/1991WO1991009995A3 Process for the deposition of thin films on solids
10/16/1991EP0451789A1 Method of forming semiconductor thin film
10/16/1991EP0451502A1 Metal-metal epitaxy on substrates
10/09/1991EP0450642A1 Crystal growth method
10/09/1991CN1055258A Pressure-rducing process and system for gas epitaxy of semiconductors
10/08/1991US5055276 Useful for composite reinforcement; larger diameter
10/03/1991WO1991014572A1 Diamond-on-a-substrate for electronic applications
10/01/1991US5053247 Method for increasing the batch size of a barrel epitaxial reactor and reactor produced thereby
09/1991
09/24/1991US5051785 N-type semiconducting diamond, and method of making the same
09/24/1991US5051117 Process for removing gaseous contaminating compounds from carrier gases containing halosilane compounds
09/24/1991US5051054 Elevating table and transporting method
09/19/1991WO1991014280A1 Process for growing semiconductor crystal
09/19/1991WO1991014028A1 High temperature superconducting films on aluminum oxide substrates
09/19/1991WO1991013679A1 Bulk gas sorption composition and apparatus
09/18/1991EP0447031A1 Composite susceptor
09/18/1991EP0446657A1 Method for preparing a shield to reduce particles in a physical vapor deposition chamber
09/17/1991US5049409 Method for metal or metal compounds inserted between adjacent graphite layers
09/17/1991US5048800 Furnaces; insulated multilayer tubes
09/11/1991EP0445754A1 Method for growing a diamond or c-BN thin film
09/11/1991EP0445596A2 Double-dome reactor for semiconductor processing
09/11/1991EP0445307A1 Single crystal oxide substrate, superconductor device produced therefrom, and producing thereof
09/06/1991CA2034765A1 Susceptor for use in chemical vapor deposition apparatus and its method of use
09/03/1991US5045496 Semi-insulating cobalt doped indium phosphide grown by MOCVD
09/03/1991US5044943 Spoked susceptor support for enhanced thermal uniformity of susceptor in semiconductor wafer processing apparatus
09/03/1991US5044315 Epitaxial deposition on wafer
08/1991
08/28/1991EP0443920A1 Process for the controlled growth of needle-like crystals and their application for making pointed microcathodes
08/27/1991US5043301 Method of thermally treating semiconductor wafers in furnace and wafer hanger useful therein
08/21/1991EP0442490A1 Method for producing single crystal boron nitride film
08/14/1991EP0441429A2 Process for growing mixed crystals from multi-component oxide melts
08/13/1991US5039626 Method for heteroepitaxial growth of a two-dimensional material on a three-dimensional material
08/13/1991US5039561 Vapor deposition of organic compound, then vacuum annealing yields layer of uniform crystalline particles
08/13/1991US5039501 Heating a carbon substrate in reactive environment consisting of silicon, nitrogen, sulfur, and group II metals
08/13/1991US5038840 Bubbler container automatic refill system
08/13/1991US5038711 Epitaxial facility
08/13/1991CA1287555C Metalorganic vapor phase epitaxial growth of group ii-vi semiconductor materials
08/06/1991US5037674 Method of chemically vapor depositing a thin film of GaAs
08/06/1991US5037626 Process for producing silicon carbide whiskers using seeding agent
08/06/1991US5037502 Process for producing a single-crystal substrate of silicon carbide
07/1991
07/31/1991EP0439064A1 Method of epitaxially growing compound crystal and doping method therein
07/31/1991CN1053511A Method for obtaining heterojunction semiconductor and super crystal lattice materials and equipments thereof
07/30/1991US5036022 Metal organic vapor phase epitaxial growth of group III-V semiconductor materials
07/30/1991US5035767 Preparation of gallium arsenide
07/25/1991WO1991010873A1 Heating apparatus for semiconductor wafers or substrates
07/25/1991DE4040035A1 Hard metallic carbon structure - with higher bulk modulus and hardness and lower density than diamond
07/24/1991EP0437704A2 Process for synthesizing diamond and diamond synthesis apparatus
07/23/1991US5033538 Workpiece carrier for a disk-shaped workpiece as well as a vacuum process space
07/23/1991CA1286494C Bubbler cylinder device
07/17/1991EP0437196A1 Liquid source container device
07/17/1991CN1053146A Mixed matter epitaxy on gallium arsenide substrate
07/16/1991US5032472 Vapor deposited thin film
07/13/1991CA2033138A1 Superhard carbon metal
07/11/1991WO1991009995A2 Process for the deposition of thin films on solids
07/09/1991US5030741 Cyclic organometallic compounds