Patents for C30B 25 - Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth (13,302)
07/1991
07/09/1991US5030583 Method of making single crystal semiconductor substrate articles and semiconductor device
07/02/1991US5028451 Method of producing sintered hard metal with diamond film
07/02/1991US5027746 Epitaxial reactor having a wall which is protected from deposits
06/1991
06/26/1991EP0434436A2 Deposition apparatus and method for manufacturing a mono-crystalline oxide superconductor thin film
06/26/1991EP0433548A1 Semi-insulating gallium arsenide by oxygen doping in metal-organic vapor phase epitaxy
06/25/1991US5025751 Solid film growth apparatus
06/19/1991CN1052340A Single-crystal diamond of very high thermal conductivity
06/13/1991WO1991008329A1 Apparatus for vapor-phase diamond synthesis and method for vapor-phase diamond synthesis
06/13/1991WO1991008323A1 Cvd deposition tunnel for a continuous cycle epitaxial reactor
06/12/1991EP0431415A2 Method and apparatus for epitaxially growing chemical-compound crystal
06/12/1991CA2030049A1 Single-crystal diamond of very high thermal conductivity
06/11/1991US5023109 Deposition of synthetic diamonds
06/11/1991US5023068 Diamond growth
06/05/1991EP0298080B1 Method and apparatus for monitoring surface layer growth
06/04/1991US5020475 Substrate handling and transporting apparatus
06/04/1991US5020474 Apparatus for vapor phase epitaxial growth
05/1991
05/28/1991US5018479 Remote plasma enhanced CVD method and apparatus for growing an epitaxial semconductor layer
05/26/1991CA2030486A1 Process for synthesizing diamond and diamond synthesis apparatus
05/21/1991US5016563 Method of manufacturing thin compound oxide film and apparatus for manufacturing thin oxide film
05/16/1991WO1991006507A1 Core wire connecting bridge for polycrystalline silicon manufacturing apparatuses
05/14/1991US5015528 Fluidized bed diamond particle growth
05/14/1991US5015494 Microwave enhanced CVD method for depositing diamond
05/14/1991US5015327 Method for producing semiconductive single crystal
05/14/1991US5015323 Multi-tipped field-emission tool for nanostructure fabrication
05/08/1991EP0426494A1 Vapor deposition apparatus
04/1991
04/30/1991US5011789 Epitaxial layer on substrate
04/30/1991US5011549 Vapor deposition, smoothness
04/23/1991US5010033 Process for producing compound semiconductor using an amorphous nucleation site
04/23/1991CA1283262C Laser assisted fiber growth
04/18/1991WO1991005087A1 Single crystal oxide substrate, superconductor device produced therefrom, and producing thereof
04/17/1991EP0422243A1 Method of forming polycrystalline film by chemical vapor deposition
04/11/1991DE3933423A1 Hot gas-type hot plate - useful for heat treating semiconductor wafers and LCD substrates
04/09/1991US5006914 Single crystal semiconductor substrate articles and semiconductor devices comprising same
04/09/1991US5006203 Nucleating diamond film on polysilicon substrate by ion beam deposition or hydrocarbon pyrolysis, etching to remove graphitically bonded materials
04/09/1991CA1282874C Semiconductor devices employing high resistivity in p-based epitaxial layer forcurrent confinement
04/04/1991WO1991004223A1 Gas separation by semi-permeable membranes
04/03/1991EP0420596A1 Gas feeding device and deposition film forming apparatus employing the same
04/03/1991EP0419939A1 Apparatus for vaporizing and supplying organometal compounds
04/02/1991US5004821 Used In Epitaxy Processes For Production Of Semiconductors; Reduction Of Phenylarsonic Acid With Zinc
03/1991
03/26/1991US5003092 Forming complexes which are precursors for semiconductors
03/26/1991US5002905 Reinforced matrix for high temperature thermal insulation, shock resistance, electrical properties
03/26/1991US5002630 Method for high temperature thermal processing with reduced convective heat loss
03/20/1991EP0417924A1 Synthetic diamond articles and their method of manufacture
03/20/1991EP0417512A1 Transparent diamond films and method for making
03/20/1991EP0417434A1 Apparatus for synthetic diamond deposition including curved filaments and substrate cooling means
03/20/1991EP0417190A1 Silicon dioxide films on diamond
03/19/1991US5001452 Injection of an ionized substance of a dopant into a diamond matrix
03/19/1991US5000113 Thermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process
03/15/1991CA2021113A1 Transparent diamond films and method for making
03/13/1991EP0416128A1 Wafer of compound semiconductor
03/12/1991US4999316 Method for forming tapered laser or waveguide optoelectronic structures
03/12/1991US4999315 Method of controlling dopant incorporation in high resistivity In-based compound Group III-V epitaxial layers
03/06/1991EP0415191A1 System for controlling epitaxial grow rate in vertical provided with a frustum pyramid susceptor
03/06/1991EP0414842A1 Improved diamond deposition cell.
03/06/1991EP0414841A1 Diamond synthesis
03/05/1991US4997677 Intermetallics
03/05/1991US4997636 Diamond growth
02/1991
02/28/1991DE3927726A1 Epitaxial layer deposition - using reactor in room partitioned by wall from clean room for loading-unloading
02/27/1991EP0413974A1 Method of making a single crystal CVD diamond
02/27/1991EP0413834A1 Diamond-covered member and process for producing the same
02/26/1991US4996079 Method of depositing thin films consisting mainly of carbon
02/26/1991CA2023221A1 Synthetic diamond articles and their method of manufacture
02/21/1991WO1991002104A1 Process for making cages for the vapour-deposition of thin films
02/21/1991WO1991001952A1 Mullite whisker preparation
02/20/1991EP0413023A1 A method and an apparatus for disposing epitaxial silicon and silicides
02/19/1991US4994408 Aluminum gallium arsenide films on gallium arsenide substrate
02/19/1991US4993361 Chemical vapor deposition
02/19/1991US4993360 Vapor growth apparatus having a diffuser section containing a flow regulating member
02/19/1991US4993357 Apparatus for atomic layer epitaxial growth
02/13/1991EP0412755A1 Method of forming crystal semiconductor film
02/12/1991US4992303 Chemical vapor deposition of cadmium mercury telluride
02/12/1991US4992301 Having multiple gas supplying nozzles with gas flow axes intersecting away from rotation center of substrae holder
02/12/1991US4991540 Quartz-glass reactor for MOCVD systems
02/06/1991EP0411424A1 Apparatus for synthetic diamond deposition including spring tensioned filaments
02/05/1991US4990754 Apparatus for transmitting heat under vacuum by grains
01/1991
01/16/1991EP0407601A1 Production method of zinc oxide whisker
01/16/1991CN1048570A Single-crystal fibre of silicon carbide, and method for producing it
01/15/1991US4985281 Vaporizing mercury; depositing mercury-cadmium-tellurium semiconductor
01/15/1991US4985227 Method for synthesis or diamond
01/15/1991US4985224 From silicon dioxide and ammonia gas
01/15/1991US4984534 Method for synthesis of diamond
01/10/1991DE3922833A1 Semiconductor disc heat treatment oven - has inlet apertures in row(s) in inner processing tube
01/09/1991EP0407286A1 Method of making single crystal silicon carbide fibres
01/09/1991EP0407133A2 Semiconductor device and method of manufacturing such semiconductor device
01/08/1991US4983249 Method for producing semiconductive single crystal
01/08/1991US4982693 Semiconductor wafer
01/07/1991CA2020495A1 Silicon carbide microcrystalline fibres and production process of same
01/02/1991EP0405896A2 Process for growing crystal
01/02/1991EP0405634A2 Volatile organic barium, strontium and calcium compounds and method for the preparation of layered materials with barium, strontium or calcium oxides or fluorides from these compounds
01/01/1991US4981666 Method for the preparation of silicon carbide whiskers
01/01/1991US4981665 Hexagonal silicon carbide platelets and preforms and methods for making and using same
01/01/1991US4981222 Wafer boat
12/1990
12/27/1990EP0403986A1 Method for manufacturing substrates for depositing diamond thin films
12/27/1990CA1278272C Method of growing crystalline layers by vapour phase epitaxy
12/25/1990US4979643 Chemical refill system
12/25/1990US4979545 Bubbler container automatic refill system
12/25/1990US4979465 Apparatus for producing semiconductors
12/19/1990EP0402675A1 Method and apparatus for forming non-columnar deposits by chemical vapor deposition
12/19/1990EP0402671A1 Tools employing a large or irregularly shaped diamond abrasive
12/18/1990US4978577 Infrared optical element of zinc selenide roughened with hydrogen sulfide before vapor deposition of zinc sulfide