Patents for C30B 25 - Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth (13,302) |
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07/09/1991 | US5030583 Method of making single crystal semiconductor substrate articles and semiconductor device |
07/02/1991 | US5028451 Method of producing sintered hard metal with diamond film |
07/02/1991 | US5027746 Epitaxial reactor having a wall which is protected from deposits |
06/26/1991 | EP0434436A2 Deposition apparatus and method for manufacturing a mono-crystalline oxide superconductor thin film |
06/26/1991 | EP0433548A1 Semi-insulating gallium arsenide by oxygen doping in metal-organic vapor phase epitaxy |
06/25/1991 | US5025751 Solid film growth apparatus |
06/19/1991 | CN1052340A Single-crystal diamond of very high thermal conductivity |
06/13/1991 | WO1991008329A1 Apparatus for vapor-phase diamond synthesis and method for vapor-phase diamond synthesis |
06/13/1991 | WO1991008323A1 Cvd deposition tunnel for a continuous cycle epitaxial reactor |
06/12/1991 | EP0431415A2 Method and apparatus for epitaxially growing chemical-compound crystal |
06/12/1991 | CA2030049A1 Single-crystal diamond of very high thermal conductivity |
06/11/1991 | US5023109 Deposition of synthetic diamonds |
06/11/1991 | US5023068 Diamond growth |
06/05/1991 | EP0298080B1 Method and apparatus for monitoring surface layer growth |
06/04/1991 | US5020475 Substrate handling and transporting apparatus |
06/04/1991 | US5020474 Apparatus for vapor phase epitaxial growth |
05/28/1991 | US5018479 Remote plasma enhanced CVD method and apparatus for growing an epitaxial semconductor layer |
05/26/1991 | CA2030486A1 Process for synthesizing diamond and diamond synthesis apparatus |
05/21/1991 | US5016563 Method of manufacturing thin compound oxide film and apparatus for manufacturing thin oxide film |
05/16/1991 | WO1991006507A1 Core wire connecting bridge for polycrystalline silicon manufacturing apparatuses |
05/14/1991 | US5015528 Fluidized bed diamond particle growth |
05/14/1991 | US5015494 Microwave enhanced CVD method for depositing diamond |
05/14/1991 | US5015327 Method for producing semiconductive single crystal |
05/14/1991 | US5015323 Multi-tipped field-emission tool for nanostructure fabrication |
05/08/1991 | EP0426494A1 Vapor deposition apparatus |
04/30/1991 | US5011789 Epitaxial layer on substrate |
04/30/1991 | US5011549 Vapor deposition, smoothness |
04/23/1991 | US5010033 Process for producing compound semiconductor using an amorphous nucleation site |
04/23/1991 | CA1283262C Laser assisted fiber growth |
04/18/1991 | WO1991005087A1 Single crystal oxide substrate, superconductor device produced therefrom, and producing thereof |
04/17/1991 | EP0422243A1 Method of forming polycrystalline film by chemical vapor deposition |
04/11/1991 | DE3933423A1 Hot gas-type hot plate - useful for heat treating semiconductor wafers and LCD substrates |
04/09/1991 | US5006914 Single crystal semiconductor substrate articles and semiconductor devices comprising same |
04/09/1991 | US5006203 Nucleating diamond film on polysilicon substrate by ion beam deposition or hydrocarbon pyrolysis, etching to remove graphitically bonded materials |
04/09/1991 | CA1282874C Semiconductor devices employing high resistivity in p-based epitaxial layer forcurrent confinement |
04/04/1991 | WO1991004223A1 Gas separation by semi-permeable membranes |
04/03/1991 | EP0420596A1 Gas feeding device and deposition film forming apparatus employing the same |
04/03/1991 | EP0419939A1 Apparatus for vaporizing and supplying organometal compounds |
04/02/1991 | US5004821 Used In Epitaxy Processes For Production Of Semiconductors; Reduction Of Phenylarsonic Acid With Zinc |
03/26/1991 | US5003092 Forming complexes which are precursors for semiconductors |
03/26/1991 | US5002905 Reinforced matrix for high temperature thermal insulation, shock resistance, electrical properties |
03/26/1991 | US5002630 Method for high temperature thermal processing with reduced convective heat loss |
03/20/1991 | EP0417924A1 Synthetic diamond articles and their method of manufacture |
03/20/1991 | EP0417512A1 Transparent diamond films and method for making |
03/20/1991 | EP0417434A1 Apparatus for synthetic diamond deposition including curved filaments and substrate cooling means |
03/20/1991 | EP0417190A1 Silicon dioxide films on diamond |
03/19/1991 | US5001452 Injection of an ionized substance of a dopant into a diamond matrix |
03/19/1991 | US5000113 Thermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process |
03/15/1991 | CA2021113A1 Transparent diamond films and method for making |
03/13/1991 | EP0416128A1 Wafer of compound semiconductor |
03/12/1991 | US4999316 Method for forming tapered laser or waveguide optoelectronic structures |
03/12/1991 | US4999315 Method of controlling dopant incorporation in high resistivity In-based compound Group III-V epitaxial layers |
03/06/1991 | EP0415191A1 System for controlling epitaxial grow rate in vertical provided with a frustum pyramid susceptor |
03/06/1991 | EP0414842A1 Improved diamond deposition cell. |
03/06/1991 | EP0414841A1 Diamond synthesis |
03/05/1991 | US4997677 Intermetallics |
03/05/1991 | US4997636 Diamond growth |
02/28/1991 | DE3927726A1 Epitaxial layer deposition - using reactor in room partitioned by wall from clean room for loading-unloading |
02/27/1991 | EP0413974A1 Method of making a single crystal CVD diamond |
02/27/1991 | EP0413834A1 Diamond-covered member and process for producing the same |
02/26/1991 | US4996079 Method of depositing thin films consisting mainly of carbon |
02/26/1991 | CA2023221A1 Synthetic diamond articles and their method of manufacture |
02/21/1991 | WO1991002104A1 Process for making cages for the vapour-deposition of thin films |
02/21/1991 | WO1991001952A1 Mullite whisker preparation |
02/20/1991 | EP0413023A1 A method and an apparatus for disposing epitaxial silicon and silicides |
02/19/1991 | US4994408 Aluminum gallium arsenide films on gallium arsenide substrate |
02/19/1991 | US4993361 Chemical vapor deposition |
02/19/1991 | US4993360 Vapor growth apparatus having a diffuser section containing a flow regulating member |
02/19/1991 | US4993357 Apparatus for atomic layer epitaxial growth |
02/13/1991 | EP0412755A1 Method of forming crystal semiconductor film |
02/12/1991 | US4992303 Chemical vapor deposition of cadmium mercury telluride |
02/12/1991 | US4992301 Having multiple gas supplying nozzles with gas flow axes intersecting away from rotation center of substrae holder |
02/12/1991 | US4991540 Quartz-glass reactor for MOCVD systems |
02/06/1991 | EP0411424A1 Apparatus for synthetic diamond deposition including spring tensioned filaments |
02/05/1991 | US4990754 Apparatus for transmitting heat under vacuum by grains |
01/16/1991 | EP0407601A1 Production method of zinc oxide whisker |
01/16/1991 | CN1048570A Single-crystal fibre of silicon carbide, and method for producing it |
01/15/1991 | US4985281 Vaporizing mercury; depositing mercury-cadmium-tellurium semiconductor |
01/15/1991 | US4985227 Method for synthesis or diamond |
01/15/1991 | US4985224 From silicon dioxide and ammonia gas |
01/15/1991 | US4984534 Method for synthesis of diamond |
01/10/1991 | DE3922833A1 Semiconductor disc heat treatment oven - has inlet apertures in row(s) in inner processing tube |
01/09/1991 | EP0407286A1 Method of making single crystal silicon carbide fibres |
01/09/1991 | EP0407133A2 Semiconductor device and method of manufacturing such semiconductor device |
01/08/1991 | US4983249 Method for producing semiconductive single crystal |
01/08/1991 | US4982693 Semiconductor wafer |
01/07/1991 | CA2020495A1 Silicon carbide microcrystalline fibres and production process of same |
01/02/1991 | EP0405896A2 Process for growing crystal |
01/02/1991 | EP0405634A2 Volatile organic barium, strontium and calcium compounds and method for the preparation of layered materials with barium, strontium or calcium oxides or fluorides from these compounds |
01/01/1991 | US4981666 Method for the preparation of silicon carbide whiskers |
01/01/1991 | US4981665 Hexagonal silicon carbide platelets and preforms and methods for making and using same |
01/01/1991 | US4981222 Wafer boat |
12/27/1990 | EP0403986A1 Method for manufacturing substrates for depositing diamond thin films |
12/27/1990 | CA1278272C Method of growing crystalline layers by vapour phase epitaxy |
12/25/1990 | US4979643 Chemical refill system |
12/25/1990 | US4979545 Bubbler container automatic refill system |
12/25/1990 | US4979465 Apparatus for producing semiconductors |
12/19/1990 | EP0402675A1 Method and apparatus for forming non-columnar deposits by chemical vapor deposition |
12/19/1990 | EP0402671A1 Tools employing a large or irregularly shaped diamond abrasive |
12/18/1990 | US4978577 Infrared optical element of zinc selenide roughened with hydrogen sulfide before vapor deposition of zinc sulfide |