| Patents for G21K 7 - Gamma ray or x-ray microscopes (1,690) |
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| 01/24/2002 | WO2002007484A2 Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it |
| 01/24/2002 | US20020008208 Ion beam apparatus and sample processing method |
| 01/24/2002 | US20020008200 Correction method of scanning electron microscope |
| 12/27/2001 | WO2001099478A1 X-ray micro-target source |
| 12/27/2001 | US20010054692 Scanning electron microscope |
| 12/27/2001 | US20010054691 Optical system for scanning microscope |
| 12/25/2001 | US6333510 Electron beam exposure or system inspection of measurement apparatus and its method and height detection apparatus |
| 12/20/2001 | DE10027060A1 Scanning tip production process for scanning probe microscope, involves exposing material such as photosensitive resist applied on carrier, through a mask of specific shape at certain angle |
| 12/13/2001 | US20010050343 Apparatus using charged particle beam |
| 12/13/2001 | US20010050342 Scanning tip and process for its production and use, particularly for a scanning probe microscope |
| 12/13/2001 | US20010050338 Scanning charged particle microscope, and focal distance adjusting method and astigmatism correction method thereof |
| 12/06/2001 | US20010048076 Surface analyzing apparatus |
| 11/29/2001 | US20010046276 Method for examining structures on a semiconductor substrate |
| 11/29/2001 | US20010045529 Double-resonance-absorption microscope |
| 11/29/2001 | US20010045515 Analysis electron microscope |
| 11/28/2001 | EP1157597A1 Method of generating euv radiation, method of manufacturing a device by means of said radiation, euv radiation source unit, and lithographic projection apparatus provided with such a radiation source unit |
| 11/22/2001 | WO2001088514A1 Apparatus for inspection of semiconductor wafers and masks using a low energy electron micoscope with two illuminating beams |
| 11/22/2001 | US20010042830 Holography transmission electron microscope |
| 11/21/2001 | EP1155419A1 "x-ray microscope having an x-ray source for soft x-rays |
| 11/21/2001 | CN1323041A Holographic X-ray microscope with preamplification |
| 11/13/2001 | US6317483 Doubly curved optical device with graded atomic planes |
| 11/08/2001 | WO2001084593A2 A lens for a scanning electron microscope |
| 11/08/2001 | WO2001084209A2 Fully automatic rapid microscope slide scanner |
| 11/08/2001 | US20010038072 Image deconvolution techniques for probe scanning apparatus |
| 11/01/2001 | US20010035495 Scanning electron microscope and method of controlling the same |
| 10/25/2001 | US20010032931 Charged particle beam instrument |
| 10/18/2001 | US20010030294 Method and an apparatus of an inspection system using an electron beam |
| 10/18/2001 | US20010030286 Scanning probe microscope |
| 10/16/2001 | US6304630 Method of generating EUV radiation, method of manufacturing a device by means of said radiation, EUV radiation source unit, and lithographic projection apparatus provided with such a radiation source unit |
| 10/16/2001 | US6303930 Coordinating optical type observing apparatus and laser marking method |
| 10/11/2001 | DE10113966A1 Sondenelektronenmikroskop Electron probe |
| 10/04/2001 | US20010025925 Charged particle beam system and pattern slant observing method |
| 09/20/2001 | US20010022346 Scanning electron microscope |
| 09/18/2001 | US6291823 Ion-induced electron emission microscopy |
| 09/11/2001 | US6288391 Method for locking probe of scanning probe microscope |
| 09/06/2001 | US20010019109 Scanning electron microscope |
| 08/30/2001 | WO2001063555A2 Image deconvolution techniques for probe scanning apparatus |
| 08/28/2001 | US6282263 X-ray generator |
| 08/22/2001 | EP1126477A2 Method for structure investigation in a semiconductor substrate |
| 08/02/2001 | US20010010358 Transmission electron microscope equipped with energy filter |
| 08/02/2001 | US20010010357 Scanning electron microscope |
| 07/10/2001 | US6259093 Surface analyzing apparatus |
| 07/05/2001 | WO2001049087A1 Method of generating euv radiation, method of manufacturing a device by means of said radiation, euv radiation source unit, and lithographic projection apparatus provided with such a radiation source unit |
| 06/28/2001 | WO2001046962A1 'x-ray microscope having an x-ray source for soft x-rays |
| 06/27/2001 | EP1110224A2 X-ray interferometer |
| 05/31/2001 | WO2001039211A1 Doubly curved optical device with graded atomic planes |
| 05/31/2001 | WO2001039210A1 X-ray zoom lens |
| 05/31/2001 | CA2392378A1 X-ray zoom lens |
| 05/25/2001 | WO2001037618A1 Method for obtaining an extreme ultraviolet radiation source, radiation source and use in lithography |
| 05/10/2001 | US20010001010 High resolution x-ray imaging of very small objects |
| 05/03/2001 | WO2001031287A1 Method and apparatus for molecular analysis of buried layers |
| 05/03/2001 | DE19934987A1 Röntgenanode und Verfahren zu ihrer Herstellung X-ray anode and processes for their preparation |
| 04/26/2001 | WO2001030122A1 Production of a dense mist of micrometric droplets in particular for extreme uv lithography |
| 04/19/2001 | US20010000279 Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample |
| 03/14/2001 | EP0873566B1 X-ray microscope with zone plates |
| 02/27/2001 | US6195410 X-ray interferometer |
| 02/13/2001 | US6185992 Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample |
| 02/01/2001 | WO2001008195A1 X-ray anode and method for the production thereof |
| 01/25/2001 | WO2001006518A1 A refractive x-ray arrangement |
| 01/25/2001 | WO2001006205A1 Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample |
| 01/11/2001 | WO2001003157A1 Object inspection and/or modification system and method |
| 12/26/2000 | US6167112 X-ray microscope with zone plates |
| 12/19/2000 | US6163590 High resolution x-ray imaging of very small objects |
| 12/07/2000 | WO2000044003A3 X-ray interferometer |
| 12/05/2000 | US6157701 X-ray generating apparatus and X-ray microscope |
| 11/22/2000 | EP1054249A1 Electronic device surface signal control probe and method of manufacturing the probe |
| 10/10/2000 | US6130427 Scanning probe microscope with multimode head |
| 10/03/2000 | US6128364 Condenser-monochromator arrangement for X-radiation |
| 09/26/2000 | US6124140 Method for measuring features of a semiconductor device |
| 08/22/2000 | US6107637 Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus |
| 07/27/2000 | WO2000044003A2 X-ray interferometer |
| 07/18/2000 | US6091796 Scintillator based microscope |
| 06/08/2000 | WO2000033052A1 Electronic device surface signal control probe and method of manufacturing the probe |
| 05/03/2000 | CN1252158A High resolution X-ray imaging of vary small objects |
| 01/26/2000 | EP0974149A1 High resolution x-ray imaging of very small objects |
| 01/05/2000 | EP0968409A2 Soft x-ray microfluoroscope |
| 10/21/1999 | WO1999053356A1 Microscope system |
| 10/20/1999 | EP0873565B1 Condenser-monochromator arrangement for x-radiation |
| 09/22/1999 | EP0815582B1 Microfocus x-ray device |
| 08/17/1999 | US5939719 Scanning probe microscope with scan correction |
| 07/14/1999 | EP0928496A1 X-ray generator |
| 07/07/1999 | EP0927331A1 Macroscopically manipulable nanoscale devices made from nanotube assemblies |
| 06/16/1999 | EP0922930A1 Scanning probe microscope with integrated deflection sensor |
| 06/15/1999 | US5912939 Soft x-ray microfluoroscope |
| 03/02/1999 | US5877891 Scanning probe microscope having a single viewing device for on-axis and oblique optical views |
| 01/26/1999 | US5864599 X-ray moire microscope |
| 01/05/1999 | US5857008 Microfocus X-ray device |
| 12/08/1998 | US5848119 Illumination system and exposure apparatus having the same |
| 11/17/1998 | US5838757 For use in imaging an object |
| 11/03/1998 | US5832052 X-ray microscope |
| 10/28/1998 | EP0873566A2 X-ray microscope with zone plates |
| 10/28/1998 | EP0873565A2 Condenser-monochromator arrangement for x-radiation |
| 10/22/1998 | WO1998035214A3 Soft x-ray microfluoroscope |
| 10/15/1998 | WO1998045853A1 High resolution x-ray imaging of very small objects |
| 09/15/1998 | US5808312 System and process for inspecting and repairing an original |
| 08/13/1998 | WO1998035214A2 Soft x-ray microfluoroscope |
| 08/04/1998 | US5790627 Method and apparatus for observing a specimen using an X-ray microscope |
| 07/14/1998 | US5781608 X-ray exposure system |
| 05/19/1998 | US5753914 Method and apparatus for investigating the physical properties of material surface layer |
| 04/02/1998 | WO1998013853A1 X-ray generator |