Patents for G21K 7 - Gamma ray or x-ray microscopes (1,690)
05/2004
05/06/2004US20040084619 Method and an apparatus for determining the dimension of a feature by varying a resolution determining parameter
05/06/2004US20040084618 Scanning probe with digitised pulsed-force mode operation and real-time evaluation
04/2004
04/29/2004WO2004015448A3 Mission-specific positron emission tomography
04/29/2004US20040079892 Tip for nanoscanning electron microscope
04/29/2004US20040079884 Converting scanning electron microscopes
04/15/2004WO2003104847A3 Low-pressure chamber for scanning electron microscopy in a wet environment
04/15/2004WO2003104846A3 A sample enclosure for a scanning electron microscope and methods of use thereof
04/13/2004US6720558 Transmission electron microscope equipped with energy filter
04/08/2004US20040065827 Method for the electron-microscopic observation of a semiconductor arrangement and apparatus therefor
04/08/2004US20040065819 Scanning unit and scanning microscope having the same
04/06/2004US6717145 Mapping electron microscopes exhibiting improved imaging of specimen having chargeable bodies
04/01/2004US20040062352 Laser plasma X-ray generating apparatus
04/01/2004US20040062347 X-ray microscope
04/01/2004US20040061051 Devices for guiding and manipulating electron beams
03/2004
03/31/2004EP0927331B1 Macroscopically manipulable nanoscale devices made from nanotube assemblies
03/30/2004US6713761 Scanning electron microscope
03/25/2004US20040056193 Applications operating with beams of charged particles
03/23/2004US6711283 Fully automatic rapid microscope slide scanner
03/23/2004US6710339 Scanning probe microscope
03/18/2004WO2003102564A3 Element-specific x-ray fluorescence microscope using multiple imaging systems comprising a zone plate
03/11/2004US20040046120 Device and method for the examination of samples in a non-vacuum environment using a scanning electron microscope
03/04/2004US20040041095 Methods and apparatus for electron beam inspection of samples
02/2004
02/26/2004WO2003104848A3 Methods for sem inspection of fluid containing samples
02/19/2004WO2004015448A2 Mission-specific positron emission tomography
02/19/2004US20040031921 Electron microscope
02/19/2004CA2495215A1 Mission-specific positron emission tomography
02/12/2004US20040028272 Pattern inspection method and apparatus using electron beam
02/12/2004US20040026621 Particle detectors
02/12/2004US20040026620 Mission-specific positron emission tomography
02/11/2004EP1388883A2 Coaxial FIB-SEM column
02/05/2004US20040021075 Method of measuring sizes in scan microscopes
02/05/2004US20040021074 Scanning charged particle microscope
02/05/2004DE10232689A1 Mit Strahlen geladener Teilchen arbeitende Anwendungen With charged particle beams working applications
01/2004
01/29/2004US20040016882 Scanning electron microscope
01/29/2004DE10230929A1 Verfahren zum elektronenmikroskopischen Beobachten einer Halbleiteranordnung und Vorrichtung hierfür A method for electron microscopic observation of a semiconductor device and apparatus therefor
01/28/2004EP1385192A2 Device working with beams of charged particles
01/28/2004CN1136587C Holographic X-ray Microscope with preamplification
01/15/2004WO2004005906A1 A method for detection of micrometric and sub-micrometric images by means of irradiation of a mask or of a biological specimen with ionizing radiation
01/15/2004CA2504195A1 A method for detection of micrometric and sub-micrometric images by means of irradiation of a mask or of a biological specimen with ionizing radiation
01/14/2004EP1381074A2 Method and apparatus for observing a semiconductor device using an electron microscope
01/13/2004US6677606 Dopa and dopamine modification of metal oxide semiconductors, method for attaching biological molecules to semiconductors
01/13/2004US6677585 Scanning charged particle microscope, and focal distance adjusting method and astigmatism correction method thereof
01/08/2004US20040005026 X-ray microscope apparatus
01/07/2004CN1466860A Method and apparatus for generating X-ray or EUV radiation
01/06/2004US6674077 Microelectromechanical system assembly and testing device
01/06/2004US6674076 Humidified imaging with an environmental scanning electron microscope
12/2003
12/23/2003US6668040 Refractive X-ray arrangement
12/23/2003US6667830 Super-resolution microscope system and method for illumination
12/23/2003US6667483 Apparatus using charged particle beam
12/18/2003WO2003104848A2 Methods for sem inspection of fluid containing samples
12/18/2003WO2003104847A2 Low-pressure chamber for scanning electron microscopy in a wet environment
12/18/2003WO2003104846A2 A sample enclosure for a scanning electron microscope and methods of use thereof
12/11/2003WO2003102564A2 Element-specific x-ray fluorescence microscope using multiple imaging systems comprising a zone plate
12/09/2003US6661008 Electron-optical system and inspection method using the same
12/09/2003US6661004 Image deconvolution techniques for probe scanning apparatus
12/04/2003US20030223536 Element-specific X-ray fluorescence microscope and method of operation
12/03/2003EP1367630A2 Improvements in or relating to particle detectors
12/02/2003US6657213 High temperature EUV source nozzle
11/2003
11/27/2003US20030219097 X-ray microscope having an X-ray source for soft X-ray
11/27/2003US20030218132 Scanning probe microscope
11/20/2003WO2003096764A1 Method and arrangement for producing radiation
11/20/2003WO2003096356A2 Reflective x-ray microscope and inspection system for examining objects with wavelengths of≤ 100nm
11/20/2003US20030213893 Electron beam apparatus and device manufacturing method using same
11/11/2003US6647088 Production of a dense mist of micrometric droplets in particular for extreme UV lithography
10/2003
10/30/2003US20030201393 Electron microscope
10/28/2003US6639219 Electron scatter in a thin membrane to eliminate detector saturation
10/21/2003US6635874 Self-cleaning technique for contamination on calibration sample in SEM
10/21/2003US6635870 Method and apparatus for molecular analysis of buried layers
10/16/2003US20030193026 Electron microscope, method for operating the same, and computer-readable medium
10/09/2003US20030189172 Scanning electron microscope and sample observation method using the same
10/07/2003US6630668 Remote control of a scanning electron microscope aperture and gun alignment
10/02/2003WO2003081605A1 X-ray image magnifying device
09/2003
09/30/2003US6627888 Scanning electron microscope
09/12/2003WO2003075286A1 X-ray microscope
09/10/2003EP1342049A1 Scanning probe with digitised pulsed-force mode operation and real-time evaluation
09/09/2003US6617761 Scanning unit and scanning microscope having the same
09/09/2003US6617580 Electron holography microscope
09/03/2003EP1340241A1 Device and method for the examination of samples in a non-vacuum environment using a scanning electron microscope
09/02/2003US6614022 Pattern inspection method and apparatus using electron beam
08/2003
08/26/2003US6610980 Apparatus for inspection of semiconductor wafers and masks using a low energy electron microscope with two illuminating beams
08/21/2003US20030155509 Electron beam system and method of manufacturing devices using the system
08/19/2003US6608308 Electrostatic lens systems for secondary-electron mapping-projection apparatus, and mapping-projection apparatus and methods comprising same
08/19/2003US6608305 Selective deposition of a particle beam based on charging characteristics of a sample
08/14/2003US20030150990 Atomic force microscopy, method of measuring surface configuration using the same, and method of producing magnetic recording medium
08/13/2003EP1335640A2 Plasma-type X-ray source encased in vacuum chamber exhibiting reduced heating of interior components, and microlithography systems comprising same
08/07/2003US20030147499 Plasma-type X-ray generators encased in vacuum chambers exhibiting reduced heating of interior components, and microlithography systems comprising same
07/2003
07/29/2003US6600156 Scanning electron microscope
07/22/2003US6596993 Method of automatically correcting magnification and non-linearity of scanning electron microscope
07/10/2003US20030129914 Composites comprising superabsorbent materials having a bimodal particle size distribution and methods of making the same
07/08/2003US6590703 Optical system for scanning microscope
07/08/2003US6590212 Microelectromechanical system assembly and testing device
07/03/2003WO2003054890A1 Scanning x-ray microscope with a plurality of simultaneous x-ray probes on the sample
07/03/2003US20030122075 Design for an electron holography microscope
07/03/2003US20030122073 Coated nanotube surface signal probe and method of attaching nanotube to probe holder
07/01/2003US6586737 Transmission electron microscope equipped with energy filter
06/2003
06/12/2003US20030108155 X-ray micro-target source
06/12/2003US20030106998 Method for producing boron nitride coatings and fibers and compositions thereof
06/11/2003EP1317685A2 Fully automatic rapid microscope slide scanner
06/10/2003US6576902 Correction method of scanning electron microscope
06/03/2003US6573501 Holography transmission electron microscope
1 ... 4 5 6 7 8 9 10 11 12 13 14 15 16 17