| Patents for B81B 7 - Micro-structural systems (8,983) |
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| 10/09/2013 | EP2648335A2 Hyperfrequency power limiter with capacitive radiofrequency MEMS switches |
| 10/09/2013 | EP2647594A2 Methods and systems for limiting sensor motion |
| 10/09/2013 | EP2647593A2 Noise reduction method for mems sensors using chopping circuits |
| 10/09/2013 | CN103347808A A silicon based mems microphone, a system and a package with the same |
| 10/09/2013 | CN103346699A V+U type composite beam micro actuator based on electric heating driving and preparation method thereof |
| 10/09/2013 | CN103344374A Hidden-type MEMS pressure sensor sensitive chip and manufacturing method thereof |
| 10/09/2013 | CN103342338A Wafer level packaging method and packaging structure of MEMS (Micro Electronic and Mechanical System) chip |
| 10/09/2013 | CN103342333A Infrared thermopile type sensor based on CMOS DPTM process and manufacturing method thereof |
| 10/09/2013 | CN103342332A Integrated thermopile infrared detection system based on CMOS process and manufacturing method thereof |
| 10/09/2013 | CN101386401B Monitoring structure of infrared detector pixel stress and monitoring method |
| 10/08/2013 | CA2535390C Optical detector for a particle sorting system |
| 10/03/2013 | WO2013147809A1 Trackable wireless optical communication |
| 10/03/2013 | US20130258621 Microelectronic package having a coaxial connector |
| 10/03/2013 | US20130256919 Multifunction sensor as pop microwave pcb |
| 10/03/2013 | US20130256815 Cavity package design |
| 10/02/2013 | EP2644563A2 Electronic device comprising differential MEMS sensor and substrate having through hole |
| 10/02/2013 | DE102013205249A1 Halbleitervorrichtung und Herstellungsverfahren hierfür A semiconductor device and manufacturing method thereof |
| 10/02/2013 | DE102012204835A1 Sensor, Verfahren zum Herstellen eines Sensors und Verfahren zum Montieren eines Sensors Sensor, method of manufacturing a sensor and method for mounting a sensor |
| 10/02/2013 | CN103332648A Electromodulation MEMS infrared source and fabrication method thereof |
| 09/26/2013 | DE102012005546A1 Mikrospiegelanordnung und Verfahren zur Herstellung einer Mikrospiegelanordnung Micro-mirror array and method of manufacturing a micro-mirror array |
| 09/26/2013 | DE102010042438B4 Sensoranordnung Sensor array |
| 09/25/2013 | CN103329634A Printed circuit board with an acoustic channel for a microphone |
| 09/25/2013 | CN103328373A Component and method for producing a component |
| 09/25/2013 | CN103328372A Mounting flexure contacts |
| 09/25/2013 | CN103326695A Reconfigurable matching network matcher with MEMS switch |
| 09/25/2013 | CN103326668A Frequency multiplier based on micromechanical clamped beam capacitance-type power sensor and preparation method |
| 09/25/2013 | CN103322995A Piezoelectric-drive electrostatic-detection bulk acoustic wave harmonic-vibration triaxial microgyroscope and preparation method thereof |
| 09/25/2013 | CN103322994A Double-wafer integrated silicon-based super-thin micro-hemispherical resonator gyroscope and preparation method thereof |
| 09/25/2013 | CN103318837A Flexible noise reduction bionic mebrane with blocking property and preparation method thereof |
| 09/25/2013 | CN103318836A Optical readout full-hollow focal plane array provided with thermal sink structures and manufacturing method thereof |
| 09/25/2013 | CN103318835A Hermetic seals for micro-electromechanical system device |
| 09/25/2013 | CN102126697B Encapsulating structure with micro electromechanical component and manufacturing method thereof |
| 09/25/2013 | CN101927976B Infrared detector with micro-bridge structure and manufacturing method thereof |
| 09/24/2013 | US8541313 Method for etching a sacrificial layer for a micro-machined structure |
| 09/24/2013 | CA2687775C Fabrication of mems and moems components |
| 09/24/2013 | CA2514230C Microelectromechanical systems having trench isolated contacts, and methods for fabricating same |
| 09/19/2013 | WO2013112310A3 Mems vibration isolation system and method |
| 09/19/2013 | US20130241013 Physical Quantity Detector |
| 09/19/2013 | US20130241012 Eutectic bonding of thin chips on a carrier substrate |
| 09/19/2013 | DE102012203900A1 Bauelement mit einer mikromechanischen Mikrofonstruktur Component having a micromechanical microphone structure |
| 09/19/2013 | DE102012005262A1 Sensoranordnung aus Trägersubstrat und ferroelektrischer Schicht sowie Verfahren zur Herstellung und Verwendung der Sensoranordnung Sensor arrangement consisting of the carrier substrate and the ferroelectric layer, and methods for making and using the sensor arrangement |
| 09/18/2013 | EP2639823A2 Controlled area solder bonding for dies |
| 09/18/2013 | CN203200012U 微机电系统传感器 MEMS sensor |
| 09/18/2013 | CN203200011U Wafer with adjustable bonding layer |
| 09/18/2013 | CN103312291A Electrostatic comb resonator |
| 09/12/2013 | WO2013133807A1 Microreactors for separation of heterogeneous liquids |
| 09/12/2013 | WO2013133792A1 Flexible circuits |
| 09/12/2013 | WO2013133767A1 A mems iris diaphragm for an optical system and method for adjusting a size of an aperture thereof |
| 09/12/2013 | WO2013089547A3 Apparatus for generating electrical stimuli for microfluidic devices and the method for controlling said apparatus |
| 09/12/2013 | US20130234264 Semiconductor sensor device and electronic apparatus |
| 09/12/2013 | DE102012203699A1 Semiconductor component e.g. micro-electromechanical component, for use as e.g. mechanical structure, has connection structure whose element is received between connectors such that linkage is formed between component and substrate |
| 09/12/2013 | DE102012102021A1 Mikromechanisches Messelement und Verfahren zur Herstellung eines mikromechanischen Messelements Micromechanical sensing element and method for manufacturing a micro-mechanical sensing element |
| 09/12/2013 | DE102012102020A1 Mikromechanisches Messelement Micromechanical measuring element |
| 09/11/2013 | CN103293337A Wireless passive capacitive accelerometer |
| 09/11/2013 | CN103292830A Physical quantity sensor and electronic apparatus |
| 09/11/2013 | CN103288043A High aspect ratio MEMS device and method for forming the same |
| 09/11/2013 | CN103288041A V-shaped-structure MEMS (micro-electromechanical system) actuator for detonating sequence |
| 09/11/2013 | CN103288040A Tunable MEMS device and method of making a tunable MEMS device |
| 09/11/2013 | CN103288039A Micro part assembly system and online assembly method of micro parts |
| 09/11/2013 | CN103288038A Moisture-resistant package |
| 09/11/2013 | CN103288037A Micromechanical sensor arrangement, corresponding manufacturing method and application |
| 09/11/2013 | CN103288036A Micromechanical sensor apparatus with a movable gate, and corresponding production process |
| 09/11/2013 | CN101309853B Apparatus for downhole fluids analysis utilizing micro electro mechanical systems (mems) or other sensors |
| 09/11/2013 | CN101306792B Micro-actuating fluid supply machine, micro-pump structure and ink jet head structure using the same |
| 09/10/2013 | CA2468132C Electrode configuration for piano mems micromirror |
| 09/06/2013 | WO2013130582A1 Method for embedding controlled-cavity mems package in integration board |
| 09/05/2013 | DE10250634B4 Halbleiterstruktur mit nachgiebigem Zwischenverbindungselement und Verfahren zu deren Herstellung Semiconductor structure having resilient interconnection element and process for their preparation |
| 09/05/2013 | DE102012203440A1 Infrarotsensor mit Beschleunigungssensor und Verfahren zum Betreiben eines Infrarotsensors Infrared sensor with the acceleration sensor and method of operating an infrared sensor |
| 09/05/2013 | DE102012203373A1 Mikromechanische Schallwandleranordnung und ein entsprechendes Herstellungsverfahren Micro-mechanical transducer array and a corresponding production method |
| 09/05/2013 | DE102012100824A1 Gemultiplexte Digital PCR Digital Multiplexed PCR |
| 09/05/2013 | DE102005029841B4 Mikromechanischer Drucksensor mit beheiztem Passivierungsmittel und Verfahren zu seiner Steuerung The micromechanical pressure sensor with heated passivation and method of controlling the |
| 09/04/2013 | EP2633330A1 Microfluidic processing of target species in ferrofluids |
| 09/04/2013 | CN103278149A Interdigital capacitor accelerometer with uniaxial folding spring beams |
| 09/04/2013 | CN103274352A MEMS module and control system based on same |
| 09/04/2013 | CN103274351A Electrochemistry geophone electrode sensitive core based on MEMS and manufacturing method thereof |
| 09/04/2013 | CN103274350A Heat insulation structure based on Parylene filling and preparation method thereof |
| 09/04/2013 | CN103274349A Thermal stress insulating MEMS micro heater interconnected substrate and method for manufacturing thermal stress insulating MEMS micro heater interconnected substrate |
| 09/04/2013 | CN102249183B CuO/TiO2 nanotube array and preparation method and application method thereof |
| 09/04/2013 | CN102079505B Ordered structure array of two-dimensional hollow balls and preparing method thereof |
| 09/04/2013 | CN101431172B Reconfigurable microwave low-pass filter containing MEMS switch and its manufacturing method |
| 08/29/2013 | US20130222046 Modified binary search for transfer function active region |
| 08/29/2013 | DE102013203379A1 Abstimmbare mems-vorrichtung und verfahren zur herstellung einer abstimmbaren mems-vorrichtung Tunable MEMS device and method of making a tunable MEMS device |
| 08/29/2013 | DE102013203180A1 Verstellbare Ventilationsöffnungen in MEMS-Aufbauten Adjustable vents in MEMS structures |
| 08/29/2013 | DE102012207376B3 Gehäuse zur Verkapselung einesMikroscannerspiegels Housing for encapsulating a micro-mirror scanner |
| 08/29/2013 | DE102012203135A1 Micromechanical sensor arrangement for use in navigation component for navigation in mobile terminal, has functional microelectromechanical system-regions integrated on front side of silicon substrate and rear side of silicon substrate |
| 08/29/2013 | DE102012202921A1 Acoustic transducer e.g. direct digital transducer used in integrated switching circuit, has control device divides received digital audio data into individual samples and controls spark gap devices according to respective samples |
| 08/29/2013 | DE102012202783A1 Mikromechanische Sensorvorrichtung mit beweglichem Gate und entsprechendes Herstellungsverfahren Micromechanical sensor device with movable gate and method of manufacture |
| 08/28/2013 | EP2631939A1 Method for manufacturing mems device |
| 08/28/2013 | CN203159204U MEMS chip with cover plate grounding structure |
| 08/28/2013 | CN101776476B Systems, gyroscope sensors, and fabrication methods for forming structures for the gyroscope sensors. |
| 08/27/2013 | US8519493 Semiconductor device having multiple substrates |
| 08/27/2013 | CA2482163C Two-step electrode for mems micromirrors |
| 08/22/2013 | WO2013120190A1 Centrifugal microfluidic mixing apparatus and method |
| 08/22/2013 | US20130214405 Component and Method for Producing a Component |
| 08/22/2013 | US20130214370 System and method for minimizing deflection of a membrance of an absolute pressure sensor |
| 08/22/2013 | US20130214368 Semiconductor integrated device assembly process |
| 08/22/2013 | DE102013201509A1 Optisches Bauelement Optical component |
| 08/22/2013 | DE102013201506A1 Optisches Bauelement Optical component |
| 08/22/2013 | DE102012202321A1 Infrared sensor pixel for infrared sensor array utilized in e.g. land based vehicle for pedestrian detection, has recess including vertical extension that is smaller than or equal to that of stop layers in substrate |
| 08/21/2013 | CN103260125A Chip packaging structure and manufacturing method thereof |