Patents
Sitemap › C23 - Coating metallic material; Coating material with metallic material; Chemical surface treatment; Diffusion treatment of metallic material; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general; Inhibiting corrosion of metallic material or incrustation in general › C23C - Coating metallic material; Coating material with metallic material; Surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general › C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes
Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
04/2014
04/16/2014EP2719794A2 Plasma etching of diamond surfaces
04/16/2014EP2718963A2 Method and system for inline chemical vapor deposition
04/16/2014CN203546143U Reaction chamber and radio-frequency band protector thereof
04/16/2014CN203546142U Lpcvd automatic water replenishing system
04/16/2014CN203546141U Metal-containing doped diamond-like carbon thick film
04/16/2014CN203545684U Pyrolytic carbon material preparation system realizing steady-state process
04/16/2014CN103733328A Substrate supporting unit and substrate processing device, and method for producing substrate supporting unit
04/16/2014CN103732792A Systems and methods for processing vapor
04/16/2014CN103732791A Deposition systems including a precursor gas furnace within a reaction chamber, and related methods
04/16/2014CN103732552A Antireflection glazing unit equipped with a porous coating
04/16/2014CN103732393A Laminate, gas barrier film, production method for laminate, and laminate production device
04/16/2014CN103732392A Laminated body, gas barrier film, and method for producing laminated body and gas barrier film
04/16/2014CN103730430A Multilayer composite membrane passivation structure of table top high-power semiconductor device and manufacturing technology of multilayer composite membrane passivation structure of table top high-power semiconductor device
04/16/2014CN103726059A Method for preparing magnesium alloy surface composite film
04/16/2014CN103726034A Substrate for technological cavity and control method, tray and design method thereof
04/16/2014CN103726033A Method for controlling plasma enhanced chemical vapor deposition heater body temperature
04/16/2014CN103726032A Device for preparing diamond-like thin film by large-volume microwave plasmas
04/16/2014CN103726031A Workpiece clamping tool of chemical vapor deposition equipment
04/16/2014CN103726030A Depositing apparatus and method for manufacturing organic light emitting diode display using the same
04/16/2014CN103726029A Deposition and tail gas treatment integrated equipment
04/16/2014CN103726028A Method for preparing ZrO2 coating through UVCVD (ultraviolet chemical vapor deposition)
04/16/2014CN103726027A Preparation method of graphene domain
04/16/2014CN103724610A Perfluoropolyether, touch screen and fingerprint-proof membrane containing perfluoropolyether membrane and preparation thereof
04/16/2014CN103722790A Preparation method of Re (rhenium) foam
04/16/2014CN103722172A Process of manufacturing watch part
04/16/2014CN102575343B Catalytic CVD device, method for formation of film, process for production of solar cell, and substrate holder
04/16/2014CN102459695B Vapor deposition reactor and method for forming thin film
04/16/2014CN102257190B Substrate, substrate provided with thin film, semiconductor device, and method for manufacturing semiconductor device
04/16/2014CN102232240B Film-forming apparatus and film-forming method
04/16/2014CN102084028B Chuck and bridge connection points for tube filaments in a chemical vapor deposition reactor
04/16/2014CN101974737B Graphite boat anti-seize transmission device
04/16/2014CN101660141B Film deposition apparatus and substrate process apparatus
04/15/2014US8699655 Method of improving wear and corrosion resistance of rod control cluster assemblies
04/15/2014US8697582 Substrate conveying roller, thin film manufacturing device, and thin film manufacturing method
04/15/2014US8697198 Magnetic field assisted deposition
04/15/2014US8697197 Methods for plasma processing
04/15/2014US8697189 Method and apparatus for precision surface modification in nano-imprint lithography
04/15/2014US8696878 Wafer processing deposition shielding components
04/15/2014US8696862 Substrate mounting table, substrate processing apparatus and substrate temperature control method
04/15/2014US8696816 Semiconductor manufacturing apparatus
04/15/2014US8696815 Thin film deposition apparatus
04/15/2014US8696814 Film deposition apparatus and film deposition method
04/15/2014CA2688861C Static chemical vapor deposition of .gamma.-ni+.gamma.'-ni3a1 coatings
04/10/2014WO2014055378A1 Low refractive index coating deposited by remote plasma cvd
04/10/2014WO2014055134A1 Optical coating method, appartus and product
04/10/2014WO2014054591A1 Hard film coating tool and method for manufacturing said tool
04/10/2014WO2014054501A1 Vapor deposition apparatus
04/10/2014WO2014054443A1 Antenna and plasma processing apparatus
04/10/2014WO2014054284A1 Nitride semiconductor structure, laminate structure, and nitride semiconductor light-emitting element
04/10/2014WO2014054222A1 Wafer support for semiconductor epitaxial manufacturing device, method for manufacturing said wafer support, semiconductor epitaxial manufacturing device, and method for manufacturing said device
04/10/2014WO2013046155A8 Tungsten diazabutadiene molecules, their synthesis, and their use for tungsten containing film depositions
04/10/2014US20140099797 Method of manufacturing semiconductor device, substrate processing method and substrate processing apparatus
04/10/2014US20140099734 Deposition method and deposition apparatus
04/10/2014US20140099491 Plasma Etch Resistant Films, Articles Bearing Plasma Etch Resistant Films and Related Methods
04/10/2014US20140099443 Zinc oxide precursor and method of depositing zinc oxide-based thin film using the same
04/10/2014US20140097446 Gallium Nitride Devices with Gallium Nitride Alloy Intermediate Layer
04/10/2014US20140096834 Method for supplying vaporized precursor
04/10/2014US20140096716 Heating/Cooling Pedestal for Semiconductor-Processing Apparatus
04/10/2014US20140096715 Apparatus for filtration and gas-vapor mixing in thin film deposition
04/10/2014DE102012218184A1 Method for preparing composite e.g. aluminum powder used for producing composite material, involves synthesizing carbon nano-tubes in synthesis mixture contained in catalyst to obtain powder having synthesis mixture and nano-tubes
04/09/2014EP2717657A1 Cvd device, and cvd film production method
04/09/2014EP2717098A1 Environmental system including vaccum scavange for an immersion lithography apparatus
04/09/2014EP2716792A1 Process for the manufacture of local nanostructures of high purity material
04/09/2014EP2714961A1 Method for depositing layers on a glass substrate by means of low-pressure pecvd
04/09/2014EP2714960A2 Compositions and processes for depositing carbon-doped silicon-containing films
04/09/2014EP2714959A1 Apparatus and method for combinatorial gas distribution through a multi-zoned showerhead
04/09/2014EP2714607A1 Method and device for coating a float glass strip
04/09/2014EP2714263A1 Metal catalyst composition
04/09/2014CN203537343U Composite film substrate for production of high-frequency surface acoustic wave device
04/09/2014CN203534191U Mechanism for lifting and overturning furnace cover of reacting furnace
04/09/2014CN203530430U Feeding detection device of tubular PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment
04/09/2014CN203530429U Semiconductor film growth equipment
04/09/2014CN203530428U Vapor deposition furnace for coating silicon carbide on large-scale graphite sleeve
04/09/2014CN203530427U Silicon chip dust removing device for plasma-assisted chemical vapor deposition equipment
04/09/2014CN203530426U Device for generating titanium carbonitride thin film on shield cutter
04/09/2014CN203530425U Equipment for growing silicon carbide film
04/09/2014CN103718275A Feedstock gasification and supply device
04/09/2014CN103717784A CVD device, method for manufacturing susceptor in which CVD device is used, and susceptor
04/09/2014CN103717783A Improved deposition technique for depositing a coating on a device
04/09/2014CN103717403A Structure including thin primer film, and process for producing said structure
04/09/2014CN103710684A Integrated online detection system for chemical vapor deposition reaction
04/09/2014CN103710683A Source bottle applied to atomic layer deposition equipment
04/09/2014CN103710682A Depositing apparatus and method for manufacturing organic light emitting diode display using the same
04/09/2014CN103710681A Testing apparatus and testing method for reaction source bottle
04/09/2014CN103710680A Zinc oxide precursor and method of depositing zinc oxide-based thin film using the same
04/09/2014CN103710679A Hydrophobic layer, preparation method thereof, article provided with hydrophobic layer, and manufacturing method of mould
04/09/2014CN103146892B Femtosecond laser surface pretreatment method for improving bonding state of layer base or film base
04/09/2014CN102953045B System and technology for chemical vapor deposition coating
04/09/2014CN102864437B Rotating device for reaction chamber
04/09/2014CN102691051B Spray head of MOCVD (metal organic chemical vapor deposition) equipment reactor and connection structure thereof
04/09/2014CN102618846B Method and device for depositing super-hard film through multi-torch plasma spray CVD (Chemical Vapor Deposition) method
04/09/2014CN102534572B Offset generation method and device
04/09/2014CN102358938B Method for controllably synthesizing single-crystal WO2 and WO3 nanowire arrays with good field emission characteristics in low temperature and large area
04/09/2014CN102292465B Pt-Al-Hf/Zr coating and method
04/09/2014CN102187011B CVD precursors
04/09/2014CN102094168B 掩膜组件 Mask assembly
04/08/2014US8692166 Substrate heating device and substrate heating method
04/08/2014US8691378 Cutting tool
04/08/2014US8691348 Thin-film manufacturing method and apparatus
04/08/2014US8691339 Evaporating method for forming thin film
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